KR101277397B1 - 기판처리장치, 스토커장치 및 기판수납용기의 반송방법 - Google Patents

기판처리장치, 스토커장치 및 기판수납용기의 반송방법 Download PDF

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Publication number
KR101277397B1
KR101277397B1 KR1020110018412A KR20110018412A KR101277397B1 KR 101277397 B1 KR101277397 B1 KR 101277397B1 KR 1020110018412 A KR1020110018412 A KR 1020110018412A KR 20110018412 A KR20110018412 A KR 20110018412A KR 101277397 B1 KR101277397 B1 KR 101277397B1
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storage container
substrate
substrate storage
holding
mounting
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KR20110102177A (ko
Inventor
유키히코 이나가키
켄사쿠 오니시
준 야마모토
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가부시키가이샤 소쿠도
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/34—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H10P72/3404—Storage means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0407—Storage devices mechanical using stacker cranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0457—Storage devices mechanical with suspended load carriers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3221—Overhead conveying
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/34—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H10P72/3411—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0297—Wafer cassette
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/34—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H10P72/3402—Mechanical parts of transfer devices

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
KR1020110018412A 2010-03-10 2011-03-02 기판처리장치, 스토커장치 및 기판수납용기의 반송방법 Active KR101277397B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2010052900A JP5318005B2 (ja) 2010-03-10 2010-03-10 基板処理装置、ストッカー装置および基板収納容器の搬送方法
JPJP-P-2010-052900 2010-03-10

Publications (2)

Publication Number Publication Date
KR20110102177A KR20110102177A (ko) 2011-09-16
KR101277397B1 true KR101277397B1 (ko) 2013-06-20

Family

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Family Applications (1)

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KR1020110018412A Active KR101277397B1 (ko) 2010-03-10 2011-03-02 기판처리장치, 스토커장치 및 기판수납용기의 반송방법

Country Status (3)

Country Link
US (2) US8827621B2 (https=)
JP (1) JP5318005B2 (https=)
KR (1) KR101277397B1 (https=)

Cited By (1)

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Publication number Priority date Publication date Assignee Title
KR20210157054A (ko) 2020-06-19 2021-12-28 세메스 주식회사 스토커

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KR101799217B1 (ko) * 2013-09-30 2017-11-17 가부시키가이샤 히다치 고쿠사이 덴키 기판 처리 장치, 반도체 장치의 제조 방법 및 기록 매체
JP2015141915A (ja) * 2014-01-27 2015-08-03 東京エレクトロン株式会社 基板熱処理装置、基板熱処理装置の設置方法
JP6314713B2 (ja) * 2014-07-14 2018-04-25 株式会社ダイフク 階間搬送設備
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JP6835031B2 (ja) * 2018-04-27 2021-02-24 株式会社ダイフク 物品搬送設備
JP7115947B2 (ja) * 2018-09-21 2022-08-09 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置
JP7300817B2 (ja) * 2018-09-21 2023-06-30 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置および基板処理装置の制御方法
JP7185461B2 (ja) 2018-09-21 2022-12-07 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置および、基板処理装置の制御方法
CN111331156B (zh) * 2018-12-19 2021-06-22 宝成工业股份有限公司 自动上下料装置
JP7221048B2 (ja) 2018-12-28 2023-02-13 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置および基板搬送方法
JP7190900B2 (ja) 2018-12-28 2022-12-16 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置、キャリア搬送方法およびキャリアバッファ装置
JP7175191B2 (ja) 2018-12-28 2022-11-18 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置および基板搬送方法
JP7114456B2 (ja) 2018-12-28 2022-08-08 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置および基板搬送方法
JP7181081B2 (ja) * 2018-12-28 2022-11-30 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置および基板搬送方法
JP7387316B2 (ja) 2019-07-19 2023-11-28 株式会社Ｓｃｒｅｅｎホールディングス 基板処理システムおよび基板搬送方法
JP7458718B2 (ja) 2019-07-19 2024-04-01 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置および基板搬送方法
JP2021046273A (ja) * 2019-09-17 2021-03-25 株式会社ダイフク 物品搬送装置
KR20210134869A (ko) * 2020-05-01 2021-11-11 에이에스엠 아이피 홀딩 비.브이. Foup 핸들러를 이용한 foup의 빠른 교환

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Publication number Priority date Publication date Assignee Title
KR20210157054A (ko) 2020-06-19 2021-12-28 세메스 주식회사 스토커

Also Published As

Publication number Publication date
JP2011187796A (ja) 2011-09-22
US8827621B2 (en) 2014-09-09
JP5318005B2 (ja) 2013-10-16
US20110222994A1 (en) 2011-09-15
US9728434B2 (en) 2017-08-08
KR20110102177A (ko) 2011-09-16
US20140341681A1 (en) 2014-11-20

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