TWI665173B - 氧化物燒結體、其製造方法及濺鍍靶 - Google Patents

氧化物燒結體、其製造方法及濺鍍靶 Download PDF

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TWI665173B
TWI665173B TW103145552A TW103145552A TWI665173B TW I665173 B TWI665173 B TW I665173B TW 103145552 A TW103145552 A TW 103145552A TW 103145552 A TW103145552 A TW 103145552A TW I665173 B TWI665173 B TW I665173B
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Taiwan
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sintered body
oxide sintered
phase
oxide
elements
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TW103145552A
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English (en)
Chinese (zh)
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TW201533005A (zh
Inventor
Shigekazu Tomai
笘井重和
Kazuyoshi Inoue
井上一吉
Kazuaki Ebata
江端一晃
Masatoshi Shibata
柴田雅敏
Futoshi Utsuno
宇都野太
Yuki TSURUMA
霍間勇輝
Yu Ishihara
石原悠
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Idemitsu Kosan Co., Ltd.
日商出光興產股份有限公司
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TWI719820B (zh) * 2020-01-31 2021-02-21 光洋應用材料科技股份有限公司 銦鋯氧化物靶材及其製法及銦鋯氧化物薄膜
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