JP5251849B2 - 接続材料および半導体装置の製造方法 - Google Patents
接続材料および半導体装置の製造方法 Download PDFInfo
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- JP5251849B2 JP5251849B2 JP2009271886A JP2009271886A JP5251849B2 JP 5251849 B2 JP5251849 B2 JP 5251849B2 JP 2009271886 A JP2009271886 A JP 2009271886A JP 2009271886 A JP2009271886 A JP 2009271886A JP 5251849 B2 JP5251849 B2 JP 5251849B2
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- H01L2224/48135—Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
- H01L2224/48137—Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being arranged next to each other, e.g. on a common substrate
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- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48245—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
- H01L2224/48247—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
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Description
図8におけるクラッド材のうち、No.24である、Zn層、Al層、Zn層の厚さが20μm、70μm、20μmであるクラッド材について評価をしたものが、図11に示す実施例1〜16である。実施例1〜16は、Zn平均結晶粒径とZn/Al界面のZn-Al合金の面積割合を変化させたZn/Al/Znクラッド材の加熱実験を実施したものと、このクラッド材を用いて半導体装置を製造し、接続性を評価したものである
先ず、実施例1~16に示すZn/Al/Znクラッド材について、融点より僅かに低い380℃で1min加熱し、Zn層表面のAlの有無について元素分析を実施した。その結果、Zn/Al界面の合金割合が40%以下のクラッド材においては、加熱後もZn層表面にAlが露出することがなかった。その結果、濡れ性が良好であることがわかった。また、加熱後のZn/Al界面の剥離の発生の有無を検討した。その結果、Zn平均結晶粒径が50μm以下のクラッド材においては、剥離が発生しないことがわかった。
実施例17〜32は、それぞれのZn/Al/Znクラッド材を、実施例1〜16と同様の加熱実験により評価し、また、それらのクラッド材により気密封止を必要とする半導体装置を製造し、接続性を評価したものである。Zn層、Al層、Zn層の厚さが20μm、70μm、20μmであるクラッド材の評価結果を例として図15に示す。
にNiまたはNi/Auめっき36を施したパッドと、半導体素子1のAl配線32にZnめっき33を施した電極の間に置き、接続温度385℃で接続を行った。なお、321はAl配線のベースメタルであり、322はAl配線のキャップメタルである。その結果、Zn平均結晶粒径が50μm以下であり、且つ、Zn/Al界面の合金面積割合が40%以下のクラッド材について、接続部のボイド率10%以内となる接続を実現することができた。
Claims (6)
- Al系合金層がZn系合金層によって挟持された接続材料であって、
前記Zn系合金層の平均結晶粒径が0.85μm 以上、50μm以下であり、且つ、前記Al系合金層と前記Zn系合金層の間に形成されるZn-Al合金の面積割合が0~40%であることを特徴とする接続材料。 - 請求項1に記載のAl系合金層のAl含有率が99~100%であることを特徴とする接続材料。
- 請求項1に記載のZn系合金層のZn含有率が90~100%であることを特徴とする接続材料。
- 半導体素子と、前記半導体素子を接続するフレームと、一端が外部端子となるリードと、前記リードの他端と前記半導体素子の電極とを接続するワイヤと、前記半導体素子および前記ワイヤを樹脂封止するレジンとを有する半導体装置の製造方法であって、
前記半導体素子と前記フレームとを、請求項1乃至3のいずれか1項に記載の接続材料を溶融して接続することを特徴とする半導体装置の製造方法。 - 半導体素子と、前記半導体素子を接続する基板と、一端が外部端子となるリードと、前記リードの他端と前記半導体素子の電極とを接続するワイヤと、前記半導体素子及び前記ワイヤを気密封止し、前記基板に接続する金属キャップをと有する半導体装置の製造方法であって、
前記基板と前記金属キャップとを、請求項1乃至3のいずれか1項に記載の接続材料を溶融して接続することを特徴とする半導体装置の製造方法。 - 半導体素子を直接回路基板に実装した半導体装置の製造方法であって、
前記半導体素子と前記回路基板とを、請求項1乃至3のいずれか1項に記載の接続材料を溶融して接続することを特徴とする半導体装置の製造方法。
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JP5742618B2 (ja) * | 2011-09-16 | 2015-07-01 | 日立金属株式会社 | ろう接用複合材及びその製造方法 |
CN115161444B (zh) * | 2022-08-12 | 2024-01-19 | 山西太钢不锈钢精密带钢有限公司 | 低膨胀合金4j36精密箔材及其超细晶固溶热处理方法和应用 |
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JPS62173095A (ja) * | 1986-01-24 | 1987-07-29 | Showa Alum Corp | はんだ付用板材 |
KR100307633B1 (ko) * | 1999-09-09 | 2001-11-07 | 윤종용 | 반도체장치의 절연막 평탄화 방법 |
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