KR101517541B1 - 다층 반도체 패키지 - Google Patents
다층 반도체 패키지 Download PDFInfo
- Publication number
- KR101517541B1 KR101517541B1 KR1020070126360A KR20070126360A KR101517541B1 KR 101517541 B1 KR101517541 B1 KR 101517541B1 KR 1020070126360 A KR1020070126360 A KR 1020070126360A KR 20070126360 A KR20070126360 A KR 20070126360A KR 101517541 B1 KR101517541 B1 KR 101517541B1
- Authority
- KR
- South Korea
- Prior art keywords
- substrate
- planar surface
- die
- semiconductor die
- vertical connections
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
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Classifications
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W74/00—Encapsulations, e.g. protective coatings
- H10W74/10—Encapsulations, e.g. protective coatings characterised by their shape or disposition
- H10W74/111—Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being completely enclosed
- H10W74/114—Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being completely enclosed by a substrate and the encapsulations
- H10W74/117—Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being completely enclosed by a substrate and the encapsulations the substrate having spherical bumps for external connection
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W74/00—Encapsulations, e.g. protective coatings
- H10W74/01—Manufacture or treatment
- H10W74/012—Manufacture or treatment of encapsulations on active surfaces of flip-chip devices, e.g. forming underfills
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W74/00—Encapsulations, e.g. protective coatings
- H10W74/10—Encapsulations, e.g. protective coatings characterised by their shape or disposition
- H10W74/15—Encapsulations, e.g. protective coatings characterised by their shape or disposition on active surfaces of flip-chip devices, e.g. underfills
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W76/00—Containers; Fillings or auxiliary members therefor; Seals
- H10W76/10—Containers or parts thereof
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
- H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/50—Bond wires
- H10W72/531—Shapes of wire connectors
- H10W72/536—Shapes of wire connectors the connected ends being ball-shaped
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/50—Bond wires
- H10W72/531—Shapes of wire connectors
- H10W72/5363—Shapes of wire connectors the connected ends being wedge-shaped
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/851—Dispositions of multiple connectors or interconnections
- H10W72/853—On the same surface
- H10W72/856—Bump connectors and die-attach connectors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/851—Dispositions of multiple connectors or interconnections
- H10W72/874—On different surfaces
- H10W72/877—Bump connectors and die-attach connectors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/851—Dispositions of multiple connectors or interconnections
- H10W72/874—On different surfaces
- H10W72/884—Die-attach connectors and bond wires
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W74/00—Encapsulations, e.g. protective coatings
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/721—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors
- H10W90/722—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors between stacked chips
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/721—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors
- H10W90/724—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors between a chip and a stacked insulating package substrate, interposer or RDL
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/731—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors
- H10W90/734—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors between a chip and a stacked insulating package substrate, interposer or RDL
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/751—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires
- H10W90/754—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires between a chip and a stacked insulating package substrate, interposer or RDL
Landscapes
- Structures For Mounting Electric Components On Printed Circuit Boards (AREA)
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
- Combinations Of Printed Boards (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US11/608,164 | 2006-12-07 | ||
| US11/608,164 US7608921B2 (en) | 2006-12-07 | 2006-12-07 | Multi-layer semiconductor package |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20080052482A KR20080052482A (ko) | 2008-06-11 |
| KR101517541B1 true KR101517541B1 (ko) | 2015-05-04 |
Family
ID=39496998
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020070126360A Active KR101517541B1 (ko) | 2006-12-07 | 2007-12-06 | 다층 반도체 패키지 |
Country Status (4)
| Country | Link |
|---|---|
| US (2) | US7608921B2 (https=) |
| JP (2) | JP5383024B2 (https=) |
| KR (1) | KR101517541B1 (https=) |
| TW (2) | TWI495082B (https=) |
Families Citing this family (78)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7989707B2 (en) | 2005-12-14 | 2011-08-02 | Shinko Electric Industries Co., Ltd. | Chip embedded substrate and method of producing the same |
| US7608921B2 (en) * | 2006-12-07 | 2009-10-27 | Stats Chippac, Inc. | Multi-layer semiconductor package |
| JP4926692B2 (ja) * | 2006-12-27 | 2012-05-09 | 新光電気工業株式会社 | 配線基板及びその製造方法と半導体装置 |
| US7612444B2 (en) * | 2007-01-05 | 2009-11-03 | Stats Chippac, Inc. | Semiconductor package with flow controller |
| WO2008105535A1 (ja) * | 2007-03-01 | 2008-09-04 | Nec Corporation | 半導体装置及びその製造方法 |
| US7928582B2 (en) | 2007-03-09 | 2011-04-19 | Micron Technology, Inc. | Microelectronic workpieces and methods for manufacturing microelectronic devices using such workpieces |
| US9330945B2 (en) * | 2007-09-18 | 2016-05-03 | Stats Chippac Ltd. | Integrated circuit package system with multi-chip module |
| US20090152740A1 (en) * | 2007-12-17 | 2009-06-18 | Soo-San Park | Integrated circuit package system with flip chip |
| US8120186B2 (en) * | 2008-02-15 | 2012-02-21 | Qimonda Ag | Integrated circuit and method |
| US7919871B2 (en) * | 2008-03-21 | 2011-04-05 | Stats Chippac Ltd. | Integrated circuit package system for stackable devices |
| US7911070B2 (en) * | 2008-09-25 | 2011-03-22 | Stats Chippac Ltd. | Integrated circuit packaging system having planar interconnect |
| US7859094B2 (en) * | 2008-09-25 | 2010-12-28 | Stats Chippac Ltd. | Integrated circuit package system for stackable devices |
| US20100078788A1 (en) * | 2008-09-26 | 2010-04-01 | Amir Wagiman | Package-on-package assembly and method |
| US8704350B2 (en) * | 2008-11-13 | 2014-04-22 | Samsung Electro-Mechanics Co., Ltd. | Stacked wafer level package and method of manufacturing the same |
| US8022538B2 (en) * | 2008-11-17 | 2011-09-20 | Stats Chippac Ltd. | Base package system for integrated circuit package stacking and method of manufacture thereof |
| US20170117214A1 (en) | 2009-01-05 | 2017-04-27 | Amkor Technology, Inc. | Semiconductor device with through-mold via |
| KR20100112446A (ko) * | 2009-04-09 | 2010-10-19 | 삼성전자주식회사 | 적층형 반도체 패키지 및 그 제조 방법 |
| FI20095557A0 (fi) | 2009-05-19 | 2009-05-19 | Imbera Electronics Oy | Valmistusmenetelmä ja elektroniikkamoduuli, joka tarjoaa uusia mahdollisuuksia johdevedoille |
| US8106499B2 (en) * | 2009-06-20 | 2012-01-31 | Stats Chippac Ltd. | Integrated circuit packaging system with a dual substrate package and method of manufacture thereof |
| US8383457B2 (en) | 2010-09-03 | 2013-02-26 | Stats Chippac, Ltd. | Semiconductor device and method of forming interposer frame over semiconductor die to provide vertical interconnect |
| USRE48111E1 (en) | 2009-08-21 | 2020-07-21 | JCET Semiconductor (Shaoxing) Co. Ltd. | Semiconductor device and method of forming interposer frame over semiconductor die to provide vertical interconnect |
| US8169058B2 (en) | 2009-08-21 | 2012-05-01 | Stats Chippac, Ltd. | Semiconductor device and method of stacking die on leadframe electrically connected by conductive pillars |
| US8987830B2 (en) | 2010-01-12 | 2015-03-24 | Marvell World Trade Ltd. | Attaching passive components to a semiconductor package |
| US9922955B2 (en) * | 2010-03-04 | 2018-03-20 | STATS ChipPAC Pte. Ltd. | Semiconductor device and method of forming package-on-package structure electrically interconnected through TSV in WLCSP |
| US8618654B2 (en) * | 2010-07-20 | 2013-12-31 | Marvell World Trade Ltd. | Structures embedded within core material and methods of manufacturing thereof |
| JP2011211077A (ja) * | 2010-03-30 | 2011-10-20 | Oki Semiconductor Co Ltd | 半導体積層パッケージ及びその製造方法 |
| US8541872B2 (en) | 2010-06-02 | 2013-09-24 | Stats Chippac Ltd. | Integrated circuit package system with package stacking and method of manufacture thereof |
| US8217502B2 (en) | 2010-06-08 | 2012-07-10 | Stats Chippac Ltd. | Integrated circuit packaging system with multipart conductive pillars and method of manufacture thereof |
| US8304296B2 (en) * | 2010-06-23 | 2012-11-06 | Stats Chippac Ltd. | Semiconductor packaging system with multipart conductive pillars and method of manufacture thereof |
| US8304900B2 (en) | 2010-08-11 | 2012-11-06 | Stats Chippac Ltd. | Integrated circuit packaging system with stacked lead and method of manufacture thereof |
| US8466567B2 (en) * | 2010-09-16 | 2013-06-18 | Stats Chippac Ltd. | Integrated circuit packaging system with stack interconnect and method of manufacture thereof |
| US9070851B2 (en) | 2010-09-24 | 2015-06-30 | Seoul Semiconductor Co., Ltd. | Wafer-level light emitting diode package and method of fabricating the same |
| US9721872B1 (en) * | 2011-02-18 | 2017-08-01 | Amkor Technology, Inc. | Methods and structures for increasing the allowable die size in TMV packages |
| US8569882B2 (en) | 2011-03-24 | 2013-10-29 | Stats Chippac Ltd. | Integrated circuit packaging system with collapsed multi-integration package and method of manufacture thereof |
| US8710668B2 (en) | 2011-06-17 | 2014-04-29 | Stats Chippac Ltd. | Integrated circuit packaging system with laser hole and method of manufacture thereof |
| US20120326324A1 (en) * | 2011-06-22 | 2012-12-27 | Lee Hyungmin | Integrated circuit packaging system with package stacking and method of manufacture thereof |
| US8779566B2 (en) * | 2011-08-15 | 2014-07-15 | National Semiconductor Corporation | Flexible routing for high current module application |
| JP2013065835A (ja) * | 2011-08-24 | 2013-04-11 | Sumitomo Bakelite Co Ltd | 半導体装置の製造方法、ブロック積層体及び逐次積層体 |
| US8698297B2 (en) | 2011-09-23 | 2014-04-15 | Stats Chippac Ltd. | Integrated circuit packaging system with stack device |
| US8716065B2 (en) * | 2011-09-23 | 2014-05-06 | Stats Chippac Ltd. | Integrated circuit packaging system with encapsulation and method of manufacture thereof |
| US10475759B2 (en) * | 2011-10-11 | 2019-11-12 | Taiwan Semiconductor Manufacturing Company, Ltd. | Integrated circuit structure having dies with connectors of different sizes |
| US9484319B2 (en) * | 2011-12-23 | 2016-11-01 | STATS ChipPAC Pte. Ltd. | Semiconductor device and method of forming extended semiconductor device with fan-out interconnect structure to reduce complexity of substrate |
| MY179499A (en) * | 2011-12-27 | 2020-11-09 | Intel Corp | Barrier tape for keep-out zone management |
| US9153507B2 (en) * | 2012-01-31 | 2015-10-06 | Broadcom Corporation | Semiconductor package with improved testability |
| KR20130105175A (ko) * | 2012-03-16 | 2013-09-25 | 삼성전자주식회사 | 보호 층을 갖는 반도체 패키지 및 그 형성 방법 |
| US9991190B2 (en) * | 2012-05-18 | 2018-06-05 | Taiwan Semiconductor Manufacturing Company, Ltd. | Packaging with interposer frame |
| US9443797B2 (en) | 2012-09-14 | 2016-09-13 | STATS ChipPAC Pte. Ltd. | Semiconductor device having wire studs as vertical interconnect in FO-WLP |
| US9818734B2 (en) | 2012-09-14 | 2017-11-14 | STATS ChipPAC Pte. Ltd. | Semiconductor device and method of forming build-up interconnect structures over a temporary substrate |
| US10192796B2 (en) | 2012-09-14 | 2019-01-29 | STATS ChipPAC Pte. Ltd. | Semiconductor device and method of forming dual-sided interconnect structures in FO-WLCSP |
| US9799592B2 (en) | 2013-11-19 | 2017-10-24 | Amkor Technology, Inc. | Semicondutor device with through-silicon via-less deep wells |
| KR101366461B1 (ko) | 2012-11-20 | 2014-02-26 | 앰코 테크놀로지 코리아 주식회사 | 반도체 디바이스 및 그 제조 방법 |
| TWI500130B (zh) * | 2013-02-27 | 2015-09-11 | 矽品精密工業股份有限公司 | 封裝基板及其製法暨半導體封裝件及其製法 |
| US20150001741A1 (en) * | 2013-06-27 | 2015-01-01 | Stats Chippac, Ltd. | Semiconductor Device and Method of Forming an Interposer Including a Beveled Edge |
| KR102134133B1 (ko) | 2013-09-23 | 2020-07-16 | 삼성전자주식회사 | 반도체 패키지 및 이의 제조 방법 |
| KR101607981B1 (ko) | 2013-11-04 | 2016-03-31 | 앰코 테크놀로지 코리아 주식회사 | 반도체 패키지용 인터포저 및 이의 제조 방법, 제조된 인터포저를 이용한 반도체 패키지 |
| US9385077B2 (en) * | 2014-07-11 | 2016-07-05 | Qualcomm Incorporated | Integrated device comprising coaxial interconnect |
| KR102198858B1 (ko) | 2014-07-24 | 2021-01-05 | 삼성전자 주식회사 | 인터포저 기판을 갖는 반도체 패키지 적층 구조체 |
| US9859200B2 (en) * | 2014-12-29 | 2018-01-02 | STATS ChipPAC Pte. Ltd. | Integrated circuit packaging system with interposer support structure mechanism and method of manufacture thereof |
| DE102015101440B4 (de) * | 2015-02-02 | 2021-05-06 | Infineon Technologies Ag | Halbleiterbauelement mit unter dem Package angeordnetem Chip und Verfahren zur Montage desselben auf einer Anwendungsplatine |
| KR101640341B1 (ko) | 2015-02-04 | 2016-07-15 | 앰코 테크놀로지 코리아 주식회사 | 반도체 패키지 |
| US9893017B2 (en) | 2015-04-09 | 2018-02-13 | STATS ChipPAC Pte. Ltd. | Double-sided semiconductor package and dual-mold method of making same |
| KR101691099B1 (ko) * | 2015-04-30 | 2016-12-29 | 하나 마이크론(주) | 팬 아웃 패키지, 팬 아웃 pop 패키지 및 그 제조 방법 |
| US9850124B2 (en) * | 2015-10-27 | 2017-12-26 | Advanced Semiconductor Engineering, Inc. | Semiconductor device package for reducing parasitic light and method of manufacturing the same |
| CN205944139U (zh) | 2016-03-30 | 2017-02-08 | 首尔伟傲世有限公司 | 紫外线发光二极管封装件以及包含此的发光二极管模块 |
| KR20170129983A (ko) | 2016-05-17 | 2017-11-28 | 삼성전자주식회사 | 발광소자 패키지, 이를 이용한 디스플레이 장치 및 그 제조방법 |
| US9786515B1 (en) | 2016-06-01 | 2017-10-10 | Nxp Usa, Inc. | Semiconductor device package and methods of manufacture thereof |
| US9960328B2 (en) | 2016-09-06 | 2018-05-01 | Amkor Technology, Inc. | Semiconductor device and manufacturing method thereof |
| US10622340B2 (en) | 2016-11-21 | 2020-04-14 | Samsung Electronics Co., Ltd. | Semiconductor package |
| EP3340293A1 (de) * | 2016-12-20 | 2018-06-27 | Siemens Aktiengesellschaft | Halbleitermodul mit stützstruktur auf der unterseite |
| KR102358323B1 (ko) | 2017-07-17 | 2022-02-04 | 삼성전자주식회사 | 반도체 패키지 |
| KR102419154B1 (ko) | 2017-08-28 | 2022-07-11 | 삼성전자주식회사 | 반도체 패키지 및 그의 제조 방법 |
| US10468384B2 (en) * | 2017-09-15 | 2019-11-05 | STATS ChipPAC Pte. Ltd. | Semiconductor device and method of forming embedded die substrate, and system-in-package modules with the same |
| KR102446861B1 (ko) | 2017-09-21 | 2022-09-23 | 삼성전자주식회사 | 적층 패키지 및 그의 제조 방법 |
| KR102497572B1 (ko) | 2018-07-03 | 2023-02-09 | 삼성전자주식회사 | 반도체 패키지 및 그의 제조 방법 |
| US20200367367A1 (en) * | 2019-05-15 | 2020-11-19 | Jabil Inc. | Method and Apparatus for Stacking Printed Circuit Board Assemblies with Single Reflow |
| JP7289719B2 (ja) * | 2019-05-17 | 2023-06-12 | 新光電気工業株式会社 | 半導体装置、半導体装置アレイ |
| KR102849154B1 (ko) | 2020-04-10 | 2025-08-21 | 삼성전자주식회사 | 반도체 패키지 |
| CN117832190A (zh) * | 2022-09-28 | 2024-04-05 | 星科金朋私人有限公司 | 集成封装及其制造方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003224228A (ja) * | 2002-01-31 | 2003-08-08 | Shinko Electric Ind Co Ltd | 半導体装置用パッケージ並びに半導体装置及びその製造方法 |
Family Cites Families (40)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07335783A (ja) * | 1994-06-13 | 1995-12-22 | Fujitsu Ltd | 半導体装置及び半導体装置ユニット |
| JPH11260999A (ja) * | 1998-03-13 | 1999-09-24 | Sumitomo Metal Ind Ltd | ノイズを低減した積層半導体装置モジュール |
| SG75873A1 (en) * | 1998-09-01 | 2000-10-24 | Texas Instr Singapore Pte Ltd | Stacked flip-chip integrated circuit assemblage |
| JP2000294720A (ja) * | 1999-04-07 | 2000-10-20 | Sharp Corp | 半導体集積回路パッケージ |
| JP2001007472A (ja) * | 1999-06-17 | 2001-01-12 | Sony Corp | 電子回路装置およびその製造方法 |
| JP3668074B2 (ja) * | 1999-10-07 | 2005-07-06 | 松下電器産業株式会社 | 半導体装置およびその製造方法 |
| US6369448B1 (en) * | 2000-01-21 | 2002-04-09 | Lsi Logic Corporation | Vertically integrated flip chip semiconductor package |
| US6472743B2 (en) * | 2001-02-22 | 2002-10-29 | Siliconware Precision Industries, Co., Ltd. | Semiconductor package with heat dissipating structure |
| JP4023159B2 (ja) * | 2001-07-31 | 2007-12-19 | ソニー株式会社 | 半導体装置の製造方法及び積層半導体装置の製造方法 |
| JP3655242B2 (ja) * | 2002-01-04 | 2005-06-02 | 株式会社東芝 | 半導体パッケージ及び半導体実装装置 |
| US6774475B2 (en) * | 2002-01-24 | 2004-08-10 | International Business Machines Corporation | Vertically stacked memory chips in FBGA packages |
| JP2003347722A (ja) * | 2002-05-23 | 2003-12-05 | Ibiden Co Ltd | 多層電子部品搭載用基板及びその製造方法 |
| US6838761B2 (en) * | 2002-09-17 | 2005-01-04 | Chippac, Inc. | Semiconductor multi-package module having wire bond interconnect between stacked packages and having electrical shield |
| US7045887B2 (en) * | 2002-10-08 | 2006-05-16 | Chippac, Inc. | Semiconductor multi-package module having inverted second package stacked over die-up flip-chip ball grid array (BGA) package |
| TW567601B (en) * | 2002-10-18 | 2003-12-21 | Siliconware Precision Industries Co Ltd | Module device of stacked semiconductor package and method for fabricating the same |
| US20040089943A1 (en) * | 2002-11-07 | 2004-05-13 | Masato Kirigaya | Electronic control device and method for manufacturing the same |
| US6861288B2 (en) * | 2003-01-23 | 2005-03-01 | St Assembly Test Services, Ltd. | Stacked semiconductor packages and method for the fabrication thereof |
| JP2004247637A (ja) * | 2003-02-17 | 2004-09-02 | Nec Saitama Ltd | 電子部品の三次元実装構造および方法 |
| JP2004335624A (ja) * | 2003-05-06 | 2004-11-25 | Hitachi Ltd | 半導体モジュール |
| KR100493063B1 (ko) * | 2003-07-18 | 2005-06-02 | 삼성전자주식회사 | 스택 반도체 칩 비지에이 패키지 및 그 제조방법 |
| US7180165B2 (en) * | 2003-09-05 | 2007-02-20 | Sanmina, Sci Corporation | Stackable electronic assembly |
| TWI239609B (en) * | 2004-03-18 | 2005-09-11 | Advanced Semiconductor Eng | Method for manufacturing multi package module |
| JP2005317862A (ja) * | 2004-04-30 | 2005-11-10 | Shinko Electric Ind Co Ltd | 半導体素子の接続構造 |
| JP4561969B2 (ja) * | 2004-05-26 | 2010-10-13 | セイコーエプソン株式会社 | 半導体装置 |
| JP2006114604A (ja) * | 2004-10-13 | 2006-04-27 | Toshiba Corp | 半導体装置及びその組立方法 |
| TW200614448A (en) * | 2004-10-28 | 2006-05-01 | Advanced Semiconductor Eng | Method for stacking bga packages and structure from the same |
| JP2006196709A (ja) * | 2005-01-13 | 2006-07-27 | Sharp Corp | 半導体装置およびその製造方法 |
| US7999376B2 (en) * | 2005-01-25 | 2011-08-16 | Panasonic Corporation | Semiconductor device and its manufacturing method |
| US7659623B2 (en) * | 2005-04-11 | 2010-02-09 | Elpida Memory, Inc. | Semiconductor device having improved wiring |
| US7429786B2 (en) * | 2005-04-29 | 2008-09-30 | Stats Chippac Ltd. | Semiconductor package including second substrate and having exposed substrate surfaces on upper and lower sides |
| US7528474B2 (en) * | 2005-05-31 | 2009-05-05 | Stats Chippac Ltd. | Stacked semiconductor package assembly having hollowed substrate |
| KR100631959B1 (ko) * | 2005-09-07 | 2006-10-04 | 주식회사 하이닉스반도체 | 적층형 반도체 패키지 및 그 제조방법 |
| TWI292617B (en) * | 2006-02-03 | 2008-01-11 | Siliconware Precision Industries Co Ltd | Stacked semiconductor structure and fabrication method thereof |
| US20070210433A1 (en) * | 2006-03-08 | 2007-09-13 | Rajesh Subraya | Integrated device having a plurality of chip arrangements and method for producing the same |
| US7569918B2 (en) * | 2006-05-01 | 2009-08-04 | Texas Instruments Incorporated | Semiconductor package-on-package system including integrated passive components |
| US20080017966A1 (en) * | 2006-05-02 | 2008-01-24 | Advanced Analogic Technologies, Inc. | Pillar Bump Package Technology |
| KR100809693B1 (ko) * | 2006-08-01 | 2008-03-06 | 삼성전자주식회사 | 하부 반도체 칩에 대한 신뢰도가 개선된 수직 적층형멀티칩 패키지 및 그 제조방법 |
| US7545029B2 (en) * | 2006-08-18 | 2009-06-09 | Tessera, Inc. | Stack microelectronic assemblies |
| US7608921B2 (en) * | 2006-12-07 | 2009-10-27 | Stats Chippac, Inc. | Multi-layer semiconductor package |
| US7635913B2 (en) * | 2006-12-09 | 2009-12-22 | Stats Chippac Ltd. | Stacked integrated circuit package-in-package system |
-
2006
- 2006-12-07 US US11/608,164 patent/US7608921B2/en active Active
-
2007
- 2007-10-11 TW TW100105024A patent/TWI495082B/zh active
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- 2007-12-06 KR KR1020070126360A patent/KR101517541B1/ko active Active
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- 2009-09-14 US US12/559,432 patent/US7994626B2/en active Active
-
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Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003224228A (ja) * | 2002-01-31 | 2003-08-08 | Shinko Electric Ind Co Ltd | 半導体装置用パッケージ並びに半導体装置及びその製造方法 |
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| Publication number | Publication date |
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| US20080136003A1 (en) | 2008-06-12 |
| JP5620956B2 (ja) | 2014-11-05 |
| JP2008147628A (ja) | 2008-06-26 |
| TWI366910B (en) | 2012-06-21 |
| US20100007002A1 (en) | 2010-01-14 |
| TWI495082B (zh) | 2015-08-01 |
| KR20080052482A (ko) | 2008-06-11 |
| JP5383024B2 (ja) | 2014-01-08 |
| JP2012235170A (ja) | 2012-11-29 |
| US7994626B2 (en) | 2011-08-09 |
| TW200828563A (en) | 2008-07-01 |
| US7608921B2 (en) | 2009-10-27 |
| TW201130110A (en) | 2011-09-01 |
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