TWI540115B - 壓電材料、壓電元件、及電子設備 - Google Patents
壓電材料、壓電元件、及電子設備 Download PDFInfo
- Publication number
- TWI540115B TWI540115B TW102129283A TW102129283A TWI540115B TW I540115 B TWI540115 B TW I540115B TW 102129283 A TW102129283 A TW 102129283A TW 102129283 A TW102129283 A TW 102129283A TW I540115 B TWI540115 B TW I540115B
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- Prior art keywords
- piezoelectric
- piezoelectric material
- piezoelectric element
- mol
- electrode
- Prior art date
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- 239000000463 material Substances 0.000 title claims 16
- 239000007788 liquid Substances 0.000 claims 5
- 239000000919 ceramic Substances 0.000 claims 4
- 229910044991 metal oxide Inorganic materials 0.000 claims 4
- 150000004706 metal oxides Chemical class 0.000 claims 4
- 239000000428 dust Substances 0.000 claims 3
- 229910052759 nickel Inorganic materials 0.000 claims 3
- 239000013078 crystal Substances 0.000 claims 2
- 229910052748 manganese Inorganic materials 0.000 claims 2
- 238000005245 sintering Methods 0.000 claims 2
- 239000002002 slurry Substances 0.000 claims 2
- 239000000654 additive Substances 0.000 claims 1
- 230000000996 additive effect Effects 0.000 claims 1
- 229910052802 copper Inorganic materials 0.000 claims 1
- 150000002736 metal compounds Chemical class 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 230000003287 optical effect Effects 0.000 claims 1
- 229910052763 palladium Inorganic materials 0.000 claims 1
- 239000000843 powder Substances 0.000 claims 1
- 238000002360 preparation method Methods 0.000 claims 1
- 229910052709 silver Inorganic materials 0.000 claims 1
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- H—ELECTRICITY
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- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/853—Ceramic compositions
- H10N30/8542—Alkali metal based oxides, e.g. lithium, sodium or potassium niobates
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- H10N30/8536—Alkaline earth metal based oxides, e.g. barium titanates
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
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- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
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- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
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- C04B35/495—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on vanadium, niobium, tantalum, molybdenum or tungsten oxides or solid solutions thereof with other oxides, e.g. vanadates, niobates, tantalates, molybdates or tungstates
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- H02N2/001—Driving devices, e.g. vibrators
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- H02N2/106—Langevin motors
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- H02N2/16—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using travelling waves, i.e. Rayleigh surface waves
- H02N2/163—Motors with ring stator
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- H10N30/053—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes by integrally sintering piezoelectric or electrostrictive bodies and electrodes
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- H10N30/057—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes by stacking bulk piezoelectric or electrostrictive bodies and electrodes
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- H10N30/06—Forming electrodes or interconnections, e.g. leads or terminals
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- H10N30/093—Forming inorganic materials
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- B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
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| EP2873103B1 (en) * | 2012-08-27 | 2020-10-28 | Canon Kabushiki Kaisha | Piezoelectric material and piezoelectric element using the same, and electronic apparatus using the piezoelectronic element |
| EP3268996B1 (en) * | 2015-04-03 | 2019-12-11 | C/o Canon Kabushiki Kaisha | Piezoelectric material, method of producing piezoelectric material, piezoelectric element, and electronic apparatus |
| JP6521241B2 (ja) * | 2015-05-28 | 2019-05-29 | セイコーエプソン株式会社 | 圧電素子及び圧電素子応用デバイス |
| JP2017179416A (ja) * | 2016-03-29 | 2017-10-05 | Tdk株式会社 | 圧電磁器スパッタリングターゲット、非鉛圧電薄膜およびそれを用いた圧電薄膜素子 |
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| USD857020S1 (en) * | 2016-05-25 | 2019-08-20 | Tdk Corporation | Piezoelectric element |
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| CN106773694B (zh) * | 2016-12-26 | 2019-10-22 | 东北电力大学 | 压电精密位置平台自适应输出反馈逆控制方法 |
| US11659769B2 (en) * | 2017-03-28 | 2023-05-23 | Tdk Corporation | Piezoelectric composition and piezoelectric element |
| JP7156632B2 (ja) | 2017-08-04 | 2022-10-19 | キヤノン株式会社 | 圧電材料、圧電素子、および電子機器 |
| JP7057941B2 (ja) * | 2017-08-04 | 2022-04-21 | キヤノン株式会社 | 圧電材料、圧電素子、および電子機器 |
| TWI682529B (zh) * | 2018-06-28 | 2020-01-11 | 李崇維 | 微元件轉移設備及其轉移與鍵接的方法 |
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| JP7166866B2 (ja) * | 2018-10-03 | 2022-11-08 | キヤノン株式会社 | 配向性圧電体膜およびその製造方法、圧電体素子、並びに、液体吐出ヘッド |
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| JP7399753B2 (ja) * | 2020-03-05 | 2023-12-18 | 住友化学株式会社 | 圧電膜、圧電積層体、圧電素子および圧電積層体の製造方法 |
| JP7491713B2 (ja) * | 2020-03-27 | 2024-05-28 | Tdk株式会社 | 圧電素子、圧電アクチュエータ、および圧電トランス |
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| US20230329120A1 (en) * | 2020-12-11 | 2023-10-12 | Ceracomp Co., Ltd. | Piezoelectric single crystal including internal electric field, method for manufacturing same, and piezoelectric and dielectric application components using same |
| JP7758530B2 (ja) * | 2021-10-29 | 2025-10-22 | 日本特殊陶業株式会社 | 圧電素子、および圧電素子の製造方法 |
| CN116803948B (zh) * | 2022-03-16 | 2024-07-09 | 中国科学院上海硅酸盐研究所 | 一种高储能特性的钛酸钡基陶瓷材料及其制备方法和应用 |
| JP2025093131A (ja) * | 2023-12-11 | 2025-06-23 | 日本特殊陶業株式会社 | 無鉛圧電組成物、圧電素子、および装置 |
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| JP2008156172A (ja) | 2006-12-25 | 2008-07-10 | National Institute Of Advanced Industrial & Technology | 無鉛圧電磁器組成物 |
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| EP2343267B1 (en) * | 2008-10-28 | 2014-11-12 | Murata Manufacturing Co., Ltd. | Piezoelectric ceramic composition and piezoelectric ceramic electronic product |
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| JP2018083752A (ja) | 2018-05-31 |
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