JPWO2004081620A1 - 回折素子および光学装置 - Google Patents

回折素子および光学装置 Download PDF

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Publication number
JPWO2004081620A1
JPWO2004081620A1 JP2005503603A JP2005503603A JPWO2004081620A1 JP WO2004081620 A1 JPWO2004081620 A1 JP WO2004081620A1 JP 2005503603 A JP2005503603 A JP 2005503603A JP 2005503603 A JP2005503603 A JP 2005503603A JP WO2004081620 A1 JPWO2004081620 A1 JP WO2004081620A1
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Japan
Prior art keywords
grating
diffraction
convex portion
light
diffraction element
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Withdrawn
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JP2005503603A
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English (en)
Japanese (ja)
Inventor
佐藤　弘昌
弘昌 佐藤
梨子　公貴
公貴 梨子
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AGC Inc
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Asahi Glass Co Ltd
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Publication of JPWO2004081620A1 publication Critical patent/JPWO2004081620A1/ja
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1847—Manufacturing methods
    • G02B5/1857—Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1809—Diffraction gratings with pitch less than or comparable to the wavelength
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1866—Transmission gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials
    • G02B5/1871—Transmissive phase gratings

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Polarising Elements (AREA)
JP2005503603A 2003-03-13 2004-03-12 回折素子および光学装置 Withdrawn JPWO2004081620A1 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2003068214 2003-03-13
JP2003068214 2003-03-13
JP2003078133 2003-03-20
JP2003078133 2003-03-20
PCT/JP2004/003305 WO2004081620A1 (ja) 2003-03-13 2004-03-12 回折素子および光学装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2010189874A Division JP5077404B2 (ja) 2003-03-13 2010-08-26 回折素子及び光学装置

Publications (1)

Publication Number Publication Date
JPWO2004081620A1 true JPWO2004081620A1 (ja) 2006-06-15

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ID=32992966

Family Applications (2)

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JP2005503603A Withdrawn JPWO2004081620A1 (ja) 2003-03-13 2004-03-12 回折素子および光学装置
JP2010189874A Expired - Lifetime JP5077404B2 (ja) 2003-03-13 2010-08-26 回折素子及び光学装置

Family Applications After (1)

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JP2010189874A Expired - Lifetime JP5077404B2 (ja) 2003-03-13 2010-08-26 回折素子及び光学装置

Country Status (5)

Country Link
US (1) US7142363B2 (https=)
EP (1) EP1602947A4 (https=)
JP (2) JPWO2004081620A1 (https=)
KR (1) KR101162135B1 (https=)
WO (1) WO2004081620A1 (https=)

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US7554734B1 (en) * 2006-04-28 2009-06-30 Johan Christer Holm Polarization independent grating
US8755113B2 (en) 2006-08-31 2014-06-17 Moxtek, Inc. Durable, inorganic, absorptive, ultra-violet, grid polarizer
JP5280654B2 (ja) * 2006-09-21 2013-09-04 日本板硝子株式会社 透過型回折格子、並びに、それを用いた分光素子及び分光器
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JP5181552B2 (ja) * 2007-07-04 2013-04-10 株式会社リコー 回折光学素子および光ビーム検出手段および光走査装置および画像形成装置
US8040607B2 (en) * 2008-04-25 2011-10-18 Jds Uniphase Corporation Surface-relief diffraction grating
US7821900B2 (en) * 2008-05-15 2010-10-26 Northrop Grumman Systems Corporation Diffractive optical element and method of designing the same
US8248696B2 (en) 2009-06-25 2012-08-21 Moxtek, Inc. Nano fractal diffuser
CN103097925B (zh) * 2010-08-06 2016-04-13 旭硝子株式会社 衍射光学元件和计测装置
US8611007B2 (en) 2010-09-21 2013-12-17 Moxtek, Inc. Fine pitch wire grid polarizer
US8913321B2 (en) 2010-09-21 2014-12-16 Moxtek, Inc. Fine pitch grid polarizer
US8873144B2 (en) 2011-05-17 2014-10-28 Moxtek, Inc. Wire grid polarizer with multiple functionality sections
US8913320B2 (en) 2011-05-17 2014-12-16 Moxtek, Inc. Wire grid polarizer with bordered sections
JP5834567B2 (ja) * 2011-07-19 2015-12-24 セイコーエプソン株式会社 検出装置及び分光装置の製造方法
US8922890B2 (en) 2012-03-21 2014-12-30 Moxtek, Inc. Polarizer edge rib modification
JP6007830B2 (ja) 2012-03-26 2016-10-12 旭硝子株式会社 透過型回折素子
JP2017004004A (ja) * 2012-03-26 2017-01-05 旭硝子株式会社 透過型回折素子
KR102117138B1 (ko) * 2012-07-27 2020-06-01 시리얼 테크놀로지즈 에스.에이. 경사 입사각을 위한 편광 격자
JP2014092730A (ja) * 2012-11-06 2014-05-19 Canon Inc 回折格子、それを用いた光学装置
EP2953214B1 (en) 2013-01-31 2018-12-19 Shimadzu Corporation Diffraction grating for laser pulse compression and laser device
JP2015028528A (ja) * 2013-07-30 2015-02-12 キヤノン株式会社 透過型回折光学素子及び計測装置
JP6356557B2 (ja) * 2013-09-30 2018-07-11 株式会社豊田中央研究所 レンズおよびその製造方法
US9354374B2 (en) 2013-10-24 2016-05-31 Moxtek, Inc. Polarizer with wire pair over rib
US9720147B2 (en) 2014-03-28 2017-08-01 Lumentum Operations Llc Reflective diffraction grating and fabrication method
JP6510231B2 (ja) * 2014-08-27 2019-05-08 京セラ株式会社 携帯電子機器
JP2017142465A (ja) * 2016-02-12 2017-08-17 古河電気工業株式会社 光操作装置および光源装置
CN106094087B (zh) * 2016-08-02 2019-07-23 中国科学院微电子研究所 一种单级衍射光栅
JP2018061155A (ja) * 2016-10-06 2018-04-12 レノボ・シンガポール・プライベート・リミテッド 情報処理装置、情報処理装置の制御方法、及び情報処理装置の制御プログラム
JP2017033019A (ja) * 2016-10-28 2017-02-09 株式会社島津製作所 レーザ装置におけるチャープパルス増幅方法
EP4122897A1 (en) * 2017-01-05 2023-01-25 Magic Leap, Inc. Patterning of high refractive index glasses by plasma etching
JP2018146624A (ja) * 2017-03-01 2018-09-20 Ａｇｃ株式会社 透過型回折素子および反射防止構造
US10802185B2 (en) * 2017-08-16 2020-10-13 Lumentum Operations Llc Multi-level diffractive optical element thin film coating
US10712475B2 (en) 2017-08-16 2020-07-14 Lumentum Operations Llc Multi-layer thin film stack for diffractive optical elements
US10914954B2 (en) 2018-08-03 2021-02-09 Facebook Technologies, Llc Rainbow reduction for waveguide displays
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JP7327907B2 (ja) * 2018-04-25 2023-08-16 デクセリアルズ株式会社 偏光板及び偏光板の製造方法
WO2019240010A1 (ja) * 2018-06-11 2019-12-19 Ａｇｃ株式会社 回折光学素子、投影装置および計測装置
EP3588150A1 (en) 2018-06-29 2020-01-01 Thomson Licensing An optical device comprising multi-layer waveguides
CN109581570B (zh) * 2018-11-23 2021-09-07 京东方科技集团股份有限公司 金属线栅及其制造方法、显示面板、显示装置
EP3671322A1 (en) 2018-12-18 2020-06-24 Thomson Licensing Device for forming an outgoing electromagnetic wave from an incident electromagnetic wave
EP3671310A1 (en) 2018-12-18 2020-06-24 Thomson Licensing Optical manipulation apparatus for trapping or moving micro or nanoparticles
EP3671293A1 (en) 2018-12-21 2020-06-24 Thomson Licensing An optical device comprising at least one diffraction grating having a grating pitch above the wavelength
US11150394B2 (en) * 2019-01-31 2021-10-19 Facebook Technologies, Llc Duty cycle range increase for waveguide combiners
US11487053B2 (en) 2019-02-26 2022-11-01 Ii-Vi Delaware, Inc. Partially etched phase-transforming optical element
CN113646668A (zh) 2019-04-11 2021-11-12 应用材料公司 用于光学装置的多深度膜
CN112389111A (zh) * 2019-08-19 2021-02-23 中钞特种防伪科技有限公司 光学防伪元件及光学防伪产品
US12019252B2 (en) 2019-11-26 2024-06-25 Analog Devices, Inc. Optical element with diffractive focusing features and diffractive anti-reflection features
JP2023059010A (ja) * 2021-10-14 2023-04-26 三菱ケミカル株式会社 導光板
US20230120539A1 (en) * 2021-10-15 2023-04-20 Applied Materials, Inc. Metallized high-index blaze grating incoupler
US20230359031A1 (en) * 2022-05-09 2023-11-09 Visera Technologies Company Limited Waveguide structure and display device using the same

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JPH08334609A (ja) * 1995-06-08 1996-12-17 Matsushita Electric Ind Co Ltd 位相格子とその作製方法並びに光学式エンコーダ
JPH10148707A (ja) * 1996-11-18 1998-06-02 Nikon Corp 回折格子及び分光装置
JPH10177107A (ja) * 1996-12-17 1998-06-30 Hitachi Koki Co Ltd 回折格子及び光記録装置
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JPH08254607A (ja) * 1995-01-28 1996-10-01 Dr Johannes Heidenhain Gmbh 位相格子
JPH08334609A (ja) * 1995-06-08 1996-12-17 Matsushita Electric Ind Co Ltd 位相格子とその作製方法並びに光学式エンコーダ
JPH10148707A (ja) * 1996-11-18 1998-06-02 Nikon Corp 回折格子及び分光装置
JPH10177107A (ja) * 1996-12-17 1998-06-30 Hitachi Koki Co Ltd 回折格子及び光記録装置
JPH10318793A (ja) * 1996-12-17 1998-12-04 Dr Johannes Heidenhain Gmbh 光電位置測定装置
JPH1164615A (ja) * 1997-08-20 1999-03-05 Asahi Glass Co Ltd 回折素子
JPH11271516A (ja) * 1998-03-26 1999-10-08 Minolta Co Ltd 回折型カラーフィルター及びそれを用いた液晶表示装置
JPH11312329A (ja) * 1998-04-28 1999-11-09 Asahi Glass Co Ltd 偏光性回折素子および光ヘッド装置
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Also Published As

Publication number Publication date
JP2010262320A (ja) 2010-11-18
KR101162135B1 (ko) 2012-07-03
KR20050109475A (ko) 2005-11-21
US7142363B2 (en) 2006-11-28
JP5077404B2 (ja) 2012-11-21
EP1602947A4 (en) 2007-03-28
US20060001972A1 (en) 2006-01-05
EP1602947A1 (en) 2005-12-07
WO2004081620A1 (ja) 2004-09-23

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