JP6698399B2 - 搬送制御装置及び搬送台車の合流点通過方法 - Google Patents
搬送制御装置及び搬送台車の合流点通過方法 Download PDFInfo
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- 238000000034 method Methods 0.000 title claims description 51
- 238000012546 transfer Methods 0.000 title claims description 49
- 230000006854 communication Effects 0.000 claims description 224
- 238000004891 communication Methods 0.000 claims description 222
- 238000001514 detection method Methods 0.000 claims description 76
- 238000013459 approach Methods 0.000 claims description 45
- 230000003287 optical effect Effects 0.000 claims description 41
- 239000003550 marker Substances 0.000 claims description 35
- 230000003213 activating effect Effects 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 description 43
- 239000013256 coordination polymer Substances 0.000 description 31
- 235000012431 wafers Nutrition 0.000 description 27
- 230000005540 biological transmission Effects 0.000 description 12
- 239000004065 semiconductor Substances 0.000 description 12
- 238000012790 confirmation Methods 0.000 description 10
- 230000003028 elevating effect Effects 0.000 description 6
- 230000007246 mechanism Effects 0.000 description 6
- 230000006870 function Effects 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 101100420928 Oryza sativa subsp. japonica SE14 gene Proteins 0.000 description 1
- 235000014676 Phragmites communis Nutrition 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000001174 ascending effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000000060 site-specific infrared dichroism spectroscopy Methods 0.000 description 1
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D1/00—Control of position, course or altitude of land, water, air, or space vehicles, e.g. automatic pilot
- G05D1/02—Control of position or course in two dimensions
- G05D1/021—Control of position or course in two dimensions specially adapted to land vehicles
- G05D1/0231—Control of position or course in two dimensions specially adapted to land vehicles using optical position detecting means
- G05D1/0238—Control of position or course in two dimensions specially adapted to land vehicles using optical position detecting means using obstacle or wall sensors
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- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D1/00—Control of position, course or altitude of land, water, air, or space vehicles, e.g. automatic pilot
- G05D1/02—Control of position or course in two dimensions
- G05D1/021—Control of position or course in two dimensions specially adapted to land vehicles
- G05D1/0287—Control of position or course in two dimensions specially adapted to land vehicles involving a plurality of land vehicles, e.g. fleet or convoy travelling
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B61—RAILWAYS
- B61L—GUIDING RAILWAY TRAFFIC; ENSURING THE SAFETY OF RAILWAY TRAFFIC
- B61L23/00—Control, warning, or like safety means along the route or between vehicles or vehicle trains
- B61L23/08—Control, warning, or like safety means along the route or between vehicles or vehicle trains for controlling traffic in one direction only
- B61L23/14—Control, warning, or like safety means along the route or between vehicles or vehicle trains for controlling traffic in one direction only automatically operated
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B61—RAILWAYS
- B61L—GUIDING RAILWAY TRAFFIC; ENSURING THE SAFETY OF RAILWAY TRAFFIC
- B61L27/00—Central railway traffic control systems; Trackside control; Communication systems specially adapted therefor
- B61L27/04—Automatic systems, e.g. controlled by train; Change-over to manual control
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G35/00—Mechanical conveyors not otherwise provided for
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- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G43/00—Control devices, e.g. for safety, warning or fault-correcting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G43/00—Control devices, e.g. for safety, warning or fault-correcting
- B65G43/08—Control devices operated by article or material being fed, conveyed or discharged
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/52—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices
- B65G47/68—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices adapted to receive articles arriving in one layer from one conveyor lane and to transfer them in individual layers to more than one conveyor lane or to one broader conveyor lane, or vice versa, e.g. combining the flows of articles conveyed by more than one conveyor
- B65G47/681—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices adapted to receive articles arriving in one layer from one conveyor lane and to transfer them in individual layers to more than one conveyor lane or to one broader conveyor lane, or vice versa, e.g. combining the flows of articles conveyed by more than one conveyor from distinct, separate conveyor lanes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D1/00—Control of position, course or altitude of land, water, air, or space vehicles, e.g. automatic pilot
- G05D1/02—Control of position or course in two dimensions
- G05D1/021—Control of position or course in two dimensions specially adapted to land vehicles
- G05D1/0212—Control of position or course in two dimensions specially adapted to land vehicles with means for defining a desired trajectory
- G05D1/0214—Control of position or course in two dimensions specially adapted to land vehicles with means for defining a desired trajectory in accordance with safety or protection criteria, e.g. avoiding hazardous areas
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D1/00—Control of position, course or altitude of land, water, air, or space vehicles, e.g. automatic pilot
- G05D1/02—Control of position or course in two dimensions
- G05D1/021—Control of position or course in two dimensions specially adapted to land vehicles
- G05D1/0231—Control of position or course in two dimensions specially adapted to land vehicles using optical position detecting means
- G05D1/0242—Control of position or course in two dimensions specially adapted to land vehicles using optical position detecting means using non-visible light signals, e.g. IR or UV signals
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D1/00—Control of position, course or altitude of land, water, air, or space vehicles, e.g. automatic pilot
- G05D1/02—Control of position or course in two dimensions
- G05D1/021—Control of position or course in two dimensions specially adapted to land vehicles
- G05D1/0259—Control of position or course in two dimensions specially adapted to land vehicles using magnetic or electromagnetic means
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D1/00—Control of position, course or altitude of land, water, air, or space vehicles, e.g. automatic pilot
- G05D1/02—Control of position or course in two dimensions
- G05D1/021—Control of position or course in two dimensions specially adapted to land vehicles
- G05D1/0276—Control of position or course in two dimensions specially adapted to land vehicles using signals provided by a source external to the vehicle
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D1/00—Control of position, course or altitude of land, water, air, or space vehicles, e.g. automatic pilot
- G05D1/02—Control of position or course in two dimensions
- G05D1/03—Control of position or course in two dimensions using near-field transmission systems, e.g. inductive-loop type
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
-
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67712—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrate being handled substantially vertically
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67715—Changing the direction of the conveying path
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67733—Overhead conveying
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67736—Loading to or unloading from a conveyor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0407—Storage devices mechanical using stacker cranes
- B65G1/0421—Storage devices mechanical using stacker cranes with control for stacker crane operations
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0297—Wafer cassette
Description
2:ロードポート
3:ウェハキャリア
5:走行レール
5a:工程間レール
5b:工程内レール
5c:分岐レール
5d:退避レール
5e:バイパスレール
5A:開口
9:合流点近傍領域
10,10a,10b:搬送台車
10A:走行部
10B:把持部
10C:チャック機構
10D:昇降体
10E:昇降機構
20:搬送制御部
21:ホストインタフェース部
22,32:記憶部
23:移載制御部
24:走行制御部
24a:合流点近傍領域進入検知制御部
24b,35:無線通信部
24c:合流点通過制御部
25:合流点マーカ検知部
26:障害物検知部
27,31:シリアル通信インタフェース部
30:ローカル通信部
33:通信制御部
34:光通信部
40:障害物センサ
60,70:ベイ
100:製造設備
C:搬送制御装置
CP:合流点
H:システムコントローラ
M:マーカ
ST:ストッカ
W:半導体ウェハ
Claims (15)
- 搬送台車に搭載されシステムコントローラからの指令に基づいて合流点を含む所定の搬送経路に沿って走行制御する搬送制御装置であって、
前記システムコントローラからの指令に基づいて目的地まで前記搬送台車を走行制御する搬送制御部に、
前記搬送経路に含まれる各合流点の近傍に設定された合流点近傍領域への進入を検知する合流点近傍領域進入検知制御部と、
当該搬送台車の周辺に障害物が存在するか否かを検知する障害物検知部と、
前記合流点近傍領域進入検知制御部で各合流点近傍領域への進入を検知すると、合流点毎に異なる値に設定された共通の周波数帯域及び共通の識別コードを用いて他の搬送台車とローカルで無線交信する無線通信部と、
前記障害物検知部で前記合流点近傍領域に他の搬送台車の存在を検知したときに、前記無線通信部が起動され、前記無線通信部で、他の搬送台車とのハンドシェークが成立した後に当該合流点への進入経路毎に設定された優先順位に従って合流点を通過する合流点通過制御部と、
が設けられている搬送制御装置。 - 前記無線通信部は、優先順位の高い進入経路に進入した搬送台車の搬送制御部が親局となり、優先順位の低い進入経路に進入した搬送台車の搬送制御部が子局となって前記ハンドシェークを行なうように構成され、前記合流点通過制御部は、前記ハンドシェークが成立した場合に優先順位の高い進入経路に進入した搬送台車が優先して合流点を通過するように構成されている請求項1記載の搬送制御装置。
- 優先順位の低い進入経路に進入した搬送台車は、優先順位の高い進入経路に侵入した搬送台車からの合流点通過完了信号の受信後、または前記ハンドシェークが途切れた後に合流点を通過するように構成されている請求項2記載の搬送制御装置。
- 前記合流点近傍領域進入検知制御部は、各合流点の進入経路の近傍に設置されたマーカを検知することにより各合流点近傍領域へ進入したと判定するように構成されている請求項1から3の何れかに記載の搬送制御装置。
- 合流点毎に設定される周波数帯域及び識別コード、及び/または進入経路毎の優先順位は、予め前記搬送制御部に備えた記憶部に記憶されている請求項1から4の何れかに記載の搬送制御装置。
- 前記障害物検知部で他の搬送台車の存在を検知しなかったときには、前記無線通信部及び前記合流点通過制御部を起動することなく、当該合流点を通過するように構成されている請求項1から5の何れかに記載の搬送制御装置。
- 前記搬送制御部に制御され前記搬送台車と荷を移載するステーションとの間で荷の移載のための通信を行なう光通信部に、前記無線通信部が一体に組み込まれ、前記合流点近傍領域進入検知制御部により合流点近傍領域への進入を検知すると、前記搬送制御部により前記光通信部に替えて前記無線通信部が起動され、前記搬送台車が前記ステーションへ接近すると、前記無線通信部に替えて前記光通信部が起動されるように構成されている請求項1から6の何れかに記載の搬送制御装置。
- 搬送台車に搭載されシステムコントローラからの指令に基づいて合流点を含む所定の搬送経路に沿って前記搬送台車を走行制御する搬送制御部により実行される搬送台車の合流点通過方法であって、
前記搬送経路に含まれる各合流点の近傍に設定された合流点近傍領域への進入を検知する合流点近傍領域進入検知制御ステップと、
当該搬送台車の周辺に障害物が存在するか否かを検知する障害物検知ステップと、
前記合流点近傍領域進入検知制御ステップで各合流点近傍領域への進入を検知すると、合流点毎に異なる値に設定された共通の周波数帯域及び共通の識別コードを用いて他の搬送台車とローカルで無線交信する無線通信ステップと、
前記障害物検知ステップで前記合流点近傍領域に他の搬送台車の存在を検知したときに前記無線通信ステップが起動され、前記無線通信ステップで他の搬送台車とのハンドシェークが成立した後に当該合流点への進入経路毎に設定された優先順位に従って合流点を通過する合流点通過制御ステップと、
が前記搬送制御部により実行される搬送台車の合流点通過方法。 - 前記無線通信ステップは、優先順位の高い進入経路に進入した搬送台車の搬送制御部が親局となり、優先順位の低い進入経路に進入した搬送台車の搬送制御部が子局となって前記ハンドシェークを行なうように構成され、前記合流点通過制御ステップは、前記ハンドシェークが成立した場合に優先順位の高い進入経路に進入した搬送台車が優先して合流点を通過するように構成されている請求項8記載の搬送台車の合流点通過方法。
- 優先順位の低い進入経路に進入した搬送台車は、優先順位の高い進入経路に侵入した搬送台車から合流点通過完了の信号受信後、または前記ハンドシェークが途切れた後に合流点を通過するように構成されている請求項9記載の搬送台車の合流点通過方法。
- 前記合流点近傍領域進入検知制御ステップは、各合流点の進入経路の近傍に設置されたマーカを検知することにより各合流点近傍領域へ進入したと判定するように構成されている請求項8から10の何れかに記載の搬送台車の合流点通過方法。
- 合流点毎に設定される周波数帯域及び識別コード、及び/または進入経路毎の優先順位は、予め前記搬送制御部に備えた記憶部に記憶されている請求項9から11の何れかに記載の搬送台車の合流点通過方法。
- 前記障害物検知ステップで他の搬送台車の存在を検知しなかったときには、前記無線通信ステップ及び前記合流点通過制御ステップを起動することなく、当該合流点を通過するように構成されている請求項9から12の何れかに記載の搬送台車の合流点通過方法。
- 複数の合流点を含む搬送経路に沿って自走する複数の搬送台車の合流点通過方法であって、
各搬送台車は、前記合流点近傍領域へ進入したときに他の搬送台車を検知すると走行を停止または減速し、
合流点毎に異なる値に設定された共通の周波数帯域及び識別コードを用いて他の搬送台車と無線交信し、
ハンドシェークが成立すると当該合流点への進入経路毎に設定された優先順位の高い搬送台車が優先的に合流点を通過し、前記ハンドシェークが終了するとその後優先順位低い搬送台車が合流点を通過するように構成されている搬送台車の合流点通過方法。 - 各搬送台車は、前記合流点近傍領域へ進入したときに他の搬送台車を検知しなければ、走行を停止することなく合流点を通過するように構成されている請求項14記載の搬送台車の合流点通過方法。
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