ATE66329T1 - Verfahren zum befoerdern und ausrichten von flachen gegenstaenden wie z.b. von halbleiterplaettchen und eine vorrichtung zum transportieren solcher gegenstaende. - Google Patents

Verfahren zum befoerdern und ausrichten von flachen gegenstaenden wie z.b. von halbleiterplaettchen und eine vorrichtung zum transportieren solcher gegenstaende.

Info

Publication number
ATE66329T1
ATE66329T1 AT85303486T AT85303486T ATE66329T1 AT E66329 T1 ATE66329 T1 AT E66329T1 AT 85303486 T AT85303486 T AT 85303486T AT 85303486 T AT85303486 T AT 85303486T AT E66329 T1 ATE66329 T1 AT E66329T1
Authority
AT
Austria
Prior art keywords
objects
transporting
conveying
carrier
semiconductor plates
Prior art date
Application number
AT85303486T
Other languages
English (en)
Inventor
Richard F Foulke
Original Assignee
Proconics Int
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Proconics Int filed Critical Proconics Int
Application granted granted Critical
Publication of ATE66329T1 publication Critical patent/ATE66329T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67712—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrate being handled substantially vertically
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/137—Associated with semiconductor wafer handling including means for charging or discharging wafer cassette
    • Y10S414/138—Wafers positioned vertically within cassette
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/18—Mechanical movements
    • Y10T74/18568—Reciprocating or oscillating to or from alternating rotary
    • Y10T74/18832—Reciprocating or oscillating to or from alternating rotary including flexible drive connector [e.g., belt, chain, strand, etc.]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/18—Mechanical movements
    • Y10T74/18888—Reciprocating to or from oscillating
    • Y10T74/1892—Lever and slide
    • Y10T74/18968—Flexible connections

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Intermediate Stations On Conveyors (AREA)
AT85303486T 1984-05-17 1985-05-17 Verfahren zum befoerdern und ausrichten von flachen gegenstaenden wie z.b. von halbleiterplaettchen und eine vorrichtung zum transportieren solcher gegenstaende. ATE66329T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US06/611,419 US4699556A (en) 1984-05-17 1984-05-17 Object handling apparatus
EP85303486A EP0161942B1 (de) 1984-05-17 1985-05-17 Verfahren zum Befördern und Ausrichten von flachen Gegenständen wie z.B. von Halbleiterplättchen und eine Vorrichtung zum Transportieren solcher Gegenstände

Publications (1)

Publication Number Publication Date
ATE66329T1 true ATE66329T1 (de) 1991-08-15

Family

ID=24448943

Family Applications (1)

Application Number Title Priority Date Filing Date
AT85303486T ATE66329T1 (de) 1984-05-17 1985-05-17 Verfahren zum befoerdern und ausrichten von flachen gegenstaenden wie z.b. von halbleiterplaettchen und eine vorrichtung zum transportieren solcher gegenstaende.

Country Status (5)

Country Link
US (1) US4699556A (de)
EP (1) EP0161942B1 (de)
JP (1) JPS6164623A (de)
AT (1) ATE66329T1 (de)
DE (1) DE3583769D1 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5004399A (en) * 1987-09-04 1991-04-02 Texas Instruments Incorporated Robot slice aligning end effector
US5125784A (en) * 1988-03-11 1992-06-30 Tel Sagami Limited Wafers transfer device
US4986729A (en) * 1989-04-24 1991-01-22 Proconics International, Inc. Wafer transfer apparatus
JP2905857B2 (ja) * 1989-08-11 1999-06-14 東京エレクトロン株式会社 縦型処理装置
US5162047A (en) * 1989-08-28 1992-11-10 Tokyo Electron Sagami Limited Vertical heat treatment apparatus having wafer transfer mechanism and method for transferring wafers
US5153841A (en) * 1990-11-21 1992-10-06 Advanced Micro Devices Method of and apparatus for semi-conductor wafer selection
JPH08288355A (ja) * 1995-04-12 1996-11-01 Nikon Corp 基板搬送装置
GB0014526D0 (en) * 2000-06-15 2000-08-09 Rebanks Christopher H Massage/manipulation ball
KR100428781B1 (ko) * 2001-04-16 2004-04-27 삼성전자주식회사 웨이퍼 이송 장치 및 그 이송 방법
US6988440B2 (en) * 2002-07-18 2006-01-24 Phd, Inc. Rotary actuator assembly
KR101042655B1 (ko) * 2006-07-27 2011-06-20 가부시키가이샤 아드반테스트 전자부품 이송방법 및 전자부품 핸들링 장치
JP5582895B2 (ja) * 2010-07-09 2014-09-03 キヤノンアネルバ株式会社 基板ホルダーストッカ装置及び基板処理装置並びに該基板ホルダーストッカ装置を用いた基板ホルダー移動方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB735359A (en) * 1953-01-09 1955-08-17 English Electric Co Ltd Improvements relating to gimbal mechanisms
NL143509C (de) * 1962-12-05
NL129819C (de) * 1963-12-06
US3340176A (en) * 1965-07-28 1967-09-05 Western Electric Co Vacuum processing machine
US3385120A (en) * 1966-07-06 1968-05-28 Rotork Eng Co Ltd Auxiliary drive unit for an actuator
US3503527A (en) * 1967-05-08 1970-03-31 George C Devol Article transfer and orienting means
US3987685A (en) * 1974-12-16 1976-10-26 Xerox Corporation Cursor position device
FR2388372A1 (fr) * 1977-04-20 1978-11-17 Thomson Csf Platine a rattrapage de niveau et positionneur a indexation mecanique utilisant une telle platine
US4466766A (en) * 1981-05-20 1984-08-21 Ruska Instrument Corporation Transfer apparatus
US4493606A (en) * 1982-05-24 1985-01-15 Proconics International, Inc. Wafer transfer apparatus
DE3219502C2 (de) * 1982-05-25 1990-04-19 Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar Vorrichtung zum automatischen Transport scheibenförmiger Objekte

Also Published As

Publication number Publication date
EP0161942B1 (de) 1991-08-14
EP0161942A2 (de) 1985-11-21
EP0161942A3 (en) 1987-06-24
JPS6164623A (ja) 1986-04-03
DE3583769D1 (de) 1991-09-19
US4699556A (en) 1987-10-13

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