DE69704638T2 - Verfahren zur Herstellung eines Sinterkörpers aus Siliciumcarbid - Google Patents

Verfahren zur Herstellung eines Sinterkörpers aus Siliciumcarbid

Info

Publication number
DE69704638T2
DE69704638T2 DE69704638T DE69704638T DE69704638T2 DE 69704638 T2 DE69704638 T2 DE 69704638T2 DE 69704638 T DE69704638 T DE 69704638T DE 69704638 T DE69704638 T DE 69704638T DE 69704638 T2 DE69704638 T2 DE 69704638T2
Authority
DE
Germany
Prior art keywords
producing
silicon carbide
sintered body
body made
sintered
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69704638T
Other languages
English (en)
Other versions
DE69704638D1 (de
Inventor
Yoshitomo Takahashi
Hiroaki Wada
Taro Miyamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bridgestone Corp
Original Assignee
Bridgestone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bridgestone Corp filed Critical Bridgestone Corp
Application granted granted Critical
Publication of DE69704638D1 publication Critical patent/DE69704638D1/de
Publication of DE69704638T2 publication Critical patent/DE69704638T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
    • C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
    • C04B35/575—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide obtained by pressure sintering
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
    • C04B35/628—Coating the powders or the macroscopic reinforcing agents
    • C04B35/62802—Powder coating materials
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
    • C04B35/63—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B using additives specially adapted for forming the products, e.g.. binder binders
    • C04B35/632—Organic additives
    • C04B35/6325—Organic additives based on organo-metallic compounds
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/64—Burning or sintering processes
    • C04B35/645—Pressure sintering
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/48—Organic compounds becoming part of a ceramic after heat treatment, e.g. carbonising phenol resins
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/50—Constituents or additives of the starting mixture chosen for their shape or used because of their shape or their physical appearance
    • C04B2235/54—Particle size related information
    • C04B2235/5418—Particle size related information expressed by the size of the particles or aggregates thereof
    • C04B2235/5436—Particle size related information expressed by the size of the particles or aggregates thereof micrometer sized, i.e. from 1 to 100 micron
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/60—Aspects relating to the preparation, properties or mechanical treatment of green bodies or pre-forms
    • C04B2235/602—Making the green bodies or pre-forms by moulding
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/656—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes characterised by specific heating conditions during heat treatment
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/658—Atmosphere during thermal treatment
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/74—Physical characteristics
    • C04B2235/77—Density

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Ceramic Products (AREA)
DE69704638T 1996-02-29 1997-02-28 Verfahren zur Herstellung eines Sinterkörpers aus Siliciumcarbid Expired - Lifetime DE69704638T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP4374896 1996-02-29
JP15567096 1996-06-17

Publications (2)

Publication Number Publication Date
DE69704638D1 DE69704638D1 (de) 2001-05-31
DE69704638T2 true DE69704638T2 (de) 2001-08-30

Family

ID=26383585

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69704638T Expired - Lifetime DE69704638T2 (de) 1996-02-29 1997-02-28 Verfahren zur Herstellung eines Sinterkörpers aus Siliciumcarbid

Country Status (4)

Country Link
US (1) US6001756A (de)
EP (1) EP0792853B1 (de)
KR (1) KR100487262B1 (de)
DE (1) DE69704638T2 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102021131748B3 (de) 2021-12-02 2023-02-23 Nippon Kornmeyer Carbon Group Gmbh Verfahren zum Herstellen von hochreinem Siliziumkarbid-Pulver

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US6251353B1 (en) * 1996-08-26 2001-06-26 Bridgestone Corporation Production method of silicon carbide particles
JPH1167427A (ja) * 1997-08-27 1999-03-09 Bridgestone Corp ヒーター部品
US6090733A (en) * 1997-08-27 2000-07-18 Bridgestone Corporation Sintered silicon carbide and method for producing the same
JP3048139B2 (ja) * 1998-07-29 2000-06-05 住友特殊金属株式会社 導電性ウェハ、薄板焼結体および薄膜磁気ヘッド用セラミックス基板の製造方法ならびに導電性ウェハの加工方法
JP2000239827A (ja) * 1998-12-22 2000-09-05 Bridgestone Corp 積層構造体及びその製造方法
JP2000238179A (ja) * 1998-12-22 2000-09-05 Bridgestone Corp 積層構造体及びその製造方法
JP2001056919A (ja) * 1999-08-11 2001-02-27 Kyocera Corp 磁気ヘッド用基板及びこれを用いた磁気ヘッド
US7018947B2 (en) * 2000-02-24 2006-03-28 Shipley Company, L.L.C. Low resistivity silicon carbide
JP2002226274A (ja) * 2001-01-25 2002-08-14 Ngk Insulators Ltd 耐蝕性セラミック材料、その製造方法および半導体製造用製品
US8202621B2 (en) * 2001-09-22 2012-06-19 Rohm And Haas Company Opaque low resistivity silicon carbide
US7127367B2 (en) 2003-10-27 2006-10-24 Applied Materials, Inc. Tailored temperature uniformity
US8536492B2 (en) 2003-10-27 2013-09-17 Applied Materials, Inc. Processing multilayer semiconductors with multiple heat sources
KR100561701B1 (ko) * 2004-01-30 2006-03-17 한국과학기술연구원 탄화규소 나노로드 및 나노와이어의 제조 방법
US7824498B2 (en) * 2004-02-24 2010-11-02 Applied Materials, Inc. Coating for reducing contamination of substrates during processing
US20070089836A1 (en) * 2005-10-24 2007-04-26 Applied Materials, Inc. Semiconductor process chamber
US20080146433A1 (en) * 2006-12-18 2008-06-19 Dynamic Defense Materials, Llc Ceramic Material Product and Method of Manufacture
US8222574B2 (en) * 2007-01-15 2012-07-17 Applied Materials, Inc. Temperature measurement and control of wafer support in thermal processing chamber
US8111978B2 (en) * 2008-07-11 2012-02-07 Applied Materials, Inc. Rapid thermal processing chamber with shower head
US7910082B2 (en) * 2008-08-13 2011-03-22 Corning Incorporated Synthesis of ordered mesoporous carbon-silicon nanocomposites
EP2361897B1 (de) * 2008-09-24 2013-03-27 Ube Industries, Ltd. Verfahren zur herstellung von sic-fasergebundener keramik
JP5737547B2 (ja) * 2009-09-04 2015-06-17 東洋炭素株式会社 炭化ケイ素被覆黒鉛粒子の製造方法及び炭化ケイ素被覆黒鉛粒子
KR101017926B1 (ko) * 2010-12-01 2011-03-04 (주) 화인테크 실리콘 카바이드 소결체의 제조방법
KR101231472B1 (ko) * 2010-12-24 2013-02-07 엘지이노텍 주식회사 탄화 규소의 소결 방법
KR101812343B1 (ko) * 2011-08-12 2017-12-26 엘지이노텍 주식회사 웨이퍼 캐리어 제조 방법
KR101897020B1 (ko) * 2011-12-26 2018-09-12 엘지이노텍 주식회사 탄화규소 분말, 이의 제조 방법, 탄화규소 소결체 및 이의 제조 방법
WO2015002968A1 (en) * 2013-07-01 2015-01-08 Dale Adams Process for sintering silicon carbide
US9556073B2 (en) * 2013-07-01 2017-01-31 Dale Adams Process for sintering silicon carbide
WO2015041871A1 (en) * 2013-09-19 2015-03-26 United Technologies Corporation Method of producing a ceramic article, intermediate article and composition therefor
KR102385785B1 (ko) * 2015-02-12 2022-04-13 익스팬테크주식회사 전도성 탄소-세라믹 복합체 및 그의 제조방법
WO2017189998A1 (en) * 2016-04-28 2017-11-02 Dale Adams Process for sintering silicon carbide
US11292749B2 (en) * 2017-01-18 2022-04-05 The University Of North Carolina At Charlotte Composite carbide compositions and methods of making the same
JP7466871B2 (ja) * 2018-09-28 2024-04-15 株式会社フジミインコーポレーテッド 被覆炭化珪素粒子粉体
CN110204338A (zh) * 2019-06-03 2019-09-06 中国科学院上海硅酸盐研究所 一种常压固相烧结的高纯SiC陶瓷及其制备方法
US11285242B1 (en) * 2019-12-20 2022-03-29 The University Of North Carolina At Charlotte Processing and bioactivation of a novel SiC medical device

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JPH07241856A (ja) * 1994-03-08 1995-09-19 Toppan Printing Co Ltd 電鋳複製スタンパの製造方法
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102021131748B3 (de) 2021-12-02 2023-02-23 Nippon Kornmeyer Carbon Group Gmbh Verfahren zum Herstellen von hochreinem Siliziumkarbid-Pulver
WO2023099329A1 (de) 2021-12-02 2023-06-08 Nippon Kornmeyer Carbon Group Gmbh Verfahren zum herstellen von hochreinem siliziumkarbid-pulver

Also Published As

Publication number Publication date
DE69704638D1 (de) 2001-05-31
EP0792853A1 (de) 1997-09-03
KR980001966A (ko) 1998-03-30
US6001756A (en) 1999-12-14
KR100487262B1 (ko) 2005-09-02
EP0792853B1 (de) 2001-04-25

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