DE112006003617A5 - Antireflexbeschichtung auf Solarzellen, sowie Verfahren zum Herstellen einer solchen Antireflexbeschichtung - Google Patents

Antireflexbeschichtung auf Solarzellen, sowie Verfahren zum Herstellen einer solchen Antireflexbeschichtung Download PDF

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Publication number
DE112006003617A5
DE112006003617A5 DE112006003617T DE112006003617T DE112006003617A5 DE 112006003617 A5 DE112006003617 A5 DE 112006003617A5 DE 112006003617 T DE112006003617 T DE 112006003617T DE 112006003617 T DE112006003617 T DE 112006003617T DE 112006003617 A5 DE112006003617 A5 DE 112006003617A5
Authority
DE
Germany
Prior art keywords
antireflection coating
producing
solar cells
antireflection
coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE112006003617T
Other languages
English (en)
Inventor
Rainer Moeller
Robert Michael Hartung
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centrotherm Photovoltaics AG
Original Assignee
Centrotherm Photovoltaics AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centrotherm Photovoltaics AG filed Critical Centrotherm Photovoltaics AG
Publication of DE112006003617A5 publication Critical patent/DE112006003617A5/de
Withdrawn legal-status Critical Current

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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02Details
    • H01L31/0216Coatings
    • H01L31/02161Coatings for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/02167Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells
    • H01L31/02168Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells the coatings being antireflective or having enhancing optical properties for the solar cells
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Sustainable Development (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Power Engineering (AREA)
  • Sustainable Energy (AREA)
  • Manufacturing & Machinery (AREA)
  • Photovoltaic Devices (AREA)
  • Chemical Vapour Deposition (AREA)
DE112006003617T 2005-11-02 2006-11-02 Antireflexbeschichtung auf Solarzellen, sowie Verfahren zum Herstellen einer solchen Antireflexbeschichtung Withdrawn DE112006003617A5 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102005052556.3 2005-11-02
DE102005052556 2005-11-02
PCT/DE2006/001927 WO2007051457A2 (de) 2005-11-02 2006-11-02 Antireflexbeschichtung auf solarzellen, sowie verfahren zum herstellen einer solchen antireflexbeschichtung

Publications (1)

Publication Number Publication Date
DE112006003617A5 true DE112006003617A5 (de) 2008-10-02

Family

ID=37845100

Family Applications (1)

Application Number Title Priority Date Filing Date
DE112006003617T Withdrawn DE112006003617A5 (de) 2005-11-02 2006-11-02 Antireflexbeschichtung auf Solarzellen, sowie Verfahren zum Herstellen einer solchen Antireflexbeschichtung

Country Status (9)

Country Link
US (1) US20090071535A1 (de)
EP (1) EP1946386A2 (de)
KR (1) KR20080076913A (de)
CN (1) CN101305471B (de)
AU (1) AU2006310865B2 (de)
DE (1) DE112006003617A5 (de)
NO (1) NO20082555L (de)
WO (1) WO2007051457A2 (de)
ZA (1) ZA200804128B (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8168462B2 (en) * 2009-06-05 2012-05-01 Applied Materials, Inc. Passivation process for solar cell fabrication
WO2011017659A1 (en) * 2009-08-06 2011-02-10 Energy Focus, Inc. Method of passivating and reducing reflectance of a photovoltaic cell
CN102612735B (zh) * 2009-10-26 2015-12-16 新南创新私人有限公司 用于硅太阳能电池的改善的金属化方法
DE102010000002B4 (de) 2010-01-04 2013-02-21 Roth & Rau Ag Verfahren zur Abscheidung von Mehrlagenschichten und/oder Gradientenschichten
DE102010000001A1 (de) 2010-01-04 2011-07-07 Roth & Rau AG, 09337 Inline-Beschichtungsanlage
EP2613358A2 (de) 2012-01-04 2013-07-10 OC Oerlikon Balzers AG Doppelschichtige Antireflexbeschichtung für siliziumbasierte Solarzellenmodule
CN104269446B (zh) * 2014-10-18 2016-08-31 中山市创科科研技术服务有限公司 一种太阳能电池用减反射镀层晶体硅片及制备方法
GB202216076D0 (en) * 2022-10-31 2022-12-14 Extraterrestrial Power Pty Ltd Solar cell

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58128775A (ja) * 1982-01-28 1983-08-01 Toshiba Corp 太陽電池の製造方法
US5418019A (en) * 1994-05-25 1995-05-23 Georgia Tech Research Corporation Method for low temperature plasma enhanced chemical vapor deposition (PECVD) of an oxide and nitride antireflection coating on silicon
AU701213B2 (en) * 1995-10-05 1999-01-21 Suniva, Inc. Self-aligned locally deep-diffused emitter solar cell
US20060130891A1 (en) * 2004-10-29 2006-06-22 Carlson David E Back-contact photovoltaic cells

Also Published As

Publication number Publication date
AU2006310865A1 (en) 2007-05-10
WO2007051457A3 (de) 2007-07-05
CN101305471B (zh) 2010-09-08
US20090071535A1 (en) 2009-03-19
NO20082555L (no) 2008-07-09
KR20080076913A (ko) 2008-08-20
ZA200804128B (en) 2009-06-24
AU2006310865B2 (en) 2012-05-24
EP1946386A2 (de) 2008-07-23
CN101305471A (zh) 2008-11-12
WO2007051457A2 (de) 2007-05-10

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