WO2020040168A1 - 磁場計測装置、磁場計測方法、磁場計測プログラム - Google Patents

磁場計測装置、磁場計測方法、磁場計測プログラム Download PDF

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WO2020040168A1
WO2020040168A1 PCT/JP2019/032548 JP2019032548W WO2020040168A1 WO 2020040168 A1 WO2020040168 A1 WO 2020040168A1 JP 2019032548 W JP2019032548 W JP 2019032548W WO 2020040168 A1 WO2020040168 A1 WO 2020040168A1
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magnetic field
magnetic
magnetic sensor
sensor array
unit
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English (en)
French (fr)
Japanese (ja)
Inventor
威信 中村
茂樹 岡武
森安　嘉貴
片岡　誠
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Asahi Kasei Microdevices Corp
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Asahi Kasei Microdevices Corp
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Priority to JP2019565966A priority Critical patent/JP6664568B1/ja
Publication of WO2020040168A1 publication Critical patent/WO2020040168A1/ja
Priority to US17/176,201 priority patent/US12274538B2/en
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/20—Metals
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/05—Detecting, measuring or recording for diagnosis by means of electric currents or magnetic fields; Measuring using microwaves or radio waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/72—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables
    • G01N27/82—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables for investigating the presence of flaws
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09—Magnetoresistive devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R35/00—Testing or calibrating of apparatus covered by the other groups of this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N50/00—Galvanomagnetic devices
    • H10N50/10—Magnetoresistive devices
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B2560/00—Constructional details of operational features of apparatus; Accessories for medical measuring apparatus
    • A61B2560/02—Operational features
    • A61B2560/0223—Operational features of calibration, e.g. protocols for calibrating sensors
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B2562/00—Details of sensors; Constructional details of sensor housings or probes; Accessories for sensors
    • A61B2562/02—Details of sensors specially adapted for in-vivo measurements
    • A61B2562/0223—Magnetic field sensors
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B2562/00—Details of sensors; Constructional details of sensor housings or probes; Accessories for sensors
    • A61B2562/04—Arrangements of multiple sensors of the same type
    • A61B2562/046—Arrangements of multiple sensors of the same type in a matrix array

Definitions

  • the present invention relates to a magnetic field measurement device, a magnetic field measurement method, and a magnetic field measurement program.
  • a pair of magnetic detection elements are stacked in the direction of detection of a magnetic field, and the magnitude of a measurement result between the pair of magnetic detection elements is the same for a disturbance magnetic field, while the magnetic field to be measured is In contrast, the disturbance magnetic field is suppressed based on the principle that the magnitude of the measurement result differs between the pair of magnetic detection elements, and the magnetic field to be measured is measured.
  • the disturbance magnetic field is suppressed based on the principle that the magnitude of the measurement result differs between the pair of magnetic detection elements, and the magnetic field to be measured is measured.
  • a magnetic field measuring device has a plurality of magnetic sensors each having a magneto-resistive element and magnetic converging plates disposed at both ends of the magneto-resistive element, and a three-dimensional magnetic sensor cell capable of detecting a magnetic field in three axial directions.
  • a magnetic sensor array configured in an array may be provided.
  • the magnetic field measurement device may include a magnetic field acquisition unit that acquires measurement data measured by the magnetic sensor array.
  • the magnetic field measurement device uses a signal vector output from each of the plurality of magnetic sensors as a base vector when the magnetic sensor array detects a magnetic field having a spatial distribution of an orthonormal function by a magnetic sensor array.
  • a signal space separation unit for separation may be provided.
  • Each of the plurality of magnetic sensor cells may include a magnetic field generation unit that generates a feedback magnetic field that reduces the input magnetic field detected by each of the plurality of magnetic sensors.
  • the magnetic sensor array may have a curved shape curved in at least one direction.
  • the plurality of magnetic sensor cells may be arranged at lattice points included in a curved surface shape in a three-dimensional space.
  • the signal space separation unit may calculate the magnetic field to be measured by suppressing the disturbance magnetic field.
  • the signal space separation unit may perform a series expansion of the spatial distribution of the magnetic field using the signal vector as the base vector.
  • the orthonormal function may be a spherical harmonic function.
  • the magnetic field acquisition unit may further include a calibration calculation unit for calibrating the measurement data acquired by the magnetic field acquisition unit.
  • the magnetic sensor array may be formed in two stages.
  • the curved surface shape may be formed in a substantially parabolic shape.
  • a magnetic field measuring method in which a magnetic field measuring device measures a magnetic field.
  • a magnetic field measuring device includes a plurality of magnetic sensors each having a magnetoresistive element and magnetic converging plates disposed at both ends of the magnetoresistive element, and a plurality of magnetic sensors capable of detecting a magnetic field in three axial directions.
  • the method may include acquiring measurement data measured by a magnetic sensor array configured by arranging sensor cells in a three-dimensional manner.
  • the magnetic field measurement method is based on a signal vector output by each of the plurality of magnetic sensors when the magnetic field measurement device detects a magnetic field having a spatial distribution of an orthonormal function with a magnetic sensor array, the spatial distribution of the magnetic field indicated by the measurement data. May be provided as a basis vector for signal separation.
  • Each of the plurality of magnetic sensor cells may generate a feedback magnetic field that reduces the input magnetic field detected by each of the plurality of magnetic sensors.
  • the magnetic sensor array may have a curved shape curved in at least one direction.
  • the plurality of magnetic sensor cells may be arranged at lattice points included in a curved surface shape in a three-dimensional space.
  • the magnetic field measurement program uses a computer to calculate the spatial distribution of the magnetic field indicated by the measurement data and the signal vector output from each of the plurality of magnetic sensors when the magnetic sensor array detects a magnetic field having a spatial distribution of an orthonormal function. It may function as a signal space separation unit that separates a signal as a vector. Each of the plurality of magnetic sensor cells may generate a feedback magnetic field that reduces the input magnetic field detected by each of the plurality of magnetic sensors.
  • the magnetic sensor array may have a curved shape curved in at least one direction.
  • the plurality of magnetic sensor cells may be arranged at lattice points included in a curved surface shape in a three-dimensional space.
  • FIG. 1 shows a configuration of a magnetic field measuring apparatus 10 according to the present embodiment.
  • the magnetic field measuring device 10 measures a magnetic field using a magnetoresistive element.
  • the magnetic field measuring device 10 is an example of a magnetocardiographic measuring device, and measures a magnetic field (referred to as “cardiac magnet”) generated by electrical activity of a human heart.
  • the magnetic field measurement device 10 may be used to measure a magnetocardiogram of a living body other than a human, or may be used to measure a biomagnetic field other than a magnetocardiogram such as a brain magnetic field.
  • the magnetic field measuring apparatus 10 may be used for a magnetic flaw inspection for detecting a surface or a subsurface flaw of a steel material or a weld.
  • the magnetic field measurement device 10 includes a main body unit 100 and an information processing unit 150.
  • the main body unit 100 is a component for sensing a magnetocardiogram of a subject, and includes a magnetic sensor unit 110, a head 120, a driving unit 125, a base unit 130, and a pole unit 140.
  • the magnetic sensor unit 110 is arranged at a position toward the heart in the chest of the subject when measuring the magnetocardiogram, and senses the magnetocardiogram of the subject.
  • the head 120 supports the magnetic sensor unit 110 and makes the magnetic sensor unit 110 face the subject.
  • the drive unit 125 is provided between the magnetic sensor unit 110 and the head 120, and changes the direction of the magnetic sensor unit 110 with respect to the head 120 when performing calibration.
  • the drive unit 125 according to the present embodiment includes a first actuator that can rotate the magnetic sensor unit 110 by 360 degrees about the Z axis in the figure and an axis perpendicular to the Z axis (the X axis in the state in the figure).
  • the drive unit 125 has a Y-shape when viewed from the Y-axis direction in the figure, and the second actuator moves the magnetic sensor unit 110 by 360 degrees around the X-axis in the figure. Can be rotated.
  • the base unit 130 is a base for supporting other components, and in this embodiment, is a stand on which a subject rides during magnetocardiographic measurement.
  • the pole part 140 supports the head 120 at the height of the subject's chest.
  • the pole portion 140 may be vertically expandable and contractable so as to adjust the height of the magnetic sensor unit 110 to the height of the chest of the subject.
  • the information processing unit 150 is a component for processing the measurement data by the main unit 100 and outputting the data by display / printing or the like.
  • the information processing unit 150 may be a computer such as a PC (personal computer), a tablet computer, a smartphone, a workstation, a server computer, or a general-purpose computer, or may be a computer system to which a plurality of computers are connected.
  • the information processing unit 150 may be a dedicated computer designed for information processing of magnetocardiography measurement, or may be dedicated hardware realized by a dedicated line.
  • FIG. 2 shows a configuration of the magnetic sensor unit 110 according to the present embodiment.
  • the magnetic sensor unit 110 has a magnetic sensor array 210 and a sensor data collection unit 230.
  • the magnetic sensor array 210 includes a magnetic sensor having a magnetoresistive element and a magnetic converging plate disposed on at least one of one end and the other end of the magnetoresistive element, or disposed on both ends of the magnetoresistive element.
  • a plurality of magnetic sensor cells 220 capable of detecting a magnetic field in three axial directions are arranged three-dimensionally. It is preferable that the magnetic flux concentrators be disposed at both ends of the magnetoresistive element in that the accuracy of sampling the spatial distribution of the magnetic field described later can be increased.
  • the magnetic sensor array 210 has a plurality of magnetic sensor cells 220 (for example, eight in the X direction, eight in the Y direction, and two in the Z direction) in each of the X, Y, and Z directions. Magnetic sensor cells 220) are arranged in a plane.
  • the sensor data collection unit 230 is electrically connected (not shown) to the plurality of magnetic sensor cells 220 included in the magnetic sensor array 210, collects sensor data (detection signals) from the plurality of magnetic sensor cells 220, and outputs information. It is supplied to the processing unit 150.
  • FIG. 3 shows the configuration and arrangement of the magnetic sensor cells 220 in the magnetic sensor array 210 according to the present embodiment.
  • Each magnetic sensor cell 220 has a plurality of sensor units 300x to 300z each having a magnetoresistive element (hereinafter, collectively referred to as “sensor unit 300”).
  • the sensor unit 300x is arranged along the X-axis direction and can detect a magnetic field in the X-axis direction.
  • the sensor section 300y is arranged along the Y-axis direction and can detect a magnetic field in the Y-axis direction.
  • the sensor unit 300z is disposed along the Z-axis direction and can detect a magnetic field in the Z-axis direction.
  • each sensor unit 300 clarifies the sampling point in space in each axial direction by sampling the spatial distribution of the magnetic field using the magnetoresistive element arranged at a narrow position sandwiched between the magnetic converging plates. be able to. Details of the configuration of each sensor unit 300 will be described later.
  • the three-axis directions of the magnetic field detected by the sensor units 300x, 300y, and 300z are the same as the three-dimensional direction in which the magnetic sensor cells 220 are arranged. Thereby, it is easy to grasp each component of the distribution of the measurement magnetic field.
  • the sensor units 300x, 300y, and 300z are arranged in each magnetic sensor cell 220 so as not to overlap with each other when viewed from each of the three-dimensional directions in which the magnetic sensor cells 220 are arranged. Further, in this drawing, one end of each of the sensor units 300x, 300y, and 300z is provided on the gap side provided between the plurality of sensor units 300, and the other end is separated from the gap in each of the three axial directions. It is arranged to be stretched.
  • a gap is provided at the lower left corner of the magnetic sensor cell 220 when viewed from the front, and the sensor units 300x, 300y, and 300z are provided so that one end is in contact with the gap and the other end is provided.
  • each member is extended in each of the X-axis, Y-axis, and Z-axis directions so as to be separated from the gap.
  • sensor units 300x, 300y, and 300z are arranged along three sides perpendicular to each other from one corner of the cubic magnetic sensor cell 220, and a gap is provided in the one corner.
  • the coils or the magnetic bodies included in the sensor units 300x, 300y, and 300z described later are arranged so as not to overlap with each other. Thereby, the measurement point can be clarified, and it becomes easier to grasp each component of the measurement magnetic field.
  • the other axis sensitivities of the sensor units 300x, 300y, and 300z can be regarded as equivalent to each other.
  • the other axis sensitivity is generated by mutual interference by coils or magnetic materials of the sensor units 300x, 300y, and 300z.
  • the three-axis directions of the magnetic field to be detected may be different from the three-dimensional directions in which the magnetic sensor cells 220 are arranged. When the two are different, the degree of freedom in designing the magnetic sensor array 210 can be increased without being restricted by the arrangement of the sensor unit 300 in the magnetic sensor cell 220 or the arrangement direction of the magnetic sensor cells 220.
  • FIG. 4 shows an example of the input / output characteristics of the magnetic sensor having the magnetoresistive element according to the present embodiment.
  • the horizontal axis indicates the magnitude B of the input magnetic field input to the magnetic sensor
  • the vertical axis indicates the magnitude V_xMR0 of the detection signal of the magnetic sensor.
  • the magnetic sensor has, for example, a giant magnetoresistance (GMR: Giant @ Magneto-Resistence) element or a tunnel magnetoresistance (TMR: Tunnel @ Magneto-Resistance) element, and detects a magnitude of a predetermined uniaxial magnetic field. .
  • GMR giant magnetoresistance
  • TMR Tunnel @ Magneto-Resistance
  • Such a magnetic sensor has high magnetic sensitivity, which is the gradient of the detection signal V_xMR0 with respect to the input magnetic field B, and can detect a small magnetic field of about 10 pT.
  • the detection signal V_xMR0 is saturated, and the range in which the linearity of the input / output characteristics is good is narrow. Therefore, by adding a closed loop for generating a feedback magnetic field to such a magnetic sensor, the linearity (or linearity) of the magnetic sensor can be improved.
  • a magnetic sensor will be described.
  • FIG. 5 shows a configuration example of the sensor unit 300 according to the present embodiment.
  • the sensor unit 300 is provided inside each of the plurality of magnetic sensor cells 220, and includes a magnetic sensor 520, a magnetic field generation unit 530, and an output unit 540. Note that a part of the sensor unit 300, for example, the amplifier circuit 532 and the output unit 540 may be provided on the sensor data collection unit 230 side instead of the magnetic sensor cell 220 side.
  • the detection result of the magnetic sensor 520 with respect to the input magnetic field B can be calculated as S ⁇ B.
  • the magnetic sensor 520 is connected to, for example, a power supply, and outputs a voltage drop corresponding to a change in the resistance value as a detection result of the input magnetic field. Details of the configuration of the magnetic sensor 520 will be described later.
  • the magnetic field generator 530 gives the magnetic sensor 520 a feedback magnetic field that reduces the input magnetic field detected by the magnetic sensor 520.
  • the magnetic field generation unit 530 operates, for example, to generate a feedback magnetic field B_FB whose direction is opposite to the magnetic field B input to the magnetic sensor 520 and whose absolute value is substantially the same as the input magnetic field, and cancels the input magnetic field.
  • the magnetic field generator 530 includes an amplifier circuit 532 and a coil 534.
  • the amplifying circuit 532 outputs a current corresponding to the detection result of the input magnetic field of the magnetic sensor 520 as a feedback current I_FB.
  • the magnetoresistive element included in the magnetic sensor 520 is configured by a bridge circuit including at least one magnetoresistive element
  • the output of the bridge circuit is connected to the input terminal pair of the amplifier circuit 532.
  • the amplifier circuit 532 outputs a current corresponding to the output of the bridge circuit as a feedback current I_FB.
  • the amplifier circuit 532 includes, for example, a transconductance amplifier, and outputs a feedback current I_FB corresponding to the output voltage of the magnetic sensor 520.
  • the feedback current I_FB can be calculated as G ⁇ S ⁇ B.
  • the coil 534 generates a feedback magnetic field B_FB according to the feedback current I_FB.
  • the coil 534 is wound so as to surround the magnetoresistive element of the magnetic sensor 520 and the magnetic flux concentrators disposed at both ends of the magnetoresistive element.
  • the coil 534 generates a uniform feedback magnetic field B_FB throughout the magnetic sensor 520.
  • the feedback magnetic field B_FB can be calculated as ⁇ ⁇ I_FB.
  • the feedback magnetic field B_FB is generated in a direction to cancel the input magnetic field B, the magnetic field input to the magnetic sensor 520 is reduced to BB_FB. Therefore, the feedback current I_FB is expressed by the following equation.
  • Equation (1) When the equation (1) is solved for the feedback current I_FB, the value of the feedback current I_FB in the steady state of the sensor unit 300 can be calculated. Assuming that the magnetic sensitivity S of the magnetic sensor 520 and the voltage / current conversion coefficient G of the amplifier circuit 532 are sufficiently large, the following equation is calculated from Equation (1).
  • the output unit 540 outputs an output signal V_xMR corresponding to the feedback current I_FB that is generated by the magnetic field generation unit 530 to generate the feedback magnetic field B_FB.
  • the output unit 540 includes, for example, a resistive element having a resistance value R, and outputs a voltage drop caused by the feedback current I_FB flowing through the resistive element as an output signal V_xMR.
  • the output signal V_xMR is calculated from Expression (2) as follows.
  • the sensor unit 300 since the sensor unit 300 generates the feedback magnetic field for reducing the magnetic field input from the outside, the magnetic field input to the magnetic sensor 520 is substantially reduced. Thereby, for example, the sensor unit 300 can use a magnetoresistive element having the characteristics shown in FIG. 4 as the magnetic sensor 520 and prevent the detection signal V_xMR from being saturated even when the absolute value of the input magnetic field B exceeds 1 ⁇ T. Next, the input / output characteristics of the sensor unit 300 will be described.
  • FIG. 6 shows an example of the input / output characteristics of the sensor unit 300 according to the present embodiment.
  • the horizontal axis indicates the magnitude B of the input magnetic field input to the sensor unit 300
  • the vertical axis indicates the magnitude V_xMR of the detection signal of the sensor unit 300.
  • the sensor unit 300 has high magnetic sensitivity and can detect a small magnetic field of about 10 pT.
  • the sensor unit 300 can keep good linearity of the detection signal V_xMR even when the absolute value of the input magnetic field B exceeds 100 ⁇ T, for example.
  • the detection result for the input magnetic field B has linearity in a predetermined range of the input magnetic field B such that the absolute value of the input magnetic field B is several hundred ⁇ T or less. It is configured as follows.
  • a weak magnetic signal such as a magnetocardiographic signal can be easily detected.
  • FIG. 7 shows a configuration example of the magnetic sensor 520 according to the present embodiment.
  • the magnetic sensor 520 according to the present embodiment includes a magnetoresistive element 702 and magnetic converging plates 704 and 706 disposed at one end and the other end of the magnetoresistive element 702.
  • the magnetic converging plates 704 and 706 are arranged so as to sandwich the magnetoresistive element 702 therebetween. That is, magnetic converging plates are arranged at both ends of the magnetoresistive element 702.
  • a magnetic convergence plate 704 disposed at the right end of the magnetoresistive element 702 along the magnetosensitive axis in a front view is a magnetic convergence plate provided on the positive side of the magnetosensitive axis.
  • the resistance of the magnetoresistive element 702 may increase or decrease.
  • the magnetosensitive axis may be along the direction of magnetization fixed by the magnetization fixed layer forming the magnetoresistive element 702.
  • the magnetic converging plates 704 and 706 are made of a soft magnetic material such as iron. By disposing the magnetic converging plates 704 and 706 made of a soft magnetic material at one end and the other end of the magnetoresistive element 702, the number of lines of magnetic force passing through the magnetoresistive element 702 can be increased. Sensitivity can be increased.
  • FIG. 2 shows an example in which the magnetic convergence plate is disposed at both one end and the other end of the magnetoresistive element 702, the magnetic convergence plate is provided at one of the one end and the other end of the magnetoresistive element 702. It may be provided only in the case. However, in order to further increase the sensitivity of the magnetic sensor 520, it is preferable to provide a magnetic converging plate at both one end and the other end of the magnetoresistive element 702.
  • the position of the magneto-resistive element 702 arranged in a narrow position between the two magnetic converging plates 704 and 706 is changed to a magnetic sensing part, That is, since it is a spatial sampling point, the magnetically sensitive part is clear, and the affinity with the signal space separation technology described later can be further improved.
  • the magnetic field measuring apparatus 10 according to the present embodiment is shown in FIG.
  • the spatial distribution of the magnetic field can be sampled at an extremely narrow position (for example, 100 ⁇ m or less) sandwiched between the magnetic converging plates at both ends, so that the SQUID coil ( ⁇ 2 cm) for measuring the biomagnetic field
  • the sampling accuracy is higher than when the spatial distribution of the magnetic field is sampled by using.
  • FIG. 8 shows a configuration of the magnetic sensor array 210, the sensor data collection unit 230, and the sensor data processing unit 800 according to the present embodiment.
  • the magnetic sensor array 210 has a plurality of magnetic sensor cells 220.
  • Each of the plurality of magnetic sensor cells 220 has the plurality of sensor units 300x to 300z as described above.
  • positions [i, j, k], [i + 1, j, k], [i, j + 1, k], and The part related to [i, j, k + 1] is shown.
  • the sensor data collection unit 230 has a plurality of AD converters 810 and clock generators 812.
  • the plurality of A / D converters 810 are provided corresponding to the plurality of sensor units 300x to 300z of the magnetic sensor cell 220, respectively, and the analog detection signal (the sensor output signal V_xMR in FIG. 6) output from the corresponding sensor unit 300 is provided.
  • Vx, Vy, and Vz are measured values (for example, representing digital voltage values) obtained by converting the detection signals from the sensor units 300x, 300y, and 300z into digital signals.
  • the clock generator 812 generates a sampling clock and supplies a common sampling clock to each of the plurality of AD converters 810. Then, each of the plurality of AD converters 810 performs AD conversion according to the common sampling clock supplied from the clock generator 812. Therefore, all of the plurality of AD converters 810 that perform AD conversion on the outputs of the three-axis sensor units 300x to 300z provided at different positions perform a synchronous operation. Thus, the plurality of AD converters 810 can simultaneously sample the detection results of the three-axis sensor units 300x to 300z provided in different spaces.
  • the sensor data processing unit 800 includes a plurality of magnetic field acquisition units 820, a plurality of calibration calculation units 830, a plurality of data output units 840, a base vector storage unit 850, and a signal provided for each of the plurality of magnetic sensor cells 220. It has a space separating section 860.
  • Sxx, Syy, and Szz represent sensitivities (principal axis sensitivities) of the sensor units 300x, 300y, and 300z in the principal axis direction, respectively.
  • Vos, x, Vos, y, and Vos, z represent offsets of the sensor units 300x, 300y, and 300z, respectively.
  • the main axis direction is a direction in which the sensor units 300x, 300y, and 300z mainly measure
  • the other axis direction is a direction in which they are not mainly measured.
  • the main axis direction is the direction (input axis direction, sensitivity axis direction) at which the magnetic sensor exhibits the maximum sensitivity when the magnetic field is input.
  • the other axis direction is an axis perpendicular to the main axis direction.
  • the main axis direction is the X axis
  • the other axis directions are the Y axis direction and the Z axis direction.
  • the magnetic sensor 520 has only the main axis sensitivity, but may have the other axis sensitivity due to process factors or the like. Further, the magnetic sensor 520 also has another axis sensitivity generated by the mutual interference described above.
  • each element of the matrix S Since each of the sensor units 300 has a linear detection result with respect to the input magnetic field in the range of the input magnetic field to be detected, each element of the matrix S has a substantially constant coefficient independent of the magnitude of the input magnetic field B. Become. Further, even if the sensor unit 300 has the other axis sensitivity, if the detection result of the sensor unit 300 has linearity, each element of the matrix S is substantially independent of the magnitude of the input magnetic field B. It becomes a constant coefficient.
  • the calibration calculation unit 830 in the present embodiment only needs to be able to calibrate the output from each magnetic sensor cell 220 as a component expressed as a coordinate system formed of three independent vectors. There is no need to correct for the three-axis components expressed as a coordinate system (so-called orthogonal coordinate system). That is, when all the magnetic sensor cells 220 are measuring the same magnetic field, the respective calibration calculation units 830 corresponding to the respective magnetic sensor cells 220 independently calculate the digital measurement data V from the corresponding magnetic field acquisition unit 820. It may be calibrated to the same magnetic field measurement data B expressed by three triaxial components.
  • the calibration calculation unit 830 calculates the inverse matrix S ⁇ 1 and the offset (Vos, x, Vos, y, Vos, z) of the matrix S using the environmental magnetic field measurement data, and calculates the magnetic field measurement acquired by the magnetic field acquisition unit 820.
  • the data is converted into magnetic field measurement data B using these calibration parameters and supplied to the data output unit 840.
  • the calibration calculation unit 830 can convert the measurement data into the magnetic field measurement data B using a substantially constant coefficient. That is, the substantially constant coefficient used by the calibration calculation unit 830 can be determined as a set of calibration parameters using the environmental magnetic field data.
  • the data output unit 840 supplies the magnetic field measurement data B calibrated by the calibration calculation unit 830 to the signal space separation unit 860.
  • the signal space separation unit 860 converts the spatial distribution of the magnetic field indicated by the magnetic field measurement data B supplied from the data output unit 840, that is, the magnetic field measurement data B obtained by calibrating the digital measurement data V, into the spatial distribution of the orthonormal function.
  • the signal vector output from each of the magnetic sensors 520 is separated as a base vector.
  • the signal space separation unit 860 acquires the basis vectors required for signal separation from the basis vector storage unit 850.
  • the signal space separation unit 860 uses the basis vectors acquired from the basis vector storage unit 850 to convert the spatial distribution of the magnetic field indicated by the magnetic field measurement data B into a measurement target magnetic field (signal source spatial signal) and a disturbance magnetic field (disturbance magnetic field).
  • a measurement target magnetic field signal source spatial signal
  • a disturbance magnetic field disturbance magnetic field
  • FIG. 9 shows a flow in which the magnetic field measurement apparatus 10 according to the present embodiment separates a signal of a spatial distribution of a magnetic field.
  • the basis vector storage unit 850 stores the basis vectors.
  • the basis vector storage unit 850 stores a signal vector output by each of the plurality of magnetic sensors 520 when the magnetic sensor array 210 detects a magnetic field having a spatial distribution of a spherical harmonic before measuring the magnetic field to be measured.
  • the basis vector storage unit 850 stores a magnetic field signal vector obtained by spatially sampling the spherical harmonic when a predetermined point in the space is designated as the coordinate origin, as a basis vector.
  • the basis vector storage unit 850 converts the magnetic field signal vector expressing the magnetic field of the space into two subspaces (signal source space and disturbance space) based on the series expansion of the spherical harmonic function of each magnetic sensor. It is calculated in advance from the position and the sensitivity vector by calculation, and stored as a base vector.
  • the spherical harmonic function is a function obtained by restricting a homogeneous polynomial that is a solution of the n-dimensional Laplace equation to a unit spherical surface, and has orthonormality on the spherical surface.
  • the basis vector storage unit 850 may store the basis vectors in advance before the flow for separating the spatial distribution of the magnetic field by the magnetic field measuring apparatus 10 into signals.
  • the base vector storage unit 850 may store a signal vector determined in advance based on a simulation result or the like as a base vector.
  • step 930 the signal space separation unit 860 acquires the signal vector stored as the base vector by the base vector storage unit 850 in step 910, from the base vector storage unit 850. Note that in this flow, either step 920 or step 930 may be performed first.
  • the signal space separation unit 860 performs a series expansion of the spatial distribution of the magnetic field indicated by the magnetic field measurement data B acquired in step 920 using the signal vector acquired in step 930 as a base vector. Then, the signal space separation unit 860 separates the spatial distribution of the magnetic field into a magnetic field to be measured (signal source space signal) and a disturbance magnetic field (disturbance space signal) from the vector obtained by the series expansion.
  • the orthonormal function may be a spherical harmonic function.
  • the signal space separation unit 860 calculates a series expansion coefficient of a base vector by a least squares method.
  • step 950 the signal space separation unit 860 calculates and outputs only the magnetic field to be measured by suppressing the disturbance magnetic field based on the result of the signal separation in step 940, and ends the process.
  • the signal space separation unit 860 calculates and outputs only the magnetic field to be measured by suppressing the disturbance magnetic field based on the result of the signal separation in step 940, and ends the process.
  • r is a position vector representing a position from the coordinate origin
  • ⁇ is Laplacian
  • ⁇ magnetic permeability
  • ⁇ is an operator representing a vector differentiation operation.
  • the solution of the Laplace equation is generally a spherical harmonic function Yl, m which is an orthonormal function system. Since it has a solution in the form of a series expansion using ( ⁇ , ⁇ ), the potential V (r) can be expressed by the following equation.
  • is an absolute value of the position vector r (distance from the coordinate origin)
  • ⁇ and ⁇ are two declinations in spherical coordinates
  • l is an azimuthal quantum number
  • m is a magnetic quantum number.
  • ⁇ and ⁇ are multipole moments
  • Lin and Lout are the numbers of the series in each of the space before and after the magnetic sensor array 210 as viewed from the subject.
  • the azimuth quantum number 1 takes a positive integer
  • the magnetic quantum number m takes an integer from ⁇ 1 to +1. That is, for example, when l is 1, m is -1, 0, and 1, and when l is 2, for example, m is -2, -1, 0, 1, and 2. Since there is no single magnetic pole in the magnetic field, the azimuth quantum number 1 starts from 1 instead of 0 in (Equation 7).
  • the first term in (Equation 7) is a term that is inversely proportional to the distance from the coordinate origin, and indicates the potential existing in the space before the magnetic sensor array 210 when viewed from the subject.
  • the second term in (Equation 7) is a term that is proportional to the distance from the coordinate origin, and indicates a potential existing in the space behind the magnetic sensor array 210 when viewed from the subject.
  • the values of al, m and bl, m calculated including the sensitivity in the main axis direction of the sensor units 300x, y, and z and the sensitivity correction in the other axis direction (corrected sensitivity vector) are stored in the base vector. It is stored in the unit 850.
  • the magnetic field measurement device 10 in which the base vector storage unit 850 stores the values of al, m and bl, m calculated including the correction of the magnetic sensitivity (main axis sensitivity and other axis sensitivity) during operation
  • the magnetic sensitivities (main axis sensitivity and other axis sensitivity) of each magnetic sensor cell 220 can be corrected.
  • the base vector storage unit 850 stores the default values of al, m, and bl, m in which the magnetic sensitivities (main axis sensitivities and other axis sensitivities) are not corrected (by the uncorrected sensitivity vectors).
  • the sensor output vector ⁇ output from each magnetic sensor cell 220 at a certain time can be expressed by the following equation.
  • the sensor output vector ⁇ can be expressed in the form of an inner product of the matrix S and the vertical vector X as shown in the following equation.
  • the matrix S indicates a basis vector, and is obtained, for example, from the basis vector storage unit 850 by the signal space separation unit 860 in step 930.
  • the vertical vector X indicates a coefficient relating to the base vector.
  • the vertical vector X to be satisfied is determined.
  • the signal space separation unit 860 may issue a warning that the measurement target magnetic field cannot be measured with high accuracy. Accordingly, the magnetic field measurement apparatus 10 measures the magnetic field to be measured in a situation such as when the apparatus is out of order or when there is a disturbance magnetic field that is too large to measure the magnetic field to be measured with high accuracy. Can be prevented in advance. In this case, the signal space separation unit 860 determines that the magnitude of the disturbance magnetic field exceeds the predetermined range when the magnitude of any of the components of SoutXout exceeds a predetermined threshold, for example. Alternatively, when the sum or average of the magnitudes of the components of SoutXout exceeds a predetermined threshold, it may be determined that the magnitude of the disturbance magnetic field exceeds a predetermined range.
  • the signal space separation unit 860 reduces the disturbance magnetic field component, that is, the result of suppressing the disturbance magnetic field component, that is, the component of the second term in (Equation 8), using the vertical vector determined in step 940. Output.
  • the signal space separation unit 860 may suppress the disturbance magnetic field component and output only the measurement target magnetic field component, that is, only the component of the first term in (Equation 8).
  • the magnetic sensor array 210 configured by three-dimensionally arranging the magnetic sensor cells 220 having the plurality of sensor units 300 capable of detecting a magnetic field in three axial directions is provided.
  • the spatial distribution of the magnetic field indicated by the magnetic field measurement data B measured using the signal can be separated into a measurement target magnetic field and a disturbance magnetic field. Further, since the magnetic field measurement device 10 outputs only the measurement target magnetic field component while suppressing the disturbance magnetic field component, the measurement target magnetic field can be measured with higher accuracy.
  • each of the plurality of sensor units 300 has a magnetic converging plate, the magnetic sensitivity of the sensor unit 300 can be increased, the spatial sampling points can be clarified, and the affinity with the signal space separation technology can be further improved. it can. Further, when the magnetic field measurement device 10 has the calibration calculation unit 830, highly accurate calibration (mismatch of the main axis sensitivity, other axis sensitivity, offset, etc.) can be realized, and the calibration error of the plurality of sensor units 300 is signaled. The magnetic field component to be measured can be taken out with higher accuracy because it can be reduced not at the spatial separation stage but at the preceding stage.
  • FIG. 10 shows an example in which the magnetic field measuring apparatus 10 according to the modification of the present embodiment measures a cardiac magnetic field using the magnetic sensor array 210 arranged in a curved surface.
  • the magnetic sensor array 210 includes a plurality of magnetic sensor cells 220 in each of the X, Y, and Z directions (for example, a total of 12 in the X direction, eight in the Y direction, and two in the Z direction). 192 magnetic sensor cells 220) are arranged in a curved shape. Each magnetic sensor cell 220 is arranged at a lattice point included in the curved surface shape in the three-dimensional lattice space.
  • the lattice points are lattice points provided at equal intervals at predetermined intervals in the X, Y, and Z directions.
  • each magnetic sensor cell 220 when viewed from any one of the X, Y, and Z directions, each magnetic sensor cell 220 is arranged along a curved surface having a protrusion in a direction orthogonal to the one direction.
  • the magnetic sensor cells 220 are arranged along a curved surface that is convex in the positive direction of the Z axis when viewed from the Y direction.
  • the magnetic sensor array 210 is arranged, for example, in the negative direction of the Z axis as much as possible within a range in which each vertex of each magnetic sensor cell 220 does not exceed a predetermined curved surface having a convex in the positive direction of the Z axis.
  • a curved surface shape having a protrusion in the positive direction of the Z axis may be formed.
  • the magnetic sensor array 210 since the magnetic sensor cells 220 are formed in a rectangular parallelepiped shape as an example, the shape of the magnetic sensor array 210 can be easily changed. That is, the magnetic sensor array 210 according to the present embodiment can adopt various shapes that can be configured by arranging the magnetic sensor cells 220 at the lattice points, and has a high degree of design freedom. Therefore, the magnetic sensor array 210 easily forms a curved surface shape in a three-dimensional space by arranging a plurality of magnetic sensor cells 220 at lattice points included in the curved surface shape in a three-dimensional space as shown in FIG. can do.
  • the magnetic field measuring apparatus 10 controls the magnetic sensor array 210 so that the chest of the subject is positioned on the center side of the curved surface, that is, the heart as the measurement target magnetic field source is positioned on the center side of the curved surface. And measure the magnetic field.
  • the magnetic field measurement apparatus 10 separates the measurement target magnetic field and the disturbance magnetic field with high accuracy by performing signal space separation using the magnetic field measurement data B measured at a position close to the heart which is the measurement target magnetic field source. Can be.
  • the magnetic sensor array 210 measures the magnetic field at a position closer to the heart, which is the magnetic field source to be measured, when the curvature of the curved surface is substantially equal to the curvature around the chest of the subject.
  • FIG. 11 shows an example in which the magnetic field measuring apparatus 10 according to the modification of the present embodiment measures a cardiac magnetic field using the magnetic sensor array 210 arranged in a closed curved shape.
  • the magnetic sensor array 210 includes a plurality of magnetic sensor cells 220 in each of the X, Y, and Z directions (for example, a total of 16 in the X direction, eight in the Y direction, and four in the Z direction). 512 magnetic sensor cells 220) are arranged in a closed curved shape. Each magnetic sensor cell 220 is arranged at a lattice point included in a closed curved surface shape in a three-dimensional lattice space.
  • the magnetic sensor array 210 has a curved surface having a protrusion in a direction orthogonal to one direction when viewed from any one of the X direction, the Y direction, and the Z direction, as in FIG. It has a plurality of magnetic sensor cells 220 arranged along.
  • the magnetic sensor array 210 further includes a plurality of magnetic sensor cells 220 arranged along a curved surface having a concave in a direction orthogonal to the one direction. Then, the magnetic sensor array 210 forms a closed curved surface shape by combining the curved surface shape with the convex and the curved surface shape with the concave.
  • the magnetic sensor array 210 when viewed from the Y direction, includes a plurality of magnetic sensor cells 220 arranged along a curved surface having a protrusion in the positive direction of the Z axis, and a positive electrode of the Z axis.
  • a closed curved surface shape by combining the curved surface shape having a convex shape and the concave shape having a concave shape in the positive direction of the Z axis.
  • the magnetic field measurement device 10 arranges the magnetic sensor array 210 so as to surround the chest of the subject with a closed curved surface, that is, surrounds the heart, which is the source of the magnetic field to be measured, with the closed curved surface. measure.
  • the magnetic field measuring apparatus 10 measures the magnetic field generated behind the subject in addition to the magnetic field generated in front of the subject due to the electrical activity of the heart, and uses the magnetic field measurement data B measured forward and backward.
  • the magnetic sensor array 210 can measure a magnetic field at a position closer to the heart, which is a magnetic field source, when the curvature of the curved surface is substantially equal to the curvature around the chest of the subject. ,preferable.
  • FIG. 10 shows a magnetic sensor array 210 curved in one direction.
  • the plurality of magnetic sensor cells 220 are arranged such that, when viewed in the XZ plane, the Z-axis coordinate increases in the positive direction as it goes toward the center of the magnetic sensor array 210 in the X-axis direction.
  • the magnetic sensor array 210 has a convex shape in the positive direction of the Z axis.
  • the magnetic sensor array 210 has a curved shape curved at least in one direction, and the curved shape is formed in a substantially parabolic shape.
  • the case where the Z-axis coordinates of the plurality of magnetic sensor cells 220 along the Y-axis direction are all equal is shown as an example, but the Z-axis coordinates of the plurality of magnetic sensor cells 220 along the Y-axis direction are shown. At least some may be different.
  • FIG. 2B shows an example in which the plurality of magnetic sensor cells 220 are arranged symmetrically with respect to the center of the magnetic sensor array 210 in the X-axis direction when viewed on the XZ plane.
  • the present invention is not limited to this.
  • At least a part of the Z-axis coordinates of the plurality of magnetic sensor cells 220 that are paired in the X-axis direction, for example, the plurality of magnetic sensor cells 220 disposed at both ends in the X-axis direction, may be different.
  • the plurality of magnetic sensor cells 220 show, as an example, the case where the Y-axis coordinates of the plurality of magnetic sensor cells 220 along the X-axis direction are all equal when viewed in the XY plane.
  • at least a part of the Y-axis coordinates of the plurality of magnetic sensor cells 220 along the X-axis direction may be different.
  • FIG. 11C shows a cylindrical type shown in FIG. 11, in which one sensor cell group in which magnetic sensor cells 220 are arranged in a row of eight (in the y-axis direction) ⁇ one in height (in the z-axis direction). Eight sensor groups are arranged so as to draw an ellipse in the XZ plane, and two sensor groups curved in at least one direction (in this case, magnetic sensor arrays curved by four sensor groups) are symmetrical. 3 shows a magnetic sensor array 210 arranged in an annular shape.
  • (2b) in the figure is a magnetic sensor array 210 in which (b) is arranged in two stages in the Z-axis direction, that is, eight vertical (x-axis) ⁇ eight (y-axis) ⁇ two heights ( 7 shows a magnetic sensor array 210 in which components arranged in the z-axis direction) are curved in at least one direction.
  • the term “tier” refers to a layout in which the magnetic sensor cells 220 are arranged in a hierarchical structure in a direction away from the curved surface covering the signal source space, and is a method of counting and calling the hierarchy.
  • the origin of the cylindrical type in (c) is such that the center in the XY direction of the magnetic sensor array 210 is the XY plane coordinates, and the center when the outer shape of the magnetic sensor array 210 viewed from the Y direction is approximated by a circle is the XZ plane. They are arranged as coordinates.
  • FIGS. 10 and 11 are superior to the example of FIG. 2 of this embodiment in attenuating the disturbance magnetic field. Therefore, in order to observe a cardiac magnetic field without being affected by a disturbance magnetic field, it is preferable that the magnetic sensor cells are arranged along a curved surface as shown in FIGS. This is because the curved shape is easier to approximate the magnetic field expressed by (Equation 8) than the plate type. The noise of the sensor is also likely to be regarded as disturbance for the same reason, and is reduced. Also, in the curved type shown in FIG.
  • the disturbance attenuation rate is better in the two-stage configuration in which two magnetic sensor cells are arranged than in the one-stage configuration in which one magnetic sensor cell is arranged in the Z-axis direction. Understand. This is because, in the case of a two-stage configuration, a detailed change in the magnetic field can be easily detected. Further, in the case of the two-stage configuration, a change in the magnetic field in the Z-axis direction can be observed, so that a three-dimensional observation of the cardiac magnetic field is possible, which is preferable. Further, a configuration having two or more stages in which the number of stages is further increased may be adopted.
  • FIG. 13 shows an example in which the magnetic field measuring apparatus 10 according to the modification of the present embodiment measures a cardiac magnetic field using the magnetic shield 1200.
  • the magnetic field measuring apparatus 10 uses the magnetic shield 1200 when measuring a cardiac magnetic field.
  • the magnetic shield 1200 is made of a material having a high magnetic permeability such as permalloy (an alloy of Ni—Fe) or mu metal (an alloy of permalloy with Cu or Cr).
  • the magnetic shield 1200 is formed in a hollow cylindrical shape, and is arranged so as to surround the subject's chest and the magnetic sensor array 210 such that the subject's chest and the magnetic sensor array 210 are located in the hollow space.
  • the chest of the subject where the magnetic field source (heart) to be measured exists is the magnetic field source space
  • the space outside the magnetic field source space and surrounded by the inner wall of the magnetic shield 1200 is the shield space
  • the outer wall of the magnetic shield 1200 The outer space is an external space.
  • the magnetic sensor array 210 is located in the shield space.
  • the magnetic shield 1200 is formed of the high magnetic permeability material as described above, and applies a disturbance magnetic field (including terrestrial magnetism) coming from an external space along the surface of the magnetic shield 1200 to absorb magnetic flux well. Can be distributed. Accordingly, the magnetic shield 1200 can significantly reduce a disturbance magnetic field (including geomagnetism) entering the shield space and prevent the spatial distribution of the magnetic field in the shield space from becoming complicated. Can be.
  • the magnetic field measuring apparatus 10 can separate the magnetic field to be measured from the magnetic field to be measured with higher accuracy because the magnetic field for disturbance is reduced and simplified in performing signal space separation. .
  • the magnetic shield 1200 is used when the magnetic field measurement apparatus 10 measures the cardiac magnetic field using the magnetic sensor array 210 arranged in a plane.
  • the magnetic field measuring apparatus 10 also measures the magnetocardiogram using the magnetic sensor array 210 arranged on a curved surface as shown in FIG. 10 and a closed curved surface as shown in FIG.
  • the magnetic shield 1200 can be used.
  • FIG. 14 shows a modification of the magnetic sensor array 210 according to the present embodiment.
  • members having the same functions and configurations as those in FIG. 3 are denoted by the same reference numerals, and description thereof will be omitted except for differences.
  • each of the plurality of magnetic sensor cells 220 included in the magnetic sensor array 210 is provided with the sensor units 300x, 300y, and 300z without providing a gap at a corner.
  • the respective sensor units 300x, 300y, and 300z have three-dimensional directions of the X axis, the Y axis, and the Z axis. Can be arranged so that they do not overlap with each other.
  • the plurality of sensor units 300x, 300y, and 300z can be dispersedly arranged in the magnetic sensor cell 220, and the plurality of sensor units 300x, 300y, and 300z can be provided at one corner. It can be prevented from being arranged in a concentrated manner.
  • the magnetic field measurement device 10 of the present embodiment may acquire measurement data using the magnetic sensor array 210 in which the sensor unit 300 is arranged as described above.
  • Various embodiments of the present invention may be described with reference to flowcharts and block diagrams, wherein blocks represent (1) steps in a process in which an operation is performed or (2) devices responsible for performing an operation. Section. Certain stages and sections are implemented by dedicated circuitry, programmable circuitry provided with computer readable instructions stored on computer readable media, and / or processors provided with computer readable instructions stored on computer readable media. May be.
  • Dedicated circuits may include digital and / or analog hardware circuits, and may include integrated circuits (ICs) and / or discrete circuits.
  • Programmable circuits include logical AND, logical OR, logical XOR, logical NAND, logical NOR, and other logical operations, memory elements such as flip-flops, registers, field programmable gate arrays (FPGAs), programmable logic arrays (PLAs), etc. And the like, and may include reconfigurable hardware circuits.
  • Computer readable media may include any tangible device capable of storing instructions for execution by a suitable device, such that computer readable media having instructions stored thereon is specified in a flowchart or block diagram.
  • Product comprising instructions that can be executed to create a means for performing the specified operation.
  • Examples of the computer readable medium may include an electronic storage medium, a magnetic storage medium, an optical storage medium, an electromagnetic storage medium, a semiconductor storage medium, and the like.
  • Computer readable media include floppy disks, diskettes, hard disks, random access memory (RAM), read only memory (ROM), erasable programmable read only memory (EPROM or flash memory), Electrically erasable programmable read only memory (EEPROM), static random access memory (SRAM), compact disk read only memory (CD-ROM), digital versatile disk (DVD), Blu-ray (RTM) disk, memory stick, integrated A circuit card or the like may be included.
  • RAM random access memory
  • ROM read only memory
  • EPROM or flash memory erasable programmable read only memory
  • EEPROM Electrically erasable programmable read only memory
  • SRAM static random access memory
  • CD-ROM compact disk read only memory
  • DVD digital versatile disk
  • Blu-ray (RTM) disk memory stick, integrated A circuit card or the like may be included.
  • the computer readable instructions may be assembler instructions, instruction set architecture (ISA) instructions, machine instructions, machine dependent instructions, microcode, firmware instructions, state setting data, or object oriented programming such as Smalltalk, JAVA, C ++, etc. Language, and any source or object code written in any combination of one or more programming languages, including conventional procedural programming languages, such as the "C" programming language or similar programming languages. Good.
  • the computer readable instructions may be directed to a general purpose computer, special purpose computer, or other programmable data processing device processor or programmable circuit, either locally or over a wide area network (WAN) such as a local area network (LAN), the Internet, or the like. ) May be executed to create means for performing the operations specified in the flowcharts or block diagrams.
  • WAN wide area network
  • LAN local area network
  • processors include computer processors, processing units, microprocessors, digital signal processors, controllers, microcontrollers, and the like.
  • FIG. 15 illustrates an example of a computer 2200 in which aspects of the present invention may be wholly or partially implemented.
  • the programs installed on the computer 2200 can cause the computer 2200 to function as one or more sections of the operation associated with the device according to the embodiment of the present invention or the one or more sections of the device. Sections may be executed and / or computer 2200 may execute a process or a step of the process according to an embodiment of the present invention.
  • Such programs may be executed by CPU 2212 to cause computer 2200 to perform certain operations associated with some or all of the blocks in the flowcharts and block diagrams described herein.
  • the computer 2200 includes a CPU 2212, a RAM 2214, a graphic controller 2216, and a display device 2218, which are interconnected by a host controller 2210.
  • Computer 2200 also includes input / output units such as a communication interface 2222, a hard disk drive 2224, a DVD-ROM drive 2226, and an IC card drive, which are connected to a host controller 2210 via an input / output controller 2220.
  • input / output units such as a communication interface 2222, a hard disk drive 2224, a DVD-ROM drive 2226, and an IC card drive, which are connected to a host controller 2210 via an input / output controller 2220.
  • the computer also includes legacy input / output units, such as a ROM 2230 and a keyboard 2242, which are connected to an input / output controller 2220 via an input / output chip 2240.
  • the CPU 2212 operates according to programs stored in the ROM 2230 and the RAM 2214, and controls each unit.
  • the graphic controller 2216 obtains the image data generated by the CPU 2212 in a frame buffer or the like provided in the RAM 2214 or in itself, and causes the image data to be displayed on the display device 2218.
  • the communication interface 2222 communicates with other electronic devices via a network.
  • Hard disk drive 2224 stores programs and data used by CPU 2212 in computer 2200.
  • the DVD-ROM drive 2226 reads a program or data from the DVD-ROM 2201 and provides the hard disk drive 2224 with the program or data via the RAM 2214.
  • the IC card drive reads programs and data from the IC card and / or writes programs and data to the IC card.
  • the ROM 2230 stores therein a boot program executed by the computer 2200 at the time of activation and / or a program depending on hardware of the computer 2200.
  • Input / output chip 2240 may also connect various input / output units to input / output controller 2220 via parallel ports, serial ports, keyboard ports, mouse ports, and the like.
  • the program is provided by a computer-readable medium such as a DVD-ROM 2201 or an IC card.
  • the program is read from a computer-readable medium, installed in a hard disk drive 2224, a RAM 2214, or a ROM 2230, which is an example of the computer-readable medium, and executed by the CPU 2212.
  • the information processing described in these programs is read by the computer 2200 and provides a link between the programs and the various types of hardware resources described above.
  • An apparatus or method may be configured for implementing manipulation or processing of information in accordance with use of computer 2200.
  • the CPU 2212 executes the communication program loaded in the RAM 2214, and performs communication processing with the communication interface 2222 based on the processing described in the communication program. You may order.
  • the communication interface 2222 reads transmission data stored in a transmission buffer processing area provided in a recording medium such as a RAM 2214, a hard disk drive 2224, a DVD-ROM 2201, or an IC card under the control of the CPU 2212, and reads the read transmission.
  • the data is transmitted to the network, or the received data received from the network is written in a reception buffer processing area provided on a recording medium.
  • the CPU 2212 causes the RAM 2214 to read all or a necessary part of a file or a database stored in an external recording medium such as a hard disk drive 2224, a DVD-ROM drive 2226 (DVD-ROM 2201), an IC card, and the like. Various types of processing may be performed on the data on RAM 2214. Next, the CPU 2212 writes back the processed data to the external recording medium.
  • an external recording medium such as a hard disk drive 2224, a DVD-ROM drive 2226 (DVD-ROM 2201), an IC card, and the like.
  • Various types of processing may be performed on the data on RAM 2214.
  • the CPU 2212 writes back the processed data to the external recording medium.
  • the CPU 2212 performs various types of operations, information processing, condition determination, conditional branching, unconditional branching, and information retrieval described in various places in the present disclosure and specified by the instruction sequence of the program, on the data read from the RAM 2214. Various types of processing may be performed, including / replace, and the results are written back to RAM 2214. In addition, the CPU 2212 may search for information in a file, a database, or the like in the recording medium.
  • the CPU 2212 specifies the attribute value of the first attribute. Searching for an entry matching the condition from the plurality of entries, reading an attribute value of a second attribute stored in the entry, and associating the attribute value with a first attribute satisfying a predetermined condition.
  • the attribute value of the obtained second attribute may be obtained.
  • the programs or software modules described above may be stored on or near computer 2200 in a computer-readable medium.
  • a recording medium such as a hard disk or a RAM provided in a server system connected to a dedicated communication network or the Internet can be used as a computer-readable medium, thereby providing a program to the computer 2200 via the network. I do.
  • Reference Signs List 10 magnetic field measuring device 100 main body unit 110 magnetic sensor unit 120 head 125 driving unit 130 base unit 140 pole unit 150 information processing unit 210 magnetic sensor array 220 magnetic sensor cell 230 sensor data collection unit 300 sensor unit 520 magnetic sensor 530 magnetic field generation unit 532 amplification Circuit 534 Coil 540 Output unit 702 Magnetic resistance element 704, 706 Magnetic convergence plate 800 Sensor data processing unit 810 AD converter 812 Clock generator 820 Magnetic field acquisition unit 830 Calibration calculation unit 840 Data output unit 850 Base vector storage unit 860 Signal space separation Part 1200 magnetic shield 2200 computer 2201 DVD-ROM 2210 Host controller 2212 CPU 2214 RAM 2216 Graphic controller 2218 Display device 2220 Input / output controller 2222 Communication interface 2224 Hard disk drive 2226 DVD-ROM drive 2230 ROM 2240 input / output chip 2242 keyboard

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2020241465A1 (enExample) * 2019-05-31 2020-12-03
JP2021177159A (ja) * 2020-05-08 2021-11-11 旭化成エレクトロニクス株式会社 磁場計測装置、磁場計測方法、および、磁場計測プログラム

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20190377035A1 (en) * 2018-06-08 2019-12-12 Asahi Kasei Microdevices Corporation Magnetic field measurement apparatus, magnetic field measurement method, and storage medium with magnetic field measurement program stored thereon
WO2020040168A1 (ja) 2018-08-22 2020-02-27 旭化成エレクトロニクス株式会社 磁場計測装置、磁場計測方法、磁場計測プログラム
JP6936405B2 (ja) 2018-12-26 2021-09-15 旭化成エレクトロニクス株式会社 磁場計測装置
US11585869B2 (en) * 2019-02-08 2023-02-21 Genetesis, Inc. Biomagnetic field sensor systems and methods for diagnostic evaluation of cardiac conditions
US11454679B2 (en) 2020-01-20 2022-09-27 Asahi Kasei Microdevices Corporation Magnetic field measuring apparatus, magnetic field measuring method and recording medium with magnetic field measuring program recorded thereon
JP7468178B2 (ja) * 2020-06-17 2024-04-16 Tdk株式会社 磁気センサアレイ
JP7626622B2 (ja) 2021-01-20 2025-02-04 旭化成エレクトロニクス株式会社 磁場計測装置、磁場計測方法、磁場計測プログラム
CN114924214B (zh) * 2022-05-24 2025-06-20 北京航空航天大学 一种矢量磁场计算方法、系统及设备
DE102022209446A1 (de) * 2022-09-09 2024-03-14 Robert Bosch Gesellschaft mit beschränkter Haftung Verfahren und Einrichtung zur Bestimmung von Kardiogrammsignalen einer oder mehrerer Personen
US12303273B2 (en) 2023-03-17 2025-05-20 SB Technology, Inc. Signal processing methods and systems for biomagnetic field imaging
JP2024135308A (ja) * 2023-03-22 2024-10-04 Tdk株式会社 情報処理装置、情報処理システム、情報処理方法およびプログラム
CN118553344B (zh) * 2024-03-22 2024-11-01 江苏南方永磁科技有限公司 一种用于铁磁性材料的弱磁信号识别方法及系统
CN118806282A (zh) * 2024-06-24 2024-10-22 北京航空航天大学 基于信号空间分离的心磁信号处理方法、设备和介质

Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003046587A1 (fr) * 2001-11-28 2003-06-05 Chikayoshi Sumi Procede d'estimation de la conductivite ou de la permittivite, procede d'estimation de vecteur densite de courant et appareil mettant en oeuvre lesdits procedes
JP2004337478A (ja) * 2003-05-19 2004-12-02 Hitachi Ltd 磁場計測装置
JP2006047080A (ja) * 2004-08-04 2006-02-16 Advanced Telecommunication Research Institute International 磁気センサ
JP2011220977A (ja) * 2010-04-14 2011-11-04 Fujikura Ltd 磁場検出装置
US20120041297A1 (en) * 2009-02-06 2012-02-16 Baylor College Of Medicine Real-time magnetic dipole detection and tracking
US20120105058A1 (en) * 2010-10-29 2012-05-03 Iakov Veniaminovitch Kopelevitch Magnetic field sensing
JP5014783B2 (ja) * 2003-03-14 2012-08-29 エレクタ エイビー（ピーユービーエル） 磁場のマルチチャネル測定値を処理するための方法とデバイス
JP2017062122A (ja) * 2015-09-23 2017-03-30 国立大学法人名古屋大学 磁界検出装置
JP2017133993A (ja) * 2016-01-29 2017-08-03 株式会社アドバンテスト 磁気ノイズ消去装置及び磁場測定装置
JP2017133889A (ja) * 2016-01-26 2017-08-03 株式会社東芝 磁気センサおよび磁気センサ装置
JP2018007821A (ja) * 2016-07-13 2018-01-18 株式会社アドバンテスト 磁場測定装置及び磁場測定方法

Family Cites Families (104)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6153387A (ja) 1984-08-22 1986-03-17 Nippon Sheet Glass Co Ltd フオトクロミツク材料
JPH06103340B2 (ja) 1988-02-01 1994-12-14 シャープ株式会社 磁気センサ
JPH06103339B2 (ja) 1989-12-28 1994-12-14 株式会社ミシマタイムインダストリー 磁場測定器
JPH05232202A (ja) 1992-02-25 1993-09-07 Fujitsu Ltd ソフトウェアグラディオメータ
US5642045A (en) 1995-08-18 1997-06-24 International Business Machines Corporation Magnetic field gradiometer with improved correction circuits
JPH09127252A (ja) 1995-10-26 1997-05-16 Kokusai Denshin Denwa Co Ltd <Kdd> 海底ケーブル探査システム
JPH09243725A (ja) 1996-03-06 1997-09-19 Kanazawa Kogyo Univ 磁気分布測定方法，磁気分布測定装置および磁気検出器板
JP3518493B2 (ja) 1997-03-07 2004-04-12 株式会社日立製作所 生体磁場の等積分図の算出方法
US5990679A (en) 1997-10-22 1999-11-23 The United States Of America As Represented By The Secretary Of The Navy Method using corrective factors for determining a magnetic gradient
JP4077945B2 (ja) 1998-08-11 2008-04-23 株式会社東芝 生体磁気計測装置
JP3563624B2 (ja) 1999-02-02 2004-09-08 株式会社日立製作所 生体磁場計測装置
JP4427122B2 (ja) 1999-03-30 2010-03-03 株式会社東芝 Ｓｑｕｉｄ磁束計
JP2001083224A (ja) 1999-09-16 2001-03-30 Ddi Corp 磁界測定方法および装置
US6376933B1 (en) 1999-12-31 2002-04-23 Honeywell International Inc. Magneto-resistive signal isolator
US6480111B2 (en) 2000-01-10 2002-11-12 Southwest Research Institute Motion detection for physiological applications
JP3406273B2 (ja) 2000-03-28 2003-05-12 株式会社エムティアイ 外乱磁界キャンセル装置
JP2002272695A (ja) 2001-03-14 2002-09-24 Ryuzo Ueda 汎用性を有する高感度磁気検出装置
JP3925301B2 (ja) 2001-07-12 2007-06-06 コニカミノルタセンシング株式会社 分光特性測定装置および同装置の分光感度の波長シフト補正方法
JP4460808B2 (ja) 2001-09-07 2010-05-12 親良 炭 電流密度ベクトル推定装置および電気導電率推定装置
DE02775480T1 (de) 2001-11-01 2005-08-18 Sentron Ag Stromsensor und stromsensor herstellungsverfahren
EP1535305A2 (en) 2002-08-16 2005-06-01 Brown University Research Foundation Scanning magnetic microscope having improved magnetic sensor
US7259545B2 (en) 2003-02-11 2007-08-21 Allegro Microsystems, Inc. Integrated sensor
JP2004271303A (ja) 2003-03-07 2004-09-30 Hitachi Metals Ltd 磁気測定装置およびそれを用いた地下掘削体の位置検出装置
JP4263544B2 (ja) 2003-06-23 2009-05-13 株式会社日立ハイテクノロジーズ 磁場計測装置
JP4287905B2 (ja) 2003-07-31 2009-07-01 光照 木村 半導体磁気センサとこれを用いた磁気計測装置
FI115737B (fi) 2003-09-26 2005-06-30 Elekta Neuromag Oy Menetelmä monikanavaisen mittaussignaalin käyttämiseksi lähdemallinnuksessa
FR2860879B1 (fr) 2003-10-08 2006-02-03 Centre Nat Etd Spatiales Sonde de mesure d'un champ magnetique.
JP4638670B2 (ja) 2003-12-26 2011-02-23 旭化成エレクトロニクス株式会社 方位角計測方法および方位角計測装置
FI115736B (fi) 2004-01-19 2005-06-30 Elekta Neuromag Oy Menetelmä AC- ja DC-lähteiden aiheuttamien monikanavasignaalien erottamiseksi toisistaan
JP2005217341A (ja) 2004-02-02 2005-08-11 Kri Inc 環境磁気雑音遮蔽装置
FI118577B (fi) 2004-02-13 2007-12-31 Elekta Ab Menetelmä mittalaitteen suojaamiseksi häiriöiltä
US6841994B1 (en) 2004-03-01 2005-01-11 The United States Of America As Represented By The Secretary Of The Navy Magnetic anomaly sensing system for detection, localization and classification of magnetic objects
JP4110108B2 (ja) 2004-03-26 2008-07-02 株式会社日立ハイテクノロジーズ 生体磁場計測装置，生体磁場計測のための水平位置設定方法
JP4521239B2 (ja) 2004-09-10 2010-08-11 株式会社日立ハイテクノロジーズ 磁場遮蔽装置及び生体磁場計測装置
EP1795864A4 (en) 2004-09-29 2011-11-02 Amosense Co Ltd MAGNETIC SENSOR CONTROL METHOD, MAGNETIC SENSOR CONTROL MODULE, AND PORTABLE TERMINAL DEVICE
FI119133B (fi) 2005-04-28 2008-07-31 Elekta Ab Menetelmä ja laite häiriön poistamiseksi sähkömagneettisesta monikanavamittauksesta
JP2008032562A (ja) 2006-07-28 2008-02-14 Ntn Corp 回転検出装置および回転検出装置付き軸受
JP4222520B2 (ja) 2006-04-17 2009-02-12 防衛省技術研究本部長 勾配型磁力計の調整方法
US7342399B1 (en) 2006-04-17 2008-03-11 The United States Of America As Represented By The Secretary Of The Navy Magnetic anomaly sensing-based system for tracking a moving magnetic target
JP2008142154A (ja) 2006-12-07 2008-06-26 Hitachi High-Technologies Corp 生体磁場計測装置および生体モデルへの平行投影方法
JP5361131B2 (ja) 2007-01-03 2013-12-04 エレクタ アクチボラゲット 直交仮想チャネルを使用したマルチチャネル測定データの分析
WO2008096856A1 (ja) 2007-02-09 2008-08-14 Asahi Kasei Emd Corporation 空間情報検出システム及びその検出方法並びに空間情報検出装置
US7603251B1 (en) 2008-06-23 2009-10-13 The United States Of America As Represented By The Secretary Of The Navy Magnetic anomaly sensing system for detection, localization and classification of a magnetic object in a cluttered field of magnetic anomalies
JP5365367B2 (ja) 2009-06-24 2013-12-11 セイコーエプソン株式会社 磁気センサー
JP5083837B2 (ja) 2009-08-28 2012-11-28 防衛省技術研究本部長 磁気測定システム
US8390283B2 (en) 2009-09-25 2013-03-05 Everspin Technologies, Inc. Three axis magnetic field sensor
FI124427B (fi) 2010-07-06 2014-08-29 Elekta Ab Menetelmä häiriöavaruuden tarkentamiseksi biomagneettisissa kenttämittauksissa
WO2012032962A1 (ja) 2010-09-10 2012-03-15 コニカミノルタオプト株式会社 生体磁気計測装置、生体磁気計測システム、及び、生体磁気計測方法
JP5712640B2 (ja) 2011-01-28 2015-05-07 コニカミノルタ株式会社 磁気計測装置および生体磁気計測方法
JP5541179B2 (ja) 2011-01-28 2014-07-09 コニカミノルタ株式会社 磁気センサおよびそれを用いる生体磁気計測装置
JP2013015351A (ja) * 2011-07-01 2013-01-24 Shinshu Univ 磁界検出装置、及び環境磁界のキャンセル方法
DE102011083961B4 (de) 2011-10-04 2023-12-21 Robert Bosch Gmbh Verfahren zum Kalibrieren eines dreiachsigen Sensors und Sensor
JP2013124873A (ja) 2011-12-13 2013-06-24 Seiko Epson Corp 磁場測定装置及びセルアレイ
FI125397B (en) 2012-01-24 2015-09-30 Elekta Ab A method for using spatial and temporal oversampling in multichannel measurements
US9201122B2 (en) 2012-02-16 2015-12-01 Allegro Microsystems, Llc Circuits and methods using adjustable feedback for self-calibrating or self-testing a magnetic field sensor with an adjustable time constant
JP2013217690A (ja) 2012-04-05 2013-10-24 Seiko Epson Corp 磁場補正装置及び磁場測定装置
DE112012006859B4 (de) 2012-08-31 2021-12-30 Hitachi, Ltd. Magnetoresistiver Sensor und Gradiometer
US9864019B2 (en) 2012-10-24 2018-01-09 Cae Inc. Magnetic sensor system
JP2014134388A (ja) 2013-01-08 2014-07-24 Shimadzu Corp 磁気測定装置
JP5924695B2 (ja) 2013-02-04 2016-05-25 三菱電機株式会社 磁界検出装置、電流検出装置、半導体集積回路、および、磁界検出方法
JP6021239B2 (ja) 2013-02-13 2016-11-09 マグネデザイン株式会社 ３次元磁界検出素子および３次元磁界検出装置
US20140257104A1 (en) 2013-03-05 2014-09-11 Ezono Ag Method and system for ultrasound imaging
US9488700B2 (en) 2013-09-12 2016-11-08 Infineon Technologies Ag Magnetic field sensors and systems with sensor circuit portions having different bias voltages and frequency ranges
JP2015075465A (ja) 2013-10-11 2015-04-20 旭化成エレクトロニクス株式会社 ３次元磁界測定装置及び３次元磁界測定方法
JP2015102512A (ja) 2013-11-27 2015-06-04 愛知製鋼株式会社 磁場発生装置およびオフセット算出方法
JP2017026312A (ja) 2013-12-02 2017-02-02 コニカミノルタ株式会社 三次元磁気センサー
CA2934516C (en) 2013-12-18 2022-06-21 Bench Tree Group, Llc System and method of directional sensor calibration
US9507005B2 (en) 2014-03-05 2016-11-29 Infineon Technologies Ag Device and current sensor for providing information indicating a safe operation of the device of the current sensor
JP2015219061A (ja) 2014-05-15 2015-12-07 Tdk株式会社 磁界検出センサ及びそれを用いた磁界検出装置
JP6210458B2 (ja) 2014-07-30 2017-10-11 パナソニックＩｐマネジメント株式会社 故障検知システム及び故障検知方法
US10466071B2 (en) 2014-08-06 2019-11-05 Infineon Technologies Ag True-phase two-dimensional magnetic field sensor
JP6267613B2 (ja) 2014-09-25 2018-01-24 アルプス電気株式会社 磁気センサおよびその磁気センサを備えた電流センサ
JP6494269B2 (ja) 2014-12-17 2019-04-03 ルネサスエレクトロニクス株式会社 磁気計測装置
JP2016183944A (ja) 2015-03-27 2016-10-20 旭化成エレクトロニクス株式会社 磁場検出方法、磁気センサ及び生体磁気センサ
JP6530245B2 (ja) 2015-06-05 2019-06-12 旭化成エレクトロニクス株式会社 検出装置、磁気センサ、検出方法、およびプログラム
JP2017000354A (ja) 2015-06-09 2017-01-05 セイコーエプソン株式会社 磁場計測装置および磁場計測方法
JP6638582B2 (ja) 2015-09-10 2020-01-29 株式会社リコー 磁気計測装置
US20170090003A1 (en) 2015-09-30 2017-03-30 Apple Inc. Efficient testing of magnetometer sensor assemblies
JP6766333B2 (ja) * 2015-10-06 2020-10-14 愛知製鋼株式会社 微小磁性体検知センサおよび異物検知装置
JP6021238B1 (ja) 2015-10-11 2016-11-09 マグネデザイン株式会社 グラジオセンサ素子およびグラジオセンサ
JP6595923B2 (ja) 2016-01-28 2019-10-23 株式会社ゼンリンデータコム 位置管理システム及び位置管理方法
DE102016203255A1 (de) 2016-02-29 2017-08-31 Siemens Healthcare Gmbh Verfahren und Vorrichtung zur Positionsbestimmung in einem Magnetresonanztomographen
JP2017166921A (ja) 2016-03-15 2017-09-21 株式会社東芝 磁気センサおよび磁気センサ装置
JP2017191039A (ja) 2016-04-14 2017-10-19 セイコーエプソン株式会社 磁場計測装置及び磁場計測装置の校正方法
JP2017191040A (ja) 2016-04-14 2017-10-19 セイコーエプソン株式会社 磁場計測装置及び磁場計測方法
EP3448250B1 (en) 2016-04-25 2020-07-29 Creavo Medical Technologies Limited Magnetometer for medical use
WO2017204151A1 (ja) 2016-05-24 2017-11-30 Tdk株式会社 磁気センサ
WO2017205734A1 (en) 2016-05-26 2017-11-30 University Of Washington Reducing sensor noise in multichannel arrays using oversampled temporal projection and associated systems and methods
CN109414212B (zh) 2016-06-03 2023-03-21 国立大学法人东京医科齿科大学 生物磁测量装置
JP6822127B2 (ja) 2016-06-23 2021-01-27 Tdk株式会社 磁気センサ
JP2018004286A (ja) 2016-06-28 2018-01-11 株式会社リコー 信号処理装置、信号処理方法、信号処理プログラム、及び磁場計測システム
JP2018054461A (ja) 2016-09-29 2018-04-05 大同特殊鋼株式会社 ３軸磁気センサ、連結モジュール、及びセンサプローブ
US10155154B2 (en) 2017-01-10 2018-12-18 Sony Interactive Entertainment Inc. Variable magnetic field-based position
US11047931B2 (en) 2017-04-11 2021-06-29 Apple Inc. Magnetic field sensor array with electromagnetic interference cancellation
US10324141B2 (en) 2017-05-26 2019-06-18 Allegro Microsystems, Llc Packages for coil actuated position sensors
FR3069329B1 (fr) 2017-07-21 2019-08-23 Sysnav Procede et dispositif de mesure du champ magnetique par des magnetometres
US10718825B2 (en) 2017-09-13 2020-07-21 Nxp B.V. Stray magnetic field robust magnetic field sensor and system
CN111527415A (zh) 2017-12-27 2020-08-11 旭化成微电子株式会社 磁传感器模块
US10509082B2 (en) 2018-02-08 2019-12-17 Nxp B.V. Magnetoresistive sensor systems with stray field cancellation utilizing auxiliary sensor signals
US20190298202A1 (en) 2018-03-28 2019-10-03 Asahi Kasei Microdevices Corporation Magnetocardiographic measurement apparatus, calibration method, and recording medium having recorded thereon calibration program
WO2020040168A1 (ja) 2018-08-22 2020-02-27 旭化成エレクトロニクス株式会社 磁場計測装置、磁場計測方法、磁場計測プログラム
JP6936405B2 (ja) 2018-12-26 2021-09-15 旭化成エレクトロニクス株式会社 磁場計測装置
JP7365915B2 (ja) 2019-03-08 2023-10-20 旭化成エレクトロニクス株式会社 測定装置
CN113874742B (zh) 2019-05-31 2024-12-06 旭化成株式会社 测量装置、测量方法以及计算机可读介质

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003046587A1 (fr) * 2001-11-28 2003-06-05 Chikayoshi Sumi Procede d'estimation de la conductivite ou de la permittivite, procede d'estimation de vecteur densite de courant et appareil mettant en oeuvre lesdits procedes
JP5014783B2 (ja) * 2003-03-14 2012-08-29 エレクタ エイビー（ピーユービーエル） 磁場のマルチチャネル測定値を処理するための方法とデバイス
JP2004337478A (ja) * 2003-05-19 2004-12-02 Hitachi Ltd 磁場計測装置
JP2006047080A (ja) * 2004-08-04 2006-02-16 Advanced Telecommunication Research Institute International 磁気センサ
US20120041297A1 (en) * 2009-02-06 2012-02-16 Baylor College Of Medicine Real-time magnetic dipole detection and tracking
JP2011220977A (ja) * 2010-04-14 2011-11-04 Fujikura Ltd 磁場検出装置
US20120105058A1 (en) * 2010-10-29 2012-05-03 Iakov Veniaminovitch Kopelevitch Magnetic field sensing
JP2017062122A (ja) * 2015-09-23 2017-03-30 国立大学法人名古屋大学 磁界検出装置
JP2017133889A (ja) * 2016-01-26 2017-08-03 株式会社東芝 磁気センサおよび磁気センサ装置
JP2017133993A (ja) * 2016-01-29 2017-08-03 株式会社アドバンテスト 磁気ノイズ消去装置及び磁場測定装置
JP2018007821A (ja) * 2016-07-13 2018-01-18 株式会社アドバンテスト 磁場測定装置及び磁場測定方法

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2020241465A1 (enExample) * 2019-05-31 2020-12-03
WO2020241465A1 (ja) * 2019-05-31 2020-12-03 旭化成株式会社 計測装置、計測方法、およびプログラム
US20220065953A1 (en) * 2019-05-31 2022-03-03 Asahi Kasei Kabushiki Kaisha Measuring apparatus, measuring method and recording medium
JP7204908B2 (ja) 2019-05-31 2023-01-16 旭化成株式会社 計測装置、計測方法、およびプログラム
US12038488B2 (en) * 2019-05-31 2024-07-16 Asahi Kasei Kabushiki Kaisha Measuring apparatus, measuring method and recording medium
JP2021177159A (ja) * 2020-05-08 2021-11-11 旭化成エレクトロニクス株式会社 磁場計測装置、磁場計測方法、および、磁場計測プログラム
JP7525297B2 (ja) 2020-05-08 2024-07-30 旭化成エレクトロニクス株式会社 磁場計測装置、磁場計測方法、および、磁場計測プログラム

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