KR20010006992A - 기판 수납 용기 - Google Patents
기판 수납 용기 Download PDFInfo
- Publication number
- KR20010006992A KR20010006992A KR1020000020575A KR20000020575A KR20010006992A KR 20010006992 A KR20010006992 A KR 20010006992A KR 1020000020575 A KR1020000020575 A KR 1020000020575A KR 20000020575 A KR20000020575 A KR 20000020575A KR 20010006992 A KR20010006992 A KR 20010006992A
- Authority
- KR
- South Korea
- Prior art keywords
- container body
- storage container
- substrate
- container
- mounting means
- Prior art date
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67379—Closed carriers characterised by coupling elements, kinematic members, handles or elements to be externally gripped
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67369—Closed carriers characterised by shock absorbing elements, e.g. retainers or cushions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67373—Closed carriers characterised by locking systems
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67383—Closed carriers characterised by substrate supports
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S206/00—Special receptacle or package
- Y10S206/832—Semiconductor wafer boat
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Packaging Frangible Articles (AREA)
Abstract
Description
Claims (8)
- 한쪽 측면이 개방된 용기 본체 및, 수납 용기의 기밀한 밀폐를 위해 용기 본체의 개구부에 설치할 수 있는 덮개로 구성된 기판 수납 용기로서:(a) 수평 위치에 있어 각각 상하로 배열된 복수의 기판 재질을 지지하기 위해, 용기 본체의 대향 측벽중 일 측벽의 내면상에 각각 일체성형된 두 세트의 기판 정렬 홈;(b) 상기 용기 본체의 저면에 고정된 저부 판;(c) 상기 용기 본체의 천정상에 설치되어 로보틱 플랜지를 착탈가능하게 지지하는 상부 설치 수단;(d) 상기 용기 본체의 측벽의 각 외면상에 설치되어 측부 레일을 착탈가능하게 지지하는 하부 설치 수단; 및(e) 상기 용기 본체의 대향측벽중 각 외면상에 설치되어 수동 핸들을 착탈가능하게 지지하는 측부 설치 수단으로 구성되며, 상기 로보틱 플랜지, 측면 레일 및 수동 핸들 중에서 선택된 부재가 선택적으로 설치되는 기판 수납 용기.
- 제 1 항에 있어서, 상기 상부 설치 수단 (c)는, 용기 본체의 천정상에 설치되는 안내 레일 및, 이 안내 레일에 형성되어 측부 개구부에 대향적인 단부 표면으로부터 측부 개구부쪽으로 경사가 점차 증가하는 경사 유도면으로 구성되며, 상기 로보틱 플랜지는 파지판 및, 이 파지판의 저면상에 설치되어, 상기 경사 유도면에 의해 안내되어 상기 안내 레일에 끼워맞춤하는 지주로 구성되는 것을 특징으로 하는 기판 수납 용기.
- 제 1 항에 있어서, 상기 하부 설치 수단은 각 측벽의 외면상에 설치되어 삽입용 공간을 형성하도록 결합 리브의 형태로 형성되고, 상기 측부 레일은 평판, 이 평판의 내측 단부상에 설치되어 결합 리브와 결합하는 삽입부 및, 평판의 외측 단부상에 설치되는 수평 지지판으로 구성되는 것을 특징으로 하는 기판 수납 용기.
- 제 1 항에 있어서, 상기 측부 설치 수단은, 용기 본체의 각 측벽 외면상에 설치되는 안내 레일 및, 개구부에 대향적인 용기 본체의 단부 표면으로부터 개구부쪽으로 경사가 점차 증가하는 경사 유도면으로 구성되고, 상기 수동 핸들은 상기 경사 유도면에 의해 안내되어 안내 레일에 끼워맞춤하는 판 및, 이 판의 외면상에 설치되는 핸들로 구성되는 것을 특징으로 하는 기판 수납 용기.
- 한쪽 측면이 개방된 용기 본체 및, 수납 용기의 기밀한 밀폐를 위해 용기 본체의 개구부에 설치할 수 있는 덮개로 구성된 기판 수납 용기로서:(a) 수평으로 평행하게 정렬된 복수의 기판 재질을 파지할 수 있는 형태의 불투명한 재질로 만들어지며, 또한 적어도 한쪽 측벽상에 투명한 재질로 만들어진 투시창이 설치되는 용기 본체; 및(b) 수납 용기의 반송에 사용되는 부속 부품들을 착탈가능하게 설치하기 위해, 용기 본체의 외면상에 설치되는 복수의 설치 수단으로 구성되는 기판 수납 용기.
- 제 1 항에 있어서, 용기 본체의 배면 벽에는, 수납 용기에 수납된 기판 재질의 검사를 위해 투명한 재질의 투시창이 설치되는 것을 특징으로 하는 기판 수납 용기.
- 제 1 항에 있어서, 열가소성 수지로 만들어지며, 표면 저항치가 108Ω내지 1013Ω의 범위에 있는 것을 특징으로 하는 기판 수납 용기.
- 제 5 항에 있어서, 열가소성 수지로 만들어지며, 표면 저항치가 108Ω내지 1013Ω의 범위에 있는 것을 특징으로 하는 기판 수납 용기.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11250999A JP3916342B2 (ja) | 1999-04-20 | 1999-04-20 | 基板収納容器 |
JP99-112509 | 1999-04-20 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20010006992A true KR20010006992A (ko) | 2001-01-26 |
KR100593217B1 KR100593217B1 (ko) | 2006-06-28 |
Family
ID=14588441
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020000020575A KR100593217B1 (ko) | 1999-04-20 | 2000-04-19 | 기판 수납 용기 |
Country Status (6)
Country | Link |
---|---|
US (3) | US6382419B1 (ko) |
EP (2) | EP1339097B1 (ko) |
JP (1) | JP3916342B2 (ko) |
KR (1) | KR100593217B1 (ko) |
DE (2) | DE60029021T2 (ko) |
TW (1) | TW444360B (ko) |
Cited By (3)
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KR100876446B1 (ko) * | 2001-11-28 | 2008-12-29 | 가부시키가이샤 라이트세이사쿠쇼 | 반송 용기의 덮개 착탈 장치 |
KR100929471B1 (ko) * | 2005-02-03 | 2009-12-02 | 신에츠 폴리머 가부시키가이샤 | 고정 캐리어, 고정 캐리어의 제조 방법, 고정 캐리어의 사용 방법, 및 기판 수납 용기 |
KR20160013018A (ko) * | 2013-05-29 | 2016-02-03 | 미라이얼 가부시키가이샤 | 기판수납용기 |
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- 2000-04-04 DE DE60029021T patent/DE60029021T2/de not_active Expired - Lifetime
- 2000-04-04 EP EP03009911A patent/EP1339097B1/en not_active Expired - Lifetime
- 2000-04-04 DE DE60010969T patent/DE60010969T2/de not_active Expired - Lifetime
- 2000-04-04 EP EP00107281A patent/EP1047112B1/en not_active Expired - Lifetime
- 2000-04-05 TW TW089106256A patent/TW444360B/zh not_active IP Right Cessation
- 2000-04-19 KR KR1020000020575A patent/KR100593217B1/ko active IP Right Grant
- 2000-04-19 US US09/551,959 patent/US6382419B1/en not_active Expired - Lifetime
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2001
- 2001-09-28 US US09/967,574 patent/US20020020650A1/en not_active Abandoned
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KR100876446B1 (ko) * | 2001-11-28 | 2008-12-29 | 가부시키가이샤 라이트세이사쿠쇼 | 반송 용기의 덮개 착탈 장치 |
KR100929471B1 (ko) * | 2005-02-03 | 2009-12-02 | 신에츠 폴리머 가부시키가이샤 | 고정 캐리어, 고정 캐리어의 제조 방법, 고정 캐리어의 사용 방법, 및 기판 수납 용기 |
KR20160013018A (ko) * | 2013-05-29 | 2016-02-03 | 미라이얼 가부시키가이샤 | 기판수납용기 |
Also Published As
Publication number | Publication date |
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TW444360B (en) | 2001-07-01 |
US20020038773A1 (en) | 2002-04-04 |
US6382419B1 (en) | 2002-05-07 |
EP1047112B1 (en) | 2004-05-26 |
DE60010969D1 (de) | 2004-07-01 |
JP3916342B2 (ja) | 2007-05-16 |
KR100593217B1 (ko) | 2006-06-28 |
JP2000306988A (ja) | 2000-11-02 |
EP1339097A2 (en) | 2003-08-27 |
DE60029021D1 (de) | 2006-08-03 |
EP1339097A3 (en) | 2004-04-28 |
EP1047112A3 (en) | 2002-02-20 |
DE60010969T2 (de) | 2005-06-02 |
US20020020650A1 (en) | 2002-02-21 |
EP1047112A2 (en) | 2000-10-25 |
EP1339097B1 (en) | 2006-06-21 |
DE60029021T2 (de) | 2006-11-30 |
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