KR100593217B1 - 기판 수납 용기 - Google Patents
기판 수납 용기 Download PDFInfo
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- KR100593217B1 KR100593217B1 KR1020000020575A KR20000020575A KR100593217B1 KR 100593217 B1 KR100593217 B1 KR 100593217B1 KR 1020000020575 A KR1020000020575 A KR 1020000020575A KR 20000020575 A KR20000020575 A KR 20000020575A KR 100593217 B1 KR100593217 B1 KR 100593217B1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67379—Closed carriers characterised by coupling elements, kinematic members, handles or elements to be externally gripped
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67369—Closed carriers characterised by shock absorbing elements, e.g. retainers or cushions
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67373—Closed carriers characterised by locking systems
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67383—Closed carriers characterised by substrate supports
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S206/00—Special receptacle or package
- Y10S206/832—Semiconductor wafer boat
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Packaging Frangible Articles (AREA)
Abstract
Description
Claims (8)
- 한쪽 측면이 개방된 용기 본체 및, 수납 용기의 기밀한 밀폐를 위해 용기 본체의 상기 개구부에 설치할 수 있는 덮개를 구비하는 기판 수납 용기로서:(a) 수평 위치에 있어 각각 상하로 배열된 복수의 기판 재질을 지지하기 위해, 상기 용기 본체의 대향 측벽중 일 측벽의 내면상에 각각 일체성형된 두 세트의 기판 정렬 홈:(b) 상기 용기 본체의 저면에 고정된 저부 판;(c) 상기 용기 본체의 천정상에 설치되어 로보틱 플랜지를 착탈가능하게 지지하는 상부 설치 수단;(d) 상기 용기 본체의 측벽의 각 외면상에 설치되어 측부 레일을 착탈가능하게 지지하는 하부 설치 수단; 및(e) 상기 용기 본체의 대향측벽의 각 외면상에 설치되어 수동 핸들을 착탈가능하게 지지하는 측부 설치 수단을 포함하며, 상기 로보틱 플랜지, 측부 레일 및 수동 핸들 중에서 선택된 부재가 선택적으로 설치되는 기판 수납 용기.
- 제 1 항에 있어서, 상기 상부 설치 수단은, 상기 용기 본체의 천정상에 제공되는 안내 레일 및, 이 안내 레일에 형성되어 상기 측면 개구부의 반대편인 단부 표면으로부터 상기 개구부쪽으로 점차 증가하는 경사를 갖는 경사 유도면을 포함하며, 상기 로보틱 플랜지는 파지판 및, 이 파지판의 저면상에 제공되어, 상기 경사 유도면에 의해 안내됨에 따라 상기 안내 레일에 끼워지게하는 지주로 구성되는 것을 특징으로 하는 기판 수납 용기.
- 제 1 항에 있어서, 상기 하부 설치 수단은 각 측벽의 외면상에 제공되어 삽입용 공간을 형성하도록 결합 리브의 형태로 형성되고, 상기 측부 레일은 평판, 이 평판의 내측 단부상에 제공되어 상기 결합 리브와 결합하는 삽입부 및, 상기 평판의 외측 단부상에 설치되는 수평 지지판을 포함하는 것을 특징으로 하는 기판 수납 용기.
- 제 1 항에 있어서, 상기 측부 설치 수단은, 용기 본체의 각 측벽 외면상에 제공되는 안내 레일 및, 상기 개구부에 반대편인 용기 본체의 단부 표면으로부터 개구부쪽으로 점차 증가하는 경사를 갖는 경사 유도면을 포함하고, 상기 수동 핸들은 상기 경사 유도면에 의해 안내됨에 따라 상기 안내 레일에 끼우기 위한 판 및, 이 판의 외면상에 제공되는 핸들을 포함하는 것을 특징으로 하는 기판 수납 용기.
- 한쪽 측면이 개방된 용기 본체 및, 수납 용기의 기밀한 밀폐를 위해 용기 본체의 개구부에 설치할 수 있는 덮개를 구비하는 기판 수납 용기로서:(a) 수평으로 평행하게 정렬된 복수의 기판 재질을 파지할 수 있는 형태의 불투명한 재질로 만들어지며, 또한 적어도 한쪽 측벽상에 투명한 재질로 만들어진 투시창이 설치되는 용기 본체; 및(b) 상기 수납 용기의 반송에 사용되는 부속 부품들을 착탈가능하게 설치하기 위해, 상기 용기 본체의 외면상에 설치되는 복수의 설치 수단을 포함하고;상기 설치 수단은 상기 용기 본체의 천정상에 설치되어 로보틱 플랜지를 착탈가능하게 지지하는 상부 설치 수단; 상기 용기 본체의 측벽의 각 외면상에 설치되어 측부 레일을 착탈가능하게 지지하는 하부 설치 수단; 및 상기 용기 본체의 대향측벽의 각 외면상에 설치되어 수동 핸들을 착탈가능하게 지지하는 측부 설치 수단을 포함하는 기판 수납 용기.
- 제 1 항에 있어서, 상기 용기 본체의 배면 벽에는, 수납 용기에 수납된 기판 재질의 검사를 위해 투명한 재질의 투시창이 제공되는 것을 특징으로 하는 기판 수납 용기.
- 제 1 항에 있어서, 상기 수납 용기는 열가소성 수지로 만들어지며, 표면 저항치가 108 Ω내지 1013 Ω의 범위에 있는 것을 특징으로 하는 기판 수납 용기.
- 제 5 항에 있어서, 상기 수납 용기는 열가소성 수지로 만들어지며, 표면 저항치가 108 Ω내지 1013 Ω의 범위에 있는 것을 특징으로 하는 기판 수납 용기.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP99-112509 | 1999-04-20 | ||
JP11250999A JP3916342B2 (ja) | 1999-04-20 | 1999-04-20 | 基板収納容器 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20010006992A KR20010006992A (ko) | 2001-01-26 |
KR100593217B1 true KR100593217B1 (ko) | 2006-06-28 |
Family
ID=14588441
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020000020575A KR100593217B1 (ko) | 1999-04-20 | 2000-04-19 | 기판 수납 용기 |
Country Status (6)
Country | Link |
---|---|
US (3) | US6382419B1 (ko) |
EP (2) | EP1047112B1 (ko) |
JP (1) | JP3916342B2 (ko) |
KR (1) | KR100593217B1 (ko) |
DE (2) | DE60010969T2 (ko) |
TW (1) | TW444360B (ko) |
Cited By (1)
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KR101851250B1 (ko) * | 2010-10-19 | 2018-04-24 | 엔테그리스, 아이엔씨. | 로봇식 플랜지를 구비한 전면 개방형 웨이퍼 컨테이너 |
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1999
- 1999-04-20 JP JP11250999A patent/JP3916342B2/ja not_active Expired - Fee Related
-
2000
- 2000-04-04 DE DE60010969T patent/DE60010969T2/de not_active Expired - Lifetime
- 2000-04-04 EP EP00107281A patent/EP1047112B1/en not_active Expired - Lifetime
- 2000-04-04 EP EP03009911A patent/EP1339097B1/en not_active Expired - Lifetime
- 2000-04-04 DE DE60029021T patent/DE60029021T2/de not_active Expired - Lifetime
- 2000-04-05 TW TW089106256A patent/TW444360B/zh not_active IP Right Cessation
- 2000-04-19 US US09/551,959 patent/US6382419B1/en not_active Expired - Lifetime
- 2000-04-19 KR KR1020000020575A patent/KR100593217B1/ko active IP Right Grant
-
2001
- 2001-09-28 US US09/967,574 patent/US20020020650A1/en not_active Abandoned
- 2001-11-15 US US10/007,758 patent/US20020038773A1/en not_active Abandoned
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KR101851250B1 (ko) * | 2010-10-19 | 2018-04-24 | 엔테그리스, 아이엔씨. | 로봇식 플랜지를 구비한 전면 개방형 웨이퍼 컨테이너 |
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EP1339097B1 (en) | 2006-06-21 |
EP1339097A3 (en) | 2004-04-28 |
EP1047112B1 (en) | 2004-05-26 |
US6382419B1 (en) | 2002-05-07 |
JP3916342B2 (ja) | 2007-05-16 |
DE60010969T2 (de) | 2005-06-02 |
EP1339097A2 (en) | 2003-08-27 |
US20020038773A1 (en) | 2002-04-04 |
TW444360B (en) | 2001-07-01 |
US20020020650A1 (en) | 2002-02-21 |
KR20010006992A (ko) | 2001-01-26 |
JP2000306988A (ja) | 2000-11-02 |
EP1047112A3 (en) | 2002-02-20 |
DE60029021T2 (de) | 2006-11-30 |
DE60029021D1 (de) | 2006-08-03 |
EP1047112A2 (en) | 2000-10-25 |
DE60010969D1 (de) | 2004-07-01 |
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