SG133444A1 - Evaluation method of resist composition using immersion solvent - Google Patents

Evaluation method of resist composition using immersion solvent

Info

Publication number
SG133444A1
SG133444A1 SG200508430-6A SG2005084306A SG133444A1 SG 133444 A1 SG133444 A1 SG 133444A1 SG 2005084306 A SG2005084306 A SG 2005084306A SG 133444 A1 SG133444 A1 SG 133444A1
Authority
SG
Singapore
Prior art keywords
resist composition
film
evaluation method
immersion
resist
Prior art date
Application number
SG200508430-6A
Other languages
English (en)
Inventor
Taku Hirayama
Hideo Hada
Satoshi Fujimura
Takeshi Iwai
Mitsuru Sato
Ryoichi Takasu
Toshikazu Tachikawa
Jun Iwashita
Keita Ishiduka
Tomotaka Yamada
Toshikazu Takayama
Masaaki Yoshida
Original Assignee
Tokyo Ohka Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Ohka Kogyo Co Ltd filed Critical Tokyo Ohka Kogyo Co Ltd
Publication of SG133444A1 publication Critical patent/SG133444A1/en

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
    • G03F7/0382—Macromolecular compounds which are rendered insoluble or differentially wettable the macromolecular compound being present in a chemically amplified negative photoresist composition
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
    • G03F7/0392—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition
    • G03F7/0397—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition the macromolecular compound having an alicyclic moiety in a side chain
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2041—Exposure; Apparatus therefor in the presence of a fluid, e.g. immersion; using fluid cooling means
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70341—Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/70605—Workpiece metrology
    • G03F7/70616—Monitoring the printed patterns
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
    • Y10S430/1055—Radiation sensitive composition or product or process of making
    • Y10S430/106—Binder containing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
    • Y10S430/1055—Radiation sensitive composition or product or process of making
    • Y10S430/106—Binder containing
    • Y10S430/111—Polymer of unsaturated acid or ester

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Materials For Photolithography (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Acyclic And Carbocyclic Compounds In Medicinal Compositions (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
SG200508430-6A 2003-01-31 2004-01-27 Evaluation method of resist composition using immersion solvent SG133444A1 (en)

Applications Claiming Priority (8)

Application Number Priority Date Filing Date Title
JP2003025152 2003-01-31
JP2003045000 2003-02-21
JP2003062531 2003-03-07
JP2003125244 2003-04-30
JP2003157257 2003-06-02
JP2003195403 2003-07-10
JP2003426939 2003-12-24
JP2004017355A JP4434762B2 (ja) 2003-01-31 2004-01-26 レジスト組成物

Publications (1)

Publication Number Publication Date
SG133444A1 true SG133444A1 (en) 2007-07-30

Family

ID=32831263

Family Applications (1)

Application Number Title Priority Date Filing Date
SG200508430-6A SG133444A1 (en) 2003-01-31 2004-01-27 Evaluation method of resist composition using immersion solvent

Country Status (9)

Country Link
US (4) US7501220B2 (de)
EP (3) EP1653284B1 (de)
JP (1) JP4434762B2 (de)
KR (3) KR100660792B1 (de)
CN (3) CN100565341C (de)
AT (2) ATE529780T1 (de)
SG (1) SG133444A1 (de)
TW (3) TWI304518B (de)
WO (1) WO2004068242A1 (de)

Families Citing this family (112)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1598701A4 (de) * 2003-02-25 2009-12-09 Tokyo Ohka Kogyo Co Ltd Fotoresistzusammensetzung und verfahren zur bildung einer resiststruktur
JP4772288B2 (ja) * 2003-06-05 2011-09-14 東京応化工業株式会社 ホトレジスト組成物用樹脂、ホトレジスト組成物、およびレジストパターン形成方法
JP4265766B2 (ja) * 2003-08-25 2009-05-20 東京応化工業株式会社 液浸露光プロセス用レジスト保護膜形成用材料、該保護膜形成材料からなるレジスト保護膜、および該レジスト保護膜を用いたレジストパターン形成方法
JP4188265B2 (ja) 2003-10-23 2008-11-26 東京応化工業株式会社 レジスト組成物およびレジストパターン形成方法
JP4300131B2 (ja) * 2004-02-16 2009-07-22 富士フイルム株式会社 液浸プロセス用化学増幅型レジスト組成物及びそれを用いたパターン形成方法
JP4365236B2 (ja) 2004-02-20 2009-11-18 富士フイルム株式会社 液浸露光用レジスト組成物及びそれを用いたパターン形成方法
KR100887202B1 (ko) 2004-04-27 2009-03-06 도오꾜오까고오교 가부시끼가이샤 액침 노광 프로세스용 레지스트 보호막 형성용 재료, 및 이보호막을 이용한 레지스트 패턴 형성 방법
JP4264038B2 (ja) * 2004-07-13 2009-05-13 パナソニック株式会社 液浸露光用の液体及びパターン形成方法
JP4368267B2 (ja) 2004-07-30 2009-11-18 東京応化工業株式会社 レジスト保護膜形成用材料、およびこれを用いたレジストパターン形成方法
JP2006073967A (ja) * 2004-09-06 2006-03-16 Tokyo Ohka Kogyo Co Ltd 液浸露光プロセス用浸漬液および該浸漬液を用いたレジストパターン形成方法
JP2006113140A (ja) * 2004-10-12 2006-04-27 Tokyo Ohka Kogyo Co Ltd 液浸露光用ポジ型レジスト組成物およびレジストパターン形成方法
JP4597655B2 (ja) * 2004-12-20 2010-12-15 東京応化工業株式会社 レジストパターン形成方法
US7459261B2 (en) * 2005-01-06 2008-12-02 Shin-Etsu Chemical Co., Ltd. Resist composition and patterning process using the same
US7947421B2 (en) 2005-01-24 2011-05-24 Fujifilm Corporation Positive resist composition for immersion exposure and pattern-forming method using the same
US8741537B2 (en) 2005-03-04 2014-06-03 Fujifilm Corporation Positive resist composition and pattern-forming method using the same
JP5203575B2 (ja) * 2005-05-04 2013-06-05 ローム・アンド・ハース・エレクトロニック・マテリアルズ，エル．エル．シー． コーティング組成物
WO2007001045A1 (ja) * 2005-06-29 2007-01-04 Nikon Corporation 露光装置、基板処理方法、及びデバイス製造方法
US7927779B2 (en) * 2005-06-30 2011-04-19 Taiwan Semiconductor Manufacturing Companym, Ltd. Water mark defect prevention for immersion lithography
JP4861767B2 (ja) 2005-07-26 2012-01-25 富士フイルム株式会社 ポジ型レジスト組成物およびそれを用いたパターン形成方法
JP2007079552A (ja) * 2005-08-17 2007-03-29 Jsr Corp 感放射線性樹脂組成物
JP4695941B2 (ja) 2005-08-19 2011-06-08 富士フイルム株式会社 液浸露光用ポジ型レジスト組成物及びそれを用いたパターン形成方法
JP2007072155A (ja) * 2005-09-07 2007-03-22 Tokyo Ohka Kogyo Co Ltd レジスト組成物およびレジストパターン形成方法
TWI403843B (zh) * 2005-09-13 2013-08-01 Fujifilm Corp 正型光阻組成物及使用它之圖案形成方法
JP4562628B2 (ja) 2005-09-20 2010-10-13 富士フイルム株式会社 ポジ型レジスト組成物及びそれを用いたパターン形成方法
JP4568668B2 (ja) * 2005-09-22 2010-10-27 富士フイルム株式会社 液浸露光用ポジ型レジスト組成物及びそれを用いたパターン形成方法
EP1783553A1 (de) * 2005-11-07 2007-05-09 Interuniversitair Microelektronica Centrum Verfahren zur Untersuchung der Interaktion zwischen Immersionsflüssigkeit und Substrat
JP2007133208A (ja) * 2005-11-11 2007-05-31 Tokyo Ohka Kogyo Co Ltd ポジ型レジスト組成物およびレジストパターン形成方法
US7629106B2 (en) * 2005-11-16 2009-12-08 Shin-Etsu Chemical Co., Ltd. Resist composition and patterning process using the same
JP4821776B2 (ja) 2005-11-21 2011-11-24 Ｊｓｒ株式会社 感放射線性樹脂組成物
JP4881686B2 (ja) 2005-12-09 2012-02-22 富士フイルム株式会社 ポジ型レジスト組成物及びそれを用いたパターン形成方法
TWI443461B (zh) 2005-12-09 2014-07-01 Fujifilm Corp 正型光阻組成物、用於正型光阻組成物之樹脂、用於合成該樹脂之化合物及使用該正型光阻組成物之圖案形成方法
JP4881687B2 (ja) 2005-12-09 2012-02-22 富士フイルム株式会社 ポジ型レジスト組成物及びそれを用いたパターン形成方法
JP4691442B2 (ja) 2005-12-09 2011-06-01 富士フイルム株式会社 ポジ型レジスト組成物およびそれを用いたパターン形成方法
JP4717640B2 (ja) * 2005-12-12 2011-07-06 東京応化工業株式会社 液浸露光用レジスト組成物およびレジストパターン形成方法
US8426101B2 (en) 2005-12-21 2013-04-23 Fujifilm Corporation Photosensitive composition, pattern-forming method using the photosensitve composition and compound in the photosensitive composition
TWI479266B (zh) * 2005-12-27 2015-04-01 Fujifilm Corp 正型光阻組成物及使用它之圖案形成方法
US8404427B2 (en) 2005-12-28 2013-03-26 Fujifilm Corporation Photosensitive composition, and pattern-forming method and resist film using the photosensitive composition
JP4866605B2 (ja) 2005-12-28 2012-02-01 富士フイルム株式会社 感光性組成物、該感光性組成物を用いたパターン形成方法及び該感光性組成物に用いられる化合物
US7538858B2 (en) * 2006-01-11 2009-05-26 Micron Technology, Inc. Photolithographic systems and methods for producing sub-diffraction-limited features
JP5114022B2 (ja) 2006-01-23 2013-01-09 富士フイルム株式会社 パターン形成方法
JP5114021B2 (ja) 2006-01-23 2013-01-09 富士フイルム株式会社 パターン形成方法
TWI477909B (zh) * 2006-01-24 2015-03-21 Fujifilm Corp 正型感光性組成物及使用它之圖案形成方法
JP4682057B2 (ja) 2006-02-20 2011-05-11 富士フイルム株式会社 感光性組成物、該感光性組成物を用いたパターン形成方法及び該感光性組成物に用いられる化合物
JP4682064B2 (ja) 2006-03-09 2011-05-11 富士フイルム株式会社 感光性組成物、該組成物を用いたパターン形成方法及び該組成物に用いる化合物
CN102109760B (zh) 2006-03-31 2015-04-15 Jsr株式会社 抗蚀剂图案形成方法
US7951524B2 (en) * 2006-04-28 2011-05-31 International Business Machines Corporation Self-topcoating photoresist for photolithography
US8034532B2 (en) 2006-04-28 2011-10-11 International Business Machines Corporation High contact angle topcoat material and use thereof in lithography process
US8945808B2 (en) * 2006-04-28 2015-02-03 International Business Machines Corporation Self-topcoating resist for photolithography
JP5189260B2 (ja) * 2006-08-25 2013-04-24 三菱レイヨン株式会社 重合体の製造方法
JP4980038B2 (ja) 2006-09-20 2012-07-18 東京応化工業株式会社 保護膜形成用材料及びホトレジストパターンの形成方法
JP4615497B2 (ja) 2006-09-20 2011-01-19 東京応化工業株式会社 レジスト保護膜形成用組成物及びこれを用いたレジストパターンの形成方法
KR101400824B1 (ko) 2006-09-25 2014-05-29 후지필름 가부시키가이샤 레지스트 조성물, 이 레지스트 조성물에 사용되는 수지, 이수지의 합성에 사용되는 화합물, 및 상기 레지스트조성물을 사용한 패턴형성방법
US8637229B2 (en) 2006-12-25 2014-01-28 Fujifilm Corporation Pattern forming method, resist composition for multiple development used in the pattern forming method, developer for negative development used in the pattern forming method, and rinsing solution for negative development used in the pattern forming method
US8530148B2 (en) 2006-12-25 2013-09-10 Fujifilm Corporation Pattern forming method, resist composition for multiple development used in the pattern forming method, developer for negative development used in the pattern forming method, and rinsing solution for negative development used in the pattern forming method
JP4554665B2 (ja) 2006-12-25 2010-09-29 富士フイルム株式会社 パターン形成方法、該パターン形成方法に用いられる多重現像用ポジ型レジスト組成物、該パターン形成方法に用いられるネガ現像用現像液及び該パターン形成方法に用いられるネガ現像用リンス液
JP2008209889A (ja) 2007-01-31 2008-09-11 Fujifilm Corp ポジ型レジスト組成物及び該ポジ型レジスト組成物を用いたパターン形成方法
JP5401046B2 (ja) 2007-03-14 2014-01-29 富士フイルム株式会社 レジスト表面疎水化用樹脂の製造方法、その製造方法及び該樹脂を含有するポジ型レジスト組成物の調整方法、レジスト膜の形成方法、及び、パターン形成方法
JP5186255B2 (ja) 2007-03-20 2013-04-17 富士フイルム株式会社 レジスト表面疎水化用樹脂、その製造方法及び該樹脂を含有するポジ型レジスト組成物
JP4621754B2 (ja) 2007-03-28 2011-01-26 富士フイルム株式会社 ポジ型レジスト組成物およびパターン形成方法
EP1975714A1 (de) 2007-03-28 2008-10-01 FUJIFILM Corporation Positive Resistzusammensetzung und Verfahren zur Strukturformung
JP4839253B2 (ja) 2007-03-28 2011-12-21 富士フイルム株式会社 ポジ型レジスト組成物およびパターン形成方法
EP1975705B1 (de) 2007-03-28 2016-04-27 FUJIFILM Corporation Positive Resistzusammensetzung und Verfahren zur Strukturformung
US8877421B2 (en) 2007-03-28 2014-11-04 Fujifilm Corporation Positive resist composition and pattern-forming method
EP1975716B1 (de) 2007-03-28 2013-05-15 Fujifilm Corporation Positive Resistzusammensetzung und Verfahren zur Strukturformung
EP2138898B1 (de) 2007-04-13 2014-05-21 FUJIFILM Corporation Verfahren zur Strukturbildung und Verwendung einer Fotolackzusammensetzung in diesem Verfahren
US8034547B2 (en) 2007-04-13 2011-10-11 Fujifilm Corporation Pattern forming method, resist composition to be used in the pattern forming method, negative developing solution to be used in the pattern forming method and rinsing solution for negative development to be used in the pattern forming method
US8603733B2 (en) 2007-04-13 2013-12-10 Fujifilm Corporation Pattern forming method, and resist composition, developer and rinsing solution used in the pattern forming method
US8476001B2 (en) 2007-05-15 2013-07-02 Fujifilm Corporation Pattern forming method
WO2008140119A1 (ja) 2007-05-15 2008-11-20 Fujifilm Corporation パターン形成方法
JP4617337B2 (ja) 2007-06-12 2011-01-26 富士フイルム株式会社 パターン形成方法
US8617794B2 (en) 2007-06-12 2013-12-31 Fujifilm Corporation Method of forming patterns
KR20100017783A (ko) 2007-06-12 2010-02-16 후지필름 가부시키가이샤 네가티브 톤 현상용 레지스트 조성물 및 이것을 사용한 패턴형성방법
US8632942B2 (en) 2007-06-12 2014-01-21 Fujifilm Corporation Method of forming patterns
JP4590431B2 (ja) 2007-06-12 2010-12-01 富士フイルム株式会社 パターン形成方法
KR101524571B1 (ko) 2007-08-10 2015-06-01 후지필름 가부시키가이샤 포지티브형 레지스트 조성물, 그 조성물을 사용한 패턴 형성 방법 및 그 조성물에 사용되는 화합물
JP5449675B2 (ja) 2007-09-21 2014-03-19 富士フイルム株式会社 感光性組成物、該感光性組成物を用いたパターン形成方法及び該感光性組成物に用いられる化合物
US8029972B2 (en) * 2007-10-11 2011-10-04 Tokyo Ohka Kogyo Co., Ltd. Resist composition and method of forming resist pattern
KR20100071088A (ko) * 2007-10-29 2010-06-28 제이에스알 가부시끼가이샤 감방사선성 수지 조성물 및 중합체
TWI391781B (zh) * 2007-11-19 2013-04-01 Tokyo Ohka Kogyo Co Ltd 光阻組成物，光阻圖型之形成方法，新穎化合物及酸產生劑
JP5398248B2 (ja) 2008-02-06 2014-01-29 東京応化工業株式会社 液浸露光用レジスト組成物およびそれを用いたレジストパターン形成方法
JP5150296B2 (ja) * 2008-02-13 2013-02-20 富士フイルム株式会社 電子線、ｘ線またはｅｕｖ用ポジ型レジスト組成物及びこれを用いたパターン形成方法
JP2009224374A (ja) * 2008-03-13 2009-10-01 Oki Semiconductor Co Ltd Ｐｅｂ装置及びその制御方法
JP5427447B2 (ja) * 2008-03-28 2014-02-26 富士フイルム株式会社 ポジ型感光性組成物及びそれを用いたパターン形成方法
JP5601198B2 (ja) 2008-05-19 2014-10-08 Ｊｓｒ株式会社 重合体並びに感放射線性組成物
JP5172494B2 (ja) * 2008-06-23 2013-03-27 東京応化工業株式会社 液浸露光用レジスト組成物、レジストパターン形成方法、含フッ素高分子化合物
JP5530651B2 (ja) 2008-07-14 2014-06-25 富士フイルム株式会社 感活性光線性または感放射線性樹脂組成物、及び該組成物を用いたパターン形成方法
JP2010085605A (ja) * 2008-09-30 2010-04-15 Hitachi Chem Co Ltd 感光性樹脂組成物、これを用いた感光性エレメント、レジストパターンの形成方法及びプリント配線板の製造方法
US8617785B2 (en) 2009-01-16 2013-12-31 Fujifilm Corporation Actinic ray-sensitive or radiation-sensitive resin composition and pattern forming method using the same
US8450041B2 (en) 2009-01-16 2013-05-28 Fujifilm Corporation Actinic ray-sensitive or radiation-sensitive resin composition and pattern forming method using the same
CN102333797B (zh) 2009-02-23 2014-08-13 Jsr株式会社 化合物、含氟原子聚合物和放射线敏感性树脂组合物
JP5586294B2 (ja) 2009-03-31 2014-09-10 富士フイルム株式会社 感活性光線性または感放射線性樹脂組成物、及び該組成物を用いたパターン形成方法
JP5386236B2 (ja) 2009-06-01 2014-01-15 東京応化工業株式会社 ポジ型レジスト組成物及びレジストパターン形成方法
JP5626207B2 (ja) 2009-06-04 2014-11-19 Jsr株式会社 感放射線性樹脂組成物及びレジストパターン形成方法
JP5568258B2 (ja) 2009-07-03 2014-08-06 東京応化工業株式会社 ポジ型レジスト組成物およびそれを用いたレジストパターン形成方法、並びに含フッ素高分子化合物
JP5645510B2 (ja) * 2009-07-10 2014-12-24 富士フイルム株式会社 感活性光線性または感放射線性樹脂組成物およびこれを用いたパターン形成方法
US9023579B2 (en) 2009-07-10 2015-05-05 Fujifilm Corporation Actinic-ray- or radiation-sensitive resin composition, compound and method of forming pattern using the composition
JP5645459B2 (ja) 2009-07-10 2014-12-24 富士フイルム株式会社 感活性光線性または感放射線性樹脂組成物およびこれを用いたパターン形成方法
JP5629440B2 (ja) 2009-08-31 2014-11-19 富士フイルム株式会社 感活性光線性または感放射線性樹脂組成物およびこれを用いたパターン形成方法
JP5505371B2 (ja) * 2010-06-01 2014-05-28 信越化学工業株式会社 高分子化合物、化学増幅ポジ型レジスト材料、及びパターン形成方法
KR101848955B1 (ko) 2010-10-04 2018-04-13 제이에스알 가부시끼가이샤 패턴 형성 방법 및 감방사선성 수지 조성물
JP5940455B2 (ja) 2010-10-15 2016-06-29 Jsr株式会社 レジストパターン形成方法
KR20130084325A (ko) 2010-10-19 2013-07-24 제이에스알 가부시끼가이샤 감방사선성 수지 조성물
JPWO2012053527A1 (ja) 2010-10-22 2014-02-24 Jsr株式会社 パターン形成方法及び感放射線性組成物
JP5035466B1 (ja) 2011-02-04 2012-09-26 Ｊｓｒ株式会社 レジストパターン形成用感放射線性樹脂組成物
KR101940522B1 (ko) 2014-09-30 2019-01-21 후지필름 가부시키가이샤 패턴 형성 방법, 보호막 형성용 조성물, 전자 디바이스의 제조 방법 및 전자 디바이스
JP6476207B2 (ja) 2014-12-17 2019-02-27 富士フイルム株式会社 パターン形成方法及び電子デバイスの製造方法
JP6864994B2 (ja) 2015-06-26 2021-04-28 住友化学株式会社 レジスト組成物
JP6883954B2 (ja) 2015-06-26 2021-06-09 住友化学株式会社 レジスト組成物
JP6782102B2 (ja) 2015-06-26 2020-11-11 住友化学株式会社 レジスト組成物
TWI701512B (zh) 2015-12-02 2020-08-11 日商富士軟片股份有限公司 圖案形成方法、電子元件的製造方法、積層膜及上層膜形成用組成物
JP6796534B2 (ja) * 2017-03-31 2020-12-09 東京応化工業株式会社 レジスト組成物及びレジストパターン形成方法
CN111205385A (zh) * 2020-02-28 2020-05-29 宁波南大光电材料有限公司 含酸抑制剂的改性成膜树脂及其制备方法与光刻胶组合物

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0605103B1 (de) * 1992-11-27 1998-10-14 Canon Kabushiki Kaisha Projektionsvorrichtung zur Tauchbelichtung
US20010014428A1 (en) * 1999-12-22 2001-08-16 Yasunori Uetani Chemically amplified positive resist composition
JP2001349816A (ja) * 2000-06-07 2001-12-21 Semiconductor Leading Edge Technologies Inc 薄膜評価方法および薄膜評価装置
US6479211B1 (en) * 1999-05-26 2002-11-12 Fuji Photo Film Co., Ltd. Positive photoresist composition for far ultraviolet exposure

Family Cites Families (53)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5353314A (en) 1976-10-26 1978-05-15 Agency Of Ind Science & Technol Sensitive high polymer composition and picture imae forming method usingsaid composition
US4276365A (en) 1979-07-02 1981-06-30 Fujitsu Limited Positive resist terpolymer composition and method of forming resist pattern
JPS6265352A (ja) 1985-09-18 1987-03-24 Hitachi Ltd 電子装置
JPS6265326A (ja) 1985-09-18 1987-03-24 Hitachi Ltd 露光装置
JPS62134644A (ja) 1985-12-06 1987-06-17 Fujitsu Ltd ポジ型レジスト組成物
US4792353A (en) 1986-10-10 1988-12-20 Massachusetts Institute Of Technology Aluminum oxide-metal compositions
JP2653148B2 (ja) 1989-01-20 1997-09-10 富士通株式会社 レジスト組成物
JP3268585B2 (ja) * 1993-03-16 2002-03-25 川崎製鉄株式会社 ２次元距離計を用いた板幅・蛇行測定装置の校正装置
KR960015081A (ko) 1993-07-15 1996-05-22 마쯔모또 에이이찌 화학증폭형 레지스트 조성물
JP3438287B2 (ja) 1994-01-20 2003-08-18 富士通株式会社 レジストの品質管理方法
KR100255706B1 (ko) 1995-10-27 2000-05-01 나까니시 히로유끼 반방향족 폴리아미드 제조방법
KR100253575B1 (ko) 1996-06-24 2000-04-15 김영환 포토레지스트
KR0183901B1 (ko) 1996-07-03 1999-04-01 삼성전자 주식회사 레지스트 조성물
US5929271A (en) 1996-08-20 1999-07-27 Tokyo Ohka Kogyo Co., Ltd. Compounds for use in a positive-working resist composition
TW490593B (en) 1996-10-16 2002-06-11 Sumitomo Chemical Co Positive resist composition
TW495535B (en) 1997-01-28 2002-07-21 Hitachi Chemical Co Ltd Epoxy resin composition for semiconductor sealing
JP3307853B2 (ja) 1997-05-30 2002-07-24 東京エレクトロン株式会社 膜厚評価方法および処理装置
TW383414B (en) 1997-03-05 2000-03-01 Tokyo Electron Ltd Photoresist agent processing method and photoresist agent processing system and evaluation method and processing apparatus for photoresist agent film
US6077643A (en) 1997-08-28 2000-06-20 Shipley Company, L.L.C. Polymers and photoresist compositions
US6057083A (en) 1997-11-04 2000-05-02 Shipley Company, L.L.C. Polymers and photoresist compositions
TW466382B (en) 1997-11-17 2001-12-01 Sumitomo Chemical Co A method for forming a resist pattern and a positive resist composition used for the same
JPH11176727A (ja) * 1997-12-11 1999-07-02 Nikon Corp 投影露光装置
AU2747999A (en) * 1998-03-26 1999-10-18 Nikon Corporation Projection exposure method and system
JP3859353B2 (ja) 1998-04-28 2006-12-20 富士通株式会社 ネガ型レジスト組成物およびレジストパターンの形成方法
JP3042618B2 (ja) 1998-07-03 2000-05-15 日本電気株式会社 ラクトン構造を有する（メタ）アクリレート誘導体、重合体、フォトレジスト組成物、及びパターン形成方法
KR100382960B1 (ko) 1998-07-03 2003-05-09 닛뽕덴끼 가부시끼가이샤 락톤 구조를 갖는 (메트)아크릴레이트 유도체, 중합체,포토레지스트 조성물, 및 이것을 사용한 패턴 형성 방법
JP2000058436A (ja) * 1998-08-11 2000-02-25 Nikon Corp 投影露光装置及び露光方法
CN1190706C (zh) * 1998-08-26 2005-02-23 住友化学工业株式会社 一种化学增强型正光刻胶组合物
JP3876571B2 (ja) 1998-08-26 2007-01-31 住友化学株式会社 化学増幅型ポジ型レジスト組成物
US6303266B1 (en) * 1998-09-24 2001-10-16 Kabushiki Kaisha Toshiba Resin useful for resist, resist composition and pattern forming process using the same
JP2000121498A (ja) 1998-10-15 2000-04-28 Nikon Corp 結像性能の評価方法及び装置
JP3727044B2 (ja) * 1998-11-10 2005-12-14 東京応化工業株式会社 ネガ型レジスト組成物
TWI263866B (en) * 1999-01-18 2006-10-11 Sumitomo Chemical Co Chemical amplification type positive resist composition
WO2000060384A1 (fr) 1999-03-31 2000-10-12 Daicel Chemical Industries, Ltd. Couche de diffusion de lumiere, couche composite de diffusion de lumiere et ecran a cristaux liquides
JP3547047B2 (ja) 1999-05-26 2004-07-28 富士写真フイルム株式会社 遠紫外線露光用ポジ型フォトレジスト組成物
US6461789B1 (en) * 1999-08-25 2002-10-08 Shin-Etsu Chemical Co., Ltd. Polymers, chemical amplification resist compositions and patterning process
JP4061801B2 (ja) * 2000-01-24 2008-03-19 住友化学株式会社 化学増幅型ポジ型レジスト組成物
JP2002043215A (ja) 2000-07-28 2002-02-08 Sharp Corp レジストパターン形成方法および半導体製造装置および半導体装置および携帯情報端末
JP2002057093A (ja) 2000-08-11 2002-02-22 Tokyo Electron Ltd 現像処理の評価方法、レジストパタ−ン形成方法及びレジストパタ−ン形成システム
JP4441104B2 (ja) 2000-11-27 2010-03-31 東京応化工業株式会社 ポジ型レジスト組成物
JP3945741B2 (ja) 2000-12-04 2007-07-18 東京応化工業株式会社 ポジ型レジスト組成物
JP4255100B2 (ja) 2001-04-06 2009-04-15 富士フイルム株式会社 ＡｒＦエキシマレ−ザ−露光用ポジ型フォトレジスト組成物及びそれを用いたパタ−ン形成方法
JP3991191B2 (ja) * 2001-06-14 2007-10-17 信越化学工業株式会社 ラクトン構造を有する新規（メタ）アクリレート化合物、重合体、フォトレジスト材料、及びパターン形成法
JP3803286B2 (ja) 2001-12-03 2006-08-02 東京応化工業株式会社 ポジ型レジスト組成物及びレジストパターンの形成方法
JP3841399B2 (ja) * 2002-02-21 2006-11-01 富士写真フイルム株式会社 ポジ型レジスト組成物
US6781670B2 (en) 2002-12-30 2004-08-24 Intel Corporation Immersion lithography
JP4121388B2 (ja) 2003-01-30 2008-07-23 富士フイルム株式会社 ポジ型レジスト組成物、及び、活性光線の照射により酸を発生する化合物
JP4146755B2 (ja) 2003-05-09 2008-09-10 松下電器産業株式会社 パターン形成方法
JP4084712B2 (ja) 2003-06-23 2008-04-30 松下電器産業株式会社 パターン形成方法
US6809794B1 (en) 2003-06-27 2004-10-26 Asml Holding N.V. Immersion photolithography system and method using inverted wafer-projection optics interface
US6844206B1 (en) 2003-08-21 2005-01-18 Advanced Micro Devices, Llp Refractive index system monitor and control for immersion lithography
JP4235810B2 (ja) * 2003-10-23 2009-03-11 信越化学工業株式会社 高分子化合物、レジスト材料及びパターン形成方法
KR100557222B1 (ko) 2004-04-28 2006-03-07 동부아남반도체 주식회사 이머전 리소그라피 공정의 액체 제거 장치 및 방법

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0605103B1 (de) * 1992-11-27 1998-10-14 Canon Kabushiki Kaisha Projektionsvorrichtung zur Tauchbelichtung
US6479211B1 (en) * 1999-05-26 2002-11-12 Fuji Photo Film Co., Ltd. Positive photoresist composition for far ultraviolet exposure
US20010014428A1 (en) * 1999-12-22 2001-08-16 Yasunori Uetani Chemically amplified positive resist composition
JP2001349816A (ja) * 2000-06-07 2001-12-21 Semiconductor Leading Edge Technologies Inc 薄膜評価方法および薄膜評価装置

Also Published As

Publication number Publication date
US20070178394A1 (en) 2007-08-02
US7527909B2 (en) 2009-05-05
EP1653284A3 (de) 2010-01-27
US20050014090A1 (en) 2005-01-20
TW200538879A (en) 2005-12-01
CN1800847A (zh) 2006-07-12
EP1653285A2 (de) 2006-05-03
EP1653284A2 (de) 2006-05-03
WO2004068242A1 (ja) 2004-08-12
US7541138B2 (en) 2009-06-02
TWI317461B (en) 2009-11-21
CN100565341C (zh) 2009-12-02
JP2005208509A (ja) 2005-08-04
CN1800846A (zh) 2006-07-12
CN1742234A (zh) 2006-03-01
JP4434762B2 (ja) 2010-03-17
ATE529780T1 (de) 2011-11-15
TW200613918A (en) 2006-05-01
KR100660791B1 (ko) 2006-12-22
EP1653285A3 (de) 2010-01-20
US7501220B2 (en) 2009-03-10
US8198004B2 (en) 2012-06-12
TWI304518B (en) 2008-12-21
KR20050098874A (ko) 2005-10-12
EP1653285B1 (de) 2015-05-27
EP1589375A4 (de) 2010-02-17
US20070190436A1 (en) 2007-08-16
EP1653284B1 (de) 2011-11-02
US20090130605A1 (en) 2009-05-21
CN100533143C (zh) 2009-08-26
KR20060006100A (ko) 2006-01-18
KR20060006101A (ko) 2006-01-18
EP1589375A1 (de) 2005-10-26
KR100660792B1 (ko) 2006-12-22
CN100523804C (zh) 2009-08-05
KR100743416B1 (ko) 2007-07-30
TW200426509A (en) 2004-12-01
EP1589375B1 (de) 2011-10-19
TWI338192B (en) 2011-03-01
ATE532103T1 (de) 2011-11-15

Similar Documents

Publication Publication Date Title
SG133444A1 (en) Evaluation method of resist composition using immersion solvent
EP1598704A3 (de) Verfahren zur Erzeugung eines Musters
WO2006015339A3 (en) Methods and apparatus for improving the accuracy and reach of electronic media exposure measurement systems
NL1028549A1 (nl) Patroonbelichtingswerkwijze en patroonbelichtingsinrichting.
WO2006056972A3 (en) Method and apparatus for speaker spotting
DE602004025703D1 (de) System zur prüfung der muskelkraft
TWI366067B (en) Photosensitive composition and pattern forming method using the same
WO2005081910A3 (en) Generalization of the photo process window and its application to opc test pattern design
EP1602983A4 (de) Wasserlösliche harzzusammensetzung, verfahren zur musterbildung und verfahren zur inspektion des beständigen musters
ATE514503T1 (de) Verfahren zur herstellung von auxetischen schäumen
DE502004011042D1 (de) Verfahren zum testen von unbestückten leiterplatten
TW200632557A (en) Positive resist composition for immersion exposure and pattern-forming method using the same
SG133539A1 (en) Lithographic apparatus and device manufacturing method using multiple exposures and multiple exposure types
EP1118855A3 (de) Verfahren zur Vorhersage der Entflammbarkeitsgrenzen von komplexen Mischungen
DE602004017060D1 (de) Verfahren zur herstellung von kleidungsstücken mit herunterhängenden beinen
DE60301970D1 (de) Verfahren und Vorrichtung für gewichtete, nichtbinäre Wiederholungskodierung und Raum-Zeit-Kodierung
TW200621102A (en) Capacitor device and method of manufacturing the same
SV2006002057A (es) Procesos ref. ppd 70440
DE60310179D1 (de) Bildformendes Verfahren, sowie bildformender Apparat
ATE390190T1 (de) Verfahren zur extraktion von inhaltsstoffen aus organischem material
DE602004016930D1 (de) Elekrographischer Photorezeptor, Herstellungsverfahren eines elektrophotographischen Photorezeptors, und elektrophotographische Apparat und Verfahrenskartusche worin der elektrophotographische Photorezeptor verwendet wird
ATE433568T1 (de) Verfahren und vorrichtung zum testen der witterungsbeständigkeit von bildern
NO20064354L (no) Fremgangsmate for bestemmelse av sympatisk tonus og system for maling derav
EP1457819A3 (de) Positiv arbeitende Resistzusammensetzung und Verfahren zur Herstellung eines Resist-Musters unter Verwendung dieser Zusammensetzung
TW200722925A (en) Positive resist composition and a pattern forming method using the same