CN102482165B - 碳化硅包覆碳基材的制造方法、碳化硅包覆碳基材、碳化硅碳复合烧结体、陶瓷包覆碳化硅碳复合烧结体以及碳化硅碳复合烧结体的制造方法 - Google Patents

碳化硅包覆碳基材的制造方法、碳化硅包覆碳基材、碳化硅碳复合烧结体、陶瓷包覆碳化硅碳复合烧结体以及碳化硅碳复合烧结体的制造方法 Download PDF

Info

Publication number
CN102482165B
CN102482165B CN201080039227.7A CN201080039227A CN102482165B CN 102482165 B CN102482165 B CN 102482165B CN 201080039227 A CN201080039227 A CN 201080039227A CN 102482165 B CN102482165 B CN 102482165B
Authority
CN
China
Prior art keywords
silicon carbide
carbon
coated
carbon substrate
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201080039227.7A
Other languages
English (en)
Chinese (zh)
Other versions
CN102482165A (zh
Inventor
中村正治
宫本钦生
东城哲朗
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyo Tanso Co Ltd
Original Assignee
Toyo Tanso Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyo Tanso Co Ltd filed Critical Toyo Tanso Co Ltd
Publication of CN102482165A publication Critical patent/CN102482165A/zh
Application granted granted Critical
Publication of CN102482165B publication Critical patent/CN102482165B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/90—Carbides
    • C01B32/914—Carbides of single elements
    • C01B32/956—Silicon carbide
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/90—Carbides
    • C01B32/914—Carbides of single elements
    • C01B32/956—Silicon carbide
    • C01B32/963—Preparation from compounds containing silicon
    • C01B32/97—Preparation from SiO or SiO2
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/52—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbon, e.g. graphite
    • C04B35/522—Graphite
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
    • C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
    • C04B35/575—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide obtained by pressure sintering
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
    • C04B35/62605—Treating the starting powders individually or as mixtures
    • C04B35/62645—Thermal treatment of powders or mixtures thereof other than sintering
    • C04B35/62675—Thermal treatment of powders or mixtures thereof other than sintering characterised by the treatment temperature
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
    • C04B35/628—Coating the powders or the macroscopic reinforcing agents
    • C04B35/62802—Powder coating materials
    • C04B35/62828—Non-oxide ceramics
    • C04B35/62831—Carbides
    • C04B35/62834—Silicon carbide
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
    • C04B35/628—Coating the powders or the macroscopic reinforcing agents
    • C04B35/62884—Coating the powders or the macroscopic reinforcing agents by gas phase techniques
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
    • C04B35/628—Coating the powders or the macroscopic reinforcing agents
    • C04B35/62897—Coatings characterised by their thickness
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
    • C04B41/5025—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials with ceramic materials
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81—Coating or impregnation
    • C04B41/85—Coating or impregnation with inorganic materials
    • C04B41/87—Ceramics
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0635—Carbides
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2111/00—Mortars, concrete or artificial stone or mixtures to prepare them, characterised by specific function, property or use
    • C04B2111/00241—Physical properties of the materials not provided for elsewhere in C04B2111/00
    • C04B2111/00405—Materials with a gradually increasing or decreasing concentration of ingredients or property from one layer to another
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/42—Non metallic elements added as constituents or additives, e.g. sulfur, phosphor, selenium or tellurium
    • C04B2235/422—Carbon
    • C04B2235/425—Graphite
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/50—Constituents or additives of the starting mixture chosen for their shape or used because of their shape or their physical appearance
    • C04B2235/54—Particle size related information
    • C04B2235/5418—Particle size related information expressed by the size of the particles or aggregates thereof
    • C04B2235/5436—Particle size related information expressed by the size of the particles or aggregates thereof micrometer sized, i.e. from 1 to 100 micron
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/66—Specific sintering techniques, e.g. centrifugal sintering
    • C04B2235/666—Applying a current during sintering, e.g. plasma sintering [SPS], electrical resistance heating or pulse electric current sintering [PECS]
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/72—Products characterised by the absence or the low content of specific components, e.g. alkali metal free alumina ceramics
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/74—Physical characteristics
    • C04B2235/77—Density
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/74—Physical characteristics
    • C04B2235/78—Grain sizes and shapes, product microstructures, e.g. acicular grains, equiaxed grains, platelet-structures
    • C04B2235/781—Nanograined materials, i.e. having grain sizes below 100 nm
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/96—Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
    • Y10T428/264—Up to 3 mils
    • Y10T428/265—1 mil or less
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/29—Coated or structually defined flake, particle, cell, strand, strand portion, rod, filament, macroscopic fiber or mass thereof
    • Y10T428/2982—Particulate matter [e.g., sphere, flake, etc.]
    • Y10T428/2991—Coated

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Structural Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Nanotechnology (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Composite Materials (AREA)
  • Thermal Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Ceramic Products (AREA)
  • Chemical Vapour Deposition (AREA)
CN201080039227.7A 2009-09-04 2010-09-01 碳化硅包覆碳基材的制造方法、碳化硅包覆碳基材、碳化硅碳复合烧结体、陶瓷包覆碳化硅碳复合烧结体以及碳化硅碳复合烧结体的制造方法 Expired - Fee Related CN102482165B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2009-205041 2009-09-04
JP2009205041A JP5737547B2 (ja) 2009-09-04 2009-09-04 炭化ケイ素被覆黒鉛粒子の製造方法及び炭化ケイ素被覆黒鉛粒子
PCT/JP2010/064871 WO2011027756A1 (ja) 2009-09-04 2010-09-01 炭化ケイ素被覆炭素基材の製造方法及び炭化ケイ素被覆炭素基材並びに炭化ケイ素炭素複合焼結体、セラミックス被覆炭化ケイ素炭素複合焼結体及び炭化ケイ素炭素複合焼結体の製造方法

Publications (2)

Publication Number Publication Date
CN102482165A CN102482165A (zh) 2012-05-30
CN102482165B true CN102482165B (zh) 2014-01-22

Family

ID=43649291

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201080039227.7A Expired - Fee Related CN102482165B (zh) 2009-09-04 2010-09-01 碳化硅包覆碳基材的制造方法、碳化硅包覆碳基材、碳化硅碳复合烧结体、陶瓷包覆碳化硅碳复合烧结体以及碳化硅碳复合烧结体的制造方法

Country Status (8)

Country Link
US (1) US9085493B2 (enExample)
EP (1) EP2474514A4 (enExample)
JP (1) JP5737547B2 (enExample)
KR (1) KR20120076340A (enExample)
CN (1) CN102482165B (enExample)
RU (1) RU2012112935A (enExample)
TW (1) TWI477443B (enExample)
WO (1) WO2011027756A1 (enExample)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5678332B2 (ja) * 2009-09-04 2015-03-04 東洋炭素株式会社 セラミックス炭素複合材及びその製造方法並びにセラミックス被覆セラミックス炭素複合材及びその製造方法
US9283693B2 (en) * 2010-07-30 2016-03-15 Lg Innotek Co., Ltd. Hot press sintering apparatus and press element
JP5748564B2 (ja) 2011-05-27 2015-07-15 東洋炭素株式会社 炭化ケイ素−炭素複合材の製造方法
JP5748586B2 (ja) * 2011-06-07 2015-07-15 東洋炭素株式会社 炭素−炭化ケイ素複合材
KR101911432B1 (ko) 2012-06-18 2019-01-04 삼성전자주식회사 복합 담체, 이의 제조 방법, 이를 포함한 전극 촉매 및 상기 전극 촉매를 포함한 막-전극 접합체 및 연료 전지
WO2013190662A1 (ja) * 2012-06-20 2013-12-27 東洋炭素株式会社 炭素－炭化ケイ素複合材
WO2014081005A1 (ja) * 2012-11-26 2014-05-30 東洋炭素株式会社 セラミックス炭素複合材の特性制御方法並びにセラミックス炭素複合材
US9636122B2 (en) 2013-03-15 2017-05-02 Depuy Ireland Unlimited Company Femoral orthopaedic instrument assembly for setting offset
DE102015111453B4 (de) * 2015-07-15 2022-03-10 Infineon Technologies Ag Ein Halbleiterbauelement und ein Verfahren zum Bilden eines Halbleiterbauelements
JP7333172B2 (ja) 2015-08-20 2023-08-24 インテグリス・インコーポレーテッド 炭化ケイ素／黒鉛複合材並びにそれを含む物品及び組立品
FR3042993A1 (fr) 2015-11-04 2017-05-05 Commissariat Energie Atomique Matrice et piston d'appareil de sps, appareil de sps les comprenant, et procede de frittage, densification ou assemblage sous une atmosphere oxydante utilisant cet appareil
EP4187191B1 (de) * 2016-10-13 2024-05-22 Airbus Defence and Space GmbH Verbundpulver zur generativen fertigung, verfahren zur herstellung eines verbundpulvers
JP7093264B2 (ja) * 2018-08-10 2022-06-29 イビデン株式会社 反応装置
CA3147593A1 (en) * 2019-07-17 2021-01-21 Phillips 66 Company Electrode particles suitable for batteries
CN115417678B (zh) * 2022-11-07 2023-03-24 湖南联合半导体科技有限公司 一种低温化学气相反应法制备SiC涂层的方法
CN116143542A (zh) * 2022-12-08 2023-05-23 中国科学院上海硅酸盐研究所 一种金刚石结合碳化硅复相陶瓷的制备方法和应用
CN117577802B (zh) * 2023-11-16 2025-12-09 宁德新能源科技有限公司 负极活性材料、负极极片、二次电池和电子设备
KR102845759B1 (ko) * 2024-01-24 2025-08-13 한국재료연구원 열방호 소재용 금속 탄화물 계면층 제조방법 및 이를 이용한 열방호 소재
CN118684521B (zh) * 2024-08-27 2025-02-25 浙江晶诚新材料有限公司 碳化硅涂层石墨基座及其制备方法与应用
CN118684522B (zh) * 2024-08-27 2025-05-13 浙江晶诚新材料有限公司 带有嵌入式碳化硅涂层的石墨基座及其制备方法与应用

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1345704A (zh) * 2000-09-29 2002-04-24 曹已生 微晶石墨粒生产方法
CN1386722A (zh) * 2002-04-05 2002-12-25 北京化工大学 一种纳米金属粒子/炭复合材料的制备方法

Family Cites Families (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5490216A (en) * 1977-12-27 1979-07-17 Toshiba Ceramics Co Heating furnace for sic coating process
JPS5610921A (en) * 1979-07-09 1981-02-03 Toshiba Ceramics Co Ltd Material for equipment for manufacturing semiconductor and its treating furnace
JPS5684381A (en) * 1979-12-04 1981-07-09 Toshiba Ceramics Co Carbon silicate material
JPS59129142A (ja) * 1983-01-14 1984-07-25 日本ピラ−工業株式会社 複合成形体およびその製造方法
JPH01145400A (ja) * 1987-11-30 1989-06-07 Toshiba Ceramics Co Ltd シリコンウェハー加熱用治具
JP2721678B2 (ja) * 1988-03-25 1998-03-04 東洋炭素株式会社 β−炭化珪素成形体及びその製造法
RU2165999C2 (ru) 1991-01-30 2001-04-27 Научно-исследовательский институт молекулярной электроники Способ формирования защитных покрытий графитовых подложкодержателей и устройство для его осуществления
JP2995583B2 (ja) 1991-02-27 1999-12-27 イビデン株式会社 炭素結合炭素繊維複合材料に用いられる複合炭素繊維
US5580834A (en) * 1993-02-10 1996-12-03 The Morgan Crucible Company Plc Self-sintered silicon carbide/carbon graphite composite material having interconnected pores which may be impregnated and raw batch and process for producing same
US5422322A (en) * 1993-02-10 1995-06-06 The Stackpole Corporation Dense, self-sintered silicon carbide/carbon-graphite composite and process for producing same
JPH06263568A (ja) 1993-03-05 1994-09-20 Japan Atom Energy Res Inst 炭素系材料の耐酸化性改良法
JPH0733561A (ja) * 1993-07-26 1995-02-03 New Oji Paper Co Ltd 炭素材料表面改質法
JPH07133173A (ja) 1993-11-04 1995-05-23 Tokai Carbon Co Ltd 耐酸化性炭素繊維強化炭素材の製造方法
JP3548597B2 (ja) * 1994-03-28 2004-07-28 東海カーボン株式会社 炭素繊維強化炭素複合材の耐酸化処理方法
JPH08169786A (ja) * 1994-12-16 1996-07-02 Tokai Carbon Co Ltd 耐酸化性炭素繊維強化炭素複合材の製造法
JPH0952777A (ja) 1995-08-10 1997-02-25 Tokai Carbon Co Ltd 耐酸化性ｃ／ｃ複合材の製造方法
US5968653A (en) * 1996-01-11 1999-10-19 The Morgan Crucible Company, Plc Carbon-graphite/silicon carbide composite article
DE69704638T2 (de) * 1996-02-29 2001-08-30 Bridgestone Corp., Tokio/Tokyo Verfahren zur Herstellung eines Sinterkörpers aus Siliciumcarbid
JP3853058B2 (ja) * 1998-01-14 2006-12-06 東海カーボン株式会社 耐酸化性ｃ／ｃ複合材及びその製造方法
JP2001180919A (ja) * 1999-12-24 2001-07-03 Sumitomo Electric Ind Ltd 炭化珪素−炭素系複合粉末とそれを用いた複合材料
JP2001198834A (ja) 2000-01-13 2001-07-24 Allied Material Corp ＳｉＣ被覆砥粒を用いたダイヤモンド砥石
JP4656273B2 (ja) * 2001-05-16 2011-03-23 信越化学工業株式会社 改質カーボン粉体の製造方法
DE10231278A1 (de) * 2002-07-10 2004-02-05 Sgl Carbon Ag Keramische Verbundkörper
CA2409524A1 (fr) * 2002-10-23 2004-04-23 Hydro-Quebec Particule comportant un noyau a base de graphite recouvert d'au moins une couche continue ou discontinue, leurs procedes d'obtention et leurs utilisations
JP4691891B2 (ja) 2003-04-24 2011-06-01 満之 大柳 Ｃ−ＳｉＣ焼結体およびその製造方法
US6953760B2 (en) * 2003-06-04 2005-10-11 Saint-Gobain Ceramics & Plastics, Inc. Ceramic component containing inclusions
JP2005075720A (ja) 2003-08-29 2005-03-24 Yoshiaki Morisada ＳｉＣ被覆カーボンナノチューブ、その製造方法とその複合材料
JP3764157B2 (ja) * 2003-10-10 2006-04-05 東洋炭素株式会社 高純度炭素系材料及びセラミックス膜被覆高純度炭素系材料
JP4998458B2 (ja) * 2006-02-24 2012-08-15 日立化成工業株式会社 セラミック焼結体及びこれを用いた摺動部品、並びに、セラミック焼結体の製造方法
JP2009091195A (ja) * 2007-10-09 2009-04-30 Shin Etsu Chem Co Ltd 一酸化珪素の製造装置及び製造方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1345704A (zh) * 2000-09-29 2002-04-24 曹已生 微晶石墨粒生产方法
CN1386722A (zh) * 2002-04-05 2002-12-25 北京化工大学 一种纳米金属粒子/炭复合材料的制备方法

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
JP特开2001-180919A 2001.07.03

Also Published As

Publication number Publication date
EP2474514A1 (en) 2012-07-11
CN102482165A (zh) 2012-05-30
EP2474514A4 (en) 2013-05-29
KR20120076340A (ko) 2012-07-09
TWI477443B (zh) 2015-03-21
RU2012112935A (ru) 2013-10-10
JP5737547B2 (ja) 2015-06-17
WO2011027756A1 (ja) 2011-03-10
US20120156479A1 (en) 2012-06-21
US9085493B2 (en) 2015-07-21
JP2011051866A (ja) 2011-03-17
TW201113220A (en) 2011-04-16

Similar Documents

Publication Publication Date Title
CN102482165B (zh) 碳化硅包覆碳基材的制造方法、碳化硅包覆碳基材、碳化硅碳复合烧结体、陶瓷包覆碳化硅碳复合烧结体以及碳化硅碳复合烧结体的制造方法
CN102482164B (zh) 陶瓷碳复合材及其制造方法与陶瓷包覆陶瓷碳复合材及其制造方法
CN104045350B (zh) 一种采用反应烧结工艺制备氮化硅-碳化硅复合陶瓷材料的方法
JP5748564B2 (ja) 炭化ケイ素−炭素複合材の製造方法
CN105622102B (zh) 类碳化硼相‑碳化硅或类碳化硼相‑碳化硅‑碳化硼复相陶瓷材料及其制备方法
JPH09183662A (ja) 窒化アルミニウム焼結体、及び窒化アルミニウム粉末の製造方法
JP2005075720A (ja) ＳｉＣ被覆カーボンナノチューブ、その製造方法とその複合材料
JP4348429B2 (ja) 窒化ケイ素多孔体及びその製造方法
JPWO2015025951A1 (ja) 多孔質セラミックス及びその製造方法
CN103896282B (zh) 氧化硅纳米线的碳化硅粉末压坯制备方法
WO2014081005A1 (ja) セラミックス炭素複合材の特性制御方法並びにセラミックス炭素複合材
KR102238819B1 (ko) 실리콘 카바이드 섬유의 제조방법 및 상기 제조방법에 의하여 제조된 실리콘 카바이드 섬유
CN104163628A (zh) 一种制备HfC-SiC复相陶瓷的方法
JP5748586B2 (ja) 炭素−炭化ケイ素複合材
JP2003277152A (ja) 炭化珪素焼結体とその製造方法および用途
JP5204972B2 (ja) 炭化珪素焼結体の製造方法
JP3051931B1 (ja) 高強度炭化ケイ素焼結体とその製造方法
KR101300104B1 (ko) 탄화규소 발열체의 제조방법
JP2022096105A (ja) 電極埋設部材、その製造方法、および基板保持部材
Zalite et al. The Effect of Raw Components on the Densification and Properties of Nanostructured Sialon Materials
JP2006076858A (ja) 複合セラミックス
JP2007217240A (ja) ＳｉＣ焼結体、ＳｉＣ粒子及びＳｉＣ焼結体の製造方法
KR20200089345A (ko) 실리콘 카바이드 섬유의 제조방법 및 상기 제조방법에 의하여 제조된 실리콘 카바이드 섬유
JP2007063092A (ja) セラミックス系複合体の製造方法及びその複合前駆体粒子の製造方法
TW201400435A (zh) 碳－碳化矽複合材料

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20140122

Termination date: 20190901

CF01 Termination of patent right due to non-payment of annual fee