TW370699B - Transporting apparatus for semiconductor device - Google Patents

Transporting apparatus for semiconductor device

Info

Publication number
TW370699B
TW370699B TW086113078A TW86113078A TW370699B TW 370699 B TW370699 B TW 370699B TW 086113078 A TW086113078 A TW 086113078A TW 86113078 A TW86113078 A TW 86113078A TW 370699 B TW370699 B TW 370699B
Authority
TW
Taiwan
Prior art keywords
plates
carrying tool
stocker
transporting
testing
Prior art date
Application number
TW086113078A
Other languages
English (en)
Inventor
Hiromichi Yamada
Kunio Kobayashi
Sekio Ito
Eiri Yuhara
Shinji Semba
Original Assignee
Mitsubishi Electric Corp
Mitsubishi Electric Eng
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp, Mitsubishi Electric Eng filed Critical Mitsubishi Electric Corp
Application granted granted Critical
Publication of TW370699B publication Critical patent/TW370699B/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06705—Apparatus for holding or moving single probes
TW086113078A 1997-02-20 1997-09-10 Transporting apparatus for semiconductor device TW370699B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP03634897A JP3689215B2 (ja) 1997-02-20 1997-02-20 半導体デバイスのテスト用搬送装置

Publications (1)

Publication Number Publication Date
TW370699B true TW370699B (en) 1999-09-21

Family

ID=12467343

Family Applications (1)

Application Number Title Priority Date Filing Date
TW086113078A TW370699B (en) 1997-02-20 1997-09-10 Transporting apparatus for semiconductor device

Country Status (4)

Country Link
US (1) US6163145A (zh)
JP (1) JP3689215B2 (zh)
DE (1) DE19745646C2 (zh)
TW (1) TW370699B (zh)

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TWI490970B (zh) * 2008-03-21 2015-07-01 Advantest Corp A pallet handling device, and an electronic component testing device provided with the device

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JP5382688B2 (ja) * 2008-12-01 2014-01-08 上野精機株式会社 高低温テストユニット、高低温テストユニットを備えたテストハンドラ、並びに高低温テストユニットの制御方法及び制御プログラム
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CN102947052B (zh) * 2010-06-17 2015-12-02 日产自动车株式会社 工件定位装置和电池制造方法
KR101936348B1 (ko) * 2012-09-17 2019-01-08 삼성전자주식회사 급속 온도 변환이 가능한 테스트 핸들러 및 그를 이용한 반도체 소자의 테스트 방법
US9575117B2 (en) * 2013-04-18 2017-02-21 Advantest Corporation Testing stacked devices
KR102165269B1 (ko) 2013-08-23 2020-10-14 삼성전자 주식회사 스토퍼를 포함하는 매거진 검사 장치
CN208238354U (zh) * 2017-05-27 2018-12-14 长沙迈迪克智能科技有限公司 一种用于血液标本流水线的自动冷藏系统
CN109326547B (zh) * 2018-11-16 2023-11-10 罗博特科智能科技股份有限公司 花篮内循环装置
CN109807070A (zh) * 2018-12-21 2019-05-28 武汉库柏特科技有限公司 一种物料识别装置及一种物料识别方法
CN113772410B (zh) * 2021-09-23 2022-05-13 深圳市创新特科技有限公司 一种无尘级夹持式载板上板机
CN114013962B (zh) * 2021-11-26 2024-04-05 东莞市爱康智能技术股份有限公司 一种料框与载盘自动上下料机构
CN115352794B (zh) * 2022-10-20 2023-02-28 歌尔股份有限公司 供料装置和组装设备

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI490970B (zh) * 2008-03-21 2015-07-01 Advantest Corp A pallet handling device, and an electronic component testing device provided with the device

Also Published As

Publication number Publication date
DE19745646C2 (de) 2001-02-08
DE19745646A1 (de) 1998-08-27
JP3689215B2 (ja) 2005-08-31
US6163145A (en) 2000-12-19
JPH10232262A (ja) 1998-09-02

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