TW200744216A - Method of manufacturing LCD apparatus by using halftone exposure method - Google Patents
Method of manufacturing LCD apparatus by using halftone exposure methodInfo
- Publication number
- TW200744216A TW200744216A TW096106310A TW96106310A TW200744216A TW 200744216 A TW200744216 A TW 200744216A TW 096106310 A TW096106310 A TW 096106310A TW 96106310 A TW96106310 A TW 96106310A TW 200744216 A TW200744216 A TW 200744216A
- Authority
- TW
- Taiwan
- Prior art keywords
- electrode
- halftone exposure
- exposure technology
- speed response
- photolithographic process
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title abstract 3
- 238000000034 method Methods 0.000 title abstract 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 1
- 238000000576 coating method Methods 0.000 abstract 1
- 238000000151 deposition Methods 0.000 abstract 1
- 239000010410 layer Substances 0.000 abstract 1
- 230000000873 masking effect Effects 0.000 abstract 1
- 239000011159 matrix material Substances 0.000 abstract 1
- 229910052757 nitrogen Inorganic materials 0.000 abstract 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N nitrogen Substances N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 abstract 1
- 238000002161 passivation Methods 0.000 abstract 1
- 239000011241 protective layer Substances 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1345—Conductors connecting electrodes to cell terminals
- G02F1/13458—Terminal pads
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/124—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or layout of the wiring layers specially adapted to the circuit arrangement, e.g. scanning lines in LCD pixel circuits
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1259—Multistep manufacturing methods
- H01L27/1288—Multistep manufacturing methods employing particular masking sequences or specially adapted masks, e.g. half-tone mask
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136231—Active matrix addressed cells for reducing the number of lithographic steps
- G02F1/136236—Active matrix addressed cells for reducing the number of lithographic steps using a grey or half tone lithographic process
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/13625—Patterning using multi-mask exposure
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Mathematical Physics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Liquid Crystal (AREA)
- Thin Film Transistor (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006166674A JP2007310334A (ja) | 2006-05-19 | 2006-05-19 | ハーフトーン露光法を用いた液晶表示装置の製造法 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200744216A true TW200744216A (en) | 2007-12-01 |
TWI333280B TWI333280B (zh) | 2010-11-11 |
Family
ID=38219337
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW096106310A TW200744216A (en) | 2006-05-19 | 2007-02-16 | Method of manufacturing LCD apparatus by using halftone exposure method |
Country Status (6)
Country | Link |
---|---|
US (1) | US7602456B2 (zh) |
JP (1) | JP2007310334A (zh) |
KR (1) | KR100934590B1 (zh) |
CN (1) | CN101075584B (zh) |
GB (1) | GB2438490A (zh) |
TW (1) | TW200744216A (zh) |
Cited By (4)
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TWI609221B (zh) * | 2010-07-01 | 2017-12-21 | 半導體能源研究所股份有限公司 | 液晶顯示裝置的驅動方法 |
TWI746790B (zh) * | 2017-04-12 | 2021-11-21 | 日商捷恩智股份有限公司 | 液晶顯示元件 |
TWI804203B (zh) * | 2019-05-20 | 2023-06-01 | 日商三井金屬鑛業股份有限公司 | 附載體金屬箔以及其使用方法及製造方法 |
Families Citing this family (72)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8382821B2 (en) | 1998-12-03 | 2013-02-26 | Medinol Ltd. | Helical hybrid stent |
US20040267349A1 (en) | 2003-06-27 | 2004-12-30 | Kobi Richter | Amorphous metal alloy medical devices |
US9155639B2 (en) | 2009-04-22 | 2015-10-13 | Medinol Ltd. | Helical hybrid stent |
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CN108538859A (zh) * | 2018-04-24 | 2018-09-14 | 深圳市华星光电技术有限公司 | 阵列基板的制作方法 |
JP7190729B2 (ja) | 2018-08-31 | 2022-12-16 | 三国電子有限会社 | キャリア注入量制御電極を有する有機エレクトロルミネセンス素子 |
JP7246681B2 (ja) | 2018-09-26 | 2023-03-28 | 三国電子有限会社 | トランジスタ及びトランジスタの製造方法、並びにトランジスタを含む表示装置 |
US11062900B2 (en) * | 2018-12-04 | 2021-07-13 | Applied Materials, Inc. | Method of reducing effective oxide thickness in a semiconductor structure |
CN109768015B (zh) * | 2019-01-29 | 2021-07-23 | 南京中电熊猫平板显示科技有限公司 | 一种阵列基板及其制造方法 |
JP7190740B2 (ja) | 2019-02-22 | 2022-12-16 | 三国電子有限会社 | エレクトロルミネセンス素子を有する表示装置 |
CN109659372B (zh) * | 2019-03-13 | 2019-07-09 | 南京中电熊猫液晶显示科技有限公司 | 一种薄膜晶体管及其制造方法 |
CN109801929B (zh) * | 2019-04-17 | 2019-07-16 | 南京中电熊猫平板显示科技有限公司 | 一种阵列基板及其制造方法 |
CN110032011B (zh) * | 2019-05-30 | 2022-08-19 | 京东方科技集团股份有限公司 | 一种狭缝电极的曝光方法 |
CN210403730U (zh) * | 2019-10-22 | 2020-04-24 | 北京京东方技术开发有限公司 | 显示面板及阵列基板 |
JP7444436B2 (ja) | 2020-02-05 | 2024-03-06 | 三国電子有限会社 | 液晶表示装置 |
KR102552063B1 (ko) * | 2020-12-23 | 2023-07-07 | 동우 화인켐 주식회사 | 전극 구조체, 이를 포함하는 터치 센서, 윈도우 적층체 및 화상 표시 장치 |
CN113690248B (zh) * | 2021-07-28 | 2024-04-16 | 合肥鑫晟光电科技有限公司 | 阵列基板的制备方法、阵列基板和显示装置 |
Family Cites Families (31)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61181130A (ja) | 1985-02-06 | 1986-08-13 | Fujitsu Ltd | パタ−ン形成方法 |
JP2594114B2 (ja) * | 1988-05-31 | 1997-03-26 | 三洋電機株式会社 | 液晶表示パネル用電極基板の製造方法 |
JP2711020B2 (ja) * | 1990-04-27 | 1998-02-10 | 三菱電機株式会社 | 液晶表示装置 |
JPH07230097A (ja) | 1994-02-18 | 1995-08-29 | Sanyo Electric Co Ltd | 液晶表示装置 |
JPH10142633A (ja) * | 1996-11-15 | 1998-05-29 | Mitsubishi Electric Corp | 薄膜トランジスタ集積装置およびその製造方法並びに液晶表示装置 |
JP3410617B2 (ja) | 1996-11-29 | 2003-05-26 | シャープ株式会社 | 薄膜のパターニング方法 |
JPH10290012A (ja) * | 1997-04-14 | 1998-10-27 | Nec Corp | アクティブマトリクス型液晶表示装置およびその製造方法 |
JP2976948B2 (ja) | 1997-10-06 | 1999-11-10 | 日本電気株式会社 | 液晶表示装置、その製造方法およびその駆動方法 |
JP4264675B2 (ja) | 1998-08-17 | 2009-05-20 | 栄 田中 | 液晶表示装置とその製造方法 |
US6287899B1 (en) | 1998-12-31 | 2001-09-11 | Samsung Electronics Co., Ltd. | Thin film transistor array panels for a liquid crystal display and a method for manufacturing the same |
TW509810B (en) | 1999-07-19 | 2002-11-11 | Chi Mei Electronics Corp | Liquid crystal display with wide viewing angle |
JP4190118B2 (ja) | 1999-12-17 | 2008-12-03 | 三菱電機株式会社 | 半導体装置、液晶表示装置および半導体装置の製造方法 |
KR100325079B1 (ko) * | 1999-12-22 | 2002-03-02 | 주식회사 현대 디스플레이 테크놀로지 | 고개구율 및 고투과율 액정표시장치의 제조방법 |
KR100322968B1 (ko) * | 1999-12-22 | 2002-02-02 | 주식회사 현대 디스플레이 테크놀로지 | 프린지 필드 구동 액정 표시 장치의 제조방법 |
KR100500684B1 (ko) * | 1999-12-29 | 2005-07-12 | 비오이 하이디스 테크놀로지 주식회사 | 4-마스크 공정을 이용한 액정 디스플레이의 제조 방법 |
JP2001201756A (ja) * | 2000-01-19 | 2001-07-27 | Sakae Tanaka | 液晶表示装置の製造方法と製造装置 |
JP2001311965A (ja) * | 2000-04-28 | 2001-11-09 | Nec Corp | アクティブマトリクス基板及びその製造方法 |
JP2002107762A (ja) * | 2000-10-02 | 2002-04-10 | Sharp Corp | 液晶用マトリクス基板の製造方法 |
JP2002141512A (ja) | 2000-11-06 | 2002-05-17 | Advanced Display Inc | 薄膜のパターニング方法およびそれを用いたtftアレイ基板およびその製造方法 |
JP3831868B2 (ja) * | 2001-08-13 | 2006-10-11 | 大林精工株式会社 | アクティブマトリックス表示装置とその製造方法 |
KR100436181B1 (ko) * | 2002-04-16 | 2004-06-12 | 엘지.필립스 엘시디 주식회사 | 액정표시장치용 어레이기판 제조방법 |
JP4565799B2 (ja) | 2002-07-01 | 2010-10-20 | 大林精工株式会社 | 横電界方式液晶表示装置、その製造方法、走査露光装置およびミックス走査露光装置 |
KR100789090B1 (ko) * | 2002-12-30 | 2007-12-26 | 엘지.필립스 엘시디 주식회사 | 액정표시장치 제조방법 |
JP4522660B2 (ja) | 2003-03-14 | 2010-08-11 | シャープ株式会社 | 薄膜トランジスタ基板の製造方法 |
JP2004319655A (ja) * | 2003-04-15 | 2004-11-11 | Quanta Display Japan Inc | 液晶表示装置とその製造方法 |
JP2005215276A (ja) * | 2004-01-29 | 2005-08-11 | Quanta Display Japan Inc | 液晶表示装置とその製造方法 |
US6869833B1 (en) * | 2004-03-16 | 2005-03-22 | Quanta Display Inc. | Method of manufacturing a thin film transistor of a liquid crystal display |
KR100584716B1 (ko) * | 2004-04-06 | 2006-05-29 | 엘지.필립스 엘시디 주식회사 | 구동회로 일체형 액정표시장치용 어레이 기판의 제조 방법 |
KR101086478B1 (ko) * | 2004-05-27 | 2011-11-25 | 엘지디스플레이 주식회사 | 표시 소자용 박막 트랜지스터 기판 및 그 제조 방법 |
KR20060021530A (ko) * | 2004-09-03 | 2006-03-08 | 비오이 하이디스 테크놀로지 주식회사 | 박막트랜지스터 액정표시장치의 어레이 기판 제조방법 |
CN100357817C (zh) * | 2004-11-29 | 2007-12-26 | 广辉电子股份有限公司 | 液晶显示装置及其制造方法 |
-
2006
- 2006-05-19 JP JP2006166674A patent/JP2007310334A/ja active Pending
-
2007
- 2007-02-16 TW TW096106310A patent/TW200744216A/zh unknown
- 2007-04-11 CN CN2007100937512A patent/CN101075584B/zh not_active Expired - Fee Related
- 2007-04-30 KR KR1020070042053A patent/KR100934590B1/ko not_active IP Right Cessation
- 2007-05-14 GB GB0709203A patent/GB2438490A/en not_active Withdrawn
- 2007-05-16 US US11/749,190 patent/US7602456B2/en not_active Expired - Fee Related
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI451584B (zh) * | 2009-11-16 | 2014-09-01 | Univ Nat Chiao Tung | 一種非晶系氧化物半導體的光感測器裝置與其製作方法 |
TWI609221B (zh) * | 2010-07-01 | 2017-12-21 | 半導體能源研究所股份有限公司 | 液晶顯示裝置的驅動方法 |
US10008169B2 (en) | 2010-07-01 | 2018-06-26 | Semiconductor Energy Laboratory Co., Ltd. | Driving method of liquid crystal display device |
TWI746790B (zh) * | 2017-04-12 | 2021-11-21 | 日商捷恩智股份有限公司 | 液晶顯示元件 |
TWI804203B (zh) * | 2019-05-20 | 2023-06-01 | 日商三井金屬鑛業股份有限公司 | 附載體金屬箔以及其使用方法及製造方法 |
Also Published As
Publication number | Publication date |
---|---|
JP2007310334A (ja) | 2007-11-29 |
US20070269936A1 (en) | 2007-11-22 |
TWI333280B (zh) | 2010-11-11 |
CN101075584A (zh) | 2007-11-21 |
CN101075584B (zh) | 2012-12-26 |
US7602456B2 (en) | 2009-10-13 |
GB2438490A (en) | 2007-11-28 |
KR20070111975A (ko) | 2007-11-22 |
KR100934590B1 (ko) | 2009-12-31 |
GB0709203D0 (en) | 2007-06-20 |
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