CN1622304A - 倒装芯片接合方法和用于柱型凸起的衬底分层金属架构 - Google Patents

倒装芯片接合方法和用于柱型凸起的衬底分层金属架构 Download PDF

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CN1622304A
CN1622304A CNA2004100803660A CN200410080366A CN1622304A CN 1622304 A CN1622304 A CN 1622304A CN A2004100803660 A CNA2004100803660 A CN A2004100803660A CN 200410080366 A CN200410080366 A CN 200410080366A CN 1622304 A CN1622304 A CN 1622304A
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bumps
chip
substrate
bonding
ultrasonic waves
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具滋郁
金亨燦
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    • H10W74/00Encapsulations, e.g. protective coatings
    • H10W74/01Manufacture or treatment
    • H10W74/012Manufacture or treatment of encapsulations on active surfaces of flip-chip devices, e.g. forming underfills
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    • H10W74/10Encapsulations, e.g. protective coatings characterised by their shape or disposition
    • H10W74/15Encapsulations, e.g. protective coatings characterised by their shape or disposition on active surfaces of flip-chip devices, e.g. underfills
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    • H10W72/012Manufacture or treatment of bump connectors, dummy bumps or thermal bumps
    • H10W72/01221Manufacture or treatment of bump connectors, dummy bumps or thermal bumps using local deposition
    • H10W72/01225Manufacture or treatment of bump connectors, dummy bumps or thermal bumps using local deposition in solid form, e.g. by using a powder or by stud bumping
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    • H10W72/07231Techniques
    • H10W72/07232Compression bonding, e.g. thermocompression bonding
    • H10W72/07233Ultrasonic bonding, e.g. thermosonic bonding
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    • H10W80/301Bonding techniques, e.g. hybrid bonding
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    • H10W90/721Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors
    • H10W90/724Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors between a chip and a stacked insulating package substrate, interposer or RDL
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    • H10W90/731Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors
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    • H10W90/734Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors between a chip and a stacked insulating package substrate, interposer or RDL

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CNA2004100803660A 2003-11-25 2004-09-29 倒装芯片接合方法和用于柱型凸起的衬底分层金属架构 Pending CN1622304A (zh)

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KR20030083891 2003-11-25
KR1020030083891 2003-11-25

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US (1) US7115446B2 (https=)
JP (1) JP2005159356A (https=)
KR (1) KR100604334B1 (https=)
CN (1) CN1622304A (https=)
SG (1) SG128468A1 (https=)
TW (1) TWI255019B (https=)
WO (1) WO2005053013A1 (https=)

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CN101331681B (zh) * 2005-12-21 2012-04-18 株式会社大真空 压电谐振片和压电谐振器件

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