KR19980018667A - 화학기계적 연마장치용 연마패드내의 투명윈도우 형성 방법 - Google Patents

화학기계적 연마장치용 연마패드내의 투명윈도우 형성 방법 Download PDF

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KR19980018667A
KR19980018667A KR1019970038776A KR19970038776A KR19980018667A KR 19980018667 A KR19980018667 A KR 19980018667A KR 1019970038776 A KR1019970038776 A KR 1019970038776A KR 19970038776 A KR19970038776 A KR 19970038776A KR 19980018667 A KR19980018667 A KR 19980018667A
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pipe
absorbing material
energy
impact energy
shape
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구니오 오오쯔까
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오오쯔까 요시오
가부시끼가이샤 오오쯔까
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/11Lapping tools
    • B24B37/20Lapping pads for working plane surfaces
    • B24B37/205Lapping pads for working plane surfaces provided with a window for inspecting the surface of the work being lapped
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/005Control means for lapping machines or devices
    • B24B37/013Devices or means for detecting lapping completion
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B47/00Drives or gearings; Equipment therefor
    • B24B47/10Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces
    • B24B47/12Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces by mechanical gearing or electric power
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/02Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent
    • B24B49/04Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent involving measurement of the workpiece at the place of grinding during grinding operation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/12Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving optical means
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B51/00Arrangements for automatic control of a series of individual steps in grinding a workpiece
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24DTOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D18/00Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/02Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/02Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0683Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating measurement during deposition or removal of the layer
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/04Lapping machines or devices; Accessories designed for working plane surfaces

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Vibration Dampers (AREA)

Abstract

본 발명은, 자동차의 중량을 그렇게 크게 하는 일이 없이, 보디에 가해진 외력의 에너지를 효율좋게 흡수하는 흡수재를 제공하는 것을 목적으로 한다.
충격에너지 흡수재는 금속제의 파이프이며, 단면 형상이 원형으로 표리 양면에 요철부를 나선상 또는 사복상(蛇腹狀)으로 두고 있다. 이 에너지 흡수재를 자동차 보디의 실내쪽 아우터패넬면 또는 인너패넬면을 따라서, 접착제 등으로 붙힌다. 외력이 자동차 보디 패넬면을 거쳐, 에너지 흡수재에 가해졌을 때, 이것이 소성변형하여 외력의 에너지를 흡수 할 수가 있다. 이 때, 승원이 패넬 등에 부닥쳐, 에너지 흡수재에 간접적으로 부닥쳤을 때, 이것이 소성 변형하여 승원의 운동에너지를 흡수할 수가 있다.

Description

충격에너지 흡수재
본 발명은, 자동차의 보디에 가해지는 외력의 에너지를 흡수하는 충격에너지 흡수재, 및 차실내 충격에 대한 승원 보호로서의 충격에너지 흡수재에 관한 것이다.
자동차의 안전성을 확보하기 위하여, 아우터패넬이나 인너패넬 등의 보디패넬의 보강이 되어 왔다. 보디패넬을 보강하기 위해서는, 패넬의 판두께를 두껍게 하면 좋으나, 판두께를 두껍게 한 만큼의 차체의 중량이 는다. 그 결과, 재료비가 많아져 생산 코스트가 높아지고, 자동차의 완성후는 연비도 나빠진다. 그래서 보디패넬은, 패넬의 곡률이나 판 두께 등을 고려하여, 패넬의 강도를 충분히 강해지도록 설계상 배려돼 있다.
(발명의 목적과 요약)
자동차의 보디는 차종마다 형상이나 보디의 판두께 등이 다르므로, 설계가 강도면에서 곤난하든지, 자동차의 부속품이 배설되어서 인너패넬로 보강될 수 없을 때도 있다. 그래서, 보디를 강화하면서 그 경량화를 충족시키려 해도 그 모든 부위를 강화시키기는 곤난하여, 어떠한 보강부재가 필요하게 된다. 또, 설계상 충분히 보디가 강화돼 있는 것이라도 중량이 그렇게 무겁게되지 않게끔하여 간단한 방법으로 더욱 보디를 강화하고 싶을 때도 있다.
한편, 자동차의 보디에 일정 이상의 외력이 가해졌을 때, 보디패넬에 소성변형이 생긴다. 이때, 그 외력 에너지를 흡수할 만한 흡수재가 있으면, 그 외력에 의한 자동차의 승원이 받는 충격이나, 다른 구성부품의 파손을 가볍게 할 수 있다.
본 발명은, 상기 과제에 감안하여 이루어진 것으로, 자동차의 중량을 그렇게 크게 하는 일 없이, 보디에 가해진 외력의 에너지를 효율좋게 흡수 할 수가 있는 충격에너지 흡수재를 제공하는 것을 목적으로 한다.
또, 외력의 에너지에 의해 차실내의 승원이 자동차의 보디(필러, 루프)등에 부닥칠 때, 승원의 운동에너지를 흡수하는 충격에너지 흡수재를 제공하는 것을 목적으로 한다.
상기 목적을 달성하기 위해, 본 발명은, 표리 양면에 요철부를 일체 성형한 금속성의 파이프를, 자동차의 외장면을 형성하는 보디 아우터 패넬과, 보디 인너패넬과의 사이에 마련한 공간내에 배치하고, 상기 파이프 주면을 상기 양 패넬면으로 향하게, 붙임 부재로 장착하여 이루고, 차체의 외부에서의 힘이 파이프에 가해졌을 때, 그 파이프가 소성 변형하여 외력의 에너지를 흡수 시키고 있다.
이로써, 차체의 외부에서 외력이 가해졌을 때, 충격에너지 흡수재가 그 외력을 흡수함과 아울러, 승원이 내장패넬 등에 부닥쳤을 때, 승원의 운동에너지를 흡수한다.
도1의 (a)는 본 발명의 실시의 형태에 의한 충격에너지 흡수재의 사시도이고,
도1의 (b)는 도1의 (a)의 충격에너지 흡수재가, 망가진 상태를 나타내는 사시도이다.
도2의 (a)는 요철부가 사복 형상의 충격에너지 흡수재의 정면도이고,
도2의 (b)는 동 부분 파단측면도이고, 도2의 (c)는, 도2의 (b)의 시시(矢視) X의 확대도이다.
도3의 (a)는 요철부가 나선 형상의 충격에너지 흡수재의 정면도이고, 도3의 (b)는, 동 부분 파단측면도이고, 도3의 (c)는, 도2의 (b)의 시시 Y의 확대도이다.
도4의 (a)는 횡방향 단면이 장원(長圓)인 충격에너지 흡수재의 사시도이며,
도4의 (b)는 진원(眞圓)의 파이프를 뒤쪽에서 장원으로 성형한 충격에너지 흡수재의 사시도이다.
도5의 (a)는 횡방향 단면이 3각형의 충격흡수에너지 흡수재의 정면도이며, 도5의 (b)는 4각형의 충격흡수에너지 흡수재의 정면도이고, 도5의 (c)는, 5각형의 충격흡수에너지 흡수재의 정면도이다.
도6은 본 발명의 실시의 형태에 의한 충격에너지 흡수재의 특성시험의 개략도이다.
도7은 특성시험의 결과를 나타내는 개략그래프의 선도(線圖)이다.
도8은 본 실시의 형태에 의한 충격에너지 흡수재를 배설하는 장소를 나타낸 자동차의 사시도이다.
도9는 자동차의 사이드보디의 분해 사시도이다.
도10은 자동차의 프론트 도어의 단면도이다.
이하, 본 발명의 실시의 형태에 의한 충격에너지 흡수재에 대해서, 도면을 참조하면서 설명한다.
도1, 도2는, 본 발명에 관련하는 충격에너지 흡수재(1)를 나타낸다. 이 에너지흡수재(1)는, 주로 자동차 보디의 보강재 및 승원의 보호재로서 사용하는 것이다. 도2의 (a)에 나타내는 것과 같이, 충격에너지흡수재(1)는, 횡방향(지름방향) 단면이 실질적으로 진원 형상의 금속제의 파이프이며, 도2의 (b),(c)에 나타내는 것과 같이, 그 표리 양면에 파상(또는 골게이트상)의 요철부(1a),(1b)를 일체 형성하고 있다.
또, 충격에너지흡수재(1)는, 그 두께(t)가 전체로서 일정한 두께이고, 표리 양면의 요철부(1a),(1b)의 형상은, 환상의 오목부(1a)와 볼록부(1b)를, 파이프의 축 방향으로 번갈아서, 또한 평행으로 병행한 사복 형상이다. 각 오목부(1a) 및 볼록부(1b)의 각 산과 골의 형상은 같고, 골게이트 피치(p)도 각 산마다 같은 길이 이다. 요철부(1a),(1b)에 의해, 충격에너지흡수재(1)의 파이프축은, 이것을 S자형으로 굽힐 수 있도록 플렉시블하게 돼있다. 충격에너지흡수재(1)의 재질은 철, 구리, 알루미늄, 스테인레스스틸 등의 각종 금속을 쓸 수가 있다.
충격에너지 흡수재는, 다른 여러가지 형상이 있다.
도3의 a ∼ c에 나타내는 충격에너지흡수재(2)는, 기본적으로 상기한 충격에너지흡수재(1)와 같으나, 파이프면의 요철부(2a),(2b)가, 파이프의 축방향으로 나선상으로 뻗고있는 것이 다르다. 다른 형상, 곧 각 요부(2a) 및 볼록부(2b)의 산의 높이와 골의 깊이나, 골게이트피치(p) 등의 길이도, 상기한 충격에너지흡수재(1)와 같다.
도4의 (a),(b)에 나타내는 충격에너지흡수재(3),(4)는, 횡단면이 장원 형상이고, 저면과 상면의 볼록부(3b),(4b)가 평탄한 면을 형성하고 있다. 도4의 (a)에 나타내는 충격에너지흡수재(4)는, 처음부터 장원 형상으로 형성된 것이고, 도4의 (b)에 나타내는 충격에너지흡수재(5)는 진원의 것을 형성한 후, 그것을 상하 방향으로 압압(押壓)하여 장원 형상으로 형성한 것이며, 볼록부(4b)가 망가져 있다.
도5에 나타내는 것과 같이, 충격에너지 흡수재의 형상은, 그 밖에도 여러 가지 것이 생각된다. 도5의 (a)에 나타내는 충격에너지흡수재(5)는 3각 형상이며, 도5의 (b)에 나타내는 충격에너지흡수재(6)는 거의 4각형이며, 도5의 (c)에 나타내는 충격에너지흡수재(7)는 5각형이다. 단, 6각형 및 그 이상의 다각형으로 형성해도 좋다.
다음에 충격에너지흡수재(1)의 특성에 대해서 설명한다.
도6에 나타내는 것과 같이, 상기한 충격에너지흡수재(1)를 압축시험기에 의해 직경 165㎜의 반구(10)의 선단에서 압축하여, 도2의 (a)에서의 내경의 길이 L의 변형량이 0㎜ 되기까지 계측했다. 압축속도는 100㎜/min 이다.
그 결과를 도7에 나타낸다. 도면에서, 실선(a)은 충격에너지흡수재(1)의 시험 결과를 나타낸다. 실선(b)는 비교예의 에너지 흡수재이며, 충격에너지흡수재(1)와 같은 진원의 파이프이며, 같은 재질, 길이, 외형, 두께를 갖고, 그 파이프 둘레면에 요철부를 두지 않은것 만이 다르다.
도7의 시험결과에 나타내는 것과 같이, 요철부(1a),(1b)에 마련한 에너지흡수재(1)는 비교예의 것과 비교하여 초기 상태에서 높은 하중에 대하여 변형량이 적고, 변형의 초기 단계에서 외력에서의 에너지를 흡수한다. 그리고, 일정 이상의 하중이 걸리면 변형량이 급격히 커진다. 비교예의 에너지 흡수재는 하중과 변형량이 거의 비례하는 리니어적(Linear的) 선도로 된다.
다음에 충격에너지흡수재(1)의 구체적인 사용예에 대해서 설명한다.
이 에너지흡수재(1)는 자동차의 보디에 외력이 가해졌을 때, 그 외력의 에너지를 흡수하고, 또는 완충재로서 승원의 운동에너지를 흡수하여 승원을 보호하는 것이다. 에너지흡수재(1)의 배치 장소로서는 도8에 나타내는 것과 같이, 자동차(11)의 프론트필러(12), 센터필러(13), 프론트 및 리어도어의 숄더(shoulder)부(14),(15), 허리부(16),(17), 프론트루프레일(18), 사이드루프레일(19), 리어헷더레일(20) 등에 또는 슬라이딩루프가 부착되어 있는 것과 같은 경우에는 그 슬라이딩루프둘레(21)에 배치된다.
도9는, 에너지흡수재(1)를 인너패넬인 프론트필러레일(12), 센터필러레일(13) 및 사이드루프레일(19)에 부착되어 있는 상태를 나타낸다. 에너지흡수재(1)는 요철부(1a),(1b)를 형성하고 있는 것으로 플렉시블하여, 배설장소에 다소의 만곡이 있어도 붙힐 수 있다. 이후 자동차(11)의 아우터패넬인 사이드보디패넬(22)에 각 레일(12),(13),(19)을 용접 또는 접착제로 고정하는 것으로써, 에너지흡수재(1)는 각 부위에 배설된다.
도10은 프론트도어(23)의 단면도이다. 상기한 것 같이 에너지흡수재(1)는, 숄더부(14)에 부착되어 있다. 에너지흡수재(1)의 부착 위치는, 도면에 나타내는 것과 같이 아우터패넬(23)쪽에 붙혀도 좋다. 또, 보다 강도를 크게 할 필요가 있을 때나 중량의 부담 등을 고려하지 않아도 좋을 때는 인너패넬로서의 리인포스먼트(24)에 고정하여도 좋다. 인너패넬(23)쪽의 강도를 크게 하면 보디의 변형을 인너패넬(23)로 억제할 수가 있다.
또한, 인너패넬쪽에 부착하여 승원이 도어에 부닥쳤을 때의 에너지를 흡수하여 보호할 수도 있다. 이때는, 에너지흡수재(1)의 재질을 얇게 하여 완충재가 되도록 조정한다.
또, 도4의 (a),(b)에 나타내는 장원 형상의 충격흡수에너지흡수재(3),(4)는, 두께가 좁은 스페이스에 배설할 때 유효하다. 또, 부착 패넬면이 평면일 때는 패넬면과의 부착 접촉 면적이 넓어지므로 패넬면에 잘 적합하여 접착제나 용접에 의해 강고히 부착할 수가 있다.
도5의 (a)에 나타내는 3각 형상의 충격에너지흡수재(5)라면, 표면에 도시 돼 있지 않은 요철부를 두어서 강화돼 있으나, 더욱 3변이 트러스(truss)와 같은 작용을 하여 하중(W)를 받아도 완전히 소성 변형하기 까지의 강도가 크게 되고 충격에너지 흡수재의 두께를 얇게 하여 자동차의 가일층의 경량화가 가능하게 된다. 단, 모가 예각이면 갈라지기 쉬우므로 모를 둥그스름하게 하는 것으로써 갈라짐을 방지할 수도 있다.
도5의 (b)에 나타내는 단면이 사다리꼴의 충격에너지흡수재(6)에 대해서도, 사변(斜邊)이 하중을 받아, 소성 변형하기 까지의 커다란 에너지를 흡수할 수가 있다. 기타의 다각형에 대해서도 그들의 형상에서 오는 특성에 따라 충격에너지 흡수재로서의 용도에 맞는 사용을 할 수가 있다.
이와같이 본 발명의 실시의 형태에 의한 에너지 흡수재는, 파이프 둘레면에 요철부를 형성한 것으로써, 커다란 에너지를 흡수할 수가 있다. 따라서, 자동차(11)의 보디에 외력이 가해졌을 때는, 도(1)의 (b)에 나타내는 것과 같이 에너지흡수재(1)가 소성 변형하는 것으로써, 외력의 에너지를 흡수하여 다른 부위에 걸리는 부담이나 충격을 경감할 수가 있다.
또, 승원이 보디에 부닥칠 때의 운동에너지를, 에너지흡수재가 소성 변형하는 것으로써 승원의 운동에너지를 흡수하여 부상을 경감한다.
또한, 부착 장소에 다소의 만곡이 있어도 그것에 대응하여 에너지흡수재(1)를 변형시켜서 부착할 수가 있는 등 범용성이 있어, 부착 작업성이 좋다. 강도가 센데 비해 중량도 가벼워, 차체의 중량 부담이 되는 일은 없다.
이상, 본 발명의 실시의 형태에 대해서 설명 했으나 물론, 본 발명은 이것에 한정되는 것 없이 본 발명의 기술적 사상에 의거하여 여러 가지의 변형이 가능하다.
예컨대,이상의 실시의 형태에 의하면 도7에 나타내는 것과 같은 위치에 에너지흡수재(1)를 배치 했으나, 에너지흡수재(1)의 부착 위치는 그러한 장소에 한하지 않고, 예컨데 범퍼(bumper)의 안쪽부에 장착할 수 있고, 기타 사이드실, 엔진룸의 에이프런(apron)사이드 패넬이나, 프론트패넬 등의 보디셀(shell)에도 배치되어 같은 효과를 갖는다. 에너지흡수재(1)의 부착 방법에 대해서는 접착제 또는 용접으로 부착했으나 에너지흡수재(1)에 클립(clip)을 부착하여 패넬에 부착해도 좋고 클립밴드로 부착 해도 좋다.
에너지흡수재(1)의 요철부(1a),(1b)의 형상에 대해서는, 파상으로 했으나 구형의 요철부를 나선상 등으로 하여도 같은 효과를 얻을 수 있고, 요철부의 선조(線條)에 대해서는, 연속적이 아니라도 좋고 두께(t), 볼록부(1b)의 산의 높이나 오목부(1a)의 깊이, 피치(P)도 같아야 할 필요는 없다.
또, 다각형의 충격에너지 흡수재에 대해서도 원형의 것과 같은 말을 할 수가 있다.
이상 말한바와 같이, 자동차의 중량을 그렇게 크게 하는 일 없이, 보디에 가해진 외력의 에너지를 흡수할 수가 있고, 승원이 외력으로 부터 받는 충격이나 다른 구성 부품의 파손을 경감할 수가 있다.
또, 보디에 가해진 외력에 대해 승원이 보디에 부닥칠 때의 운동에너지를 흡수하여 승원의 부상을 경감할 수가 있다.

Claims (4)

  1. 표리 양면에 요철부를 일체 성형한 금속성의 파이프를, 자동차의 외장면에 형성하는 보디 아우터패넬과, 보디 인너패넬과의 사이에 마련한 공간내에 배설함과 아울러, 상기 파이프 둘레면을 상기 양 패넬면으로 향하여 부착 부재로 장착하고 있어, 차체의 외부에서의 힘이 파이프에 가해졌을 때, 그 파이프가 소성 변형하여 외력에너지를 흡수시키는 것을 특징으로 하는 충격에너지 흡수재.
  2. 청구항 1에 있어서, 상기 파이프의 단면 형상이 실질적으로 원형이며, 요철부가 그 파이프의 축방향으로 뻗는 나선형상, 또는 그의 축방향으로 오목부와 볼록부를 번갈아 늘어놓은 사복 형상인 충격에너지 흡수재.
  3. 청구항 1에 있어서, 상기 파이프의 단면 형상이 실질적으로 다각형이며 요철부가 그 파이프의 축방향으로 뻗는 나선형상, 또는 그 축방향으로 오목부와 볼록부를 번갈아 늘어 놓은 사복 형상인 충격에너지 흡수재.
  4. 청구항 3에 있어서, 상기 다각형의 파이프의 모난부(角部)를 둥그스름하게한 충격흡수에너지 흡수재.
KR1019970038776A 1996-08-16 1997-08-14 화학기계적 연마장치용 연마패드내의 투명윈도우 형성 방법 KR19980018667A (ko)

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US20010036805A1 (en) 2001-11-01
KR19980018668A (ko) 1998-06-05
US7118450B2 (en) 2006-10-10
US6910944B2 (en) 2005-06-28
US7011565B2 (en) 2006-03-14
US20060014476A1 (en) 2006-01-19
US6045439A (en) 2000-04-04
US20030190867A1 (en) 2003-10-09
EP0824995A1 (en) 1998-02-25
US20070021037A1 (en) 2007-01-25
JPH1083977A (ja) 1998-03-31
SG111000A1 (en) 2005-05-30
US6280290B1 (en) 2001-08-28
SG54539A1 (en) 1998-11-16
JP3327817B2 (ja) 2002-09-24
US5893796A (en) 1999-04-13
TW339460B (en) 1998-09-01
KR100334203B1 (ko) 2002-06-20
US7255629B2 (en) 2007-08-14

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