KR100795657B1 - 기판 처리 장치 - Google Patents
기판 처리 장치 Download PDFInfo
- Publication number
- KR100795657B1 KR100795657B1 KR1020070020161A KR20070020161A KR100795657B1 KR 100795657 B1 KR100795657 B1 KR 100795657B1 KR 1020070020161 A KR1020070020161 A KR 1020070020161A KR 20070020161 A KR20070020161 A KR 20070020161A KR 100795657 B1 KR100795657 B1 KR 100795657B1
- Authority
- KR
- South Korea
- Prior art keywords
- substrate
- unit
- board
- conveyance
- processing apparatus
- Prior art date
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J11/00—Manipulators not otherwise provided for
- B25J11/0095—Manipulators transporting wafers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
- B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
- B25J9/041—Cylindrical coordinate type
- B25J9/042—Cylindrical coordinate type comprising an articulated arm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
- B25J9/106—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JPJP-P-2006-00113415 | 2006-04-17 | ||
JP2006113415A JP4969138B2 (ja) | 2006-04-17 | 2006-04-17 | 基板処理装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20070102933A KR20070102933A (ko) | 2007-10-22 |
KR100795657B1 true KR100795657B1 (ko) | 2008-01-21 |
Family
ID=38759402
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020070020161A KR100795657B1 (ko) | 2006-04-17 | 2007-02-28 | 기판 처리 장치 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP4969138B2 (ja) |
KR (1) | KR100795657B1 (ja) |
CN (1) | CN101060066B (ja) |
TW (1) | TWI345284B (ja) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101520939B1 (ko) * | 2008-09-12 | 2015-05-18 | 주식회사 디엠에스 | 슬릿코터 |
JP5537380B2 (ja) * | 2009-11-16 | 2014-07-02 | キヤノン株式会社 | 露光装置及びデバイス製造方法 |
KR101081883B1 (ko) | 2009-12-21 | 2011-11-09 | 주식회사 케이씨텍 | 노즐 간극의 정밀제어가 가능한 기판 코터 장치 |
JP5417186B2 (ja) * | 2010-01-08 | 2014-02-12 | 大日本スクリーン製造株式会社 | 基板処理装置 |
CN102320753A (zh) * | 2011-08-09 | 2012-01-18 | 深圳市华星光电技术有限公司 | 玻璃基板的涂布设备及其涂布方法 |
KR102126421B1 (ko) * | 2012-04-13 | 2020-06-24 | 가부시키가이샤 니콘 | 롤용 카세트 장치 |
CN102931120B (zh) * | 2012-10-25 | 2017-09-29 | 上海集成电路研发中心有限公司 | 工件传输系统 |
KR101456471B1 (ko) * | 2013-03-06 | 2014-10-31 | (주) 티에이에스 | 이송 시스템 |
JP5735161B1 (ja) * | 2014-07-08 | 2015-06-17 | 中外炉工業株式会社 | 塗布装置及びその改良方法 |
CN105363627A (zh) * | 2015-10-09 | 2016-03-02 | 昆山希盟自动化科技有限公司 | Ccd对位的loca贴合机 |
CN106585067A (zh) * | 2015-10-19 | 2017-04-26 | 深圳莱宝高科技股份有限公司 | 一种面板处理装置及其处理方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06143177A (ja) * | 1992-10-28 | 1994-05-24 | Tokyo Electron Ltd | 基板搬送装置 |
JPH07236814A (ja) * | 1993-05-18 | 1995-09-12 | Tokyo Electron Ltd | フィルタ装置及びレジスト処理システム |
JPH07297258A (ja) * | 1994-04-26 | 1995-11-10 | Tokyo Electron Ltd | 板状体の搬送装置 |
JPH1022358A (ja) * | 1996-06-28 | 1998-01-23 | Dainippon Screen Mfg Co Ltd | 基板処理装置 |
JPH1079343A (ja) * | 1996-09-03 | 1998-03-24 | Tokyo Electron Ltd | 処理方法及び塗布現像処理システム |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3622842B2 (ja) * | 2000-12-11 | 2005-02-23 | 住友精密工業株式会社 | 搬送式基板処理装置 |
JP4003611B2 (ja) * | 2002-10-28 | 2007-11-07 | トヨタ自動車株式会社 | 発電電動装置 |
JP4080349B2 (ja) * | 2003-02-21 | 2008-04-23 | 大日本スクリーン製造株式会社 | 減圧乾燥装置および被膜形成装置 |
JP2005142372A (ja) * | 2003-11-06 | 2005-06-02 | Tokyo Electron Ltd | 基板処理装置及び基板処理方法 |
JP2005270932A (ja) * | 2004-03-26 | 2005-10-06 | Tokyo Electron Ltd | 塗布膜形成装置 |
-
2006
- 2006-04-17 JP JP2006113415A patent/JP4969138B2/ja active Active
-
2007
- 2007-02-01 TW TW096103632A patent/TWI345284B/zh active
- 2007-02-27 CN CN2007100843178A patent/CN101060066B/zh active Active
- 2007-02-28 KR KR1020070020161A patent/KR100795657B1/ko active IP Right Grant
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06143177A (ja) * | 1992-10-28 | 1994-05-24 | Tokyo Electron Ltd | 基板搬送装置 |
JPH07236814A (ja) * | 1993-05-18 | 1995-09-12 | Tokyo Electron Ltd | フィルタ装置及びレジスト処理システム |
JPH07297258A (ja) * | 1994-04-26 | 1995-11-10 | Tokyo Electron Ltd | 板状体の搬送装置 |
JPH1022358A (ja) * | 1996-06-28 | 1998-01-23 | Dainippon Screen Mfg Co Ltd | 基板処理装置 |
JPH1079343A (ja) * | 1996-09-03 | 1998-03-24 | Tokyo Electron Ltd | 処理方法及び塗布現像処理システム |
Also Published As
Publication number | Publication date |
---|---|
TWI345284B (en) | 2011-07-11 |
JP4969138B2 (ja) | 2012-07-04 |
CN101060066A (zh) | 2007-10-24 |
TW200810004A (en) | 2008-02-16 |
KR20070102933A (ko) | 2007-10-22 |
JP2007287914A (ja) | 2007-11-01 |
CN101060066B (zh) | 2010-09-15 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR100795657B1 (ko) | 기판 처리 장치 | |
KR101139180B1 (ko) | 기판 반송 방법 및 기판 반송 장치 | |
JP4884039B2 (ja) | 基板バッファ装置、基板バッファリング方法、基板処理装置、制御プログラムおよびコンピュータ読取可能な記憶媒体 | |
KR101079441B1 (ko) | 스테이지 장치 및 도포 처리 장치 | |
JP3579228B2 (ja) | 基板処理装置 | |
KR101061707B1 (ko) | 도포막형성 장치 및 도포막형성 방법 | |
KR100633970B1 (ko) | 기판 반송 장치 | |
US7874261B2 (en) | Stage apparatus and coating treatment device | |
KR101216321B1 (ko) | 기판 처리 장치 | |
JP5189370B2 (ja) | 基板交換装置及び基板処理装置並びに基板検査装置 | |
KR100687565B1 (ko) | 기판 처리 장치 | |
KR20110085883A (ko) | 기판 반송장치 및 기판 반송방법 | |
TWI613749B (zh) | 基板處理裝置及基板處理方法 | |
KR20070058978A (ko) | 기판 반송 시스템, 기판 반송 장치 및 기판 처리 장치 | |
JP4593461B2 (ja) | 基板搬送システム | |
JP3485990B2 (ja) | 搬送方法及び搬送装置 | |
JP4541396B2 (ja) | 塗布膜形成装置、基板搬送方法及び記憶媒体 | |
JP6595276B2 (ja) | 基板処理装置および基板処理方法 | |
JP3957419B2 (ja) | 基板処理装置 | |
JP2009165942A (ja) | 基板処理装置および基板処理方法 | |
JP2019070794A (ja) | 基板の搬送装置、搬送方法、及びフォトリソグラフィ設備 | |
JPH10209241A (ja) | 基板搬送装置およびそれを備えた基板処理装置 | |
JP3892327B2 (ja) | 基板処理装置 | |
KR20110081494A (ko) | 기판 이송 장치 | |
JPH1187456A (ja) | 基板処理装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E701 | Decision to grant or registration of patent right | ||
GRNT | Written decision to grant | ||
FPAY | Annual fee payment |
Payment date: 20121227 Year of fee payment: 6 |
|
FPAY | Annual fee payment |
Payment date: 20131219 Year of fee payment: 7 |
|
FPAY | Annual fee payment |
Payment date: 20141219 Year of fee payment: 8 |
|
FPAY | Annual fee payment |
Payment date: 20151217 Year of fee payment: 9 |
|
FPAY | Annual fee payment |
Payment date: 20161219 Year of fee payment: 10 |
|
FPAY | Annual fee payment |
Payment date: 20171219 Year of fee payment: 11 |
|
FPAY | Annual fee payment |
Payment date: 20181219 Year of fee payment: 12 |
|
FPAY | Annual fee payment |
Payment date: 20191219 Year of fee payment: 13 |