JP4390799B2 - 接続材料、接続材料の製造方法、および半導体装置 - Google Patents
接続材料、接続材料の製造方法、および半導体装置 Download PDFInfo
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- JP4390799B2 JP4390799B2 JP2006314168A JP2006314168A JP4390799B2 JP 4390799 B2 JP4390799 B2 JP 4390799B2 JP 2006314168 A JP2006314168 A JP 2006314168A JP 2006314168 A JP2006314168 A JP 2006314168A JP 4390799 B2 JP4390799 B2 JP 4390799B2
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
- B23K20/02—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating by means of a press ; Diffusion bonding
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- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/495—Lead-frames or other flat leads
- H01L23/49579—Lead-frames or other flat leads characterised by the materials of the lead frames or layers thereon
- H01L23/49582—Metallic layers on lead frames
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
- B23K20/04—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating by means of a rolling mill
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
- B23K35/02—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape
- B23K35/0222—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape for use in soldering, brazing
- B23K35/0233—Sheets, foils
- B23K35/0238—Sheets, foils layered
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- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/01—Layered products comprising a layer of metal all layers being exclusively metallic
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Description
第1の発明は、Al系合金層の最表面にZn系合金層を設けた接続材料を提供することにある。Zn−Al合金の場合、Alが成分であるために、溶融した瞬間にAl酸化物膜が表面に形成されるため、機械的に酸化物膜を破らなければ、十分な濡れが得られない。本発明の場合、接続材料の表面が不純物程度にしかAlを含有しないZn系合金であるため、接続時にZn系合金とAl系合金が反応してAl酸化物膜が形成される前に十分な濡れを確保することができる。また、接続時に溶融部はZn−Al系合金となるので、融点は380℃近傍まで低下する。よって、Znの融点420℃より低下するため、純Znに比べて接続後の冷却時に発生する熱応力を低減でき、半導体素子の破壊を抑制できる。接続時にAl合金層を残存させることにより、軟らかいAlが応力緩衝材として機能するため、接続信頼性を向上することができる。接続時にZnの融点420℃まで温度を上げなくても380℃以上の温度であれば、接触したZn層とAl層の間で拡散が進み、融点380℃のZn−Al共晶が形成されるため、接続が可能となる。
本発明の実施の形態における接続材料の断面を図5に示す。本実施の形態における接続材料は、下からZn系合金層(単にZn層、Znとも記す)101、中間がAl系合金層(単にAl層、Alとも記す)102、一番上がZn系合金層(単にZn層、Znとも記す)101となる。この接続材料は、前述した図3に示すように、Zn系合金層101a、Al系合金層102a、Zn系合金層101aを重ねて圧延加工する、すなわちクラッド圧延を行うことで製造した。
実施例1〜12は、図7に示すように、半導体装置11のダイボンディングに接続材料10を用いたものである。この半導体装置11は、半導体素子1と、この半導体素子1を接続するフレーム2と、一端が外部端子となるリード5と、このリード5の他端と半導体素子1の電極とを接続するワイヤ4と、半導体素子1およびワイヤ4を樹脂封止する封止用レジン6とを有し、半導体素子1とフレーム2は接続材料10で接続されて構成される。
実施例13〜24は、図10に示すように、気密封止を必要とする半導体装置21の封止材として本接続材料10aを用いたものである。この半導体装置21は、半導体素子1と、この半導体素子1を接続するモジュール基板23と、一端が外部端子となるリード5と、このリード5の他端と半導体素子1の電極とを接続するワイヤ4と、半導体素子1およびワイヤ4を気密封止し、モジュール基板23に接続する金属キャップ22とを有し、モジュール基板23と金属キャップ22は接続材料10aで接続されて構成される。なお、この半導体装置21においては、モジュール基板23上にチップ部品等も接続されている。
他の実施例は、図13に示すように、フリップチップ実装を必要とする半導体装置31のバンプとして本接続材料10bを用いたものである。この半導体装置31は、半導体素子1を有し、この半導体素子1とこれを実装する基板34は接続材料10bで接続されて構成される。
10,10a,10b…接続材料、
11…半導体装置、
21…半導体装置、22,22a…金属キャップ、23…モジュール基板、24…金属合金、
31…半導体装置、32…Al配線、33…Znめっき、34…基板、35…Cu配線、36…NiまたはNi/Auめっき、
101…Zn系合金層、102…Al系合金層、103…ローラー、104…加圧成形機。
Claims (7)
- 第1のZn系合金層、Al系合金層、第2のZn系合金層とがこの順に積層され、前記第1のZn系合金層と前記Al系合金層と前記第2のZn系合金層の厚さの比が1:5:1であり、
前記Al系合金層のAl含有率が100wt.%であり、
前記Al系合金層の0.2%耐力が30N/mm 2 以下であり、
前記第1のZn系合金層および前記第2のZn系合金層のZn含有率が90〜100wt.%であり、
前記第1のZn系合金層および前記第2のZn系合金層のAl含有率が0.01wt.%未満であり、
前記Al系合金層の厚さが30μmより大きく200μmより小さく、
前記Zn系合金層の厚さが5μmより大きく100μmより小さいことを特徴とする接続材料。 - 第1のZn系合金層の上にAl系合金層を重ね、前記Al系合金層の上に第2のZn系合金層を重ねて、前記第1のZn系合金層と前記Al系合金層と前記第2のZn系合金層の厚さの比が1:5:1となるようにクラッド圧延により製造し、
前記Al系合金層のAl含有率が100wt.%であり、
前記Al系合金層の0.2%耐力が30N/mm 2 以下であり、
前記第1のZn系合金層および前記第2のZn系合金層のZn含有率が90〜100wt.%であり、
前記第1のZn系合金層および前記第2のZn系合金層のAl含有率が0.01wt.%未満であり、
前記Al系合金層の厚さが30μmより大きく200μmより小さく、
前記Zn系合金層の厚さが5μmより大きく100μmより小さいことを特徴とする接続材料の製造方法。 - 第1のZn系合金層の上にAl系合金層を重ね、前記Al系合金層の上に第2のZn系合金層を重ねて、前記第1のZn系合金層と前記Al系合金層と前記第2のZn系合金層の厚さの比が1:5:1となるように加圧成形により製造し、
前記Al系合金層のAl含有率が100wt.%であり、
前記Al系合金層の0.2%耐力が30N/mm 2 以下であり、
前記第1のZn系合金層および前記第2のZn系合金層のZn含有率が90〜100wt.%であり、
前記第1のZn系合金層および前記第2のZn系合金層のAl含有率が0.01wt.%未満であり、
前記Al系合金層の厚さが30μmより大きく200μmより小さく、
前記Zn系合金層の厚さが5μmより大きく100μmより小さいことを特徴とする接続材料の製造方法。 - 半導体素子と、
前記半導体素子を接続するフレームと、
一端が外部端子となるリードと、
前記リードの他端と前記半導体素子の電極とを接続するワイヤと、
前記半導体素子および前記ワイヤを樹脂封止するレジンとを有し、
前記半導体素子と前記フレームとを接続する接続材料は、第1のZn系合金層、Al系合金層、第2のZn系合金層とがこの順に積層され、前記第1のZn系合金層と前記Al系合金層と前記第2のZn系合金層の厚さの比が1:5:1であり、
前記Al系合金層のAl含有率が100wt.%であり、
前記Al系合金層の0.2%耐力が30N/mm 2 以下であり、
前記第1のZn系合金層および前記第2のZn系合金層のZn含有率が90〜100wt.%であり、
前記第1のZn系合金層および前記第2のZn系合金層のAl含有率が0.01wt.%未満であり、
前記Al系合金層の厚さが30μmより大きく200μmより小さく、
前記Zn系合金層の厚さが5μmより大きく100μmより小さいことを特徴とする半導体装置。 - 半導体素子と、
前記半導体素子を接続する基板と、
一端が外部端子となるリードと、
前記リードの他端と前記半導体素子の電極とを接続するワイヤと、
前記半導体素子および前記ワイヤを気密封止し、前記基板に接続する金属キャップとを有し、
前記基板と前記金属キャップとを接続する接続材料は、第1のZn系合金層、Al系合金層、第2のZn系合金層とがこの順に積層され、前記第1のZn系合金層と前記Al系合金層と前記第2のZn系合金層の厚さの比が1:5:1であり、
前記Al系合金層のAl含有率が100wt.%であり、
前記Al系合金層の0.2%耐力が30N/mm 2 以下であり、
前記第1のZn系合金層および前記第2のZn系合金層のZn含有率が90〜100wt.%であり、
前記第1のZn系合金層および前記第2のZn系合金層のAl含有率が0.01wt.%未満であり、
前記Al系合金層の厚さが30μmより大きく200μmより小さく、
前記Zn系合金層の厚さが5μmより大きく100μmより小さいことを特徴とする半導体装置。 - 請求項5記載の半導体装置において、
前記半導体素子と前記基板とを接続する接続材料は、第1のZn系合金層、Al系合金層、第2のZn系合金層とがこの順に積層され、前記第1のZn系合金層と前記Al系合金層と前記第2のZn系合金層の厚さの比が1:5:1であり、
前記Al系合金層のAl含有率が100wt.%であり、
前記Al系合金層の0.2%耐力が30N/mm 2 以下であり、
前記第1のZn系合金層および前記第2のZn系合金層のZn含有率が90〜100wt.%であり、
前記第1のZn系合金層および前記第2のZn系合金層のAl含有率が0.01wt.%未満であり、
前記Al系合金層の厚さが30μmより大きく200μmより小さく、
前記Zn系合金層の厚さが5μmより大きく100μmより小さいことを特徴とする半導体装置。 - 半導体素子を有し、
前記半導体素子と該半導体素子を実装する基板とを接続する接続材料は、第1のZn系合金層、Al系合金層、第2のZn系合金層とがこの順に積層され、前記第1のZn系合金層と前記Al系合金層と前記第2のZn系合金層の厚さの比が1:5:1であり、
前記Al系合金層のAl含有率が100wt.%であり、
前記Al系合金層の0.2%耐力が30N/mm 2 以下であり、
前記第1のZn系合金層および前記第2のZn系合金層のZn含有率が90〜100wt.%であり、
前記第1のZn系合金層および前記第2のZn系合金層のAl含有率が0.01wt.%未満であり、
前記Al系合金層の厚さが30μmより大きく200μmより小さく、
前記Zn系合金層の厚さが5μmより大きく100μmより小さいことを特徴とする半導体装置。
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JP2006314168A JP4390799B2 (ja) | 2006-11-21 | 2006-11-21 | 接続材料、接続材料の製造方法、および半導体装置 |
TW96142854A TW200829361A (en) | 2006-11-21 | 2007-11-13 | Connecting material, method for manufacturing connecting material, and semiconductor device |
CN2007101887756A CN101185991B (zh) | 2006-11-21 | 2007-11-20 | 接合材料、接合材料的制造方法及半导体装置 |
CN201110375028.XA CN102437130B (zh) | 2006-11-21 | 2007-11-20 | 半导体装置及其制造方法 |
KR1020070118365A KR100953470B1 (ko) | 2006-11-21 | 2007-11-20 | 접속 재료, 접속 재료의 제조 방법 및 반도체 장치 |
US11/943,632 US20080206590A1 (en) | 2006-11-21 | 2007-11-21 | Connecting material, method for manufacturing connecting material, and semiconductor device |
KR1020100013802A KR100998115B1 (ko) | 2006-11-21 | 2010-02-16 | 반도체 장치, 접속 구조 및 그 제조 방법 |
US13/228,169 US8356742B2 (en) | 2006-11-21 | 2011-09-08 | Method for manufacturing a semiconductor device using an Al-Zn connecting material |
US13/745,448 US20130127026A1 (en) | 2006-11-21 | 2013-01-18 | Connecting material, method for manufacturing connecting material and semiconductor device |
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KR20100031708A (ko) | 2010-03-24 |
US8356742B2 (en) | 2013-01-22 |
CN102437130B (zh) | 2016-08-03 |
TWI340678B (ja) | 2011-04-21 |
US20130127026A1 (en) | 2013-05-23 |
KR20080046106A (ko) | 2008-05-26 |
KR100998115B1 (ko) | 2010-12-02 |
TW200829361A (en) | 2008-07-16 |
CN101185991B (zh) | 2012-01-11 |
KR100953470B1 (ko) | 2010-04-16 |
US20080206590A1 (en) | 2008-08-28 |
CN101185991A (zh) | 2008-05-28 |
CN102437130A (zh) | 2012-05-02 |
US20120000965A1 (en) | 2012-01-05 |
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