JPS5423102Y2 - - Google Patents
Info
- Publication number
- JPS5423102Y2 JPS5423102Y2 JP5454775U JP5454775U JPS5423102Y2 JP S5423102 Y2 JPS5423102 Y2 JP S5423102Y2 JP 5454775 U JP5454775 U JP 5454775U JP 5454775 U JP5454775 U JP 5454775U JP S5423102 Y2 JPS5423102 Y2 JP S5423102Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Warehouses Or Storage Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5454775U JPS5423102Y2 (https=) | 1975-04-23 | 1975-04-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5454775U JPS5423102Y2 (https=) | 1975-04-23 | 1975-04-23 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS51135384U JPS51135384U (https=) | 1976-11-01 |
| JPS5423102Y2 true JPS5423102Y2 (https=) | 1979-08-09 |
Family
ID=28205279
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5454775U Expired JPS5423102Y2 (https=) | 1975-04-23 | 1975-04-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5423102Y2 (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101277397B1 (ko) * | 2010-03-10 | 2013-06-20 | 가부시키가이샤 소쿠도 | 기판처리장치, 스토커장치 및 기판수납용기의 반송방법 |
-
1975
- 1975-04-23 JP JP5454775U patent/JPS5423102Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101277397B1 (ko) * | 2010-03-10 | 2013-06-20 | 가부시키가이샤 소쿠도 | 기판처리장치, 스토커장치 및 기판수납용기의 반송방법 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS51135384U (https=) | 1976-11-01 |