JP6027452B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP6027452B2 JP6027452B2 JP2013018754A JP2013018754A JP6027452B2 JP 6027452 B2 JP6027452 B2 JP 6027452B2 JP 2013018754 A JP2013018754 A JP 2013018754A JP 2013018754 A JP2013018754 A JP 2013018754A JP 6027452 B2 JP6027452 B2 JP 6027452B2
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Description
ボンディングパッド付近の断面において、第一金属膜132は、層間絶縁膜131の上に設けられ、層間絶縁膜133が、第一金属膜132を覆うように設けられる。既知のフォトリソグラフィーおよびエッチングもしくはCMP技術により、金属プラグ134は、第一金属膜132の上に配置形成される。第二金属膜135は、金属プラグ134を介して第一金属膜132と接続するように、且つ第一金属膜132の上方に設けられる。保護膜136は、第二金属膜135の上に開口部を有する。また、保護膜136は、保護膜136の開口部以外で第二金属膜135を覆う。
まず、ボンディングパッドを有する半導体装置において、第一層間絶縁膜上の第一金属膜と、前記第一金属膜上の第二層間絶縁膜と、前記第二層間絶縁膜を貫通して形成された金属プラグと、前記第二層間絶縁膜上に前記金属プラグを介して電気的に接続して設けられた第二金属膜と、を備え、前記金属プラグは大径の第一金属プラグと小径の第二金属プラグからなり、前記第一金属プラグ直上の前記第二金属膜の表面には凹部があることを特徴とする半導体装置とした。
また、前記第二金属プラグが前記ボンディングパッド領域外に配置されていることを特徴とする半導体装置とした。
また、前記第二金属プラグが前記ボンディングパッド領域内に配置されていることを特徴とする半導体装置とした。
また、前記第一金属プラグと前記第二金属プラグとが、前記ボンディングパッド領域内で交互に配置されていることを特徴とする半導体装置とした。
また、前記金属プラグは、ボンディングパッドの角部方向を除き、同心円状に配置されていることを特徴とする半導体装置とした。
また、前記金属プラグは、うずまき状に配置されていることを特徴とする半導体装置とした。
また、前記金属プラグは、前記ボンディングパッドの中央部に円形配置され、さらに、その外側にうずまき状に配置されていることを特徴とする半導体装置とした。
そして、前記金属プラグは、複数の金属プラグを集合して台形の領域としたものがボンディングパッドの四辺に沿って4つ配置されていることを特徴とする半導体装置とした。
まず、ボンディングパッドを有する半導体装置の基本構造について説明する。図1は、本発明の半導体装置を示す平面図と断面図である。
図2(a)は、本発明の半導体装置にプローブ針200が第二金属膜15に接触している状態を図示したものである。プローブ針200はボンディングパッドとの電気的接触を高めるためにある程度の加重をかけて第二金属膜15の表面を滑らせるが、本発明の半導体装置では表面に凹部があり、この凹部にプローブ針200の先端が嵌まり込んで停止する。この領域に加えられた応力は直下の大径金属プラグ14bを伝播して第一金属膜12に分散することになる。したがって、第二層間絶縁膜13に過度の応力が加わりクラックが生じることを防止できる。
[変形例1]図3(a)は、ボンディングパッドに大径金属プラグ14bのみを配置した半導体装置の平面図である。図1(a)では、小径金属プラグ14aと、それよりも断面直径が大きい大径金属プラグ14bが正格子の交点を交互に占めるように配置したが、本変形例ではすべての交点を大径金属プラグ14bで占める配置とした。このような構成とすることでボンディングパッド領域内の凹部の数が多くなり、応力緩和力が増え、ボンディングパッド下への衝撃を、より減少することができる。図3(b)も大径金属プラグ14bのみを配置した半導体装置の平面図である。図3(a)との違いは、奇数行の大径金属プラグ14bと偶数行の大径金属プラグ14bがずれて配置されている点である。言い換えれば、大径金属プラグ14bは千鳥状に配置された形状となっている。このように、ボンディングパッド領域は大径金属プラグ14bのみが配置されているが、ボンディングパッド領域外は第二金属膜15と同層の金属配線と下層の金属配線とが小径金属プラグ14aのみで電気的に接続されている。
13 第二層間絶縁膜
12 第一金属膜
14a 大径金属プラグ
14b 小径金属プラグ
15 第二金属膜
16 保護膜
17 凹部
18 ボンディングパッド(開口領域)
131 第一層間絶縁膜
133 第二層間絶縁膜
132 第一金属膜
134 小径金属プラグ
135 第二金属膜
136 保護膜
137 クラック
200 プローブ針
300 ボンディングボール
Claims (7)
- ボンディングパッドを有する半導体装置であって、
第一層間絶縁膜上の第一金属膜と、
前記第一金属膜上の第二層間絶縁膜と、
前記第二層間絶縁膜を貫通して形成された金属プラグと、
前記第二層間絶縁膜上に前記金属プラグを介して電気的に接続して設けられた第二金属膜からなる前記ボンディングパッドと、
を備え、
前記金属プラグは大径の第一金属プラグを含み、前記第一金属プラグに前記第二金属膜が入り込むことで、前記第一金属プラグ直上の前記ボンディングパッドの表面には凹部が形成されており、前記金属プラグは、前記ボンディングパッドの角部方向を除き、前記ボンディングパッド領域内で同心円状に配置されていることを特徴とする半導体装置。 - ボンディングパッドを有する半導体装置であって、
第一層間絶縁膜上の第一金属膜と、
前記第一金属膜上の第二層間絶縁膜と、
前記第二層間絶縁膜を貫通して形成された金属プラグと、
前記第二層間絶縁膜上に前記金属プラグを介して電気的に接続して設けられた第二金属膜からなる前記ボンディングパッドと、
を備え、
前記金属プラグは大径の第一金属プラグを含み、前記第一金属プラグに前記第二金属膜が入り込むことで、前記第一金属プラグ直上の前記ボンディングパッドの表面には凹部が形成されており、前記金属プラグは、前記ボンディングパッドの中央部に円形配置され、さらに、その外側にうずまき状に配置されていることを特徴とする半導体装置。 - ボンディングパッドを有する半導体装置であって、
第一層間絶縁膜上の第一金属膜と、
前記第一金属膜上の第二層間絶縁膜と、
前記第二層間絶縁膜を貫通して形成された金属プラグと、
前記第二層間絶縁膜上に前記金属プラグを介して電気的に接続して設けられた第二金属膜からなる前記ボンディングパッドと、
を備え、
前記金属プラグは大径の第一金属プラグを含み、前記第一金属プラグに前記第二金属膜が入り込むことで、前記第一金属プラグ直上の前記ボンディングパッドの表面には凹部が形成されており、前記金属プラグは、前記金属プラグを複数集合して台形の領域としたものが、前記ボンディングパッド領域内で、前記ボンディングパッドの四辺に沿って4つ配置されていることを特徴とする半導体装置。 - 前記金属プラグは、さらに、前記第一金属プラグよりも径の小さい小径の第二金属プラグを含んでいることを特徴とする請求項1乃至3の何れか1項に記載の半導体装置。
- 前記第一金属プラグは、高融点金属膜と前記第二金属膜からなり、第二金属プラグは高融点金属膜のみからなり、前記第二金属プラグ直上の前記第二金属膜の表面は平坦であることを特徴とする請求項4記載の半導体装置。
- 前記第二金属プラグが前記ボンディングパッド領域外に配置されていることを特徴とする請求項4あるいは5に記載の半導体装置。
- 前記第一金属プラグと前記第二金属プラグとが、前記ボンディングパッド領域内で交互に配置されていることを特徴とする請求項4乃至6のいずれか1項に記載の半導体装置。
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JP2013018754A JP6027452B2 (ja) | 2013-02-01 | 2013-02-01 | 半導体装置 |
EP14746692.4A EP2953159A4 (en) | 2013-02-01 | 2014-01-09 | SEMICONDUCTOR COMPONENT |
PCT/JP2014/050192 WO2014119348A1 (ja) | 2013-02-01 | 2014-01-09 | 半導体装置 |
US14/762,497 US9412710B2 (en) | 2013-02-01 | 2014-01-09 | Semiconductor device |
KR1020157020908A KR102145168B1 (ko) | 2013-02-01 | 2014-01-09 | 반도체 장치 |
CN201480007251.0A CN104969334B (zh) | 2013-02-01 | 2014-01-09 | 半导体装置 |
TW103101421A TWI604581B (zh) | 2013-02-01 | 2014-01-15 | 半導體裝置 |
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CN105489582B (zh) * | 2015-12-29 | 2018-09-28 | 苏州晶方半导体科技股份有限公司 | 半导体芯片及其形成方法 |
US20190074258A1 (en) * | 2015-12-29 | 2019-03-07 | China Wafer Level Csp Co., Ltd. | Solder pad, semiconductor chip comprising solder pad, and forming method therefor |
CN108666287B (zh) * | 2017-04-01 | 2020-07-28 | 中芯国际集成电路制造(北京)有限公司 | 一种焊盘结构 |
CN109422234B (zh) * | 2017-09-01 | 2021-04-09 | 中芯国际集成电路制造(上海)有限公司 | 测试结构及其制造方法 |
CN111863787B (zh) * | 2019-04-29 | 2022-05-24 | 群创光电股份有限公司 | 电子装置 |
CN110310920A (zh) * | 2019-07-03 | 2019-10-08 | 上海华虹宏力半导体制造有限公司 | 半导体器件及其制作方法 |
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US5248903A (en) * | 1992-09-18 | 1993-09-28 | Lsi Logic Corporation | Composite bond pads for semiconductor devices |
US6300688B1 (en) * | 1994-12-07 | 2001-10-09 | Quicklogic Corporation | Bond pad having vias usable with antifuse process technology |
US5665996A (en) * | 1994-12-30 | 1997-09-09 | Siliconix Incorporated | Vertical power mosfet having thick metal layer to reduce distributed resistance |
JPH08293523A (ja) * | 1995-02-21 | 1996-11-05 | Seiko Epson Corp | 半導体装置およびその製造方法 |
US6110816A (en) * | 1999-03-05 | 2000-08-29 | Taiwan Semiconductor Manufacturing Company | Method for improving bondability for deep-submicron integrated circuit package |
JP2002118268A (ja) * | 2000-10-10 | 2002-04-19 | Matsushita Electric Ind Co Ltd | 半導体素子および半導体素子への結線方法 |
KR100437460B1 (ko) * | 2001-12-03 | 2004-06-23 | 삼성전자주식회사 | 본딩패드들을 갖는 반도체소자 및 그 제조방법 |
JP2003347351A (ja) * | 2002-05-29 | 2003-12-05 | Mitsubishi Electric Corp | 半導体装置 |
JP3970150B2 (ja) * | 2002-10-16 | 2007-09-05 | 三洋電機株式会社 | ボンディングパッド及びその形成方法 |
JP4092214B2 (ja) | 2003-01-16 | 2008-05-28 | Necエレクトロニクス株式会社 | 半導体装置 |
JP2005116562A (ja) * | 2003-10-02 | 2005-04-28 | Renesas Technology Corp | 半導体装置 |
JP4674522B2 (ja) * | 2004-11-11 | 2011-04-20 | 株式会社デンソー | 半導体装置 |
KR20080067129A (ko) * | 2007-01-15 | 2008-07-18 | 삼성전자주식회사 | 다층 패드를 갖는 반도체 소자 |
JP5329068B2 (ja) * | 2007-10-22 | 2013-10-30 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
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JP2012195328A (ja) * | 2011-03-15 | 2012-10-11 | Panasonic Corp | 半導体装置およびその製造方法 |
US8994181B2 (en) * | 2011-08-18 | 2015-03-31 | Taiwan Semiconductor Manufacturing Company, Ltd. | Bond pad structure to reduce bond pad corrosion |
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JP2014150190A (ja) | 2014-08-21 |
CN104969334B (zh) | 2017-06-16 |
EP2953159A1 (en) | 2015-12-09 |
US9412710B2 (en) | 2016-08-09 |
EP2953159A4 (en) | 2016-11-09 |
TW201438167A (zh) | 2014-10-01 |
KR102145168B1 (ko) | 2020-08-18 |
CN104969334A (zh) | 2015-10-07 |
WO2014119348A1 (ja) | 2014-08-07 |
TWI604581B (zh) | 2017-11-01 |
KR20150112990A (ko) | 2015-10-07 |
US20150357297A1 (en) | 2015-12-10 |
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