WO2013141009A1 - 感光性導電ペーストおよび導電パターンの製造方法 - Google Patents
感光性導電ペーストおよび導電パターンの製造方法 Download PDFInfo
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- WO2013141009A1 WO2013141009A1 PCT/JP2013/055808 JP2013055808W WO2013141009A1 WO 2013141009 A1 WO2013141009 A1 WO 2013141009A1 JP 2013055808 W JP2013055808 W JP 2013055808W WO 2013141009 A1 WO2013141009 A1 WO 2013141009A1
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- conductive paste
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- photosensitive conductive
- photosensitive
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
- G03F7/0388—Macromolecular compounds which are rendered insoluble or differentially wettable with ethylenic or acetylenic bands in the side chains of the photopolymer
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/40—Treatment after imagewise removal, e.g. baking
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
- H01B1/20—Conductive material dispersed in non-conductive organic material
- H01B1/22—Conductive material dispersed in non-conductive organic material the conductive material comprising metals or alloys
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B13/00—Apparatus or processes specially adapted for manufacturing conductors or cables
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F2203/00—Indexing scheme relating to G06F3/00 - G06F3/048
- G06F2203/041—Indexing scheme relating to G06F3/041 - G06F3/045
- G06F2203/04103—Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- G06F3/044—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
Definitions
- the present invention relates to a photosensitive conductive paste and a method for producing a conductive pattern using the photosensitive conductive paste.
- the conductive pattern in the present invention refers to a conductive pattern containing both an organic component including a resin and an inorganic component including a conductive filler.
- Patent Documents 1 and 2 Most of the polymer-type conductive pastes in practical use form a pattern by a screen printing method and form a conductive pattern by heat curing.
- Patent Document 3 a conductive paste capable of acid etching (Patent Document 3) and a photosensitive curable conductive paste are disclosed (see Patent Documents 4 and 5).
- the conductive paste described in Patent Document 3 as a conventional technique has a problem that a resist layer needs to be formed on the coating film in order to perform patterning by a photolithography method, and the number of steps is increased.
- a fine pattern can be easily obtained by imparting photosensitivity, but in Patent Document 4, the conductivity is low, and in the method described in Patent Document 5, acrylic (methacrylic) is used for the expression of conductivity. It is necessary to reduce the equivalent, the conductive pattern obtained by this method is fragile, difficult to apply on a flexible substrate, and poor adhesion to an ITO (indium tin oxide) electrode on a glass or film substrate There was a problem.
- the object of the present invention is to solve the above-mentioned problems, have strong adhesion with ITO on the substrate, enable fine patterning, develop conductivity at a relatively low temperature, and in some cases have a flexible conductive pattern Is to obtain a photosensitive conductive paste and a method for producing a conductive pattern.
- the photosensitive conductive paste of the present invention has the following configuration. Namely, dicarboxylic acid or acid anhydride (A) thereof, compound (B) having an acid value in the range of 40 to 200 mgKOH / g, alicyclic compound (C), photopolymerization initiator (D), and conductive filler A photosensitive conductive paste containing (E).
- the manufacturing method of the conductive pattern of this invention has the following structure. That is, A method for producing a conductive pattern, wherein the photosensitive conductive paste is applied onto a substrate, dried, exposed and developed, and then cured at a temperature of 100 ° C. or higher and 300 ° C. or lower.
- the compound (B) having an acid value in the range of 40 to 200 mgKOH / g preferably has an unsaturated double bond.
- the dicarboxylic acid or its acid anhydride (A) is preferably a dicarboxylic acid represented by the following structural formula (1) or its acid anhydride.
- the dicarboxylic acid or its acid anhydride (A) is preferably a dicarboxylic acid represented by the following structural formula (2) or its acid anhydride.
- the alicyclic compound (C) preferably contains any one of an unsaturated double bond, a hydroxyl group, a carboxyl group, an epoxy group, an amino group, and an isocyanate group. .
- the alicyclic compound (C) preferably has a cyclohexane skeleton.
- the compound (B) having an acid value in the range of 40 to 200 mgKOH / g is preferably epoxy acrylate.
- the glass transition temperature of the compound (B) having the acid value in the range of 40 to 200 mgKOH / g is preferably in the range of ⁇ 10 to 50 ° C.
- a conductive pattern having excellent adhesion with ITO, a low specific resistance even under low temperature curing conditions is obtained, and fine patterning is possible due to high photosensitive characteristics.
- a fine bump, wiring, etc. can be easily formed not only on a rigid board
- the photosensitive conductive paste of the present invention comprises a dicarboxylic acid or its acid anhydride (A), a compound (B) having an acid value in the range of 40 to 200 mgKOH / g, an alicyclic compound (C), a photopolymerization initiator (
- the conductive filler (E) is dispersed in the photosensitive resin composition comprising D).
- the paste is applied onto the substrate, dried as necessary to remove the solvent, and then subjected to exposure, development, and a curing step at a temperature of 100 ° C. to 300 ° C. to obtain a desired conductive pattern on the substrate.
- It is a photosensitive conductive paste that can be used.
- the conductive pattern obtained by using the paste of the present invention is a composite of an organic component and an inorganic component, and conductivity is developed when the conductive fillers come into contact with each other by curing shrinkage during curing.
- the dicarboxylic acid or dicarboxylic acid compound (A) thereof contained in the photosensitive conductive paste of the present invention is oxalic acid, malonic acid, succinic acid, glutaric acid, adipic acid, pimelic acid, suberic acid, azelaic acid , Sebacic acid, phthalic acid, isophthalic acid, terephthalic acid, and compounds corresponding to the structural formula (1) include 2-methylmalonic acid, 2-ethylmalonic acid, 2-propylmalonic acid, 2-butylmalonic acid 2- (3-methoxypropyl) malonic acid, 2- (3-propoxypropyl) malonic acid, 2- (3-propoxybutyl) malonic acid, (E) -2- (hex-4-ethyl) malonic acid, 2-methylsuccinic acid, 2-ethylsuccinic acid, 2-propylsuccinic acid, 2-butylsuccinic acid, 2- (3-methoxypropyl) succinic acid,
- (E) -2- (hex-4-ethyl) succinic acid, 2-propylsuccinic acid, 3-hexylpentanedioic acid, 2-hexylmalonic acid, 2- (3-ethoxypropyl) succinic acid, 2- (3-Ethoxybutyl) succinic acid and (E) -2 (hex-1-enyl) succinic acid are particularly preferred.
- the acid anhydride means a compound obtained by dehydration condensation of two molecules of the carboxylic acid of the above compound.
- the addition amount of the dicarboxylic acid or its acid anhydride (A) is preferably in the range of 0.5 to 30 parts by weight with respect to 100 parts by weight of the compound (B) whose acid value is in the range of 40 to 200 mgKOH / g. More preferably, it is 1 to 20 parts by weight.
- the affinity for the developer is increased and good patterning is possible.
- the conductivity of the final composition is improved.
- the addition amount of the acid anhydride (A) 30 parts by weight or less it is possible to improve the development margin and the adhesion under high temperature and high humidity.
- the compound (B) having an acid value in the range of 40 to 200 mgKOH / g contained in the photosensitive conductive paste of the present invention refers to a monomer, oligomer or polymer having at least one carboxyl group in the molecule. 1 type (s) or 2 or more types can be used.
- the compound (B) include acrylic copolymers.
- the acrylic copolymer is a copolymer containing at least an acrylic monomer as a copolymerization component, and as a specific example of the acrylic monomer, all compounds having a carbon-carbon double bond can be used.
- P-me Styrenes such as styrene, o-methylstyrene, m-methylstyrene, ⁇ -methylstyrene, chloromethylstyrene, hydroxymethylstyrene, ⁇ -methacryloxypropyltrimethoxysilane, 1-vinyl-2-pyrrolidone, allylated cyclohexyldi Acrylate, 1,4-butanediol diacrylate, 1,3-butylene glycol diacrylate, ethylene glycol diacrylate, diethylene glycol diacrylate, triethylene glycol diacrylate, polyethylene glycol diacrylate, dipentaerythritol hexaacrylate, dipentaerythritol mono Hydroxypentaacrylate, ditrimethylolpropane tetraacrylate, glycerol diacrylate, methoxylated cyclohexyl Diacrylate, neopentyl glycol di
- an unsaturated acid such as an unsaturated carboxylic acid
- an unsaturated acid include acrylic acid, methacrylic acid, itaconic acid, crotonic acid, maleic acid, fumaric acid, vinyl acetate, and acid anhydrides thereof.
- a part of the unsaturated acid in the acrylic polymer obtained by using the unsaturated acid such as the unsaturated carboxylic acid as a monomer as a monomer, a group that reacts with the unsaturated acid such as glycidyl (meth) acrylate, and the unsaturated acid can be prepared.
- the acid value of the compound (B) contained in the photosensitive conductive paste of the present invention needs to be 40 to 200 mgKOH / g from the viewpoint of alkali solubility. If the acid value is less than 40 mgKOH / g, there is a problem that the solubility of the soluble part in the developer is lowered. On the other hand, if the acid value exceeds 200 mgKOH / g, the allowable development width cannot be increased.
- the acid value is determined according to JIS K 0070 (1992).
- the glass transition temperature of the compound (B) contained in the photosensitive conductive paste of the present invention is preferably ⁇ 10 to 50 ° C., more preferably 10 to 40.
- Tg is ⁇ 10 ° C. or higher
- the tackiness of the dried film can be suppressed, and when it is 10 ° C. or higher, the shape stability particularly with respect to temperature change is increased.
- Tg is 50 ° C. or lower
- flexibility is exhibited at room temperature, and when it is 50 ° C. or lower, internal stress at the time of bending can be relaxed, and generation of cracks can be particularly suppressed.
- the compound (B) contained in the photosensitive conductive paste of the present invention is preferably epoxy acrylate.
- the compound (B) is an epoxy acrylate
- a hydroxyl group formed by ring-opening an epoxy group with an unsaturated acid interacts with the substrate, and the adhesion can be further improved.
- Epoxy acrylate refers to a compound in which a part of the copolymer component is an epoxy acrylate monomer.
- the glass transition temperature of the compound (B) contained in the photosensitive conductive paste of the present invention can be determined by differential scanning calorimetry (DSC) measurement of the photosensitive component, but the copolymerization ratio of the monomer as the copolymerization component and It can calculate by following Numerical formula (1) using the glass transition temperature of the homopolymer of each monomer. In the present invention, this value is used for those that can be calculated, and the cases where the glass transition temperature of the homopolymer is not known are determined from the DSC measurement results.
- DSC differential scanning calorimetry
- Tg represents the glass transition temperature (unit: K) of the polymer
- T1, T2, T3 Represent the glass transition temperature (unit: K) of the homopolymer of monomer 1, monomer 2, monomer 3,.
- W1, W2, W3 Indicate the copolymerization ratio of monomer 1, monomer 2, monomer 3,.
- the alicyclic compound (C) contained in the photosensitive conductive paste of the present invention refers to a compound having in the molecule one or more of the structures in which carbon atoms are bonded in a ring, excluding the aromatic ring.
- those excluding the aromatic ring include cyclopropane skeleton, cyclobutane skeleton, cyclopentane skeleton, cyclohexane skeleton, cyclobutene skeleton, cyclopentene skeleton, cyclohexene skeleton, cyclopropyne skeleton, cyclobutyne skeleton, cyclopentine skeleton , Cyclohexyne skeleton, hydrogenated bisphenol A skeleton and the like.
- Specific examples include hydrogenated bisphenol A, 1,1-cyclobutanedicarboxylic acid, 1,2,3,4-cyclobutanetetracarboxylic acid, 4,4-diamino-dicyclohexylmethane, isophoronediamine, dicyclohexylmethane 4,4 ′.
- Diisocyanate, trans-4-methylcyclohexyl isocyanate Takenate 600 (1,3-bis (isocyanatomethyl) cyclohexane) (trade name, manufactured by Mitsui Chemicals), isophorone diisocyanate, 1,2-epoxycyclohexane, 1-vinyl -3,4-epoxycyclohexane, licarresin DME-100 (1,4-cyclohexanedimethanol diglycidyl ether) (trade name, manufactured by Shin Nippon Rika Co., Ltd.), licarresin HBE-100 (4,4'-isopropylidenedicyclohexane) Sanoh And (chloromethyl) oxirane polymer) (trade name, manufactured by Shin Nippon Chemical Co., Ltd.), ST-4000D (epoxy resin based on hydrogenated bisphenol A) (trade name, manufactured by Nippon Steel Chemical Co., Ltd.), 1,2: 5,6-diep
- the addition amount of the alicyclic compound (C) contained in the photosensitive conductive paste of the present invention is preferably 5 to 100 parts by weight with respect to 100 parts by weight of the compound (B) having an acid value in the range of 40 to 200 mgKOH / g. It is added in the range of 200 parts by weight, more preferably 30 to 60 parts by weight. Adhesiveness with ITO can be improved by adding 5 parts by weight or more with respect to 100 parts by weight of the compound (B) having an acid value in the range of 40 to 200 mgKOH / g. Further, the development residue can be suppressed by setting the addition amount to 100 parts by weight or less of the compound (B) having an acid value in the range of 40 to 200 mgKOH / g.
- the photopolymerization initiator (D) contained in the photosensitive conductive paste of the present invention is a compound that absorbs light of a short wavelength such as ultraviolet rays and decomposes to generate a radical or a compound that generates a radical by causing a hydrogen abstraction reaction.
- 1,2-octanedione 1- [4- (phenylthio) -2- (O-benzoyloxime)], 2,4,6-trimethylbenzoyl-diphenyl-phosphine oxide, bis (2,4 , 6-trimethylbenzoyl) -phenylphosphine oxide, ethanone, 1- [9-ethyl-6-2 (2-methylbenzoyl) -9H-carbazol-3-yl] -1- (O-acetyloxime), benzophenone, o-Benzoyl methyl benzoate, 4,4′-bis (dimethylamino) benzophenone, 4,4′-bis (diethylamino) benzophenone, 4,4′-dichlorobenzophenone, 4-benzoyl-4′-methyldiphenyl ketone, di Benzyl ketone, fluorenone, 2,2'-diethoxyacetophenone, 2,2-dimethoxy 2-phenylacetophenone
- the addition amount of the photopolymerization initiator (D) is 100 parts by weight of the compound (B) having an acid value in the range of 40 to 200 mgKOH / g. Preferably it is added in the range of 0.05 to 30 parts by weight, more preferably 5 to 20 parts by weight.
- the addition amount of the photopolymerization initiator (D) is 100 parts by weight of the compound (B) to be 5 parts by weight or more, the curing density of the exposed part can be increased, and the remaining film ratio after development can be increased. .
- the amount of addition of the photopolymerization initiator (D) to 100 parts by weight of the compound (B) is 20 parts by weight or less, thereby suppressing excessive light absorption particularly at the upper part of the coating film by the photopolymerization initiator (D). And it can suppress that a conductive pattern becomes a reverse taper shape and adhesiveness with a base material falls.
- the photosensitive conductive paste of the present invention can be improved in sensitivity by adding a sensitizer together with the photopolymerization initiator (D), or can expand the wavelength range effective for the reaction.
- the sensitizer examples include 2,4-diethylthioxanthone, isopropylthioxanthone, 2,3-bis (4-diethylaminobenzal) cyclopentanone, 2,6-bis (4-dimethylaminobenzal) cyclohexanone, 2,6-bis (4-dimethylaminobenzal) -4-methylcyclohexanone, Michler's ketone, 4,4-bis (diethylamino) benzophenone, 4,4-bis (dimethylamino) chalcone, 4,4-bis (diethylamino) Chalcone, p-dimethylaminocinnamylidene indanone, p-dimethylaminobenzylidene indanone, 2- (p-dimethylaminophenylvinylene) isonaphthothiazole, 1,3-bis (4-dimethylaminophenylvinylene) isonaphthothiazo
- the addition amount is usually 0.05 to 10 weights per 100 weight parts of the compound (B) whose acid value is in the range of 40 to 200 mg KOH / g. It is preferably within the range of parts, more preferably 0.1 to 10 parts by weight.
- the conductive filler (E) contained in the photosensitive conductive paste of the present invention contains at least one of Ag, Au, Cu, Pt, Pb, Sn, Ni, Al, W, Mo, ruthenium oxide, Cr, Ti, and indium. These conductive fillers are preferably included, and can be used alone, as an alloy, or as a mixed powder. Moreover, the electroconductive particle which coat
- the volume average particle diameter of the conductive filler (E) is preferably from 0.1 to 10 ⁇ m, more preferably from 0.5 to 6 ⁇ m.
- the volume average particle diameter is preferably from 0.1 to 10 ⁇ m, more preferably from 0.5 to 6 ⁇ m.
- the contact probability between the conductive fillers is improved, the specific resistance value of the conductive pattern to be produced, and the disconnection probability can be lowered, and the ultraviolet rays at the time of exposure are in the film. Can be transmitted smoothly, and fine patterning becomes easy.
- the volume average particle size is 10 ⁇ m or less, the surface smoothness, pattern accuracy, and dimensional accuracy of the printed circuit pattern are improved.
- the volume average particle diameter can be determined by a Coulter counter method.
- the amount of the conductive filler (E) added is preferably in the range of 70 to 95% by weight, more preferably 80 to 90% by weight, based on the total solid content in the photosensitive conductive paste.
- the photosensitive conductive paste of the present invention may contain a solvent.
- Solvents include N, N-dimethylacetamide, N, N-dimethylformamide, N-methyl-2-pyrrolidone, dimethylimidazolidinone, dimethyl sulfoxide, diethylene glycol monoethyl ether, diethylene glycol monoethyl ether acetate, ⁇ -butyrolactone, lactic acid Examples include ethyl, 1-methoxy-2-propanol, 1-ethoxy-2-propanol, ethylene glycol mono-n-propyl ether, diacetone alcohol, tetrahydrofurfuryl alcohol, propylene glycol monomethyl ether acetate and the like.
- a solvent can be used individually by 1 type, or 2 or more types can be mixed and used for it. The solvent may be added later for the purpose of adjusting the viscosity after preparing the paste.
- the photosensitive conductive paste of the present invention is a non-photosensitive polymer, plasticizer, leveling agent, surfactant, silane coupling agent that does not have an unsaturated double bond in the molecule as long as the desired properties are not impaired. Additives such as antifoaming agents and pigments can also be blended.
- the non-photosensitive polymer include epoxy resin, novolac resin, phenol resin, polyimide precursor, and closed ring polyimide.
- plasticizer examples include dibutyl phthalate, dioctyl phthalate, polyethylene glycol, glycerin and the like.
- leveling agent examples include a special vinyl polymer and a special acrylic polymer.
- silane coupling agents methyltrimethoxysilane, dimethyldiethoxysilane, phenyltriethoxysilane, hexamethyldisilazane, 3-methacryloxypropyltrimethoxysilane, 3-glycidoxypropyltrimethoxysilane, vinyltrimethoxysilane Etc.
- the photosensitive conductive paste of the present invention is produced using a disperser, a kneader or the like. Specific examples of these include, but are not limited to, a three-roller, a ball mill, and a planetary ball mill.
- the paste of the present invention is applied on a substrate, heated to volatilize the solvent and dried. Thereafter, exposure is performed through a pattern formation mask, and a desired pattern is formed on the substrate through a development process. And it cures at the temperature of 100 degreeC or more and 300 degrees C or less, and produces a conductive pattern.
- the curing temperature is preferably 120 to 180 ° C. If the heating temperature is less than 100 ° C., the volume shrinkage of the resin cannot be increased, and the specific resistivity cannot be decreased. On the other hand, when the heating temperature exceeds 300 ° C., it cannot be used on a substrate having low heat resistance, and cannot be used in combination with a material having low heat resistance.
- the substrate used in the present invention is, for example, a polyethylene terephthalate film (hereinafter referred to as PET film), a polyimide film, a polyester film, an aramid film, an epoxy resin substrate, a polyetherimide resin substrate, a polyetherketone resin substrate, a polysulfone resin substrate, or glass.
- PET film polyethylene terephthalate film
- a polyimide film a polyimide film
- polyester film an aramid film
- an epoxy resin substrate a polyetherimide resin substrate
- a polyetherketone resin substrate a polysulfone resin substrate
- glass glass
- examples include, but are not limited to, a substrate, a silicon wafer, an alumina substrate, an aluminum nitride substrate, a silicon carbide substrate, a decorative layer forming substrate, and an insulating layer forming substrate.
- Examples of the method for applying the photosensitive conductive paste of the present invention to a substrate include spin coating using a spinner, spray coating, roll coating, screen printing, blade coater, die coater, calendar coater, meniscus coater, bar coater and the like.
- the coating film thickness varies depending on the coating method, the solid content concentration of the composition, the viscosity, and the like, but is usually applied so that the film thickness after drying is in the range of 0.1 to 50 ⁇ m.
- the solvent is removed from the coating film applied on the substrate.
- the method for removing the solvent include heat drying using an oven, a hot plate, infrared rays, and vacuum drying. Heat drying is preferably performed in the range of 50 to 180 ° C. for 1 minute to several hours.
- the pattern is processed by photolithography on the coating film after removing the solvent.
- a light source used for exposure it is preferable to use i-line (365 nm), h-line (405 nm), and g-line (436 nm) of a mercury lamp.
- Developer solutions for alkali development include tetramethylammonium hydroxide, diethanolamine, diethylaminoethanol, sodium hydroxide, potassium hydroxide, sodium carbonate, potassium carbonate, triethylamine, diethylamine, methylamine, dimethylamine, dimethylaminoethyl acetate
- An aqueous solution of a compound such as dimethylaminoethanol, dimethylaminoethyl methacrylate, cyclohexylamine, ethylenediamine or hexamethylenediamine is preferred.
- these aqueous solutions may contain polar solvents such as N-methyl-2-pyrrolidone, N, N-dimethylformamide, N, N-dimethylacetamide, dimethyl sulfoxide and ⁇ -butyrolactone, alcohols such as methanol, ethanol and isopropanol.
- polar solvents such as N-methyl-2-pyrrolidone, N, N-dimethylformamide, N, N-dimethylacetamide, dimethyl sulfoxide and ⁇ -butyrolactone
- alcohols such as methanol, ethanol and isopropanol.
- Esters such as ethyl lactate and propylene glycol monomethyl ether acetate
- ketones such as cyclopentanone, cyclohexanone, isobutyl ketone, and methyl isobutyl ketone may be used alone or as a developer.
- what added surfactant to these alkaline aqueous solution can also be
- Developers for organic development include N-methyl-2-pyrrolidone, N-acetyl-2-pyrrolidone, N, N-dimethylacetamide, N, N-dimethylformamide, dimethyl sulfoxide, hexamethyl phosphortriamide, etc. Can be used alone or in combination with methanol, ethanol, isopropyl alcohol, xylene, water, methyl carbitol, ethyl carbitol and the like.
- the development can be performed by spraying the developer on the coating film surface while the substrate is allowed to stand or rotate, immersing the substrate in the developer, or applying ultrasonic waves while immersing.
- a rinsing treatment with water may be performed.
- alcohols such as ethanol and isopropyl alcohol
- esters such as ethyl lactate and propylene glycol monomethyl ether acetate may be added to water for rinsing treatment.
- the paste composition film is cured to develop conductivity.
- the curing method include oven drying, inert oven, hot plate, heat drying using infrared rays, vacuum drying, and the like.
- a conductive pattern can be produced through a curing process.
- the conductive pattern manufactured using the photosensitive conductive paste of the present invention is suitably used as a peripheral wiring for a touch panel.
- Examples of the touch panel system include a resistive film type, an optical type, an electromagnetic induction type, and a capacitance type.
- the capacitance type touch panel particularly requires fine wiring, the photosensitive conductive paste of the present invention.
- the conductive pattern manufactured using is more preferably used.
- One unit is a group of straight lines in which a photosensitive conductive paste is applied on a PET film to a dry thickness of 7 ⁇ m, dried in a drying oven at 100 ° C. for 5 minutes, and arranged in a constant line and space (L / S). And exposing and developing through a photomask having a light-transmitting pattern having nine types of units having different L / S values, and then curing in a drying oven at 140 ° C. for 30 minutes to obtain a conductive pattern .
- the L / S values of each unit were 500/500, 250/250, 100/100, 50/50, 40/40, 30/30, 25/25, 20/20, and 15/15 (respective line widths).
- Specific resistivity surface resistance value ⁇ film thickness ⁇ line width / line length
- the film thickness was measured using a stylus type step gauge Surfcom (registered trademark) 1400 (manufactured by Tokyo Seimitsu Co., Ltd.). The film thickness was measured at three positions at random, and the average value of the three points was taken as the film thickness. The length measurement was 1 mm, and the scanning speed was 0.3 mm / sec.
- the line width was determined by observing three positions at random with an optical microscope and analyzing the image data to obtain the average value of the three points as the line width.
- FIG. 2 is a diagram schematically showing a sample used in the flexibility test.
- a photosensitive conductive paste is applied to a rectangular PET film (thickness 40 ⁇ m) having a length of 10 mm and a width of 100 mm so as to have a dry thickness of 7 ⁇ m, followed by drying in a drying oven at 100 ° C. for 5 minutes.
- a photomask having a translucent portion A is arranged so that the translucent portion is at the center of the sample, exposed, developed, and then cured in a drying oven at 140 ° C. for 30 minutes to form a conductive pattern.
- the photosensitive conductive paste was applied on a PET film ELECRYSTA (registered trademark) V270L-TFS (manufactured by Nitto Denko Corporation) with ITO so that the dry thickness was 7 ⁇ m, and dried in a drying oven at 100 ° C.
- the compound (B-1) obtained had an acid value of 103 mgKOH / g and a glass transition temperature determined from the formula (1) of 21.7 ° C.
- a reaction vessel in a nitrogen atmosphere was charged with 150 g of diethylene glycol monoethyl ether acetate and heated to 80 ° C. using an oil bath.
- a reaction vessel in a nitrogen atmosphere was charged with 150 g of diethylene glycol monoethyl ether acetate and heated to 80 ° C. using an oil bath.
- a mixture of 50 g of ethylene oxide-modified bisphenol A diacrylate: FA-324A, 20 g of EA, 15 g of AA, 0.8 g of 2,2′-azobisisobutyronitrile and 10 g of diethylene glycol monoethyl ether acetate was added over 1 hour. It was dripped. After completion of the dropping, a polymerization reaction was further performed for 6 hours. Thereafter, 1 g of hydroquinone monomethyl ether was added to terminate the polymerization reaction.
- a reaction vessel in a nitrogen atmosphere was charged with 150 g of diethylene glycol monoethyl ether acetate and heated to 80 ° C. using an oil bath.
- a reaction vessel in a nitrogen atmosphere was charged with 150 g of diethylene glycol monoethyl ether acetate and heated to 80 ° C. using an oil bath.
- a reaction vessel in a nitrogen atmosphere was charged with 150 g of diethylene glycol monoethyl ether acetate and heated to 80 ° C. using an oil bath.
- a reaction vessel in a nitrogen atmosphere was charged with 150 g of diethylene glycol monoethyl ether acetate and heated to 80 ° C. using an oil bath.
- the average particle diameter of the conductive filler (E) was measured using a dynamic light scattering particle size distribution meter manufactured by Horiba, Ltd.
- the obtained paste was applied on a PET film having a film thickness of 100 ⁇ m by screen printing and dried in a drying oven at 80 ° C. for 10 minutes. Then, full exposure was performed using an exposure apparatus PEM-6M (manufactured by Union Optics Co., Ltd.) with an exposure amount of 150 mJ / cm 2 (wavelength 365 nm conversion), and immersion development was performed with a 0.25% Na 2 CO 3 solution for 30 seconds. After rinsing with ultrapure water, curing was performed in a drying oven at 140 ° C. for 30 minutes. The film thickness of the patterned conductive pattern was 7 ⁇ m.
- Examples 1 to 22 that satisfy the requirements of the present invention, a high-resolution pattern could be formed and a low-resistance conductive pattern could be obtained by curing at 140 ° C., but Comparative Example 1 using no compound (C) In No. 2 and No. 2, the adhesion with ITO decreased under high temperature and high humidity.
- a conductive pattern having excellent adhesion with ITO, a low specific resistance even under low temperature curing conditions is obtained, and fine patterning is possible due to high photosensitive characteristics.
- a fine bump, wiring, etc. can be easily formed not only on a rigid board
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Abstract
Description
上記感光性導電ペーストを基板上に塗布し、乾燥し、露光し、現像した後に100℃以上300℃以下の温度でキュアする導電パターンの製造方法、である。
本発明の感光性導電ペーストは、上記ジカルボン酸またはその酸無水物(A)が下記構造式(2)で表されるジカルボン酸またはその酸無水物であることが好ましい。
本発明の感光性導電ペーストは、上記脂環式化合物(C)が不飽和二重結合、水酸基、カルボキシル基、エポキシ基、アミノ基、イソシアネート基のいずれか一つを含有していることが好ましい。
本発明の感光性導電ペーストに含まれる酸価が40~200mgKOH/gの範囲内である化合物(B)としては、分子内にカルボキシル基を少なくとも一つ以上有するモノマー、オリゴマーもしくはポリマーのことをいい、1種または2種以上使用することができる。
光重合開始剤(D)の添加量としては、酸価が40~200mgKOH/gの範囲内である化合物(B)100重量部に対し、好ましくは0.05~30重量部の範囲で添加され、より好ましくは、5~20重量部である。化合物(B)100重量部に対する光重合開始剤(D)の添加量を5重量部以上とすることにより、特に露光部の硬化密度が増加し、現像後の残膜率を高くすることができる。また、化合物(B)100重量部に対する光重合開始剤(D)の添加量を20重量部以下とすることで、特に光重合開始剤(D)による塗布膜上部での過剰な光吸収を抑制し、導電パターンが逆テーパー形状となり基材との接着性が低下することを抑制することができる。
本発明の感光性導電ペーストに含まれる導電フィラー(E)はAg、Au、Cu、Pt、Pb、Sn、Ni、Al、W、Mo、酸化ルテニウム、Cr、Ti、およびインジウムの少なくとも1種を含むことが好ましく、これらの導電フィラーを単独、合金、あるいは混合粉末として用いることができる。また、上述の成分で絶縁性粒子または導電性粒子の表面を被膜した導電性粒子も同様に用いることができる。中でも導電性の観点からAg、CuおよびAuが好ましく、コスト、安定性の観点からAgがより好ましい。
PETフィルム上に感光性導電ペーストを乾燥厚みが7μmになるように塗布、100℃の乾燥オーブン内で5分間乾燥し、一定のラインアンドスペース(L/S)で配列する直線群を1つのユニットとし、L/Sの値が異なる9種類のユニットを有する透光パターンを有するフォトマスクを介して露光、現像し、その後、140℃で30分間乾燥オーブン内でキュアすることによって導電パターンを得た。各ユニットのL/Sの値は500/500、250/250、100/100、50/50、40/40、30/30、25/25、20/20、15/15とした(それぞれライン幅(μm)/間隔(μm)を表す)。パターンを光学顕微鏡により観察し、パターン間に残渣がなく、かつパターン剥がれのない最小のL/Sの値を持つパターンを確認し、この最小のL/Sの値を現像可能なL/Sとした。
100℃の乾燥オーブン内で5分間乾燥し、図1に示すパターンの透光部Aを有するフォトマスクを介して露光し、現像し、その後、140℃で30分間乾燥オーブン内でキュアすることによって比抵抗率測定用導電性パターンを得た。導電性パターンのライン幅は0.400mm、ライン長さは80mmである。得られたパターンの端部を表面抵抗計でつなぎ、表面抵抗値を測定し、次の計算式に当てはめて比抵抗率を算出した。
比抵抗率=表面抵抗値×膜厚×線幅/ライン長
なお膜厚の測定は触針式段差計サーフコム(登録商標)1400((株)東京精密製)を用いて行った。膜厚の測定はランダムに3箇所の位置にて測り、その3点の平均値を膜厚とした。測長は1mm、走査速度は0.3mm/secとした。線幅はパターンを光学顕微鏡でランダムに3箇所の位置を観察し、画像データを解析して得られた3点の平均値を線幅とした。
図2は屈曲性試験に用いたサンプルを模式的に示した図である。縦10mm、横100mmの長方形のPETフィルム(厚み40μm)上に感光性導電ペーストを乾燥厚みが7μmになるように塗布し、100℃の乾燥オーブン内で5分間乾燥し、図1に示すパターンの透光部Aを有するフォトマスクを、透光部がサンプル中央になるように配置して露光し、現像し、その後、140℃で30分間乾燥オーブン内でキュアして導電パターンを形成し、テスターを用いて抵抗値を測定した。その後導電パターンが内側、外側と交互になるように曲げてサンプル短辺Bとサンプル短辺Cを接触させ、元に戻す屈曲動作を100回繰り返した後、再度テスターで抵抗値を測定した。その結果、抵抗値の変化量が20%以下であり、且つ導電パターンにクラック、剥がれ、断線などがないものをgoodとし、そうでないものをpoorとした。
<ITOとの密着性評価方法>
ITO付きPETフィルムELECRYSTA(登録商標)V270L-TFS(日東電工(株)製)上に感光性導電ペーストを乾燥厚みが7μmになるように塗布し、100℃の乾燥オーブン内で5分間乾燥し、印刷面を全面露光し、その後、140℃で30分間乾燥オーブン内でキュアした後、1mm幅で10×10の碁盤目状にカッターで切れ目を入れ、85℃、85%RHの恒温恒湿槽SH-661(エスペック(株)製)に240h投入した。その後サンプルを取り出し、碁盤目状の箇所にテープを貼着して剥がし、残存マス数で判定を行った。なお、テープとしてはセロハンテープ(ニチバン(株)製)を用いて行った。
アジピン酸
2-プロピルサクシン酸
3-ヘキシルペンタンジオイック酸
(E)-2-(ヘキサ-4-エチル) サクシン酸
2-ヘキシルペンタンジオイック酸
2-ヘキシルマロン酸
2-(3-エトキシプロピル)サクシン酸
2-(3-エトキシブチル)サクシン酸
(E)-2-(ヘキサ-1-エニル)サクシン酸
[酸価が40~200mgKOH/gの範囲内である化合物(B)]
合成例1:酸価が40~200mgKOH/gの範囲内である化合物(B-1)
共重合比率(重量基準):エチルアクリレート(以下、EA)/メタクリル酸2-エチルヘキシル(以下、2-EHMA)/スチレン(以下、St)/グリシジルメタクリレート(以下、GMA)/アクリル酸(以下、AA)=20/40/20/5/15
窒素雰囲気の反応容器中にジエチレングリコールモノエチルエーテルアセテート150gを仕込みオイルバスを用いて80℃まで昇温した。これに、EA20g、2-EHMA40g、St20g、AA15g、2,2’-アゾビスイソブチロニトリル0.8gおよびジエチレングリコールモノエチルエーテルアセテート10gからなる混合物を1時間かけて滴下した。滴下終了後、さらに6時間重合反応を行った。その後、ハイドロキノンモノメチルエーテル1gを添加して重合反応を停止した。引き続きGMA5g、トリエチルベンジルアンモニウムクロライド1gおよびジエチレングリコールモノエチルエーテルアセテート10gからなる混合物を0.5時間かけて滴下した。滴下終了後、さらに2時間付加反応を行った。得られた反応溶液をメタノールで精製することで未反応不純物を除去し、さらに24時間真空乾燥することで化合物(B-1)を得た。得られた化合物(B-1)の酸価は103mgKOH/g、数式(1)より求めたガラス転移温度は21.7℃であった。
共重合比率(重量基準)トリシクロデカンジメタノールジアクリレート(製品名:IRR214-K、ダイセル・サイテック(株)製)/変性ビスフェノールAジアクリレート(製品名:EBECRYL150、ダイセル・サイテック(株)製)/St/AA)=25/40/20/15
窒素雰囲気の反応容器中にジエチレングリコールモノエチルエーテルアセテート150gを仕込みオイルバスを用いて80℃まで昇温した。これに、IRR214-Kを25g、EBECRYL150を40g、St20g、AA15g、2,2’-アゾビスイソブチロニトリル0.8gおよびジエチレングリコールモノエチルエーテルアセテート10gからなる混合物を1時間かけて滴下した。滴下終了後、さらに6時間重合反応を行った。その後、ハイドロキノンモノメチルエーテル1gを添加して重合反応を停止した。得られた反応溶液をメタノールで精製することで未反応不純物を除去し、さらに24時間真空乾燥することで化合物(B-2)を得た。得られた化合物(B-2)の酸価は89mgKOH/g、DSC測定から得られたガラス転移温度は78.4℃であった。
共重合比率(重量基準)ネオペンチルグリコールジアクリレート(製品名:ライトアクリレートNP-A、共栄社化学(株)製)/変性ビスフェノールAジアクリレート(製品名:EBECRYL150、ダイセル・サイテック(株)製)/St/AA)=25/40/20/15
窒素雰囲気の反応容器中にジエチレングリコールモノエチルエーテルアセテート150gを仕込みオイルバスを用いて80℃まで昇温した。これに、ライトアクリレートNP-Aを25g、EBECRYL150を40g、St20g、AA15g、2,2’-アゾビスイソブチロニトリル0.8gおよびジエチレングリコールモノエチルエーテルアセテート10gからなる混合物を1時間かけて滴下した。滴下終了後、さらに6時間重合反応を行った。その後、ハイドロキノンモノメチルエーテル1gを添加して重合反応を停止した。得られた反応溶液をメタノールで精製することで未反応不純物を除去し、さらに24時間真空乾燥することで化合物(B-3)を得た。得られた化合物(B-3)の酸価は84mgKOH/g、DSC測定から得られたガラス転移温度は52.3℃であった。
共重合比率(重量基準):エチレンオキサイド変性ビスフェノールAジアクリレート(製品名:FA-324A、日立化成工業(株)製)/EA/GMA/AA=50/10/5/15
窒素雰囲気の反応容器中にジエチレングリコールモノエチルエーテルアセテート150gを仕込みオイルバスを用いて80℃まで昇温した。これに、エチレンオキサイド変性ビスフェノールAジアクリレート:FA-324Aを50g、EA20g、AA15g、2,2’-アゾビスイソブチロニトリル0.8gおよびジエチレングリコールモノエチルエーテルアセテート10gからなる混合物を1時間かけて滴下した。滴下終了後、さらに6時間重合反応を行った。その後、ハイドロキノンモノメチルエーテル1gを添加して重合反応を停止した。引き続きGMA5g、トリエチルベンジルアンモニウムクロライド1gおよびジエチレングリコールモノエチルエーテルアセテート10gからなる混合物を0.5時間かけて滴下した。滴下終了後、さらに2時間付加反応を行った。得られた反応溶液をメタノールで精製することで未反応不純物を除去し、さらに24時間真空乾燥することで化合物(B-4)を得た。得られた化合物(B-4)の酸価は96mgKOH/g、数式(1)より求めたガラス転移温度は19.9℃であった。
共重合比率(重量基準)2官能エポキシアクリレートモノマー(製品名:エポキシエステル70PA、共栄社化学(株)製)/変性ビスフェノールAジアクリレート(製品名:EBECRYL150、ダイセル・サイテック(株)製)/St/AA)=25/40/20/15
窒素雰囲気の反応容器中にジエチレングリコールモノエチルエーテルアセテート150gを仕込みオイルバスを用いて80℃まで昇温した。これに、エポキシエステル70PAを25g、EBECRYL150を40g、St20g、AA15g、2,2’-アゾビスイソブチロニトリル0.8gおよびジエチレングリコールモノエチルエーテルアセテート10gからなる混合物を1時間かけて滴下した。滴下終了後、さらに6時間重合反応を行った。その後、ハイドロキノンモノメチルエーテル1gを添加して重合反応を停止した。得られた反応溶液をメタノールで精製することで未反応不純物を除去し、さらに24時間真空乾燥することで化合物(B-5)を得た。得られた化合物(B-5)の酸価は88mgKOH/g、DSC測定から得られたガラス転移温度は58.1℃であった。
共重合比率(重量基準)2官能エポキシアクリレートモノマー(製品名:エポキシエステル3002A、共栄社化学(株)製)/2官能エポキシアクリレートモノマー(製品名:エポキシエステル70PA、共栄社化学(株)製)/St/AA)=25/40/20/15
窒素雰囲気の反応容器中にジエチレングリコールモノエチルエーテルアセテート150gを仕込みオイルバスを用いて80℃まで昇温した。これに、エポキシエステル3002Aを25g、エポキシエステル70PAを40g、St20g、AA15g、2,2’-アゾビスイソブチロニトリル0.8gおよびジエチレングリコールモノエチルエーテルアセテート10gからなる混合物を1時間かけて滴下した。滴下終了後、さらに6時間重合反応を行った。その後、ハイドロキノンモノメチルエーテル1gを添加して重合反応を停止した。得られた反応溶液をメタノールで精製することで未反応不純物を除去し、さらに24時間真空乾燥することで化合物(B-6)を得た。得られた化合物(B-6)の酸価は90mgKOH/g、DSC測定から得られたガラス転移温度は78.1℃であった。
共重合比率(重量基準)2官能エポキシアクリレートモノマー(製品名:エポキシエステル3002A、共栄社化学(株)製)/2官能エポキシアクリレートモノマー(製品名:エポキシエステル70PA、共栄社化学(株)製)/GMA/St/AA)=20/40/5/20/15
窒素雰囲気の反応容器中にジエチレングリコールモノエチルエーテルアセテート150gを仕込みオイルバスを用いて80℃まで昇温した。これに、エポキシエステル3002Aを20g、エポキシエステル70PAを40g、St20g、AA15g、2,2’-アゾビスイソブチロニトリル0.8gおよびジエチレングリコールモノエチルエーテルアセテート10gからなる混合物を1時間かけて滴下した。滴下終了後、さらに6時間重合反応を行った。その後、ハイドロキノンモノメチルエーテル1gを添加して重合反応を停止した。引き続きGMA5g、トリエチルベンジルアンモニウムクロライド1gおよびジエチレングリコールモノエチルエーテルアセテート10gからなる混合物を0.5時間かけて滴下した。滴下終了後、さらに2時間付加反応を行った。得られた反応溶液をメタノールで精製することで未反応不純物を除去し、さらに24時間真空乾燥することで化合物(B-7)を得た。得られた化合物(B-7)の酸価は101mgKOH/g、DSC測定から得られたガラス転移温度は80.4℃であった。
共重合比率(重量基準)2官能エポキシアクリレートモノマー(製品名:エポキシエステル80MFA、共栄社化学(株)製)/トリシクロデカンジメタノールジアクリレート(製品名:IRR214-K、ダイセル・サイテック(株)製)/GMA/St/AA)=20/40/5/20/15
窒素雰囲気の反応容器中にジエチレングリコールモノエチルエーテルアセテート150gを仕込みオイルバスを用いて80℃まで昇温した。これに、エポキシエステル80MFAを20g、IRR214-Kを40g、St20g、AA15g、2,2’-アゾビスイソブチロニトリル0.8gおよびジエチレングリコールモノエチルエーテルアセテート10gからなる混合物を1時間かけて滴下した。滴下終了後、さらに6時間重合反応を行った。その後、ハイドロキノンモノメチルエーテル1gを添加して重合反応を停止した。引き続きGMA5g、トリエチルベンジルアンモニウムクロライド1gおよびジエチレングリコールモノエチルエーテルアセテート10gからなる混合物を0.5時間かけて滴下した。滴下終了後、さらに2時間付加反応を行った。得られた反応溶液をメタノールで精製することで未反応不純物を除去し、さらに24時間真空乾燥することで化合物(B-8)を得た。得られた化合物(B-8)の酸価は104mgKOH/g、DSC測定から得られたガラス転移温度は45.4℃であった。
水添ビスフェノールA
1,1-シクロブタンジカルボン酸
トランス-4-メチルシクロヘキシルイソシアネート
水添ビスフェノールAのPO付加物ジアクリレート
リカレジン(登録商標)HBE-100(4,4’-イソプロピリデンジシクロヘキサノールと(クロロメチル)オキシランのポリマー)(新日本理化(株)製)
[光重合開始剤(D)]
IRGACURE(登録商標)369(チバジャパン(株)製)
[導電フィラー(E)]
表1に記載の材料、体積平均粒子径のものを用いた。なお、体積平均粒子径は以下の方法により求めた。
導電フィラー(E)の平均粒子径は、(株)堀場製作所製動的光散乱式粒度分布計により体積平均粒子径を測定した。
ライトアクリレートBP-4EA(共栄社化学(株)製)
[溶剤]
ジエチレングリコールモノエチルエーテルアセテート(東京化成工業(株)製)
(実施例1)
100mLクリーンボトルにアジピン酸を0.50g、化合物(B-1)を10.0g、光重合開始剤IRGACURE 369(チバジャパン(株)製)を0.50g、水添ビスフェノールAを0.5g、ジエチレングリコールモノエチルエーテルアセテートを5.0g入れ、“あわとり錬太郎”(登録商標)ARE-310((株)シンキー製)で混合し、感光性樹脂溶液16.5g(固形分69.7重量%)を得た。
表1~3に示す組成の感光性導電ペーストを実施例1と同様の方法で製造し、評価結果を表4に示した。
表3に示す組成の感光性導電ペーストを実施例1と同様の方法で製造し、評価結果を表4に示した。
B、C:サンプル短辺
D:導電パターン
E:PETフィルム
Claims (11)
- ジカルボン酸またはその酸無水物(A)、酸価が40~200mgKOH/gの範囲内である化合物(B)、脂環式化合物(C)、光重合開始剤(D)、および導電フィラー(E)を含む感光性導電ペースト。
- 前記化合物(B)が不飽和二重結合を有する請求項1記載の感光性導電ペースト。
- 前記脂環式化合物(C)が不飽和二重結合、水酸基、カルボキシル基、エポキシ基、アミノ基、イソシアネート基、アルコキシ基のいずれか一つを含有している請求項1~4のいずれかに記載の感光性導電ペースト。
- 前記脂環式化合物(C)がシクロヘキサン骨格を有している請求項1~5のいずれかに記載の感光性導電ペースト。
- 前記脂環式化合物(C)が水添ビスフェノールA骨格を有している請求項1~6のいずれかに記載の感光性導電ペースト。
- 前記酸価が40~200mgKOH/gの範囲内である化合物(B)がエポキシアクリレートである請求項1~7のいずれかに記載の感光性導電ペースト
- 前記酸価が40~200mgKOH/gの範囲内である化合物(B)のガラス転移温度が-10~50℃の範囲内である請求項1~8のいずれかに記載の感光性導電ペースト。
- 請求項1~9のいずれかに記載の感光性導電ペーストを基板上に塗布し、乾燥し、露光し、現像した後に100℃以上300℃以下の温度でキュアする導電パターンの製造方法。
- 請求項10記載の導電パターンを備えるタッチパネル。
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US14/386,497 US9081278B2 (en) | 2012-03-22 | 2013-03-04 | Photosensitive conductive paste and method of producing conductive pattern |
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KR101716722B1 (ko) | 2017-03-15 |
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CN104204946A (zh) | 2014-12-10 |
TW201348353A (zh) | 2013-12-01 |
TWI560248B (en) | 2016-12-01 |
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