CN104603083B - 压电材料、压电元件和电子装置 - Google Patents
压电材料、压电元件和电子装置 Download PDFInfo
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- CN104603083B CN104603083B CN201380044802.6A CN201380044802A CN104603083B CN 104603083 B CN104603083 B CN 104603083B CN 201380044802 A CN201380044802 A CN 201380044802A CN 104603083 B CN104603083 B CN 104603083B
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- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
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| EP2873103B1 (en) * | 2012-08-27 | 2020-10-28 | Canon Kabushiki Kaisha | Piezoelectric material and piezoelectric element using the same, and electronic apparatus using the piezoelectronic element |
| EP3268996B1 (en) * | 2015-04-03 | 2019-12-11 | C/o Canon Kabushiki Kaisha | Piezoelectric material, method of producing piezoelectric material, piezoelectric element, and electronic apparatus |
| JP6521241B2 (ja) * | 2015-05-28 | 2019-05-29 | セイコーエプソン株式会社 | 圧電素子及び圧電素子応用デバイス |
| JP2017179416A (ja) * | 2016-03-29 | 2017-10-05 | Tdk株式会社 | 圧電磁器スパッタリングターゲット、非鉛圧電薄膜およびそれを用いた圧電薄膜素子 |
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| USD857020S1 (en) * | 2016-05-25 | 2019-08-20 | Tdk Corporation | Piezoelectric element |
| JP7036022B2 (ja) | 2016-10-17 | 2022-03-15 | 昭栄化学工業株式会社 | セラミック電子部品用誘電体磁器組成物及びセラミック電子部品 |
| CN106773694B (zh) * | 2016-12-26 | 2019-10-22 | 东北电力大学 | 压电精密位置平台自适应输出反馈逆控制方法 |
| US11659769B2 (en) * | 2017-03-28 | 2023-05-23 | Tdk Corporation | Piezoelectric composition and piezoelectric element |
| JP7156632B2 (ja) | 2017-08-04 | 2022-10-19 | キヤノン株式会社 | 圧電材料、圧電素子、および電子機器 |
| JP7057941B2 (ja) * | 2017-08-04 | 2022-04-21 | キヤノン株式会社 | 圧電材料、圧電素子、および電子機器 |
| TWI682529B (zh) * | 2018-06-28 | 2020-01-11 | 李崇維 | 微元件轉移設備及其轉移與鍵接的方法 |
| KR20200017847A (ko) | 2018-08-09 | 2020-02-19 | 고려대학교 산학협력단 | 압전 박막의 제조 방법 및 압전 박막을 이용한 압전 센서 |
| US12329036B2 (en) * | 2018-09-12 | 2025-06-10 | Tdk Corporation | Dielectric thin film, dielectric thin film element, piezoelectric actuator, piezoelectric sensor, head assembly, head stack assembly, hard disk drive, printer head and inkjet printer device |
| JP7166866B2 (ja) * | 2018-10-03 | 2022-11-08 | キヤノン株式会社 | 配向性圧電体膜およびその製造方法、圧電体素子、並びに、液体吐出ヘッド |
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| WO2020240986A1 (ja) * | 2019-05-27 | 2020-12-03 | 株式会社村田製作所 | 誘電体磁器組成物およびセラミックコンデンサ |
| JP7399753B2 (ja) * | 2020-03-05 | 2023-12-18 | 住友化学株式会社 | 圧電膜、圧電積層体、圧電素子および圧電積層体の製造方法 |
| JP7491713B2 (ja) * | 2020-03-27 | 2024-05-28 | Tdk株式会社 | 圧電素子、圧電アクチュエータ、および圧電トランス |
| DE102020114219A1 (de) | 2020-05-27 | 2021-12-02 | Physik Instrumente (PI) GmbH & Co KG | Ultraschallaktor |
| US20230329120A1 (en) * | 2020-12-11 | 2023-10-12 | Ceracomp Co., Ltd. | Piezoelectric single crystal including internal electric field, method for manufacturing same, and piezoelectric and dielectric application components using same |
| JP7758530B2 (ja) * | 2021-10-29 | 2025-10-22 | 日本特殊陶業株式会社 | 圧電素子、および圧電素子の製造方法 |
| CN116803948B (zh) * | 2022-03-16 | 2024-07-09 | 中国科学院上海硅酸盐研究所 | 一种高储能特性的钛酸钡基陶瓷材料及其制备方法和应用 |
| JP2025093131A (ja) * | 2023-12-11 | 2025-06-23 | 日本特殊陶業株式会社 | 無鉛圧電組成物、圧電素子、および装置 |
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Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001240471A (ja) * | 2000-02-29 | 2001-09-04 | Kyocera Corp | 圧電磁器組成物および圧電共振子 |
| CN102515761A (zh) * | 2011-12-22 | 2012-06-27 | 四川师范大学 | 铌酸钠锆钛酸钡钙系无铅压电陶瓷组合物 |
Family Cites Families (13)
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| JPH077973A (ja) * | 1993-06-18 | 1995-01-10 | Canon Inc | 超音波モータ |
| JP3635992B2 (ja) * | 1999-07-22 | 2005-04-06 | 株式会社村田製作所 | 圧電型電気音響変換器 |
| JP3771760B2 (ja) * | 1999-11-26 | 2006-04-26 | 京セラ株式会社 | 圧電磁器組成物 |
| JP4417536B2 (ja) * | 2000-07-31 | 2010-02-17 | 京セラ株式会社 | 圧電磁器および圧電素子 |
| JP4995412B2 (ja) * | 2003-05-29 | 2012-08-08 | 日本特殊陶業株式会社 | 圧電磁器組成物及びこれを用いた圧電素子 |
| JP4764265B2 (ja) * | 2006-06-20 | 2011-08-31 | キヤノン株式会社 | 撮像装置 |
| JP2008156172A (ja) | 2006-12-25 | 2008-07-10 | National Institute Of Advanced Industrial & Technology | 無鉛圧電磁器組成物 |
| JP2009227535A (ja) | 2008-03-25 | 2009-10-08 | Panasonic Corp | 圧電性磁器組成物 |
| JP5386848B2 (ja) * | 2008-03-31 | 2014-01-15 | Tdk株式会社 | 圧電磁器 |
| EP2343267B1 (en) * | 2008-10-28 | 2014-11-12 | Murata Manufacturing Co., Ltd. | Piezoelectric ceramic composition and piezoelectric ceramic electronic product |
| JP5734688B2 (ja) * | 2010-02-10 | 2015-06-17 | キヤノン株式会社 | 配向性酸化物セラミックスの製造方法、配向性酸化物セラミックス、圧電素子、液体吐出ヘッド、超音波モータおよび塵埃除去装置 |
| CN103415489B (zh) * | 2011-02-28 | 2016-01-06 | 佳能株式会社 | 压电材料、压电元件、液体排出头、超声马达和去尘装置 |
| CN102515762A (zh) * | 2011-12-22 | 2012-06-27 | 四川师范大学 | 铌酸钠钛酸钡铋钾系无铅压电陶瓷组合物 |
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Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001240471A (ja) * | 2000-02-29 | 2001-09-04 | Kyocera Corp | 圧電磁器組成物および圧電共振子 |
| CN102515761A (zh) * | 2011-12-22 | 2012-06-27 | 四川师范大学 | 铌酸钠锆钛酸钡钙系无铅压电陶瓷组合物 |
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| CN104603083A (zh) | 2015-05-06 |
| KR101899746B1 (ko) | 2018-09-17 |
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| US20170018701A1 (en) | 2017-01-19 |
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| JP2014062032A (ja) | 2014-04-10 |
| EP2867183B1 (en) | 2018-06-06 |
| TWI540115B (zh) | 2016-07-01 |
| JP2018083752A (ja) | 2018-05-31 |
| US20150221856A1 (en) | 2015-08-06 |
| WO2014034694A1 (en) | 2014-03-06 |
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