JP5741034B2 - 有軌道台車システム - Google Patents
有軌道台車システム Download PDFInfo
- Publication number
- JP5741034B2 JP5741034B2 JP2011026070A JP2011026070A JP5741034B2 JP 5741034 B2 JP5741034 B2 JP 5741034B2 JP 2011026070 A JP2011026070 A JP 2011026070A JP 2011026070 A JP2011026070 A JP 2011026070A JP 5741034 B2 JP5741034 B2 JP 5741034B2
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- 238000003860 storage Methods 0.000 description 7
- 230000003028 elevating effect Effects 0.000 description 6
- 230000009467 reduction Effects 0.000 description 6
- 238000001514 detection method Methods 0.000 description 4
- 238000012544 monitoring process Methods 0.000 description 4
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- 230000000694 effects Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000006698 induction Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
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- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
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- 230000006870 function Effects 0.000 description 1
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- 229910052751 metal Inorganic materials 0.000 description 1
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- 230000002265 prevention Effects 0.000 description 1
- 230000001141 propulsive effect Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
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Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B60—VEHICLES IN GENERAL
- B60T—VEHICLE BRAKE CONTROL SYSTEMS OR PARTS THEREOF; BRAKE CONTROL SYSTEMS OR PARTS THEREOF, IN GENERAL; ARRANGEMENT OF BRAKING ELEMENTS ON VEHICLES IN GENERAL; PORTABLE DEVICES FOR PREVENTING UNWANTED MOVEMENT OF VEHICLES; VEHICLE MODIFICATIONS TO FACILITATE COOLING OF BRAKES
- B60T8/00—Arrangements for adjusting wheel-braking force to meet varying vehicular or ground-surface conditions, e.g. limiting or varying distribution of braking force
- B60T8/17—Using electrical or electronic regulation means to control braking
- B60T8/1701—Braking or traction control means specially adapted for particular types of vehicles
- B60T8/1705—Braking or traction control means specially adapted for particular types of vehicles for rail vehicles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67715—Changing the direction of the conveying path
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B61—RAILWAYS
- B61B—RAILWAY SYSTEMS; EQUIPMENT THEREFOR NOT OTHERWISE PROVIDED FOR
- B61B13/00—Other railway systems
- B61B13/04—Monorail systems
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B61—RAILWAYS
- B61B—RAILWAY SYSTEMS; EQUIPMENT THEREFOR NOT OTHERWISE PROVIDED FOR
- B61B3/00—Elevated railway systems with suspended vehicles
- B61B3/02—Elevated railway systems with suspended vehicles with self-propelled vehicles
-
- E—FIXED CONSTRUCTIONS
- E01—CONSTRUCTION OF ROADS, RAILWAYS, OR BRIDGES
- E01B—PERMANENT WAY; PERMANENT-WAY TOOLS; MACHINES FOR MAKING RAILWAYS OF ALL KINDS
- E01B7/00—Switches; Crossings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
- H01L21/67265—Position monitoring, e.g. misposition detection or presence detection of substrates stored in a container, a magazine, a carrier, a boat or the like
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67727—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using a general scheme of a conveying path within a factory
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67733—Overhead conveying
Landscapes
- Engineering & Computer Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Transportation (AREA)
- Architecture (AREA)
- Civil Engineering (AREA)
- Structural Engineering (AREA)
- Control Of Position, Course, Altitude, Or Attitude Of Moving Bodies (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Train Traffic Observation, Control, And Security (AREA)
- Platform Screen Doors And Railroad Systems (AREA)
Description
このような有軌道台車システムでは、軌道の分岐点や合流点において台車同士が互いに衝突しないように、衝突防止システムが備えられる場合がある。例えば特許文献1から3では、分岐点及び合流点付近に設けられた誘導線を介して台車同士が通信を行うことで、互いを認識し合い衝突を防止するという技術が開示されている。
Claims (4)
- 分岐点及び合流点を有する軌道と、前記分岐点及び前記合流点を含む所定領域内に設けられた誘導線と、前記軌道に支持されると共に案内されて走行する複数の台車とを備える有軌道台車システムであって、
前記複数の台車の各々は、
互いに周波数の異なる複数の信号を夫々発信可能な発信手段と、
前記発信手段から発信された複数の信号を前記誘導線へと夫々送信する送信手段と、
前記誘導線を介して伝達された複数の信号を夫々受信可能な受信手段と、
前記受信手段において受信された信号の種類に基づいて、前記台車の減速若しくは停止、又は走行の続行を判定する判定手段と、
前記判定手段における判定結果に応じて、前記台車の走行を制御する制御手段と
を有し、
前記誘導線は、連続する複数の前記分岐点又は前記合流点にわたって設けられており、
前記発信手段は、通過しようとする前記分岐点又は前記合流点の各々に対応して固有に定められた種類の信号を発信する
ことを特徴とする有軌道台車システム。 - 前記受信手段は、前記台車の前端側に設けられており、
前記送信手段は、前記台車の後端側に設けられている
ことを特徴とする請求項1に記載の有軌道台車システム。 - 前記誘導線は、前記軌道の右側及び左側の縁の少なくとも一方に沿って設けられており、
前記受信手段は、前記台車の右前端側に設けられた第1受信手段、及び前記台車の左前端側に設けられた第2受信手段を含んでおり、
前記送信手段は、前記台車の右後端側に設けられた第1送信手段、及び前記台車の左後端側に設けられた第2送信手段を含んでいる
ことを特徴とする請求項2に記載の有軌道台車システム。 - 前記発信手段は、前記複数の信号の一つとして緊急停止信号を発信可能であり、
前記判定手段は、前記受信手段が前記緊急停止信号を受信した場合に、前記台車を緊急停止させると判定し、
前記制御手段は、前記台車を緊急停止させると判定された場合に、前記台車を緊急停止させるように制御する
ことを特徴とする請求項1から3のいずれか一項に記載の有軌道台車システム。
Priority Applications (8)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011026070A JP5741034B2 (ja) | 2011-02-09 | 2011-02-09 | 有軌道台車システム |
CN201180067039XA CN103348297A (zh) | 2011-02-09 | 2011-12-06 | 有轨台车系统 |
EP11858125.5A EP2674827A1 (en) | 2011-02-09 | 2011-12-06 | Guided transfer car system |
SG2013058136A SG192232A1 (en) | 2011-02-09 | 2011-12-06 | Guided transfer car system |
PCT/JP2011/078161 WO2012108098A1 (ja) | 2011-02-09 | 2011-12-06 | 有軌道台車システム |
US13/984,514 US9283935B2 (en) | 2011-02-09 | 2011-12-06 | Rail guided vehicle system |
KR1020137022916A KR20130120530A (ko) | 2011-02-09 | 2011-12-06 | 유궤도 대차 시스템 |
TW101103843A TWI494728B (zh) | 2011-02-09 | 2012-02-07 | There are rail trolley systems |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011026070A JP5741034B2 (ja) | 2011-02-09 | 2011-02-09 | 有軌道台車システム |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2012164271A JP2012164271A (ja) | 2012-08-30 |
JP5741034B2 true JP5741034B2 (ja) | 2015-07-01 |
Family
ID=46638327
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011026070A Expired - Fee Related JP5741034B2 (ja) | 2011-02-09 | 2011-02-09 | 有軌道台車システム |
Country Status (8)
Country | Link |
---|---|
US (1) | US9283935B2 (ja) |
EP (1) | EP2674827A1 (ja) |
JP (1) | JP5741034B2 (ja) |
KR (1) | KR20130120530A (ja) |
CN (1) | CN103348297A (ja) |
SG (1) | SG192232A1 (ja) |
TW (1) | TWI494728B (ja) |
WO (1) | WO2012108098A1 (ja) |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102826316B (zh) * | 2012-08-31 | 2015-06-17 | 深圳市华星光电技术有限公司 | 一种玻璃基板的仓储系统以及玻璃基板仓储方法 |
SG11201506361WA (en) | 2013-02-15 | 2015-09-29 | Murata Machinery Ltd | Conveyance system |
JP6698399B2 (ja) * | 2016-03-29 | 2020-05-27 | 北陽電機株式会社 | 搬送制御装置及び搬送台車の合流点通過方法 |
US11305953B2 (en) | 2016-05-03 | 2022-04-19 | Assa Abloy Entrance Systems Ab | Control systems for operation of loading dock equipment, and associated methods of manufacture and use |
US11225824B2 (en) | 2016-05-03 | 2022-01-18 | Assa Abloy Entrance Systems Ab | Control systems for operation of loading dock equipment, and associated methods of manufacture and use |
JP6652084B2 (ja) * | 2017-02-09 | 2020-02-19 | 株式会社ダイフク | 物品搬送設備 |
JP6729465B2 (ja) * | 2017-03-28 | 2020-07-22 | 株式会社ダイフク | 物品搬送設備 |
US11256264B2 (en) | 2017-08-30 | 2022-02-22 | Assa Abloy Entrance Systems Ab | Vehicle guidance systems and associated methods of use at logistics yards and other locations |
KR101862025B1 (ko) * | 2017-12-22 | 2018-05-29 | 임창범 | 반도체 웨이퍼용 이송장치 |
WO2020049876A1 (ja) * | 2018-09-05 | 2020-03-12 | 村田機械株式会社 | 走行車システム |
US10494205B1 (en) | 2018-12-06 | 2019-12-03 | Assa Abloy Entrance Systems Ab | Remote loading dock authorization systems and methods |
US11142413B2 (en) | 2019-01-28 | 2021-10-12 | Assa Abloy Entrance Systems Ab | Systems and methods for automated loading and unloading at a dock station |
SG11202112577UA (en) * | 2019-05-14 | 2021-12-30 | Murata Machinery Ltd | Transport system and transport control method |
US11262747B2 (en) | 2019-06-11 | 2022-03-01 | Assa Abloy Entrance Systems Ab | Vehicle identification and guidance systems and associated methods |
JP7502936B2 (ja) * | 2020-03-30 | 2024-06-19 | 住友重機械工業株式会社 | リニアモータ搬送システムおよびその運用方法 |
JP7501557B2 (ja) | 2022-03-07 | 2024-06-18 | 村田機械株式会社 | 走行車システム |
CN115042824B (zh) * | 2022-06-06 | 2024-03-29 | 成川科技(苏州)有限公司 | 一种有轨台车系统及其控制方法 |
CN116453994B (zh) * | 2023-06-15 | 2023-09-08 | 上海果纳半导体技术有限公司 | 天车搬运装置 |
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JPS50373B1 (ja) * | 1970-05-20 | 1975-01-08 | ||
JPS50373A (ja) | 1973-05-09 | 1975-01-06 | ||
US4272004A (en) * | 1979-10-23 | 1981-06-09 | Sws Incorporated | Z-Bar guide apparatus |
JPS59231613A (ja) * | 1983-06-15 | 1984-12-26 | Daifuku Co Ltd | 電磁誘導式無人車の運行制御装置 |
JPS61103217A (ja) * | 1984-10-26 | 1986-05-21 | Tokyo Denshi Kogyo Kk | 無人車両の制御装置 |
US4902948A (en) * | 1985-05-02 | 1990-02-20 | Eaton-Kenway, Inc. | Guide wire communication system and method |
SE463949B (sv) * | 1988-07-04 | 1991-02-11 | Netzler & Dahlgren Ing Firman | Foerfarande och anordning foer bestaemning av orienteringen av ett fordon i foerhaallande till en styrslinga |
JP2665611B2 (ja) * | 1989-06-14 | 1997-10-22 | 株式会社ダイフク | 移動車の衝突防止装置 |
JPH04112212A (ja) * | 1990-09-03 | 1992-04-14 | Fuji Electric Co Ltd | 無人搬送車の走行制御装置 |
JP3985320B2 (ja) | 1997-02-28 | 2007-10-03 | アシスト シンコー株式会社 | 無人車の衝突防止制御装置 |
JP2007226835A (ja) | 1997-02-28 | 2007-09-06 | Asyst Shinko Inc | 無人車の衝突防止制御装置 |
JP2000250627A (ja) * | 1999-02-26 | 2000-09-14 | Matsushita Electric Ind Co Ltd | 無人搬送車の走行制御方法 |
JP2003264216A (ja) | 2002-03-08 | 2003-09-19 | Murata Mach Ltd | 搬送システム |
JP2004207335A (ja) * | 2002-12-24 | 2004-07-22 | Renesas Technology Corp | 搬送システムの制御装置 |
JP4241306B2 (ja) * | 2003-10-07 | 2009-03-18 | アシスト テクノロジーズ ジャパン株式会社 | 衝突防止制御システム |
JP2009009440A (ja) | 2007-06-29 | 2009-01-15 | Asyst Technologies Japan Inc | 無人搬送システム |
JP2009053937A (ja) * | 2007-08-27 | 2009-03-12 | Asyst Technologies Japan Inc | 搬送システム、及び搬送システムの制御方法 |
-
2011
- 2011-02-09 JP JP2011026070A patent/JP5741034B2/ja not_active Expired - Fee Related
- 2011-12-06 KR KR1020137022916A patent/KR20130120530A/ko not_active Application Discontinuation
- 2011-12-06 EP EP11858125.5A patent/EP2674827A1/en not_active Withdrawn
- 2011-12-06 SG SG2013058136A patent/SG192232A1/en unknown
- 2011-12-06 US US13/984,514 patent/US9283935B2/en not_active Expired - Fee Related
- 2011-12-06 WO PCT/JP2011/078161 patent/WO2012108098A1/ja active Application Filing
- 2011-12-06 CN CN201180067039XA patent/CN103348297A/zh active Pending
-
2012
- 2012-02-07 TW TW101103843A patent/TWI494728B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
WO2012108098A1 (ja) | 2012-08-16 |
SG192232A1 (en) | 2013-09-30 |
US20140034786A1 (en) | 2014-02-06 |
EP2674827A1 (en) | 2013-12-18 |
JP2012164271A (ja) | 2012-08-30 |
TW201237579A (en) | 2012-09-16 |
KR20130120530A (ko) | 2013-11-04 |
US9283935B2 (en) | 2016-03-15 |
TWI494728B (zh) | 2015-08-01 |
CN103348297A (zh) | 2013-10-09 |
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