JPWO2016056656A1 - 合金バンプの製造方法 - Google Patents
合金バンプの製造方法 Download PDFInfo
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- JPWO2016056656A1 JPWO2016056656A1 JP2016553173A JP2016553173A JPWO2016056656A1 JP WO2016056656 A1 JPWO2016056656 A1 JP WO2016056656A1 JP 2016553173 A JP2016553173 A JP 2016553173A JP 2016553173 A JP2016553173 A JP 2016553173A JP WO2016056656 A1 JPWO2016056656 A1 JP WO2016056656A1
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- plating film
- alloy
- acid
- plating
- film
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- QCDYQQDYXPDABM-UHFFFAOYSA-N phloroglucinol Chemical compound OC1=CC(O)=CC(O)=C1 QCDYQQDYXPDABM-UHFFFAOYSA-N 0.000 description 1
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- ZWLUXSQADUDCSB-UHFFFAOYSA-N phthalaldehyde Chemical compound O=CC1=CC=CC=C1C=O ZWLUXSQADUDCSB-UHFFFAOYSA-N 0.000 description 1
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- 159000000001 potassium salts Chemical class 0.000 description 1
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- 239000004065 semiconductor Substances 0.000 description 1
- HRZFUMHJMZEROT-UHFFFAOYSA-L sodium disulfite Chemical compound [Na+].[Na+].[O-]S(=O)S([O-])(=O)=O HRZFUMHJMZEROT-UHFFFAOYSA-L 0.000 description 1
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- 235000019345 sodium thiosulphate Nutrition 0.000 description 1
- BATOPAZDIZEVQF-UHFFFAOYSA-N sorbic aldehyde Natural products CC=CC=CC=O BATOPAZDIZEVQF-UHFFFAOYSA-N 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 239000001119 stannous chloride Substances 0.000 description 1
- 235000011150 stannous chloride Nutrition 0.000 description 1
- RCIVOBGSMSSVTR-UHFFFAOYSA-L stannous sulfate Chemical compound [SnH2+2].[O-]S([O-])(=O)=O RCIVOBGSMSSVTR-UHFFFAOYSA-L 0.000 description 1
- LSNNMFCWUKXFEE-UHFFFAOYSA-L sulfite Chemical class [O-]S([O-])=O LSNNMFCWUKXFEE-UHFFFAOYSA-L 0.000 description 1
- 229940117986 sulfobetaine Drugs 0.000 description 1
- 150000003460 sulfonic acids Chemical class 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
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- 150000004764 thiosulfuric acid derivatives Chemical class 0.000 description 1
- 229960000790 thymol Drugs 0.000 description 1
- ZPRVNEJJMJMSCN-UHFFFAOYSA-L tin(2+);disulfamate Chemical compound [Sn+2].NS([O-])(=O)=O.NS([O-])(=O)=O ZPRVNEJJMJMSCN-UHFFFAOYSA-L 0.000 description 1
- 229910000375 tin(II) sulfate Inorganic materials 0.000 description 1
- 150000004992 toluidines Chemical class 0.000 description 1
- DQFBYFPFKXHELB-VAWYXSNFSA-N trans-chalcone Chemical compound C=1C=CC=CC=1C(=O)\C=C\C1=CC=CC=C1 DQFBYFPFKXHELB-VAWYXSNFSA-N 0.000 description 1
- LDHQCZJRKDOVOX-UHFFFAOYSA-N trans-crotonic acid Natural products CC=CC(O)=O LDHQCZJRKDOVOX-UHFFFAOYSA-N 0.000 description 1
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Classifications
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/10—Bump connectors ; Manufacturing methods related thereto
- H01L24/11—Manufacturing methods
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/10—Bump connectors ; Manufacturing methods related thereto
- H01L24/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L24/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
- H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
- H05K3/34—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/03—Manufacturing methods
- H01L2224/034—Manufacturing methods by blanket deposition of the material of the bonding area
- H01L2224/03444—Manufacturing methods by blanket deposition of the material of the bonding area in gaseous form
- H01L2224/0345—Physical vapour deposition [PVD], e.g. evaporation, or sputtering
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- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/03—Manufacturing methods
- H01L2224/034—Manufacturing methods by blanket deposition of the material of the bonding area
- H01L2224/0346—Plating
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- H—ELECTRICITY
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- H01L2224/0347—Manufacturing methods using a lift-off mask
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- H—ELECTRICITY
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- H01L2224/05599—Material
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- H01L2224/05638—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
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- H01L2224/11849—Reflowing
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- H01L2224/11—Manufacturing methods
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- H01L2224/11901—Methods of manufacturing bump connectors involving a specific sequence of method steps with repetition of the same manufacturing step
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Abstract
Description
まず、本発明の第1の実施形態に係る合金バンプの製造方法について図1を参照しながら説明する。本実施形態ではスズ(Sn)とインジウム(In)との2種の金属成分を含むIn−Sn合金からなる合金バンプを基板上に形成する方法について説明する。
以下に、本発明の第2の実施形態として、3層のめっき膜を形成して、合金バンプを形成する方法について図2を参照しながら説明する。本実施形態では、Bi−Sn合金からなるバンプを形成する方法について説明する。
任意の10箇所の合金比率をEDXで含有率を測定し、10点の上限から下限を引いた重量%。
11,21 アンダーバンプメタル(UBM)
12,22 レジストパターン
13,23 開口部
14 Snめっき膜(第1めっき膜)
15 Inめっき膜(第2めっき膜)
16 (In−Sn)合金バンプ
24 Snめっき膜(第1めっき膜)
25 Biめっき膜(第2めっき膜)
26 Snめっき膜(第3めっき膜)
27 (Bi−Sn)合金バンプ
Claims (9)
- 基板の上に、該基板を露出する開口部を有するレジストパターンを形成する工程と、
前記開口部内における前記基板の上にアンダーバンプメタルを形成する工程と、
前記アンダーバンプメタルの上に、電気めっきにより第1めっき膜を形成する工程と、
前記第1めっき膜の上に、電気めっきにより前記第1めっき膜が含む金属成分を含まない第2めっき膜を形成する工程と、
前記レジストパターンを除去する工程と、
前記基板に熱処理を施して前記第1めっき膜と第2めっき膜とを合金化することにより合金バンプを形成する工程とを備えていることを特徴とする合金バンプの製造方法。 - 前記第2めっき膜を形成した後に、前記第2めっき膜の上に、電気めっきにより第3めっき膜を形成する工程をさらに備えることを特徴とする請求項1に記載の合金バンプの製造方法。
- 前記第3めっき膜を、前記第1めっき膜と同一の金属により形成することを特徴とする請求項2に記載の合金バンプの製造方法。
- 前記第3めっき膜を、前記第1めっき膜及び第2めっき膜よりも薄い膜厚で形成することを特徴とする請求項3に記載の合金バンプの製造方法。
- 前記第1めっき膜、第2めっき膜及び第3めっき膜は、それぞれ、スズ、ビスマス、インジウム、亜鉛、銀、及びそれらの合金のうちのいずれか1つからなることを特徴とする請求項1〜4のいずれか1項に記載の合金バンプの製造方法。
- 前記第1めっき膜、第2めっき膜及び第3めっき膜は、それぞれ単一の金属からなることを特徴とする請求項1〜5に記載の合金バンプの製造方法。
- 前記第1めっき膜はSnからなり、前記第2めっき膜はIn又はBiからなることを特徴とする請求項1又は2に記載の合金バンプの製造方法。
- 前記第1めっき膜はSnからなり、前記第2めっき膜はInからなり、前記第2めっき膜の上に更なる金属膜を形成することなく、前記合金バンプを形成する工程を行うことを特徴とする請求項1に記載の合金バンプの製造方法。
- 前記第1めっき膜はSnからなり、前記第2めっき膜はBiからなり、前記第3めっき膜はSnからなり、前記第3めっき膜の上に更なる金属膜を形成することなく、前記合金バンプを形成する工程を行うことを特徴とする請求項3に記載の合金バンプの製造方法。
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US20180016690A1 (en) | 2016-07-18 | 2018-01-18 | Rohm And Haas Electronic Materials Llc | Indium electroplating compositions containing 2-imidazolidinethione compounds and methods for electroplating indium |
US20180016689A1 (en) * | 2016-07-18 | 2018-01-18 | Rohm And Haas Electronic Materials Llc | Indium electroplating compositions and methods for electroplating indium |
US9837341B1 (en) * | 2016-09-15 | 2017-12-05 | Intel Corporation | Tin-zinc microbump structures |
JP7335036B2 (ja) * | 2019-03-29 | 2023-08-29 | ラピスセミコンダクタ株式会社 | 半導体パッケージの製造方法 |
JP7091406B2 (ja) * | 2019-09-11 | 2022-06-27 | 株式会社新菱 | Sn-Bi-In系低融点接合部材、微小部材および半導体電子回路、バンプの製造方法ならびに半導体電子回路の実装方法 |
JP7080867B2 (ja) * | 2019-09-11 | 2022-06-06 | 株式会社新菱 | Sn-Bi-In系低融点接合部材、微小部材および半導体電子回路、バンプの製造方法ならびに半導体電子回路の実装方法 |
JP7091405B2 (ja) * | 2019-09-11 | 2022-06-27 | 株式会社新菱 | Sn-Bi-In系低融点接合部材および、その製造方法、ならびに半導体電子回路およびその実装方法 |
US20230072996A1 (en) * | 2020-02-05 | 2023-03-09 | Ishihara Chemical Co., Ltd. | STRUCTURE CONTAINING Sn LAYER OR Sn ALLOY LAYER |
JP2022043722A (ja) * | 2020-09-04 | 2022-03-16 | 株式会社新菱 | Sn-In系低融点接合部材およびその製造方法ならびに半導体電子回路およびその実装方法 |
US20230304180A1 (en) * | 2022-03-24 | 2023-09-28 | Rohm And Haas Electronic Materials Llc | Method of inhibiting tarnish formation and corrosion |
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