JPS6467932A - Semiconductor wafer cassette conveyor - Google Patents
Semiconductor wafer cassette conveyorInfo
- Publication number
- JPS6467932A JPS6467932A JP22500987A JP22500987A JPS6467932A JP S6467932 A JPS6467932 A JP S6467932A JP 22500987 A JP22500987 A JP 22500987A JP 22500987 A JP22500987 A JP 22500987A JP S6467932 A JPS6467932 A JP S6467932A
- Authority
- JP
- Japan
- Prior art keywords
- cassette
- conveying means
- conveyance
- high speed
- efficiently
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
PURPOSE:To shorten the conveying time of an urgent cassette and to obtain a cassette conveyor in which the conveyance of a reference cassette is not disordered by so stereoscopically disposing two systems of efficiently conveying means and high speed conveying means as not to disturb each other in the conveyance between processor groups. CONSTITUTION:High speed conveying means 12 so stereoscopically disposed as not to disturb conveyance to each other simultaneously process in parallel with efficiently conveying means 11 except the operations of feeding robots 8a, 8b. When a cassette 2 containing a wafer 1 is of an urgent cassette, a bearer 15 and a placing base 16 respectively containing motors are traveled in X-axis and Y-axis traveling passages 13, 14 as the high speed conveying means to shorten the conveying time. In case of a reference cassette, it is conveyed by the efficiently conveying means without disordering the flow of matters.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP22500987A JPS6467932A (en) | 1987-09-08 | 1987-09-08 | Semiconductor wafer cassette conveyor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP22500987A JPS6467932A (en) | 1987-09-08 | 1987-09-08 | Semiconductor wafer cassette conveyor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6467932A true JPS6467932A (en) | 1989-03-14 |
Family
ID=16822647
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP22500987A Pending JPS6467932A (en) | 1987-09-08 | 1987-09-08 | Semiconductor wafer cassette conveyor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6467932A (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6283692B1 (en) * | 1998-12-01 | 2001-09-04 | Applied Materials, Inc. | Apparatus for storing and moving a cassette |
JP2005223031A (en) * | 2004-02-04 | 2005-08-18 | Renesas Technology Corp | Manufacturing method for semiconductor ic device |
US7234908B2 (en) | 2000-03-16 | 2007-06-26 | Applied Materials, Inc. | Apparatus for storing and moving a cassette |
US7433756B2 (en) | 2003-11-13 | 2008-10-07 | Applied Materials, Inc. | Calibration of high speed loader to substrate transport system |
US7577487B2 (en) | 2005-09-14 | 2009-08-18 | Applied Materials, Inc. | Methods and apparatus for a band to band transfer module |
US7806648B2 (en) | 2006-04-14 | 2010-10-05 | Murata Kikai Kabushiki Kaisha | Transportation system and transportation method |
-
1987
- 1987-09-08 JP JP22500987A patent/JPS6467932A/en active Pending
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6283692B1 (en) * | 1998-12-01 | 2001-09-04 | Applied Materials, Inc. | Apparatus for storing and moving a cassette |
US7637707B2 (en) | 1998-12-01 | 2009-12-29 | Applied Materials, Inc. | Apparatus for storing and moving a cassette |
US7234908B2 (en) | 2000-03-16 | 2007-06-26 | Applied Materials, Inc. | Apparatus for storing and moving a cassette |
US7433756B2 (en) | 2003-11-13 | 2008-10-07 | Applied Materials, Inc. | Calibration of high speed loader to substrate transport system |
US7912576B2 (en) | 2003-11-13 | 2011-03-22 | Applied Materials, Inc. | Calibration of high speed loader to substrate transport system |
JP2005223031A (en) * | 2004-02-04 | 2005-08-18 | Renesas Technology Corp | Manufacturing method for semiconductor ic device |
US7577487B2 (en) | 2005-09-14 | 2009-08-18 | Applied Materials, Inc. | Methods and apparatus for a band to band transfer module |
US7806648B2 (en) | 2006-04-14 | 2010-10-05 | Murata Kikai Kabushiki Kaisha | Transportation system and transportation method |
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