KR20050033434A - 반도체장치 및 그의 제조방법 - Google Patents
반도체장치 및 그의 제조방법 Download PDFInfo
- Publication number
- KR20050033434A KR20050033434A KR1020040077760A KR20040077760A KR20050033434A KR 20050033434 A KR20050033434 A KR 20050033434A KR 1020040077760 A KR1020040077760 A KR 1020040077760A KR 20040077760 A KR20040077760 A KR 20040077760A KR 20050033434 A KR20050033434 A KR 20050033434A
- Authority
- KR
- South Korea
- Prior art keywords
- substrate
- semiconductor device
- semiconductor
- adhesive bonding
- semiconductor element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/50—Encapsulations or containers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
- H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
- H10W70/62—Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their interconnections
- H10W70/65—Shapes or dispositions of interconnections
- H10W70/657—Shapes or dispositions of interconnections on sidewalls or bottom surfaces of the package substrates, interposers or redistribution layers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/074—Connecting or disconnecting of anisotropic conductive adhesives
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/30—Die-attach connectors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/30—Die-attach connectors
- H10W72/321—Structures or relative sizes of die-attach connectors
- H10W72/325—Die-attach connectors having a filler embedded in a matrix
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/30—Die-attach connectors
- H10W72/351—Materials of die-attach connectors
- H10W72/352—Materials of die-attach connectors comprising metals or metalloids, e.g. solders
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/30—Die-attach connectors
- H10W72/351—Materials of die-attach connectors
- H10W72/353—Materials of die-attach connectors not comprising solid metals or solid metalloids, e.g. ceramics
- H10W72/354—Materials of die-attach connectors not comprising solid metals or solid metalloids, e.g. ceramics comprising polymers
Landscapes
- Light Receiving Elements (AREA)
- Wire Bonding (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Photovoltaic Devices (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JPJP-P-2003-00347678 | 2003-10-06 | ||
| JP2003347678 | 2003-10-06 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020090082612A Division KR20090114343A (ko) | 2003-10-06 | 2009-09-02 | 반도체장치 제조방법 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR20050033434A true KR20050033434A (ko) | 2005-04-12 |
Family
ID=34509704
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020040077760A Ceased KR20050033434A (ko) | 2003-10-06 | 2004-09-30 | 반도체장치 및 그의 제조방법 |
| KR1020090082612A Ceased KR20090114343A (ko) | 2003-10-06 | 2009-09-02 | 반도체장치 제조방법 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020090082612A Ceased KR20090114343A (ko) | 2003-10-06 | 2009-09-02 | 반도체장치 제조방법 |
Country Status (5)
| Country | Link |
|---|---|
| US (2) | US7180197B2 (https=) |
| EP (1) | EP1542272B1 (https=) |
| JP (1) | JP4679106B2 (https=) |
| KR (2) | KR20050033434A (https=) |
| CN (1) | CN100499175C (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100898503B1 (ko) | 2007-09-04 | 2009-05-20 | 주식회사 아이에스시테크놀러지 | 고주파 인터포저 |
Families Citing this family (35)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005340647A (ja) * | 2004-05-28 | 2005-12-08 | Nec Compound Semiconductor Devices Ltd | インターポーザ基板、半導体パッケージ及び半導体装置並びにそれらの製造方法 |
| JP2006202938A (ja) * | 2005-01-20 | 2006-08-03 | Kojiro Kobayashi | 半導体装置及びその製造方法 |
| US7754529B2 (en) * | 2005-02-03 | 2010-07-13 | Panasonic Corporation | Flip chip mounting body and method for mounting such flip chip mounting body and bump forming method |
| US7943287B2 (en) * | 2006-07-28 | 2011-05-17 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing display device |
| US7994021B2 (en) * | 2006-07-28 | 2011-08-09 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing semiconductor device |
| KR101346246B1 (ko) | 2006-08-24 | 2013-12-31 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 표시장치 제작방법 |
| US7795154B2 (en) | 2006-08-25 | 2010-09-14 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device that uses laser ablation, to selectively remove one or more material layers |
| US8563431B2 (en) * | 2006-08-25 | 2013-10-22 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
| US7651896B2 (en) | 2006-08-30 | 2010-01-26 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
| JP5110830B2 (ja) * | 2006-08-31 | 2012-12-26 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
| US7960261B2 (en) * | 2007-03-23 | 2011-06-14 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing crystalline semiconductor film and method for manufacturing thin film transistor |
| KR101423055B1 (ko) * | 2007-04-18 | 2014-07-25 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치를 갖는 광전 변환 소자 및 이것을 사용한반도체 장치 |
| EP1986238A3 (en) | 2007-04-27 | 2010-12-29 | Semiconductor Energy Laboratory Co., Ltd. | Resin molded optical semiconductor device and corresponding fabrication method |
| JP4989549B2 (ja) * | 2007-08-24 | 2012-08-01 | 三洋電機株式会社 | 太陽電池及び太陽電池モジュール |
| JP5252472B2 (ja) | 2007-09-28 | 2013-07-31 | シャープ株式会社 | 太陽電池、太陽電池の製造方法、太陽電池モジュールの製造方法および太陽電池モジュール |
| EP2216827A1 (en) | 2007-11-09 | 2010-08-11 | Sharp Kabushiki Kaisha | Solar battery module and method for manufacturing solar battery module |
| DE102007055017B4 (de) * | 2007-11-14 | 2010-11-04 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zum Verbinden zweier Fügeflächen und Bauteil mit zwei verbundenen Fügeflächen |
| CN101897033B (zh) * | 2007-12-17 | 2012-11-14 | 高通Mems科技公司 | 具有干涉式背面掩模的光伏装置及其制造方法 |
| US20090278213A1 (en) * | 2008-05-08 | 2009-11-12 | International Business Machines Corporation | Electrode arrays and methods of fabricating the same using printing plates to arrange particles in an array |
| US8207487B2 (en) * | 2008-06-25 | 2012-06-26 | Semiconductor Energy Laboratory Co., Ltd. | Photoelectric conversion device including charge/discharge circuit |
| EP2448008A1 (en) | 2009-06-22 | 2012-05-02 | Sharp Kabushiki Kaisha | Solar cell, solar cell with wiring sheet attached, and solar cell module |
| JP4988065B2 (ja) | 2009-06-29 | 2012-08-01 | シャープ株式会社 | 配線シート、配線シート付き太陽電池セル、太陽電池モジュールおよび配線シートロール |
| JPWO2011024534A1 (ja) * | 2009-08-27 | 2013-01-24 | 独立行政法人産業技術総合研究所 | 多接合光電変換装置、集積型多接合光電変換装置、並びにその製造方法 |
| JP5660122B2 (ja) * | 2010-03-02 | 2015-01-28 | コニカミノルタ株式会社 | 放射線検出パネル、放射線画像検出器、放射線検出パネルの製造方法および放射線画像検出器の製造方法 |
| DE102010027953A1 (de) * | 2010-04-20 | 2011-12-01 | Robert Bosch Gmbh | Verfahren zur Herstellung eines Photovoltaikmoduls mit rückseitenkontaktierten Halbleiterzellen und Photovoltaik-Modul |
| JP2012080085A (ja) * | 2010-09-10 | 2012-04-19 | Nichia Chem Ind Ltd | 支持体及びそれを用いた発光装置 |
| CN102810574A (zh) * | 2011-05-31 | 2012-12-05 | 联景光电股份有限公司 | 太阳能电池的电极 |
| CN102569247A (zh) * | 2012-01-17 | 2012-07-11 | 华为终端有限公司 | 集成模块、集成系统板和电子设备 |
| TWI669835B (zh) | 2012-07-05 | 2019-08-21 | 日商半導體能源研究所股份有限公司 | 發光裝置 |
| KR102173801B1 (ko) | 2012-07-12 | 2020-11-04 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 표시 장치, 및 표시 장치의 제작 방법 |
| US11074025B2 (en) | 2012-09-03 | 2021-07-27 | Semiconductor Energy Laboratory Co., Ltd. | Display device and method for manufacturing the same |
| US11581446B2 (en) * | 2015-10-08 | 2023-02-14 | The Boeing Company | Semiconductor device including an electrically conductive adhesive layer and a bypass diode in a carrier |
| US10879211B2 (en) | 2016-06-30 | 2020-12-29 | R.S.M. Electron Power, Inc. | Method of joining a surface-mount component to a substrate with solder that has been temporarily secured |
| JP2018098487A (ja) * | 2016-12-14 | 2018-06-21 | 株式会社村田製作所 | 半導体モジュール |
| KR102423292B1 (ko) * | 2021-09-07 | 2022-07-20 | 한국기계연구원 | 식각 장치 및 이를 포함하는 인터포저 제조 시스템 |
Family Cites Families (41)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4423435A (en) * | 1980-10-27 | 1983-12-27 | Texas Instruments Incorporated | Assembly of an electronic device on an insulative substrate |
| JPS63122133A (ja) * | 1986-11-11 | 1988-05-26 | Matsushita Electric Ind Co Ltd | 半導体チツプの電気的接続方法 |
| JPH0287558A (ja) * | 1988-09-24 | 1990-03-28 | Murata Mfg Co Ltd | Icチップ |
| DE68926448T2 (de) * | 1988-10-14 | 1996-12-12 | Matsushita Electric Ind Co Ltd | Bildsensor und verfahren zu dessen herstellung |
| US5272376A (en) * | 1990-06-01 | 1993-12-21 | Clarion Co., Ltd. | Electrode structure for a semiconductor device |
| JPH04107955A (ja) * | 1990-08-28 | 1992-04-09 | Matsushita Electric Ind Co Ltd | 電子回路素子の封止方法 |
| JP3329512B2 (ja) | 1993-03-22 | 2002-09-30 | 株式会社半導体エネルギー研究所 | 半導体回路およびその作製方法 |
| US5501989A (en) | 1993-03-22 | 1996-03-26 | Semiconductor Energy Laboratory Co., Ltd. | Method of making semiconductor device/circuit having at least partially crystallized semiconductor layer |
| JP3164182B2 (ja) * | 1993-08-27 | 2001-05-08 | 株式会社村田製作所 | 複合電子部品 |
| JP3150840B2 (ja) | 1994-03-11 | 2001-03-26 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
| US6700133B1 (en) * | 1994-03-11 | 2004-03-02 | Semiconductor Energy Laboratory Co., Ltd. | Method for producing semiconductor device |
| US5672545A (en) * | 1994-08-08 | 1997-09-30 | Santa Barbara Research Center | Thermally matched flip-chip detector assembly and method |
| JP2900229B2 (ja) | 1994-12-27 | 1999-06-02 | 株式会社半導体エネルギー研究所 | 半導体装置およびその作製方法および電気光学装置 |
| JPH08201540A (ja) * | 1995-01-31 | 1996-08-09 | Citizen Watch Co Ltd | 太陽電池付き時計の構造 |
| EP0840369A4 (en) * | 1995-06-30 | 2001-12-19 | Toshiba Kk | ELECTRONIC COMPONENT AND PRODUCTION METHOD THEREFOR |
| JPH0945805A (ja) * | 1995-07-31 | 1997-02-14 | Fujitsu Ltd | 配線基板、半導体装置及び半導体装置を配線基板から取り外す方法並びに半導体装置の製造方法 |
| JP3183390B2 (ja) * | 1995-09-05 | 2001-07-09 | キヤノン株式会社 | 光電変換装置及びそれを用いた撮像装置 |
| JPH1022329A (ja) * | 1996-07-01 | 1998-01-23 | Mitsui High Tec Inc | 半導体装置 |
| US6461890B1 (en) * | 1996-12-27 | 2002-10-08 | Rohm Co., Ltd. | Structure of semiconductor chip suitable for chip-on-board system and methods of fabricating and mounting the same |
| US5783465A (en) * | 1997-04-03 | 1998-07-21 | Lucent Technologies Inc. | Compliant bump technology |
| JP3856250B2 (ja) * | 1997-04-23 | 2006-12-13 | シチズン電子株式会社 | Smd型led |
| KR100539060B1 (ko) * | 1997-10-28 | 2007-04-25 | 소니 케미카루 가부시키가이샤 | 이방도전성접착제및접착용막 |
| SG71734A1 (en) * | 1997-11-21 | 2000-04-18 | Inst Materials Research & Eng | Area array stud bump flip chip and assembly process |
| JP4085459B2 (ja) * | 1998-03-02 | 2008-05-14 | セイコーエプソン株式会社 | 3次元デバイスの製造方法 |
| JP3561166B2 (ja) * | 1999-01-21 | 2004-09-02 | 株式会社リコー | 異方性導電ペーストを用いた電子部品の接続方法 |
| JP2000323472A (ja) * | 1999-05-06 | 2000-11-24 | Canon Inc | 半導体装置、光電変換装置、及びこれらの製造方法 |
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| JP3597754B2 (ja) * | 2000-04-24 | 2004-12-08 | Necエレクトロニクス株式会社 | 半導体装置及びその製造方法 |
| JP2001358437A (ja) * | 2000-06-15 | 2001-12-26 | Seiko Epson Corp | 半導体装置の実装方法 |
| JP2002094082A (ja) | 2000-07-11 | 2002-03-29 | Seiko Epson Corp | 光素子及びその製造方法並びに電子機器 |
| US6624921B1 (en) * | 2001-03-12 | 2003-09-23 | Amkor Technology, Inc. | Micromirror device package fabrication method |
| JP2002313979A (ja) * | 2001-04-09 | 2002-10-25 | Sony Corp | インタポーザおよび電子回路装置 |
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| JP2003060744A (ja) | 2001-08-21 | 2003-02-28 | Sanyo Electric Co Ltd | 携帯機器 |
| JP4000507B2 (ja) | 2001-10-04 | 2007-10-31 | ソニー株式会社 | 固体撮像装置の製造方法 |
| US6555917B1 (en) * | 2001-10-09 | 2003-04-29 | Amkor Technology, Inc. | Semiconductor package having stacked semiconductor chips and method of making the same |
| JP5030360B2 (ja) * | 2002-12-25 | 2012-09-19 | オリンパス株式会社 | 固体撮像装置の製造方法 |
| JP3972825B2 (ja) | 2003-01-28 | 2007-09-05 | セイコーエプソン株式会社 | アクティブマトリクス型表示装置の製造方法 |
| US20040156177A1 (en) | 2003-02-12 | 2004-08-12 | Matsushita Electric Industrial Co., Ltd. | Package of electronic components and method for producing the same |
| JP2004266271A (ja) * | 2003-02-12 | 2004-09-24 | Matsushita Electric Ind Co Ltd | 電子部品の実装体及びその製造方法 |
| JP3693060B2 (ja) * | 2003-09-24 | 2005-09-07 | セイコーエプソン株式会社 | 半導体装置及びその製造方法、回路基板並びに電子機器 |
-
2004
- 2004-09-15 EP EP04021934.7A patent/EP1542272B1/en not_active Expired - Lifetime
- 2004-09-29 US US10/951,811 patent/US7180197B2/en not_active Expired - Lifetime
- 2004-09-30 KR KR1020040077760A patent/KR20050033434A/ko not_active Ceased
- 2004-10-05 JP JP2004292650A patent/JP4679106B2/ja not_active Expired - Fee Related
- 2004-10-08 CN CNB2004100874789A patent/CN100499175C/zh not_active Expired - Fee Related
-
2006
- 2006-08-03 US US11/498,164 patent/US8481370B2/en not_active Expired - Lifetime
-
2009
- 2009-09-02 KR KR1020090082612A patent/KR20090114343A/ko not_active Ceased
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100898503B1 (ko) | 2007-09-04 | 2009-05-20 | 주식회사 아이에스시테크놀러지 | 고주파 인터포저 |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1606169A (zh) | 2005-04-13 |
| KR20090114343A (ko) | 2009-11-03 |
| US8481370B2 (en) | 2013-07-09 |
| US20050082655A1 (en) | 2005-04-21 |
| EP1542272A3 (en) | 2012-03-07 |
| EP1542272B1 (en) | 2016-07-20 |
| CN100499175C (zh) | 2009-06-10 |
| JP4679106B2 (ja) | 2011-04-27 |
| US7180197B2 (en) | 2007-02-20 |
| JP2005175436A (ja) | 2005-06-30 |
| US20060270114A1 (en) | 2006-11-30 |
| EP1542272A2 (en) | 2005-06-15 |
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| PA0109 | Patent application |
St.27 status event code: A-0-1-A10-A12-nap-PA0109 |
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| PG1501 | Laying open of application |
St.27 status event code: A-1-1-Q10-Q12-nap-PG1501 |
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| PN2301 | Change of applicant |
St.27 status event code: A-3-3-R10-R13-asn-PN2301 St.27 status event code: A-3-3-R10-R11-asn-PN2301 |
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| A107 | Divisional application of patent | ||
| A201 | Request for examination | ||
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