KR100753328B1 - 스퍼터링 타겟트, 광 정보기록 매체용 박막 및 그 제조방법 - Google Patents
스퍼터링 타겟트, 광 정보기록 매체용 박막 및 그 제조방법 Download PDFInfo
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- KR100753328B1 KR100753328B1 KR1020057016161A KR20057016161A KR100753328B1 KR 100753328 B1 KR100753328 B1 KR 100753328B1 KR 1020057016161 A KR1020057016161 A KR 1020057016161A KR 20057016161 A KR20057016161 A KR 20057016161A KR 100753328 B1 KR100753328 B1 KR 100753328B1
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/086—Oxides of zinc, germanium, cadmium, indium, tin, thallium or bismuth
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- C04B35/453—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zinc, tin, or bismuth oxides or solid solutions thereof with other oxides, e.g. zincates, stannates or bismuthates
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Abstract
Description
Claims (8)
- A, B는 각각 상이한 3가 이상의 양성 원소이며 그 가수는 각각 Ka, Kb로 했을 때, AXBYO(Kax+Kby)/2(ZnO)m, 3<m<9, X ≤m, 0 < Y ≤0.9, X+Y=2를 만족하는 화합물이며, 또한 A가 인듐, 상대밀도가 90% 이상, 타겟트 내에 있어서의 아연 이외의, 양성원소의 격차의 범위가 0.5% 이내, 타겟트 내에 있어서의 밀도의 격차의 범위가 3% 이내인 것을 특징으로 하는 스퍼터링 타겟트
- 삭제
- 삭제
- 삭제
- 삭제
- 제1항에 기재된 스퍼터링용 타겟트를 사용하여 형성된 광 정보기록 매체용 박막
- 제6항에 있어서, 반사층 혹은 기록층과 인접하여 사용되는 것을 특징으로 하는광 정보기록 매체용 박막
- 제1항에 기재된 스퍼터링용 타겟트를 사용하여 직류 스퍼터로 박막을 형성하는 것을 특징으로 하는 광 정보기록 매채용 박막의 제조방법
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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JP2003056884 | 2003-03-04 | ||
JPJP-P-2003-00056884 | 2003-03-04 |
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KR20050106473A KR20050106473A (ko) | 2005-11-09 |
KR100753328B1 true KR100753328B1 (ko) | 2007-08-29 |
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JP (3) | JP4611198B2 (ko) |
KR (1) | KR100753328B1 (ko) |
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US20080299415A1 (en) | 2008-12-04 |
US20100167000A1 (en) | 2010-07-01 |
JP2009062618A (ja) | 2009-03-26 |
CN1756857B (zh) | 2010-09-29 |
CN101650955A (zh) | 2010-02-17 |
JP4699504B2 (ja) | 2011-06-15 |
US7892457B2 (en) | 2011-02-22 |
CN101650955B (zh) | 2011-08-24 |
US7718095B2 (en) | 2010-05-18 |
JPWO2004079038A1 (ja) | 2006-06-08 |
TWI304446B (ko) | 2008-12-21 |
JP4611198B2 (ja) | 2011-01-12 |
US20100240521A1 (en) | 2010-09-23 |
TW200417619A (en) | 2004-09-16 |
US20060147740A1 (en) | 2006-07-06 |
WO2004079038A1 (ja) | 2004-09-16 |
JP4965540B2 (ja) | 2012-07-04 |
KR20050106473A (ko) | 2005-11-09 |
JP2009080924A (ja) | 2009-04-16 |
US7635440B2 (en) | 2009-12-22 |
CN1756857A (zh) | 2006-04-05 |
US7897068B2 (en) | 2011-03-01 |
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