CN115340360B - 氧化物烧结体、该烧结体的制造方法及溅射靶 - Google Patents

氧化物烧结体、该烧结体的制造方法及溅射靶 Download PDF

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CN115340360B
CN115340360B CN202211043880.1A CN202211043880A CN115340360B CN 115340360 B CN115340360 B CN 115340360B CN 202211043880 A CN202211043880 A CN 202211043880A CN 115340360 B CN115340360 B CN 115340360B
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sintered body
oxide sintered
body according
oxide
phase
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CN115340360A (zh
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笘井重和
井上一吉
江端一晃
柴田雅敏
宇都野太
霍间勇辉
石原悠
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Idemitsu Kosan Co Ltd
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