JP4159946B2 - 基板収納容器 - Google Patents
基板収納容器 Download PDFInfo
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- JP4159946B2 JP4159946B2 JP2003295323A JP2003295323A JP4159946B2 JP 4159946 B2 JP4159946 B2 JP 4159946B2 JP 2003295323 A JP2003295323 A JP 2003295323A JP 2003295323 A JP2003295323 A JP 2003295323A JP 4159946 B2 JP4159946 B2 JP 4159946B2
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- storage container
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- 229920003002 synthetic resin Polymers 0.000 description 2
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Images
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
各支持リブの表面に、基板の裏面周縁部に面接触する複数の突条を容器本体の幅方向外側から内側にかけて設け、各突条の両側部をそれぞれ傾けて突条を容器本体の幅方向外側から内側に向けて徐々に細くなるようにし、
各コンベヤ接触レールのコンベヤに接触する底面を略平滑な平面に形成し、このコンベヤ接触レールの前後両端部の底面を切り欠いて上下方向に1°〜10°の角度で傾斜させたことを特徴としている。
また、コンベヤ接触レールの端部両側をそれぞれ傾け、このコンベヤ接触レールの非端部から端部に向かうにしたがいコンベヤ接触レールの端部を徐々に広げることもできる。
2 支持リブ
5 突条
6 位置規制片
20 蓋体
30 ボトムプレート
31 位置決め部材
40 コンベヤ接触レール
41 コンベヤ接触面
42 底面
43 誘導部
Claims (4)
- 基板を収納可能な容器本体と、この容器本体の内部両側の上下方向にそれぞれ並べ設けられる基板用の支持リブと、この複数の支持リブの後方に位置する基板用の位置規制片と、容器本体の底部に取り付けられるボトムプレートと、このボトムプレートの両側部にそれぞれ設けられてコンベヤで容器本体が搬送される場合に基板に加わる振動を抑制する一対のコンベヤ接触レールとを含んでなる基板収納容器であって、
各支持リブの表面に、基板の裏面周縁部に面接触する複数の突条を容器本体の幅方向外側から内側にかけて設け、各突条の両側部をそれぞれ傾けて突条を容器本体の幅方向外側から内側に向けて徐々に細くなるようにし、
各コンベヤ接触レールのコンベヤに接触する底面を略平滑な平面に形成し、このコンベヤ接触レールの前後両端部の底面を切り欠いて上下方向に1°〜10°の角度で傾斜させたことを特徴とする基板収納容器。 - 容器本体の内部両側とベース板とをそれぞれ一体化し、このベース板の内面に複数の支持リブと位置規制片とを一体形成して位置規制片をベース板の後部に位置させ、各支持リブを細長い棚板形に形成し、位置規制片を支持リブとは異なる低磨耗性の材料で形成した請求項1記載の基板収納容器。
- ベース板の後部をその表裏両面から挟むよう位置規制片を一体形成した請求項2記載の基板収納容器。
- コンベヤ接触レールの端部両側をそれぞれ傾け、このコンベヤ接触レールの非端部から端部に向かうにしたがいコンベヤ接触レールの端部を徐々に広げるようにした請求項1、2、又は3記載の基板収納容器。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003295323A JP4159946B2 (ja) | 2003-08-19 | 2003-08-19 | 基板収納容器 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003295323A JP4159946B2 (ja) | 2003-08-19 | 2003-08-19 | 基板収納容器 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005064378A JP2005064378A (ja) | 2005-03-10 |
JP4159946B2 true JP4159946B2 (ja) | 2008-10-01 |
Family
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Application Number | Title | Priority Date | Filing Date |
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JP2003295323A Expired - Fee Related JP4159946B2 (ja) | 2003-08-19 | 2003-08-19 | 基板収納容器 |
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JP (1) | JP4159946B2 (ja) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007086363A (ja) * | 2005-09-21 | 2007-04-05 | Hoya Corp | マスクブランク収納ケース、マスクブランクの収納方法及びマスクブランク収納体 |
CN100388455C (zh) * | 2005-09-29 | 2008-05-14 | 中芯国际集成电路制造(上海)有限公司 | 具有安全挡板的晶舟盒导轨传动装置 |
US20090194456A1 (en) * | 2006-07-07 | 2009-08-06 | Entegris, Inc. | Wafer cassette |
JP4920387B2 (ja) * | 2006-12-01 | 2012-04-18 | 信越半導体株式会社 | 基板収納容器 |
JP4889460B2 (ja) * | 2006-12-05 | 2012-03-07 | 信越ポリマー株式会社 | 半導体搬送容器用部品用導電性樹脂組成物及びこれを用いた半導体搬送容器用部品並びに半導体搬送容器 |
WO2009020068A1 (ja) * | 2007-08-09 | 2009-02-12 | Shin-Etsu Polymer Co., Ltd. | 基板を搭載する処理治具用の収納容器 |
JP5449974B2 (ja) * | 2009-10-16 | 2014-03-19 | ゴールド工業株式会社 | 精密基板収納容器 |
JP5522477B2 (ja) * | 2010-12-17 | 2014-06-18 | 株式会社ダイフク | 搬送設備 |
JP5601647B2 (ja) * | 2011-03-17 | 2014-10-08 | 信越ポリマー株式会社 | 基板収納容器及びサポート治具 |
JP5959302B2 (ja) * | 2012-05-16 | 2016-08-02 | 信越ポリマー株式会社 | 基板収納容器 |
JP5921371B2 (ja) * | 2012-07-13 | 2016-05-24 | 信越ポリマー株式会社 | 基板収納容器 |
-
2003
- 2003-08-19 JP JP2003295323A patent/JP4159946B2/ja not_active Expired - Fee Related
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