JP4262672B2 - 半導体装置およびその製造方法 - Google Patents
半導体装置およびその製造方法 Download PDFInfo
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- JP4262672B2 JP4262672B2 JP2004372560A JP2004372560A JP4262672B2 JP 4262672 B2 JP4262672 B2 JP 4262672B2 JP 2004372560 A JP2004372560 A JP 2004372560A JP 2004372560 A JP2004372560 A JP 2004372560A JP 4262672 B2 JP4262672 B2 JP 4262672B2
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- semiconductor chip
- main surface
- sealing body
- conductive member
- resin sealing
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- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/495—Lead-frames or other flat leads
- H01L23/49541—Geometry of the lead-frame
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- H01L23/051—Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls the container being a hollow construction and having a conductive base as a mounting as well as a lead for the semiconductor body another lead being formed by a cover plate parallel to the base plate, e.g. sandwich type
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Description
前記半導体チップを封止する樹脂封止体であって、互いに反対側に位置する第1及び第2の主面を有し、前記樹脂封止体の第1の主面が前記半導体チップの第1の主面側に位置し、前記樹脂封止体の第2の主面が前記半導体チップの第2の主面側に位置する樹脂封止
体と、
一端側が前記半導体チップの第1の電極上に位置し、かつ前記半導体チップの第1の電極に第1の接続手段を介在して接続され、前記一端側に対して反対側の他端側が前記一端側よりも前記樹脂封止体の第2の主面側に位置し、かつ前記樹脂封止体から露出する第1の導電部材と、
前記半導体チップの第2の電極に第2の接続手段を介在して接続された第2の導電部材及び前記半導体チップの第3の電極に第3の接続手段を介在して接続された第3の導電部材とを有し、
前記第1の導電部材の前記一端側は、前記樹脂封止体の第1の主面から露出し、
前記第2及び第3の導電部材は、前記樹脂封止体の第2の主面及び側面から露出し、
前記第1、第2及び第3の接続手段は、前記第1、第2及び第3の導電部材と前記半導体チップとの熱膨張率差により生じる熱応力を緩衝する機能を持つ応力緩衝層と、前記応力緩衝層の前記半導体チップ側に形成され、前記応力緩衝層と前記半導体チップの第1、第2及び第3の電極とを接続する機能を持つ第1の接続層と、前記応力緩衝層の前記第1、第2及び第3の導電部材側に形成され、前記応力緩衝層と前記第1、第2及び第3の導電部材とを接続する機能を持つ第2の接続層とを有するものである。
前記半導体チップを封止する樹脂封止体であって、互いに反対側に位置する第1及び第2の主面を有し、前記樹脂封止体の第1の主面が前記半導体チップの第1の主面側に位置し、前記樹脂封止体の第2の主面が前記半導体チップの第2の主面側に位置する樹脂封止
体と、
前記半導体チップの第1の電極上に位置し、かつ前記半導体チップの第1の電極に第1の接続手段を介在して接続され、更に前記樹脂封止体の第1の主面から露出する第1の部分と、前記第1の部分と一体に形成され、かつ前記樹脂封止体の内部に位置する第2の部分と、前記第2の部分と一体に形成され、かつ前記樹脂封止体の第2の主面から露出する第3の部分とを有する第1の導電部材と、
前記半導体チップの第2の電極に第2の接続手段を介在して接続され、かつ前記樹脂封止体の第2主面から一部が露出する第2の導電部材と、
前記半導体チップの第3の電極に第3の接続手段を介在して接続され、かつ前記樹脂封止体の第2主面から一部が露出する第3の導電部材とを有し、
前記第1、第2及び第3の接続手段は、前記第1、第2及び第3の導電部材と前記半導体チップとの熱膨張率差により生じる熱応力を緩衝する機能を持つ応力緩衝層と、前記応力緩衝層の前記半導体チップ側に形成され、前記応力緩衝層と前記半導体チップの第1、第2及び第3の電極とを接続する機能を持つ第1の接続層と、前記応力緩衝層の前記第1、第2及び第3の導電部材側に形成され、前記応力緩衝層と前記第1、第2及び第3の導電部材とを接続する機能を持つ第2の接続層とを有するものである。
図1は本実施の形態1のパワートランジスタ(半導体装置)の封止体1の上面(第1の主面)の平面図、図2は図1のパワートランジスタの封止体1の下面(第2の主面、実装面)の平面図、図3は図1および図2のパワートランジスタの封止体1の下面側から見た内部構造を示す平面図、図4は図2のY1−Y1線の断面図、図5は図2のY2−Y2線の断面図、図6は図1等の封止体1内の半導体チップ2に形成されたトランジスタセルの一例の断面図、図7は図1等のパワートランジスタのドレイン用のリード端子(第1の導電部材、外部端子)3DLと半導体チップ2のドレインパッド(第1の電極)DPとを接続する接続部(第1の接続手段)4Aの拡大断面図、図8は図1等のパワートランジスタのソース用のリード端子(第2の導電部材、外部端子)3SLと半導体チップ2のソースパッド(第2の電極)SPとを接続する接続部(第2の接続手段)4Bの拡大断面図、図9はパワートランジスタの実装時の断面図をそれぞれ示している。
本実施の形態2では、前記接続部4A,4B,4Cの前記応力緩衝層4mbの材料として柔軟な金属材料を用いる場合について説明する。なお、前記接続部4A,4B,4Cの前記接続層4ma,4mcは前記実施の形態1と同じなので説明を省略する。
本実施の形態3では、前記接続部4A,4B,4Cの前記接続層4ma,4mcの材料として高融点鉛フリー半田を用いる場合について説明する。なお、前記接続部4A,4B,4Cの前記応力緩衝層4mbは前記実施の形態1と同じなので説明を省略する。
本実施の形態4では、前記接続部4A,4B,4Cの前記接続層4ma,4mcの材料として前記実施の形態3で説明したのと同様の高融点鉛フリー半田を用い、前記応力緩衝層4mbの材料として前記実施の形態2で説明したのと同様の柔軟な金属を用いる場合について説明する。
例えば前記実施の形態1〜4では、接続部4A〜4Cの接続層4ma,4mcの材料が同一であり、接続部4A〜4Cの応力緩衝層4mbの材料が同一である場合について説明したが、これに限定されるものではなく種々変更可能であり、何れも部位に応じて異なる材料を用いても構わない。
本実施の形態6では、前記実施の形態1〜5のパワートランジスタの製造方法の一例について、図14及び図15を参照しながら説明する。なお、図14はパワートランジスタの製造フロー図、図15はパワートランジスタの製造工程中の説明図である。図15(a)〜(f)の各々の上段は単位パワートランジスタ領域の平面図、図15(a)〜(c)の各々の下段は各々の上段のX1−X1線の断面図、図15(d)〜(f)の各々の下段は各々の上段の側面図を示している。
本実施の形態7では、前記実施の形態1〜5のパワートランジスタの製造方法であって、前記接続部4A〜4C形成用の金属箔4をスクラブにより接合する方法を用いる例を説明する。
2 半導体チップ
2SUB 半導体基板
2EP エピタキシャル層
3DL リード端子(第1の導電部材)
3SL リード端子(第2の導電部材)
3GL リード端子(第3の導電部材)
4A 接続部(第1の接続手段)
4B 接続部(第2の接続手段)
4C 接続部(第3の接続手段)
4ma 接続層
4ma0 金属層
4ma1 金属層
4ma2 金属層
4mb 応力緩衝層
4mb1〜4mb3 金属層
4mc 接続層
4mc0 金属層
4mc1 金属層
5p p型の半導体領域
6n n+型の半導体領域
7 溝
8 ゲート絶縁膜
9 ゲート電極
10 絶縁層
11 コンタクトホール
12 溝
13p p+型の半導体領域
15 配線基板
15a 電極
16 接着材
20 真空吸着ノズル
21 角錐コレット
DP ドレインパッド(第1の電極)
SP ソースパッド(第2の電極)
GP ゲートパッド(第3の電極)
Q1 パワーMISFET
Dp 内部ダイオード
Claims (15)
- 互いに反対側に位置する第1及び第2の主面と、前記第1の主面に形成された第1の電極と、前記第2の主面に形成された第2及び第3の電極とを有する半導体チップと、
前記半導体チップを封止する樹脂封止体であって、互いに反対側に位置する第1及び第2の主面を有し、前記樹脂封止体の第1の主面が前記半導体チップの第1の主面側に位置し、前記樹脂封止体の第2の主面が前記半導体チップの第2の主面側に位置する樹脂封止体と、
一端側が前記半導体チップの第1の電極上に位置し、かつ前記半導体チップの第1の電極に第1の接続手段を介在して接続され、前記一端側に対して反対側の他端側が前記一端側よりも前記樹脂封止体の第2の主面側に位置し、かつ前記樹脂封止体から露出し、前記樹脂封止体の第1の側面側に位置する第1の導電部材と、
前記半導体チップの第2の電極に第2の接続手段を介在して接続された第2の導電部材及び前記半導体チップの第3の電極に第3の接続手段を介在して接続された第3の導電部材とを有し、
前記第1の導電部材の前記一端側は、前記樹脂封止体の第1の主面から露出し、
前記第2及び第3の導電部材は、前記樹脂封止体の第2の主面及び前記第1の側面以外の他の3つの側面のうちのそれぞれ異なる側面から露出し、
前記第1、第2及び第3の接続手段は、前記第1、第2及び第3の導電部材と前記半導体チップとの熱膨張率差により生じる熱応力を緩衝する機能を持つ応力緩衝層と、前記応力緩衝層の前記半導体チップ側に形成され、前記応力緩衝層と前記半導体チップの第1、第2及び第3の電極とを接続する機能を持つ第1の接続層と、前記応力緩衝層の前記第1、第2及び第3の導電部材側に形成され、前記応力緩衝層と前記第1、第2及び第3の導電部材とを接続する機能を持つ第2の接続層とを有することを特徴とする半導体装置。 - 請求項1記載の半導体装置において、
前記第1及び第2の接続層は、前記第1、第2及び第3の導電部材を配線基板の電極に接続する接着材の融点よりも高い融点を有する金属層または金属層化合物層であり、
前記応力緩衝層は、前記第1、第2及び第3の導電部材を配線基板の電極に接続する接着材の融点よりも高い融点を有し、かつ、前記半導体チップの熱膨張係数と、前記第1、第2及び第3の導電部材の熱膨張係数との間の熱膨張係数を有する金属層、または前記第1、第2及び第3の導電部材を配線基板の電極に接続する接着材の融点よりも高い融点を有し、かつ、100MPa未満の降伏応力を有する金属層であることを特徴とする半導体装置。 - 請求項2記載の半導体装置において、
前記第1及び第2の接続層が、260℃以上の融点を有する金属間化合物層であり、Sn、In、Sn-Ag系、Sn-Cu系、Sn-Ag-Cu系、Sn-Zn系、Sn-Zn-Bi系、Sn-In系、In-Ag系、In-Cu系、Bi-Sn系およびBi-In系の鉛フリー半田のうちの1つと、Cu、Ag、Ni、Auのうちの少なくとも1つの金属とが、接続時に反応して形成されていることを特徴とする半導体装置。 - 請求項2記載の半導体装置において、
前記第1及び第2の接続層が、260℃以上400℃以下の融点を有する鉛フリー半田層であり、前記鉛フリー半田層が、Au-Sn系合金、Au-Ge系合金、Au-Si系合金、Zn-Al系合金、Zn-Al-Ge系合金、Bi、Bi-Ag系合金、Bi-Cu系合金、Bi-Ag-Cu系合金のいずれか1つからなることを特徴とする半導体装置。 - 請求項2〜4のいずれか1項に記載の半導体装置において、
前記応力緩衝層は、260℃以上の融点を有する金属層であり、Cu/インバー合金/Cu複合材、Cu/Cu2O複合材、Cu-Mo合金、Ti、Mo、Wのうちのいずれか1種からなることを特徴とする半導体装置。 - 請求項2〜4のいずれか1項に記載の半導体装置において、
前記応力緩衝層は、260℃以上の融点を有する金属層であり、Al、Mg、Ag、Zn、Cu、Niのうちのいずれか1種からなることを特徴とする半導体装置。 - 請求項1〜6のいずれか1項に記載の半導体装置において、
前記第2及び第3の導電部材は、前記樹脂封止体の側面から突出していることを特徴とする半導体装置。 - 請求項1〜6のいずれか1項に記載の半導体装置において、
前記第1の導電部材の他端側は、前記樹脂封止体の前記第2の主面及び前記第1の側面から露出していることを特徴とする半導体装置。 - 請求項1〜6のいずれか1項に記載の半導体装置において、
前記第1の導電部材は、一部が前記半導体チップの第1の電極上に位置し、かつ他の一部が前記半導体チップの外側に突出する第1の部分と、
前記第1の部分と一体に形成された第2の部分と、
前記第2の部分と一体に形成され、かつ前記第1の部分よりも前記樹脂封止体の第2の主面側に位置する第3の部分とを有し、
前記第1の部分は、前記樹脂封止体の第1の主面から露出し、
前記第3の部分は、前記樹脂封止体から露出していることを特徴とする半導体装置。 - 請求項9記載の半導体装置において、
前記第2の部分は、前記第1の部分と前記第3の部分とを前記樹脂封止体の厚さ方向に離間させるオフセット部であることを特徴とする半導体装置。 - 請求項1〜6のいずれか1項に記載の半導体装置において、
前記第1の導電部材は、一部が前記半導体チップの第1の電極上に位置し、かつ他の一部が前記半導体チップの外側に突出する第1の部分と、
前記第1の部分から前記樹脂封止体の第2の主面側に折れ曲がる第2の部分と、
前記第2の部分から前記第1の部分の突出方向と同一方向に延びる第3の部分とを有し、
前記第1の部分は、前記樹脂封止体の第1の主面から露出し、
前記第3の部分は、前記樹脂封止体から露出していることを特徴とする半導体装置。 - 請求項1〜6のいずれか1項に記載の半導体装置において、
前記半導体チップの第1の電極は、ドレイン電極であり、
前記半導体チップの第2の電極は、ソース電極であり、
前記半導体チップの第3の電極は、ゲート電極であることを特徴とする半導体装置。 - 互いに反対側に位置する第1及び第2の主面と、前記第1の主面に形成された第1の電極と、前記第2の主面に形成された第2及び第3の電極とを有する半導体チップと、
前記半導体チップを封止する樹脂封止体であって、互いに反対側に位置する第1及び第2の主面を有し、前記樹脂封止体の第1の主面が前記半導体チップの第1の主面側に位置し、前記樹脂封止体の第2の主面が前記半導体チップの第2の主面側に位置する樹脂封止体と、
前記半導体チップの第1の電極に第1の接続手段を介在して接続された第1の部分と、前記第1の部分と一体に形成された第2の部分と、前記第2の部分と一体に形成され、かつ前記第1の部分よりも前記樹脂封止体の第2の主面側に位置する第3の部分とを有する第1の導電部材と、
前記半導体チップの第2の電極に第2の接続手段を介在して接続された第2の導電部材と、前記半導体チップの第3の電極に第3の接続手段を介在して接続された第3の導電部材とを有する半導体装置の製造方法であって、
前記第1、第2及び第3の接続手段は、前記第1、第2及び第3の導電部材と前記半導体チップとの熱膨張率差により生じる熱応力を緩衝する機能を持つ応力緩衝層と、前記応力緩衝層の前記半導体チップ側に形成され、前記応力緩衝層と前記半導体チップの第1、第2及び第3の電極とを接続する機能を持つ第1の接続層形成用の金属層と、前記応力緩衝層の前記第1、第2及び第3の導電部材側に形成され、前記応力緩衝層と前記第1、第2及び第3の導電部材とを接続する機能を持つ第2の接続層形成用の金属層とを有する金属箔を用いて形成し、
前記第1の導電部材の第1の部分が前記樹脂封止体の第1の主面から露出し、前記第1の導電部材の第2の部分が前記樹脂封止体の内部に位置し、前記第1の導電部材の第3の部分が前記樹脂封止体から露出して、前記樹脂封止体の第1の側面側に位置し、かつ前記第2及び第3の導電部材が前記樹脂封止体の前記第2の主面及び前記第1の側面以外の他の3つの側面のうちのそれぞれ異なる側面から露出する前記樹脂封止体を形成することを特徴とする半導体装置の製造方法。 - (a)第1の主面及びその反対側の第2の主面を持ち、前記第1の主面に第1の電極を持ち、かつ、前記第2の主面に第2及び第3の電極を持つ半導体チップを用意する工程、
(b)第1の部分と、前記第1の部分に対して一体的に形成され、前記第1の部分の前記半導体チップの搭載面に対して交差する方向に延びる第2の部分と、前記第2の部分に対して一体的に形成され、前記第2の部分の延在方向に対して交差する方向に延びる第3の部分とを有する第1の導電部材を持つ第1のリードフレームを用意する工程、
(c)第2の導電部材と、これに対して一体的に形成された第3の導電部材とを持つ第2のリードフレームを用意する工程、
(d)前記第1、第2及び第3の導電部材と前記半導体チップとの熱膨張率差により生じる熱応力を緩衝する機能を持つ応力緩衝層と、前記応力緩衝層の第1の主面に接触した状態で積層された第1の接続層形成用の金属層と、前記応力緩衝層の前記第1の主面の反対側の第2の主面に接触した状態で積層された第2の接続層形成用の金属層とを有する第1、第2及び第3の金属箔を用意する工程、
(e)前記半導体チップの第1の電極を前記第1の金属箔により形成される第1の接続手段を介して前記第1の導電部材の第1の部分の前記搭載面に接合する工程、
(f)前記半導体チップの第2電極を前記第2の金属箔により形成される第2の接続手段を介して前記第2の導電部材に接合し、かつ、前記半導体チップの第3の電極を前記第3の金属箔により形成される第3の接続手段を介して前記第3の導電部材に接合する工程、
(g)前記半導体チップ、前記第1の導電部材、前記第2の導電部材及び前記第3の導電部材を樹脂封止体により封止する工程、
(h)前記樹脂封止体の一部を除去し、前記第1、第2及び第3の導電部材の一部を前記樹脂封止体から露出させる工程、
(i)前記第1及び第2のリードフレームの一部を切断することにより、前記樹脂封止体を前記第1及び第2のリードフレームから切り離す工程を有し、
前記(i)工程後の前記樹脂封止体は、
前記第1の導電部材の第1の部分の一部が前記樹脂封止体の第1の主面から露出され、前記第1の導電部材の第2の部分が前記樹脂封止体に内包され、前記第1の導電部材の第3の部分の一部が前記樹脂封止体の前記第1の主面に対して反対側の第2の主面および前記第1の主面に対して交差する第1の側面から露出され、
前記第2及び第3の導電部材の一部は、前記樹脂封止体の前記第2の主面及び前記第1の側面以外の他の3つの側面のうちのそれぞれ異なる側面から露出されている構成を有することを特徴とする半導体装置の製造方法。 - (a)第1の主面及びその反対側の第2の主面を持ち、前記第1の主面に第1の電極を持ち、かつ、前記第2の主面に第2及び第3の電極を持つ半導体チップを用意する工程、
(b)第1の部分と、前記第1の部分に対して一体的に形成され、前記第1の部分の前記半導体チップの搭載面に対して交差する方向に延びる第2の部分と、前記第2の部分に対して一体的に形成され、前記第2の部分の延在方向に対して交差する方向に延びる第3の部分とを有する第1の導電部材を持つ第1のリードフレームを用意する工程、
(c)第2の導電部材と、これに対して一体的に形成された第3の導電部材とを持つ第2のリードフレームを用意する工程、
(d)前記第1、第2及び第3の導電部材と前記半導体チップとの熱膨張率差により生じる熱応力を緩衝する機能を持つ応力緩衝層と、前記応力緩衝層の第1の主面に接触した状態で積層され、第1の融点を持つ第1の接続層形成用の金属層と、前記応力緩衝層の前記第1の主面の反対側の第2の主面に接触した状態で積層され、前記第1の融点よりも低い第2の融点を持つ第2の接続層形成用の金属層とを有する第1、第2及び第3の金属箔を用意する工程、
(e)前記半導体チップの第1の電極を前記第1の金属箔により形成される第1の接続手段を介して前記第1の導電部材の第1の部分の前記搭載面に接合する工程、
(f)前記半導体チップの第2電極を前記第2の金属箔により形成される第2の接続手段を介して前記第2の導電部材に接合し、かつ、前記半導体チップの第3の電極を前記第3の金属箔により形成される第3の接続手段を介して前記第3の導電部材に接合する工程、
(g)前記半導体チップ、前記第1の導電部材、前記第2の導電部材及び前記第3の導電部材を樹脂封止体により封止する工程、
(h)前記樹脂封止体の一部を除去し、前記第1、第2及び第3の導電部材の一部を前記樹脂封止体から露出させる工程、
(i)前記第1及び第2のリードフレームの一部を切断することにより、前記樹脂封止体を前記第1及び第2のリードフレームから切り離す工程を有し、
前記(e)工程は、
前記第1の金属箔の第2の接続層形成用の金属層を前記第1の導電部材の第1の部分の前記搭載面に接触させた状態で加熱溶融することにより、前記第1の金属箔を前記第1の導電部材に接合する工程と、
前記第1の導電部材に接合された前記第1の金属箔の第1の接続層形成用の金属層を前記半導体チップの第1の電極に接触させた状態で加熱溶融することにより、前記第1の金属箔を前記半導体チップの第1の電極に接合する工程とを有し、
前記(f)工程は、
前記第2及び第3の金属箔の第2の接続層形成用の金属層をそれぞれ前記半導体チップの第2及び第3の電極に接触させた状態で加熱溶融することにより、前記第2及び第3の金属箔をそれぞれ前記半導体チップの第2及び第3の電極に接合する工程と、
前記半導体チップの第2及び第3の電極に接合された前記第2及び第3の金属箔の第1の接続層形成用の金属層をそれぞれ前記第2及び第3の導電部材に接触させた状態で加熱溶融することにより、前記第2及び第3の金属箔をそれぞれ前記第2及び第3の導電部材に接合する工程とを有し、
前記(i)工程後の前記樹脂封止体は、
前記第1の導電部材の第1の部分の一部が前記樹脂封止体の第1の主面から露出され、前記第1の導電部材の第2の部分が前記樹脂封止体に内包され、前記第1の導電部材の第3の部分の一部が前記樹脂封止体の前記第1の主面に対して反対側の第2の主面および前記第1の主面に対して交差する第1の側面から露出され、
前記第2及び第3の導電部材の一部は、前記樹脂封止体の前記第2の主面及び前記第1の側面以外の他の3つの側面のうちのそれぞれ異なる側面から露出されている構成を有することを特徴とする半導体装置の製造方法。
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