WO2008108406A1 - フォトレジスト用化合物、フォトレジスト液、およびこれを用いるエッチング方法 - Google Patents

フォトレジスト用化合物、フォトレジスト液、およびこれを用いるエッチング方法 Download PDF

Info

Publication number
WO2008108406A1
WO2008108406A1 PCT/JP2008/053954 JP2008053954W WO2008108406A1 WO 2008108406 A1 WO2008108406 A1 WO 2008108406A1 JP 2008053954 W JP2008053954 W JP 2008053954W WO 2008108406 A1 WO2008108406 A1 WO 2008108406A1
Authority
WO
WIPO (PCT)
Prior art keywords
compound
photoresist
solution
photoresist solution
etching method
Prior art date
Application number
PCT/JP2008/053954
Other languages
English (en)
French (fr)
Inventor
Tetsuya Watanabe
Yoshihisa Usami
Original Assignee
Fujifilm Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2007196756A external-priority patent/JP5078488B2/ja
Priority claimed from JP2007212149A external-priority patent/JP4777313B2/ja
Priority claimed from JP2008047238A external-priority patent/JP5576024B2/ja
Priority claimed from JP2008047130A external-priority patent/JP5401042B2/ja
Priority claimed from JP2008047237A external-priority patent/JP5465393B2/ja
Priority claimed from JP2008047127A external-priority patent/JP5465392B2/ja
Application filed by Fujifilm Corporation filed Critical Fujifilm Corporation
Priority to EP08721374A priority Critical patent/EP2135901A4/en
Priority to US12/530,100 priority patent/US20100104985A1/en
Priority to CN200880007061A priority patent/CN101675117A/zh
Publication of WO2008108406A1 publication Critical patent/WO2008108406A1/ja

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
    • C09B23/00—Methine or polymethine dyes, e.g. cyanine dyes
    • C09B23/02—Methine or polymethine dyes, e.g. cyanine dyes the polymethine chain containing an odd number of >CH- or >C[alkyl]- groups
    • C09B23/04—Methine or polymethine dyes, e.g. cyanine dyes the polymethine chain containing an odd number of >CH- or >C[alkyl]- groups one >CH- group, e.g. cyanines, isocyanines, pseudocyanines
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
    • C09B69/00—Dyes not provided for by a single group of this subclass
    • C09B69/02—Dyestuff salts, e.g. salts of acid dyes with basic dyes
    • C09B69/06—Dyestuff salts, e.g. salts of acid dyes with basic dyes of cationic dyes with organic acids or with inorganic complex acids
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
    • C09B23/00—Methine or polymethine dyes, e.g. cyanine dyes
    • C09B23/0008—Methine or polymethine dyes, e.g. cyanine dyes substituted on the polymethine chain
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
    • C09B23/00—Methine or polymethine dyes, e.g. cyanine dyes
    • C09B23/0008—Methine or polymethine dyes, e.g. cyanine dyes substituted on the polymethine chain
    • C09B23/0016—Methine or polymethine dyes, e.g. cyanine dyes substituted on the polymethine chain the substituent being a halogen atom
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
    • C09B23/00—Methine or polymethine dyes, e.g. cyanine dyes
    • C09B23/0008—Methine or polymethine dyes, e.g. cyanine dyes substituted on the polymethine chain
    • C09B23/005—Methine or polymethine dyes, e.g. cyanine dyes substituted on the polymethine chain the substituent being a COOH and/or a functional derivative thereof
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
    • C09B23/00—Methine or polymethine dyes, e.g. cyanine dyes
    • C09B23/0066—Methine or polymethine dyes, e.g. cyanine dyes the polymethine chain being part of a carbocyclic ring,(e.g. benzene, naphtalene, cyclohexene, cyclobutenene-quadratic acid)
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
    • C09B23/00—Methine or polymethine dyes, e.g. cyanine dyes
    • C09B23/0091—Methine or polymethine dyes, e.g. cyanine dyes having only one heterocyclic ring at one end of the methine chain, e.g. hemicyamines, hemioxonol
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
    • C09B23/00—Methine or polymethine dyes, e.g. cyanine dyes
    • C09B23/02—Methine or polymethine dyes, e.g. cyanine dyes the polymethine chain containing an odd number of >CH- or >C[alkyl]- groups
    • C09B23/06—Methine or polymethine dyes, e.g. cyanine dyes the polymethine chain containing an odd number of >CH- or >C[alkyl]- groups three >CH- groups, e.g. carbocyanines
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
    • C09B23/00—Methine or polymethine dyes, e.g. cyanine dyes
    • C09B23/02—Methine or polymethine dyes, e.g. cyanine dyes the polymethine chain containing an odd number of >CH- or >C[alkyl]- groups
    • C09B23/08—Methine or polymethine dyes, e.g. cyanine dyes the polymethine chain containing an odd number of >CH- or >C[alkyl]- groups more than three >CH- groups, e.g. polycarbocyanines
    • C09B23/083—Methine or polymethine dyes, e.g. cyanine dyes the polymethine chain containing an odd number of >CH- or >C[alkyl]- groups more than three >CH- groups, e.g. polycarbocyanines five >CH- groups
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
    • C09B23/00—Methine or polymethine dyes, e.g. cyanine dyes
    • C09B23/02—Methine or polymethine dyes, e.g. cyanine dyes the polymethine chain containing an odd number of >CH- or >C[alkyl]- groups
    • C09B23/08—Methine or polymethine dyes, e.g. cyanine dyes the polymethine chain containing an odd number of >CH- or >C[alkyl]- groups more than three >CH- groups, e.g. polycarbocyanines
    • C09B23/086—Methine or polymethine dyes, e.g. cyanine dyes the polymethine chain containing an odd number of >CH- or >C[alkyl]- groups more than three >CH- groups, e.g. polycarbocyanines more than five >CH- groups
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
    • C09B23/00—Methine or polymethine dyes, e.g. cyanine dyes
    • C09B23/10—The polymethine chain containing an even number of >CH- groups
    • C09B23/102—The polymethine chain containing an even number of >CH- groups two heterocyclic rings linked carbon-to-carbon
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
    • C09B23/00—Methine or polymethine dyes, e.g. cyanine dyes
    • C09B23/10—The polymethine chain containing an even number of >CH- groups
    • C09B23/107—The polymethine chain containing an even number of >CH- groups four >CH- groups
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
    • C09B29/00—Monoazo dyes prepared by diazotising and coupling
    • C09B29/0025—Monoazo dyes prepared by diazotising and coupling from diazotized amino heterocyclic compounds
    • C09B29/0029—Monoazo dyes prepared by diazotising and coupling from diazotized amino heterocyclic compounds the heterocyclic ring containing only nitrogen as heteroatom
    • C09B29/0033—Monoazo dyes prepared by diazotising and coupling from diazotized amino heterocyclic compounds the heterocyclic ring containing only nitrogen as heteroatom containing a five-membered heterocyclic ring with one nitrogen atom
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
    • C09B29/00—Monoazo dyes prepared by diazotising and coupling
    • C09B29/0025—Monoazo dyes prepared by diazotising and coupling from diazotized amino heterocyclic compounds
    • C09B29/0029—Monoazo dyes prepared by diazotising and coupling from diazotized amino heterocyclic compounds the heterocyclic ring containing only nitrogen as heteroatom
    • C09B29/0037—Monoazo dyes prepared by diazotising and coupling from diazotized amino heterocyclic compounds the heterocyclic ring containing only nitrogen as heteroatom containing a five-membered heterocyclic ring with two nitrogen atoms
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
    • C09B29/00—Monoazo dyes prepared by diazotising and coupling
    • C09B29/0025—Monoazo dyes prepared by diazotising and coupling from diazotized amino heterocyclic compounds
    • C09B29/0029—Monoazo dyes prepared by diazotising and coupling from diazotized amino heterocyclic compounds the heterocyclic ring containing only nitrogen as heteroatom
    • C09B29/004—Monoazo dyes prepared by diazotising and coupling from diazotized amino heterocyclic compounds the heterocyclic ring containing only nitrogen as heteroatom containing a five-membered heterocyclic ring with three nitrogen atoms
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
    • C09B29/00—Monoazo dyes prepared by diazotising and coupling
    • C09B29/0025—Monoazo dyes prepared by diazotising and coupling from diazotized amino heterocyclic compounds
    • C09B29/0029—Monoazo dyes prepared by diazotising and coupling from diazotized amino heterocyclic compounds the heterocyclic ring containing only nitrogen as heteroatom
    • C09B29/0048—Monoazo dyes prepared by diazotising and coupling from diazotized amino heterocyclic compounds the heterocyclic ring containing only nitrogen as heteroatom containing a six-membered heterocyclic ring with one nitrogen atom
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
    • C09B29/00—Monoazo dyes prepared by diazotising and coupling
    • C09B29/0025—Monoazo dyes prepared by diazotising and coupling from diazotized amino heterocyclic compounds
    • C09B29/0062—Monoazo dyes prepared by diazotising and coupling from diazotized amino heterocyclic compounds the heterocyclic ring containing nitrogen and oxygen as heteroatoms
    • C09B29/0066—Monoazo dyes prepared by diazotising and coupling from diazotized amino heterocyclic compounds the heterocyclic ring containing nitrogen and oxygen as heteroatoms containing a five-membered heterocyclic ring with nitrogen and oxygen atoms
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
    • C09B29/00—Monoazo dyes prepared by diazotising and coupling
    • C09B29/0025—Monoazo dyes prepared by diazotising and coupling from diazotized amino heterocyclic compounds
    • C09B29/0074—Monoazo dyes prepared by diazotising and coupling from diazotized amino heterocyclic compounds the heterocyclic ring containing nitrogen and sulfur as heteroatoms
    • C09B29/0077—Monoazo dyes prepared by diazotising and coupling from diazotized amino heterocyclic compounds the heterocyclic ring containing nitrogen and sulfur as heteroatoms containing a five-membered heterocyclic ring with one nitrogen and one sulfur as heteroatoms
    • C09B29/0081—Isothiazoles or condensed isothiazoles
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
    • C09B29/00—Monoazo dyes prepared by diazotising and coupling
    • C09B29/0025—Monoazo dyes prepared by diazotising and coupling from diazotized amino heterocyclic compounds
    • C09B29/0074—Monoazo dyes prepared by diazotising and coupling from diazotized amino heterocyclic compounds the heterocyclic ring containing nitrogen and sulfur as heteroatoms
    • C09B29/0077—Monoazo dyes prepared by diazotising and coupling from diazotized amino heterocyclic compounds the heterocyclic ring containing nitrogen and sulfur as heteroatoms containing a five-membered heterocyclic ring with one nitrogen and one sulfur as heteroatoms
    • C09B29/0085—Thiazoles or condensed thiazoles
    • C09B29/0088—Benzothiazoles
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
    • C09B29/00—Monoazo dyes prepared by diazotising and coupling
    • C09B29/0025—Monoazo dyes prepared by diazotising and coupling from diazotized amino heterocyclic compounds
    • C09B29/0074—Monoazo dyes prepared by diazotising and coupling from diazotized amino heterocyclic compounds the heterocyclic ring containing nitrogen and sulfur as heteroatoms
    • C09B29/0092—Monoazo dyes prepared by diazotising and coupling from diazotized amino heterocyclic compounds the heterocyclic ring containing nitrogen and sulfur as heteroatoms containing a five-membered heterocyclic ring with two nitrogen and one sulfur as heteroatoms
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
    • C09B29/00—Monoazo dyes prepared by diazotising and coupling
    • C09B29/06—Monoazo dyes prepared by diazotising and coupling from coupling components containing amino as the only directing group
    • C09B29/08—Amino benzenes
    • C09B29/0801—Amino benzenes containing acid groups, e.g. COOH, SO3H, PO3H2, OSO3H, OPO3H2; SO2NHSO2R or salts thereof, R being hydrocarbonyls
    • C09B29/0803—Amino benzenes containing acid groups, e.g. COOH, SO3H, PO3H2, OSO3H, OPO3H2; SO2NHSO2R or salts thereof, R being hydrocarbonyls containing SO3H, OSO3H
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
    • C09B29/00—Monoazo dyes prepared by diazotising and coupling
    • C09B29/06—Monoazo dyes prepared by diazotising and coupling from coupling components containing amino as the only directing group
    • C09B29/08—Amino benzenes
    • C09B29/0805—Amino benzenes free of acid groups
    • C09B29/0807—Amino benzenes free of acid groups characterised by the amino group
    • C09B29/0809—Amino benzenes free of acid groups characterised by the amino group substituted amino group
    • C09B29/081—Amino benzenes free of acid groups characterised by the amino group substituted amino group unsubstituted alkylamino, alkenylamino, alkynylamino, cycloalkylamino, aralkylamino or arylamino
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
    • C09B29/00—Monoazo dyes prepared by diazotising and coupling
    • C09B29/06—Monoazo dyes prepared by diazotising and coupling from coupling components containing amino as the only directing group
    • C09B29/08—Amino benzenes
    • C09B29/0805—Amino benzenes free of acid groups
    • C09B29/0807—Amino benzenes free of acid groups characterised by the amino group
    • C09B29/0809—Amino benzenes free of acid groups characterised by the amino group substituted amino group
    • C09B29/0811—Amino benzenes free of acid groups characterised by the amino group substituted amino group further substituted alkylamino, alkenylamino, alkynylamino, cycloalkylamino aralkylamino or arylamino
    • C09B29/083—Amino benzenes free of acid groups characterised by the amino group substituted amino group further substituted alkylamino, alkenylamino, alkynylamino, cycloalkylamino aralkylamino or arylamino having -N< (in a ring)
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
    • C09B29/00—Monoazo dyes prepared by diazotising and coupling
    • C09B29/10—Monoazo dyes prepared by diazotising and coupling from coupling components containing hydroxy as the only directing group
    • C09B29/12—Monoazo dyes prepared by diazotising and coupling from coupling components containing hydroxy as the only directing group of the benzene series
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
    • C09B29/00—Monoazo dyes prepared by diazotising and coupling
    • C09B29/24—Monoazo dyes prepared by diazotising and coupling from coupling components containing both hydroxyl and amino directing groups
    • C09B29/26—Amino phenols
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
    • C09B29/00—Monoazo dyes prepared by diazotising and coupling
    • C09B29/32—Monoazo dyes prepared by diazotising and coupling from coupling components containing a reactive methylene group
    • C09B29/325—Monoazo dyes prepared by diazotising and coupling from coupling components containing a reactive methylene group free of acid groups
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
    • C09B29/00—Monoazo dyes prepared by diazotising and coupling
    • C09B29/32—Monoazo dyes prepared by diazotising and coupling from coupling components containing a reactive methylene group
    • C09B29/33—Aceto- or benzoylacetylarylides
    • C09B29/335—Aceto- or benzoylacetylarylides free of acid groups
    • C09B29/337—Carbocyclic arylides
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
    • C09B29/00—Monoazo dyes prepared by diazotising and coupling
    • C09B29/32—Monoazo dyes prepared by diazotising and coupling from coupling components containing a reactive methylene group
    • C09B29/33—Aceto- or benzoylacetylarylides
    • C09B29/335—Aceto- or benzoylacetylarylides free of acid groups
    • C09B29/338—Heterocyclic arylides, e.g. acetoacetylaminobenzimidazolone
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
    • C09B29/00—Monoazo dyes prepared by diazotising and coupling
    • C09B29/34—Monoazo dyes prepared by diazotising and coupling from other coupling components
    • C09B29/36—Monoazo dyes prepared by diazotising and coupling from other coupling components from heterocyclic compounds
    • C09B29/3604—Monoazo dyes prepared by diazotising and coupling from other coupling components from heterocyclic compounds containing only a nitrogen as heteroatom
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
    • C09B29/00—Monoazo dyes prepared by diazotising and coupling
    • C09B29/34—Monoazo dyes prepared by diazotising and coupling from other coupling components
    • C09B29/36—Monoazo dyes prepared by diazotising and coupling from other coupling components from heterocyclic compounds
    • C09B29/3604—Monoazo dyes prepared by diazotising and coupling from other coupling components from heterocyclic compounds containing only a nitrogen as heteroatom
    • C09B29/3608—Monoazo dyes prepared by diazotising and coupling from other coupling components from heterocyclic compounds containing only a nitrogen as heteroatom containing a five-membered heterocyclic ring with only one nitrogen as heteroatom
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
    • C09B29/00—Monoazo dyes prepared by diazotising and coupling
    • C09B29/34—Monoazo dyes prepared by diazotising and coupling from other coupling components
    • C09B29/36—Monoazo dyes prepared by diazotising and coupling from other coupling components from heterocyclic compounds
    • C09B29/3604—Monoazo dyes prepared by diazotising and coupling from other coupling components from heterocyclic compounds containing only a nitrogen as heteroatom
    • C09B29/3617—Monoazo dyes prepared by diazotising and coupling from other coupling components from heterocyclic compounds containing only a nitrogen as heteroatom containing a six-membered heterocyclic with only one nitrogen as heteroatom
    • C09B29/3621—Monoazo dyes prepared by diazotising and coupling from other coupling components from heterocyclic compounds containing only a nitrogen as heteroatom containing a six-membered heterocyclic with only one nitrogen as heteroatom from a pyridine ring
    • C09B29/3626—Monoazo dyes prepared by diazotising and coupling from other coupling components from heterocyclic compounds containing only a nitrogen as heteroatom containing a six-membered heterocyclic with only one nitrogen as heteroatom from a pyridine ring from a pyridine ring containing one or more hydroxyl groups (or = O)
    • C09B29/3634—Monoazo dyes prepared by diazotising and coupling from other coupling components from heterocyclic compounds containing only a nitrogen as heteroatom containing a six-membered heterocyclic with only one nitrogen as heteroatom from a pyridine ring from a pyridine ring containing one or more hydroxyl groups (or = O) from diazotized heterocyclic rings
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
    • C09B29/00—Monoazo dyes prepared by diazotising and coupling
    • C09B29/34—Monoazo dyes prepared by diazotising and coupling from other coupling components
    • C09B29/36—Monoazo dyes prepared by diazotising and coupling from other coupling components from heterocyclic compounds
    • C09B29/3604—Monoazo dyes prepared by diazotising and coupling from other coupling components from heterocyclic compounds containing only a nitrogen as heteroatom
    • C09B29/3647—Monoazo dyes prepared by diazotising and coupling from other coupling components from heterocyclic compounds containing only a nitrogen as heteroatom containing a five-membered ring with two nitrogen atoms as heteroatoms
    • C09B29/3652—Monoazo dyes prepared by diazotising and coupling from other coupling components from heterocyclic compounds containing only a nitrogen as heteroatom containing a five-membered ring with two nitrogen atoms as heteroatoms containing a 1,2-diazoles or hydrogenated 1,2-diazoles
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
    • C09B29/00—Monoazo dyes prepared by diazotising and coupling
    • C09B29/34—Monoazo dyes prepared by diazotising and coupling from other coupling components
    • C09B29/36—Monoazo dyes prepared by diazotising and coupling from other coupling components from heterocyclic compounds
    • C09B29/3604—Monoazo dyes prepared by diazotising and coupling from other coupling components from heterocyclic compounds containing only a nitrogen as heteroatom
    • C09B29/3647—Monoazo dyes prepared by diazotising and coupling from other coupling components from heterocyclic compounds containing only a nitrogen as heteroatom containing a five-membered ring with two nitrogen atoms as heteroatoms
    • C09B29/3652—Monoazo dyes prepared by diazotising and coupling from other coupling components from heterocyclic compounds containing only a nitrogen as heteroatom containing a five-membered ring with two nitrogen atoms as heteroatoms containing a 1,2-diazoles or hydrogenated 1,2-diazoles
    • C09B29/366—Monoazo dyes prepared by diazotising and coupling from other coupling components from heterocyclic compounds containing only a nitrogen as heteroatom containing a five-membered ring with two nitrogen atoms as heteroatoms containing a 1,2-diazoles or hydrogenated 1,2-diazoles containing hydroxy-1,2-diazoles, e.g. pyrazolone
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
    • C09B29/00—Monoazo dyes prepared by diazotising and coupling
    • C09B29/34—Monoazo dyes prepared by diazotising and coupling from other coupling components
    • C09B29/36—Monoazo dyes prepared by diazotising and coupling from other coupling components from heterocyclic compounds
    • C09B29/3604—Monoazo dyes prepared by diazotising and coupling from other coupling components from heterocyclic compounds containing only a nitrogen as heteroatom
    • C09B29/3665—Monoazo dyes prepared by diazotising and coupling from other coupling components from heterocyclic compounds containing only a nitrogen as heteroatom containing a six-membered heterocyclic ring with two nitrogen atoms
    • C09B29/3669—Monoazo dyes prepared by diazotising and coupling from other coupling components from heterocyclic compounds containing only a nitrogen as heteroatom containing a six-membered heterocyclic ring with two nitrogen atoms from a pyrimidine ring
    • C09B29/3673—Barbituric acid and derivatives thereof
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
    • C09B45/00—Complex metal compounds of azo dyes
    • C09B45/02—Preparation from dyes containing in o-position a hydroxy group and in o'-position hydroxy, alkoxy, carboxyl, amino or keto groups
    • C09B45/14—Monoazo compounds
    • C09B45/20—Monoazo compounds containing cobalt
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
    • C09B47/00—Porphines; Azaporphines
    • C09B47/04—Phthalocyanines abbreviation: Pc
    • C09B47/08—Preparation from other phthalocyanine compounds, e.g. cobaltphthalocyanineamine complex
    • C09B47/12—Obtaining compounds having alkyl radicals, or alkyl radicals substituted by hetero atoms, bound to the phthalocyanine skeleton
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
    • C09B47/00—Porphines; Azaporphines
    • C09B47/04—Phthalocyanines abbreviation: Pc
    • C09B47/08—Preparation from other phthalocyanine compounds, e.g. cobaltphthalocyanineamine complex
    • C09B47/12—Obtaining compounds having alkyl radicals, or alkyl radicals substituted by hetero atoms, bound to the phthalocyanine skeleton
    • C09B47/14—Obtaining compounds having alkyl radicals, or alkyl radicals substituted by hetero atoms, bound to the phthalocyanine skeleton having alkyl radicals substituted by halogen atoms
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
    • C09B47/00—Porphines; Azaporphines
    • C09B47/04—Phthalocyanines abbreviation: Pc
    • C09B47/08—Preparation from other phthalocyanine compounds, e.g. cobaltphthalocyanineamine complex
    • C09B47/18—Obtaining compounds having oxygen atoms directly bound to the phthalocyanine skeleton
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
    • C09B47/00—Porphines; Azaporphines
    • C09B47/04—Phthalocyanines abbreviation: Pc
    • C09B47/08—Preparation from other phthalocyanine compounds, e.g. cobaltphthalocyanineamine complex
    • C09B47/20—Obtaining compounds having sulfur atoms directly bound to the phthalocyanine skeleton
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
    • C09B47/00—Porphines; Azaporphines
    • C09B47/04—Phthalocyanines abbreviation: Pc
    • C09B47/08—Preparation from other phthalocyanine compounds, e.g. cobaltphthalocyanineamine complex
    • C09B47/22—Obtaining compounds having nitrogen atoms directly bound to the phthalocyanine skeleton
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
    • C09B47/00—Porphines; Azaporphines
    • C09B47/04—Phthalocyanines abbreviation: Pc
    • C09B47/08—Preparation from other phthalocyanine compounds, e.g. cobaltphthalocyanineamine complex
    • C09B47/24—Obtaining compounds having —COOH or —SO3H radicals, or derivatives thereof, directly bound to the phthalocyanine radical
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
    • C09B47/00—Porphines; Azaporphines
    • C09B47/04—Phthalocyanines abbreviation: Pc
    • C09B47/08—Preparation from other phthalocyanine compounds, e.g. cobaltphthalocyanineamine complex
    • C09B47/24—Obtaining compounds having —COOH or —SO3H radicals, or derivatives thereof, directly bound to the phthalocyanine radical
    • C09B47/26—Amide radicals
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
    • C09B69/00—Dyes not provided for by a single group of this subclass
    • C09B69/02—Dyestuff salts, e.g. salts of acid dyes with basic dyes
    • C09B69/04—Dyestuff salts, e.g. salts of acid dyes with basic dyes of anionic dyes with nitrogen containing compounds
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G03F7/091—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers characterised by antireflection means or light filtering or absorbing means, e.g. anti-halation, contrast enhancement
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/36—Imagewise removal not covered by groups G03F7/30 - G03F7/34, e.g. using gas streams, using plasma

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Architecture (AREA)
  • Structural Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Materials For Photolithography (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)

Abstract

本発明は、オキソノール色素骨格を有する化合物、シアニン色素、スチリル色素、メロシアニン色素骨格を有する化合物、フタロシアニン色素骨格を有する化合物、アゾ化合物およびアゾ化合物と金属イオンとの錯体化合物からなる群から選ばれたフォトレジスト用化合物に関する。更に本発明は、上記フォトレジスト用化合物を少なくとも一種含むフォトレジスト液および上記フォトレジスト液を使用する被加工表面のエッチング方法を提供する。
PCT/JP2008/053954 2007-03-05 2008-03-05 フォトレジスト用化合物、フォトレジスト液、およびこれを用いるエッチング方法 WO2008108406A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP08721374A EP2135901A4 (en) 2007-03-05 2008-03-05 CONNECTION FOR PHOTORESIST, PHOTORESIST SOLUTION AND USE OF THIS PROCESS
US12/530,100 US20100104985A1 (en) 2007-03-05 2008-03-05 Compound for photoresist, photoresist liquid, and etching method using the same
CN200880007061A CN101675117A (zh) 2007-03-05 2008-03-05 光致抗蚀用化合物、光致抗蚀液及使用其的蚀刻方法

Applications Claiming Priority (20)

Application Number Priority Date Filing Date Title
JP2007054289 2007-03-05
JP2007-054289 2007-03-05
JP2007196756A JP5078488B2 (ja) 2007-03-05 2007-07-27 発光素子およびその製造方法ならびに光学素子およびその製造方法
JP2007-196756 2007-07-27
JP2007-212149 2007-08-16
JP2007212149A JP4777313B2 (ja) 2007-08-16 2007-08-16 光学読取用の情報記録媒体の製造方法
JP2007-267664 2007-10-15
JP2007267665 2007-10-15
JP2007-267665 2007-10-15
JP2007267664 2007-10-15
JP2008047238A JP5576024B2 (ja) 2008-02-28 2008-02-28 フォトレジスト液、およびこれを用いるエッチング方法
JP2008-047127 2008-02-28
JP2008-047130 2008-02-28
JP2008047130A JP5401042B2 (ja) 2008-02-28 2008-02-28 フォトレジスト用化合物、フォトレジスト液、およびこれを用いるエッチング方法
JP2008-047238 2008-02-28
JP2008-047243 2008-02-28
JP2008-047237 2008-02-28
JP2008047237A JP5465393B2 (ja) 2008-02-28 2008-02-28 フォトレジスト液、およびこれを用いるエッチング方法
JP2008047243 2008-02-28
JP2008047127A JP5465392B2 (ja) 2008-02-28 2008-02-28 フォトレジスト液、およびこれを用いるエッチング方法

Publications (1)

Publication Number Publication Date
WO2008108406A1 true WO2008108406A1 (ja) 2008-09-12

Family

ID=39738279

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/053954 WO2008108406A1 (ja) 2007-03-05 2008-03-05 フォトレジスト用化合物、フォトレジスト液、およびこれを用いるエッチング方法

Country Status (5)

Country Link
US (1) US20100104985A1 (ja)
EP (1) EP2135901A4 (ja)
KR (1) KR20090128379A (ja)
CN (1) CN101675117A (ja)
WO (1) WO2008108406A1 (ja)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010035483A1 (ja) * 2008-09-25 2010-04-01 富士フイルム株式会社 光情報記録媒体、情報記録方法、および、アゾ金属錯体色素
WO2010041470A1 (ja) * 2008-10-10 2010-04-15 富士フイルム株式会社 光情報記録媒体、情報記録方法および光増感剤
JP2010164907A (ja) * 2009-01-19 2010-07-29 Mitsubishi Paper Mills Ltd 感光性組成物および平版印刷版
WO2010116594A1 (ja) * 2009-03-30 2010-10-14 富士フイルム株式会社 フォトレジスト材料およびフォトレジスト膜、これを用いるエッチング方法、ならびに新規アゾ色素化合物
JP2013173848A (ja) * 2012-02-24 2013-09-05 Adeka Corp 着色アルカリ現像性感光性組成物
JP2014534641A (ja) * 2011-11-04 2014-12-18 東京エレクトロン株式会社 スパイクアニールプロセスを制御する方法及びシステム
JP2014237824A (ja) * 2008-03-07 2014-12-18 富士フイルム株式会社 アゾ顔料、該アゾ顔料を含む顔料分散物及び着色組成物

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5214696B2 (ja) * 2010-09-27 2013-06-19 富士フイルム株式会社 パタン形成方法、基板製造方法、及びモールド製造方法
KR101556280B1 (ko) 2012-12-07 2015-09-30 제일모직 주식회사 컬러필터용 감광성 수지 조성물 및 이를 이용한 컬러필터
US10011672B2 (en) 2013-05-16 2018-07-03 Samsung Sdi Co., Ltd. Photosensitive resin composition for color filter and color filter using the same
JP6245495B2 (ja) * 2013-05-23 2017-12-13 オリンパス株式会社 光検出器
KR101819656B1 (ko) 2014-05-13 2018-01-17 제일모직 주식회사 감광성 수지 조성물 및 이를 이용한 컬러필터
TWI757545B (zh) * 2017-09-15 2022-03-11 日商關東電化工業股份有限公司 使用酸鹵化物之原子層蝕刻
CN109244198B (zh) * 2018-08-31 2020-07-03 宁波天炬光电科技有限公司 芯片级低成本表面处理方法及一种装置

Citations (58)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE350399C (de) 1919-09-19 1922-03-20 Qu Bernd Ziemert Projektionsschirm
GB1077611A (en) 1964-04-21 1967-08-02 Agfa Ag Spectral sensitisation process
JPS5116675A (ja) 1974-06-21 1976-02-10 Ici Ltd
JPS54151024A (en) * 1978-05-18 1979-11-27 Fuji Photo Film Co Ltd Photopolymerizable composition
JPS5829803A (ja) * 1981-08-17 1983-02-22 Mitsubishi Chem Ind Ltd 光重合性組成物
JPS58175693A (ja) 1982-04-08 1983-10-14 Ricoh Co Ltd 高密度光情報記録媒体
JPS58224351A (ja) * 1982-06-23 1983-12-26 Fuji Photo Film Co Ltd 感光性印刷版
JPS5981194A (ja) 1982-11-01 1984-05-10 Tdk Corp 光記録媒体
JPS59189340A (ja) * 1983-04-13 1984-10-26 Nippon Oil & Fats Co Ltd 高感度光重合開始剤組成物
JPS6018387A (ja) 1983-07-11 1985-01-30 Tdk Corp 光記録媒体
JPS6019587A (ja) 1983-07-13 1985-01-31 Tdk Corp 光記録媒体
JPS6019586A (ja) 1983-07-13 1985-01-31 Tdk Corp 光記録媒体
JPS6035054A (ja) 1983-08-05 1985-02-22 Tdk Corp 光記録媒体
JPS6036190A (ja) 1983-08-09 1985-02-25 Tdk Corp 光記録媒体
JPS6036191A (ja) 1983-08-09 1985-02-25 Tdk Corp 光記録媒体
JPS6044554A (ja) 1983-08-20 1985-03-09 Tdk Corp 光記録媒体
JPS6044555A (ja) 1983-08-20 1985-03-09 Tdk Corp 光記録媒体
JPS6044390A (ja) 1983-08-23 1985-03-09 Tdk Corp 光記録媒体
JPS6044389A (ja) 1983-08-23 1985-03-09 Tdk Corp 光記録媒体
JPS6047069A (ja) 1983-08-24 1985-03-14 Tdk Corp 光記録媒体
JPS6054892A (ja) 1983-09-05 1985-03-29 Tdk Corp 光記録媒体
JPS6060104A (ja) * 1983-09-12 1985-04-06 Fuji Photo Film Co Ltd 光重合性組成物
JPS61141443A (ja) * 1984-12-14 1986-06-28 Nippon Telegr & Teleph Corp <Ntt> パタ−ン形成材料およびパタ−ン形成方法
JPS61148162A (ja) 1984-12-20 1986-07-05 Nippon Sheet Glass Co Ltd ビオロゲン誘導体
JPS63209995A (ja) 1987-02-27 1988-08-31 Fuji Photo Film Co Ltd 光学的情報記録媒体
JPS642034A (en) * 1987-06-25 1989-01-06 Sumitomo Chem Co Ltd Photoresist composition
JPH0196171A (ja) 1987-10-09 1989-04-14 Kootec Kk ビオロゲン誘導体の製造方法
JPH0138680B2 (ja) 1982-09-27 1989-08-15 Tdk Electronics Co Ltd
JPH02136857A (ja) * 1988-11-18 1990-05-25 Canon Inc 感光性樹脂組成物
US4968593A (en) 1987-02-27 1990-11-06 Fuji Photo Film Co., Ltd. Optical information recording medium
JPH0425492A (ja) 1990-05-21 1992-01-29 Tdk Corp 光記録媒体
JPH0626028B2 (ja) 1984-02-06 1994-04-06 株式会社リコー 光情報記録媒体
JPH10297103A (ja) 1996-09-30 1998-11-10 Fuji Photo Film Co Ltd 情報記録媒体及びオキソノール化合物
JPH11348420A (ja) 1998-06-04 1999-12-21 Fuji Photo Film Co Ltd 情報記録媒体
JP2000052658A (ja) 1998-06-04 2000-02-22 Fuji Photo Film Co Ltd 情報記録媒体及び新規オキソノ―ル化合物
JP2000272241A (ja) 1999-03-23 2000-10-03 Fuji Photo Film Co Ltd 光情報記録媒体および情報記録方法
JP3096239B2 (ja) 1996-04-01 2000-10-10 太陽誘電株式会社 光ディスクのランニングｏｐｃ方法及び光ディスク記録再生装置
JP2001022059A (ja) * 1999-07-08 2001-01-26 Tokyo Ohka Kogyo Co Ltd パターン形成用組成物、それを用いた画像記録材料、および記録材料の製造方法
US6225024B1 (en) 1998-06-04 2001-05-01 Fuji Photo Film Co., Ltd. Information recording medium
JP2001232945A (ja) 2000-02-25 2001-08-28 Fuji Photo Film Co Ltd 光情報記録媒体及び情報記録方法
JP2002074740A (ja) 2000-08-25 2002-03-15 Hayashibara Biochem Lab Inc 光記録媒体
US20020195609A1 (en) 2001-06-25 2002-12-26 Shunji Yoshitake Semiconductor light emitting device
JP2003174171A (ja) 2001-12-06 2003-06-20 Sharp Corp 機能線、それを用いたトランジスタアレイ、アクティブマトリクス基板、表示装置、半導体装置並びにトランジスタアレイおよびアクティブマトリクス基板の製造方法
JP2003174191A (ja) 2001-06-25 2003-06-20 Toshiba Corp 半導体発光素子及びその製造方法
US20030132445A1 (en) 2002-01-15 2003-07-17 Shunji Yoshitake Semiconductor light emission device and manufacturing method thereof
JP2003203348A (ja) 2001-10-31 2003-07-18 Yamaha Corp 光ディスク記録装置および画像形成方法
US6670475B2 (en) 1996-09-30 2003-12-30 Fuji Photo Film Co., Ltd. Information recording medium
JP2005250224A (ja) * 2004-03-05 2005-09-15 Fuji Photo Film Co Ltd 着色硬化性組成物、カラーフィルタ及びその製造方法
JP2007054289A (ja) 2005-08-24 2007-03-08 Aisin Seiki Co Ltd 簡易型オムツ交換ベッド
JP2007196756A (ja) 2006-01-24 2007-08-09 Toyota Motor Corp 車両の制御装置および車両
JP2007212149A (ja) 2006-02-07 2007-08-23 Ono Sokki Co Ltd シャシダイナモメータの車両固定装置
JP2007267664A (ja) 2006-03-31 2007-10-18 Kubota Corp 水田作業機
JP2007267665A (ja) 2006-03-31 2007-10-18 Japan Health Science Foundation 新規骨吸収抑制剤のスクリーニング方法および新規骨吸収抑制剤
JP2008047237A (ja) 2006-08-18 2008-02-28 Konica Minolta Opto Inc 光ピックアップ装置
JP2008047238A (ja) 2006-08-18 2008-02-28 Fujitsu Ltd 不揮発性半導体メモリ
JP2008047130A (ja) 2006-08-16 2008-02-28 Fisher Rosemount Syst Inc プロセス制御システムを維持管理するためのシステムと方法
JP2008047127A (ja) 2006-08-14 2008-02-28 Samsung Electronics Co Ltd 適応的外乱抑制方法、コンピュータで読み取り可能な記録媒体、適応的外乱抑制装置、ディスクドライブ装置、およびディスクドライブ装置制御方法
JP2008047243A (ja) 2006-08-18 2008-02-28 Fujitsu Ltd 集積回路

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4307182A (en) * 1980-05-23 1981-12-22 Minnesota Mining And Manufacturing Company Imaging systems with tetra(aliphatic) borate salts
US4636459A (en) * 1985-03-06 1987-01-13 Fuji Photo Film Co., Ltd. Photopolymerizable compositions
DE3541534A1 (de) * 1985-11-25 1987-05-27 Hoechst Ag Positiv arbeitendes strahlungsempfindliches gemisch
DE68921146T2 (de) * 1988-11-11 1995-06-14 Fuji Photo Film Co Ltd Lichtempfindliche Zusammensetzung.
GB9004337D0 (en) * 1990-02-27 1990-04-25 Minnesota Mining & Mfg Preparation and use of dyes
JP3672634B2 (ja) * 1994-09-09 2005-07-20 株式会社ルネサステクノロジ データ処理装置
KR100508699B1 (ko) * 2001-08-09 2005-08-17 학교법인 한양학원 Ａｆｍ 리소그래피용 아조 화합물 레지스트
US6562527B2 (en) * 2001-08-17 2003-05-13 Kodak Polychrome Graphics Llc Imaged members and method of preparation thereof

Patent Citations (59)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE350399C (de) 1919-09-19 1922-03-20 Qu Bernd Ziemert Projektionsschirm
GB1077611A (en) 1964-04-21 1967-08-02 Agfa Ag Spectral sensitisation process
JPS5116675A (ja) 1974-06-21 1976-02-10 Ici Ltd
JPS54151024A (en) * 1978-05-18 1979-11-27 Fuji Photo Film Co Ltd Photopolymerizable composition
JPS5829803A (ja) * 1981-08-17 1983-02-22 Mitsubishi Chem Ind Ltd 光重合性組成物
JPS58175693A (ja) 1982-04-08 1983-10-14 Ricoh Co Ltd 高密度光情報記録媒体
JPS58224351A (ja) * 1982-06-23 1983-12-26 Fuji Photo Film Co Ltd 感光性印刷版
JPH0138680B2 (ja) 1982-09-27 1989-08-15 Tdk Electronics Co Ltd
JPS5981194A (ja) 1982-11-01 1984-05-10 Tdk Corp 光記録媒体
JPS59189340A (ja) * 1983-04-13 1984-10-26 Nippon Oil & Fats Co Ltd 高感度光重合開始剤組成物
JPS6018387A (ja) 1983-07-11 1985-01-30 Tdk Corp 光記録媒体
JPS6019587A (ja) 1983-07-13 1985-01-31 Tdk Corp 光記録媒体
JPS6019586A (ja) 1983-07-13 1985-01-31 Tdk Corp 光記録媒体
JPS6035054A (ja) 1983-08-05 1985-02-22 Tdk Corp 光記録媒体
JPS6036191A (ja) 1983-08-09 1985-02-25 Tdk Corp 光記録媒体
JPS6036190A (ja) 1983-08-09 1985-02-25 Tdk Corp 光記録媒体
JPS6044554A (ja) 1983-08-20 1985-03-09 Tdk Corp 光記録媒体
JPS6044555A (ja) 1983-08-20 1985-03-09 Tdk Corp 光記録媒体
JPS6044390A (ja) 1983-08-23 1985-03-09 Tdk Corp 光記録媒体
JPS6044389A (ja) 1983-08-23 1985-03-09 Tdk Corp 光記録媒体
JPS6047069A (ja) 1983-08-24 1985-03-14 Tdk Corp 光記録媒体
JPS6054892A (ja) 1983-09-05 1985-03-29 Tdk Corp 光記録媒体
JPS6060104A (ja) * 1983-09-12 1985-04-06 Fuji Photo Film Co Ltd 光重合性組成物
JPH0626028B2 (ja) 1984-02-06 1994-04-06 株式会社リコー 光情報記録媒体
JPS61141443A (ja) * 1984-12-14 1986-06-28 Nippon Telegr & Teleph Corp <Ntt> パタ−ン形成材料およびパタ−ン形成方法
JPS61148162A (ja) 1984-12-20 1986-07-05 Nippon Sheet Glass Co Ltd ビオロゲン誘導体
US4968593A (en) 1987-02-27 1990-11-06 Fuji Photo Film Co., Ltd. Optical information recording medium
JPS63209995A (ja) 1987-02-27 1988-08-31 Fuji Photo Film Co Ltd 光学的情報記録媒体
JPS642034A (en) * 1987-06-25 1989-01-06 Sumitomo Chem Co Ltd Photoresist composition
JPH0196171A (ja) 1987-10-09 1989-04-14 Kootec Kk ビオロゲン誘導体の製造方法
JPH02136857A (ja) * 1988-11-18 1990-05-25 Canon Inc 感光性樹脂組成物
JPH0425492A (ja) 1990-05-21 1992-01-29 Tdk Corp 光記録媒体
JP3096239B2 (ja) 1996-04-01 2000-10-10 太陽誘電株式会社 光ディスクのランニングｏｐｃ方法及び光ディスク記録再生装置
JPH10297103A (ja) 1996-09-30 1998-11-10 Fuji Photo Film Co Ltd 情報記録媒体及びオキソノール化合物
US6670475B2 (en) 1996-09-30 2003-12-30 Fuji Photo Film Co., Ltd. Information recording medium
JPH11348420A (ja) 1998-06-04 1999-12-21 Fuji Photo Film Co Ltd 情報記録媒体
JP2000052658A (ja) 1998-06-04 2000-02-22 Fuji Photo Film Co Ltd 情報記録媒体及び新規オキソノ―ル化合物
US6225024B1 (en) 1998-06-04 2001-05-01 Fuji Photo Film Co., Ltd. Information recording medium
JP2000272241A (ja) 1999-03-23 2000-10-03 Fuji Photo Film Co Ltd 光情報記録媒体および情報記録方法
JP2001022059A (ja) * 1999-07-08 2001-01-26 Tokyo Ohka Kogyo Co Ltd パターン形成用組成物、それを用いた画像記録材料、および記録材料の製造方法
JP2001232945A (ja) 2000-02-25 2001-08-28 Fuji Photo Film Co Ltd 光情報記録媒体及び情報記録方法
JP2002074740A (ja) 2000-08-25 2002-03-15 Hayashibara Biochem Lab Inc 光記録媒体
JP2003174191A (ja) 2001-06-25 2003-06-20 Toshiba Corp 半導体発光素子及びその製造方法
US20020195609A1 (en) 2001-06-25 2002-12-26 Shunji Yoshitake Semiconductor light emitting device
JP2003203348A (ja) 2001-10-31 2003-07-18 Yamaha Corp 光ディスク記録装置および画像形成方法
JP2003174171A (ja) 2001-12-06 2003-06-20 Sharp Corp 機能線、それを用いたトランジスタアレイ、アクティブマトリクス基板、表示装置、半導体装置並びにトランジスタアレイおよびアクティブマトリクス基板の製造方法
US20030132445A1 (en) 2002-01-15 2003-07-17 Shunji Yoshitake Semiconductor light emission device and manufacturing method thereof
JP2003209283A (ja) 2002-01-15 2003-07-25 Toshiba Corp 半導体発光素子及びその製造方法
JP2005250224A (ja) * 2004-03-05 2005-09-15 Fuji Photo Film Co Ltd 着色硬化性組成物、カラーフィルタ及びその製造方法
JP2007054289A (ja) 2005-08-24 2007-03-08 Aisin Seiki Co Ltd 簡易型オムツ交換ベッド
JP2007196756A (ja) 2006-01-24 2007-08-09 Toyota Motor Corp 車両の制御装置および車両
JP2007212149A (ja) 2006-02-07 2007-08-23 Ono Sokki Co Ltd シャシダイナモメータの車両固定装置
JP2007267664A (ja) 2006-03-31 2007-10-18 Kubota Corp 水田作業機
JP2007267665A (ja) 2006-03-31 2007-10-18 Japan Health Science Foundation 新規骨吸収抑制剤のスクリーニング方法および新規骨吸収抑制剤
JP2008047127A (ja) 2006-08-14 2008-02-28 Samsung Electronics Co Ltd 適応的外乱抑制方法、コンピュータで読み取り可能な記録媒体、適応的外乱抑制装置、ディスクドライブ装置、およびディスクドライブ装置制御方法
JP2008047130A (ja) 2006-08-16 2008-02-28 Fisher Rosemount Syst Inc プロセス制御システムを維持管理するためのシステムと方法
JP2008047237A (ja) 2006-08-18 2008-02-28 Konica Minolta Opto Inc 光ピックアップ装置
JP2008047238A (ja) 2006-08-18 2008-02-28 Fujitsu Ltd 不揮発性半導体メモリ
JP2008047243A (ja) 2006-08-18 2008-02-28 Fujitsu Ltd 集積回路

Non-Patent Citations (8)

* Cited by examiner, † Cited by third party
Title
"Rodd's Chemistry of Carbon Compounds", vol. IV, 1977, ELSEVIER SCIENCE PUBLISHING COMPANY, INC., pages: 369 - 422
C. C. LEZNOFF; A. B. P. LEVER: "Phthalocyanines - Properties and Applications", VCH, pages: 1 - 54
CHEM. REV., vol. 91, 1991, pages 165
D. M. STURMER: "Heterocyclic Compounds - Special topics in heterocyclic chemistry", vol. 14, 1977, JOHN WILEY & SONS, pages: 482 - 515
F. M. HARMER: "Heterocyclic Compounds - Cyanine Dyes and Related Compounds", 1964, JOHN WILEY & SONS
JOURNAL OF THE CHEMICAL SOCIETY OF JAPAN, October 1992 (1992-10-01), pages 1
See also references of EP2135901A4
SHIRAI; KOBAYASHI: "Phthalocyanme Chemistry and Functions", IPC, pages: 1 - 62

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014237824A (ja) * 2008-03-07 2014-12-18 富士フイルム株式会社 アゾ顔料、該アゾ顔料を含む顔料分散物及び着色組成物
WO2010035483A1 (ja) * 2008-09-25 2010-04-01 富士フイルム株式会社 光情報記録媒体、情報記録方法、および、アゾ金属錯体色素
JP2010100029A (ja) * 2008-09-25 2010-05-06 Fujifilm Corp 光情報記録媒体、情報記録方法、および、アゾ金属錯体色素
US8808824B2 (en) 2008-09-25 2014-08-19 Fujifilm Corporation Optical information recording medium, method of recording information and azo metal complex dye
TWI477563B (zh) * 2008-09-25 2015-03-21 Fujifilm Corp 光資訊記錄媒體、資訊記錄方法、以及偶氮金屬錯體色素
WO2010041470A1 (ja) * 2008-10-10 2010-04-15 富士フイルム株式会社 光情報記録媒体、情報記録方法および光増感剤
JP2010164907A (ja) * 2009-01-19 2010-07-29 Mitsubishi Paper Mills Ltd 感光性組成物および平版印刷版
WO2010116594A1 (ja) * 2009-03-30 2010-10-14 富士フイルム株式会社 フォトレジスト材料およびフォトレジスト膜、これを用いるエッチング方法、ならびに新規アゾ色素化合物
JP2014534641A (ja) * 2011-11-04 2014-12-18 東京エレクトロン株式会社 スパイクアニールプロセスを制御する方法及びシステム
JP2013173848A (ja) * 2012-02-24 2013-09-05 Adeka Corp 着色アルカリ現像性感光性組成物

Also Published As

Publication number Publication date
EP2135901A1 (en) 2009-12-23
EP2135901A4 (en) 2013-02-13
KR20090128379A (ko) 2009-12-15
CN101675117A (zh) 2010-03-17
US20100104985A1 (en) 2010-04-29

Similar Documents

Publication Publication Date Title
WO2008108406A1 (ja) フォトレジスト用化合物、フォトレジスト液、およびこれを用いるエッチング方法
WO2008123404A1 (ja) シアニン化合物、該化合物を用いた光学フィルター及び光学記録材料
CA2550266A1 (en) Deployable zonal isolation system
WO2007014339A3 (en) Method and apparatus for coupling expandable tubular members
JP2009508710A5 (ja)
WO2007095312A3 (en) Image reconstruction from limited or incomplete data
WO2008024948A3 (en) Apparatus and methods for enhancing optical coherence tomography imaging using volumetric filtering techniques
WO2007139924A3 (en) Apparatus for making bio-organic compounds
CL2007003274A1 (es) Un metodo para tomar muestras de semilla, que comprende posicionar automaticamente la semilla en una orientacion predeterminada, retirar una muestra mensurable proveniente de la semilla; y aparato para tomar muestras de una o mas semilla.
WO2008153712A3 (en) Method for introducing nucleic acids into fungal cells
WO2010093726A3 (en) Large stokes shift dyes
WO2008104174A3 (en) A strengthening structure for a wind turbine blade, a wind turbine blade, a method for assembling a wind turbine blade and use hereof.
WO2007100933A3 (en) Etch selectivity enhancement, deposition quality evaluation, structural modification and three-dimensional imaging using electron beam activated chemical etch
WO2006128009A3 (en) Supplement composition and method of use for enhancement of dna repair process
WO2009051065A1 (ja) 画像生成方法、装置、およびそのプログラム並びにプログラムを記録した記録媒体
WO2007050160A3 (en) Firmware filters and patches
WO2007021677A3 (en) Method of making a fuel cell component using an easily removed mask
WO2007121022A3 (en) Peer to peer gateway
WO2008039321A3 (en) Iterative process with rotated architecture for reduced pipeline dependency
EP1940967A4 (en) METHOD FOR THE PRODUCTION OF A METAL PHTHALOCYANINE COMPOUND AND METHOD FOR THE PRODUCTION OF A PHTHALOCYANINE COMPOUND AND AN ANALOGON THEREOF
WO2010071840A3 (en) Conforming components using reverse engineering
WO2009054109A1 (ja) 基板搬送装置および基板搬送方法
WO2008005081A3 (en) Method or providing a customer with increased integrated circuit performance
DE112006003617A5 (de) Antireflexbeschichtung auf Solarzellen, sowie Verfahren zum Herstellen einer solchen Antireflexbeschichtung
WO2009102709A3 (en) Radially supported seal and method

Legal Events

Date Code Title Description
WWE Wipo information: entry into national phase

Ref document number: 200880007061.3

Country of ref document: CN

121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 08721374

Country of ref document: EP

Kind code of ref document: A1

WWE Wipo information: entry into national phase

Ref document number: 1020097016473

Country of ref document: KR

NENP Non-entry into the national phase

Ref country code: DE

WWE Wipo information: entry into national phase

Ref document number: 2008721374

Country of ref document: EP

WWE Wipo information: entry into national phase

Ref document number: 5834/CHENP/2009

Country of ref document: IN