KR101056356B1 - 제어된 기계적 강도를 가진 분리가능 구조물 및 동 구조물을 생산하는 방법 - Google Patents
제어된 기계적 강도를 가진 분리가능 구조물 및 동 구조물을 생산하는 방법 Download PDFInfo
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- KR101056356B1 KR101056356B1 KR1020037013312A KR20037013312A KR101056356B1 KR 101056356 B1 KR101056356 B1 KR 101056356B1 KR 1020037013312 A KR1020037013312 A KR 1020037013312A KR 20037013312 A KR20037013312 A KR 20037013312A KR 101056356 B1 KR101056356 B1 KR 101056356B1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/20—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C99/00—Subject matter not provided for in other groups of this subclass
- B81C99/0075—Manufacture of substrate-free structures
- B81C99/008—Manufacture of substrate-free structures separating the processed structure from a mother substrate
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
- H01L21/7624—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
- H01L21/76251—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques
- H01L21/76254—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques with separation/delamination along an ion implanted layer, e.g. Smart-cut, Unibond
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/958—Passivation layer
Abstract
Description
Claims (32)
- 제 1 웨이퍼의 일 면을 제 2 웨이퍼의 일 면에 분자 부착 접합함으로써 분리가능 구조물을 생산하는 방법으로서, 상기 방법은,접합 전에, 상기 면들 중 적어도 하나의 거칠기를 증가시켜 상기 2개의 웨이퍼 사이에 제어된 레벨의 기계강도를 가진 접합 인터페이스를 생성하도록 상기 면들 중 적어도 하나를 처리하는 단계;상기 면들을 서로 접합하는 단계;인터페이스의 접합 후에 구성요소의 전부 또는 일부를 상기 2개의 웨이퍼 중 적어도 하나 상에 제조하는 단계; 및접합 인터페이스에서 상기 구조물을 후속 분리하는 단계;를 포함하고,상기 제어된 레벨의 기계강도는, 인터페이스의 접합 후에 구성요소의 전부 또는 일부를 상기 2개의 웨이퍼 중 적어도 하나 상에 제조할 수 있도록 하고, 또한 접합 인터페이스에서 상기 구조물을 후속 분리할 수 있도록 하는 것을 특징으로 하는 분리가능 구조물을 생산하는 방법.
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- 제 1 항에 있어서, 상기 거칠기를 증가시키는 것은 상기 면의 국소적인 화학적 에칭을 포함하는 것을 특징으로 하는 분리가능 구조물을 생산하는 방법.
- 제 4 항에 있어서, 상기 화학적 에칭은 산 에칭인 것을 특징으로 하는 분리가능 구조물을 생산하는 방법.
- 제 5 항에 있어서, 상기 산 에칭은 플루오르화수소 산을 사용하여 수행되는 것을 특징으로 하는 분리가능 구조물을 생산하는 방법.
- 제 1 항, 제 4 항 내지 제 6 항 중 어느 한 항에 있어서, 상기 2 개의 웨이퍼 중 적어도 하나에 박층이 생성되는 것을 특징으로 하는 분리가능 구조물을 생산하는 방법.
- 제 7 항에 있어서, 상기 박층은 웨이퍼의 화학적 또는 기계적 씨닝(thinning)에 의하여 획득되는 것을 특징으로 하는 분리가능 구조물을 생산하는 방법.
- 제 7 항에 있어서, 상기 박층은 하나의 웨이퍼의 매립된 연약층을 파괴함으로써 획득되는 것을 특징으로 하는 분리가능 구조물을 생산하는 방법.
- 제 9 항에 있어서, 상기 매립된 연약층은 가스 물질을 이식함으로써 획득되는 것을 특징으로 하는 분리가능 구조물을 생산하는 방법.
- 삭제
- 제 1 항, 제 4 항 내지 제 6 항 중 어느 한 항에 있어서, 상기 후속 분리 단계는 화학적 에칭, 열적 압력의 인가 및 기계력의 인가에 의하여 수행되는 것을 특징으로 하는 분리가능 구조물을 생산하는 방법.
- 제 1 항, 제 4 항 내지 제 6 항 중 어느 한 항에 있어서, 상기 2개의 웨이퍼 중 적어도 하나는 분리하기 전에 적어도 하나의 엘리먼트로 커팅되는 것을 특징으로 하는 분리가능 구조물을 생산하는 방법.
- 제 13 항에 있어서, 상기 분리는 엘리먼트별로 수행되는 것을 특징으로 하는 분리가능 구조물을 생산하는 방법.
- 제 7 항에 있어서, 상기 접합 인터페이스에서 상기 구조물을 후속 분리하는 단계는 상기 구조물을 생산하는 단계에 후속하여 수행되고, 상기 구조물을 생산하는 단계와 상기 분리 단계 사이에, 상기 구조물이 박층의 레벨에서 기판(16, 16')에 접합되는 제 2 접합 단계가 수행되는 것을 특징으로 하는 분리가능 구조물을 생산하는 방법.
- 제 15 항에 있어서, 상기 접합 단계는 분자 부착 접합을 포함하는 것을 특징으로 하는 분리가능 구조물을 생산하는 방법.
- 제 15 항에 있어서, 상기 접합 단계는 접착 접합을 포함하는 것을 특징으로 하는 분리가능 구조물을 생산하는 방법.
- 제 17 항에 있어서, 상기 접착 접합은 UV방사에 의하여 경화되는 접착제를 사용하여 수행되는 것을 특징으로 하는 분리가능 구조물을 생산하는 방법.
- 제 15 항에 있어서, 상기 기판을 분리하는 단계는 화학적 에칭, 기계적, 열적, 또는 광학적 압력 중 하나 이상을 인가함으로써 수행되는 것을 특징으로 하는 분리가능 구조물을 생산하는 방법.
- 제 1 항, 제 4 항 내지 제 6 항 중 어느 한 항에 있어서, 상기 구조물을 생산하는 단계 및 상기 분리 단계 사이에서, 마이크로전자 구성요소, 광전자 구성요소, 기계적 구성요소, 압전 구성요소, 초전도체 구성요소, 또는 마그네틱 구성요소의 전부 또는 일부를 제조하는 단계가 수행되는 것을 특징으로 하는 분리가능 구조물을 생산하는 방법.
- 제 1 항, 제 4 항 내지 제 6 항 중 어느 한 항에 있어서, 상기 구조물의 분리 후에, 상기 2개의 웨이퍼 중 적어도 하나가 재사용되는 것을 특징으로 하는 분리가능한 구조물을 생산하는 방법.
- 제 7 항에 있어서 상기 박층은 반도체 재료로 된 층인 것을 특징으로 하는 분리가능 구조물을 생산하는 방법.
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Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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FR01/05130 | 2001-04-13 | ||
FR0105130A FR2823599B1 (fr) | 2001-04-13 | 2001-04-13 | Substrat demomtable a tenue mecanique controlee et procede de realisation |
PCT/FR2002/001268 WO2002084722A2 (fr) | 2001-04-13 | 2002-04-11 | Substrat demontable a tenue mecanique controlee et procede de realisation |
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KR1020097017883A Division KR100991395B1 (ko) | 2001-04-13 | 2002-04-11 | 제어된 기계적 강도를 가진 분리가능 구조물 및 동 구조물을 생산하는 방법 |
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KR20030094338A KR20030094338A (ko) | 2003-12-11 |
KR101056356B1 true KR101056356B1 (ko) | 2011-08-12 |
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KR1020097017883A KR100991395B1 (ko) | 2001-04-13 | 2002-04-11 | 제어된 기계적 강도를 가진 분리가능 구조물 및 동 구조물을 생산하는 방법 |
KR1020037013312A KR101056356B1 (ko) | 2001-04-13 | 2002-04-11 | 제어된 기계적 강도를 가진 분리가능 구조물 및 동 구조물을 생산하는 방법 |
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KR1020097017883A KR100991395B1 (ko) | 2001-04-13 | 2002-04-11 | 제어된 기계적 강도를 가진 분리가능 구조물 및 동 구조물을 생산하는 방법 |
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US (1) | US7902038B2 (ko) |
EP (1) | EP1378004B1 (ko) |
JP (2) | JP2004533717A (ko) |
KR (2) | KR100991395B1 (ko) |
CN (1) | CN100435278C (ko) |
FR (1) | FR2823599B1 (ko) |
MY (1) | MY139201A (ko) |
TW (1) | TW563248B (ko) |
WO (1) | WO2002084722A2 (ko) |
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2001
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2002
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- 2002-04-11 WO PCT/FR2002/001268 patent/WO2002084722A2/fr active Application Filing
- 2002-04-11 JP JP2002581572A patent/JP2004533717A/ja not_active Withdrawn
- 2002-04-11 KR KR1020037013312A patent/KR101056356B1/ko active IP Right Grant
- 2002-04-11 CN CNB028097440A patent/CN100435278C/zh not_active Expired - Lifetime
- 2002-04-11 EP EP02732807.9A patent/EP1378004B1/fr not_active Expired - Lifetime
- 2002-04-12 MY MYPI20021350A patent/MY139201A/en unknown
- 2002-04-12 TW TW091107436A patent/TW563248B/zh not_active IP Right Cessation
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KR20000057896A (ko) * | 1999-02-02 | 2000-09-25 | 미다라이 후지오 | 복합부재와 그 분리방법, 접합적층기판과 그 분리방법,이설층의 이설방법 및 soi기판의 제조 방법 |
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KR20030094338A (ko) | 2003-12-11 |
WO2002084722A3 (fr) | 2003-11-06 |
FR2823599B1 (fr) | 2004-12-17 |
MY139201A (en) | 2009-08-28 |
KR20090099019A (ko) | 2009-09-18 |
JP2004533717A (ja) | 2004-11-04 |
WO2002084722A2 (fr) | 2002-10-24 |
US7902038B2 (en) | 2011-03-08 |
TW563248B (en) | 2003-11-21 |
CN1541406A (zh) | 2004-10-27 |
KR100991395B1 (ko) | 2010-11-02 |
CN100435278C (zh) | 2008-11-19 |
JP2009267427A (ja) | 2009-11-12 |
FR2823599A1 (fr) | 2002-10-18 |
EP1378004B1 (fr) | 2019-01-16 |
US20040222500A1 (en) | 2004-11-11 |
EP1378004A2 (fr) | 2004-01-07 |
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