JP5683049B2 - Method for manufacturing semiconductor device - Google Patents

Description

The present invention relates to a semiconductor device using an oxide semiconductor and a manufacturing method thereof.

Note that in this specification, a semiconductor device refers to all devices that can function by utilizing semiconductor characteristics, and electro-optical devices such as display devices, semiconductor circuits, and electronic devices are all semiconductor devices.

A light-transmitting metal oxide is used in a semiconductor device. For example, a metal oxide (hereinafter referred to as an oxide conductor) having conductivity such as indium tin oxide (ITO) is applied as a transparent electrode material required for a display device such as a liquid crystal display.

In addition, a metal oxide having a light-transmitting property has attracted attention as a material exhibiting semiconductor characteristics. For example, an In—Ga—Zn—O-based oxide or the like is expected to be applied to a semiconductor material required for a display device such as a liquid crystal display. In particular, a thin film transistor (hereinafter referred to as T
It is expected to be applied to the channel layer of FT).

A TFT to which a metal oxide having semiconductor characteristics (hereinafter referred to as an oxide semiconductor) is applied can be manufactured by a low-temperature process. Therefore, the expectation as a material which substitutes or surpasses the amorphous silicon used by a display apparatus etc. is increasing.

In addition, both the oxide conductor and the oxide semiconductor have a light-transmitting property. Therefore, a TFT having a light-transmitting property can be manufactured by using these to form a TFT (see Non-Patent Document 1, for example).

A TFT using an oxide semiconductor has high field effect mobility. Therefore, the TFT
A drive circuit such as a display device can also be configured by using (see, for example, Non-Patent Document 2).

Tetsuo Nozawa "Transparent Circuit" Nikkei Electronics 2007.8.27 (no. 959) pp. 39-52 T. T. et al. Osada, 8 others, SID '09 DIGEST, pp. 184-187 (2009)

An object of one embodiment of the present invention is to reduce manufacturing cost of a semiconductor device.

An object of one embodiment of the present invention is to improve the aperture ratio of a semiconductor device.

An object of one embodiment of the present invention is to increase the definition of a display portion of a semiconductor device.

An object of one embodiment of the present invention is to provide a semiconductor device that can be driven at high speed.

One embodiment of the present invention includes a driver circuit portion and a display portion over the same substrate, and the driver circuit portion includes a metal source electrode (also referred to as a source electrode layer) and a drain electrode (also referred to as a drain electrode layer). And the channel layer is formed of an oxide semiconductor, and the driver circuit wiring is formed of metal. The display portion includes a source electrode and a drain electrode made of an oxide conductor. The display device includes a pixel TFT having a semiconductor layer formed of an oxide semiconductor and a display portion wiring formed of an oxide conductor.

Note that Non-Patent Document 1 discloses a specific TFT manufacturing process and other elements that constitute a display device (
For example, the structure of a capacitor element or the like is not disclosed. There is no description of manufacturing a driver circuit and a light-transmitting TFT over the same substrate.

In the semiconductor device of one embodiment of the present invention, a driver circuit portion including a driver circuit TFT and a display portion including a pixel TFT are manufactured over the same substrate. Therefore, the manufacturing cost of the semiconductor device can be reduced.

In addition, in the semiconductor device of one embodiment of the present invention, the display portion includes a pixel TFT in which a source electrode and a drain electrode are formed using an oxide conductor and a semiconductor layer is formed using an oxide semiconductor, and an oxide conductor. And display portion wiring configured. That is, in the semiconductor device, a region where the pixel TFT and the pixel wiring are formed can be an opening. Therefore, the aperture ratio of the semiconductor device can be improved.

In addition, in the semiconductor device of one embodiment of the present invention, the display portion includes a pixel TFT in which a source electrode and a drain electrode are formed using an oxide conductor and a semiconductor layer is formed using an oxide semiconductor, and an oxide conductor. And display portion wiring configured. That is, in the semiconductor device, the pixel size can be designed without being limited by the size of the pixel TFT. Therefore, the display portion of the semiconductor device can be made high definition.

The semiconductor device of one embodiment of the present invention includes a driver circuit TFT in which a source electrode and a drain electrode are formed of metal and a channel layer is formed of an oxide semiconductor in a driver circuit portion.
And a wiring for a driving circuit made of metal. That is, in the semiconductor device, a driver circuit is formed using a TFT that exhibits high field-effect mobility and a wiring with low resistance. Therefore, the semiconductor device can be a semiconductor device that can be driven at high speed.

As the oxide semiconductor used in this specification, a thin film represented by InMO ₃ (ZnO) _m (m> 0) is formed, and a thin film transistor using the thin film as an oxide semiconductor layer is manufactured. Note that M represents one metal element or a plurality of metal elements selected from Ga, Fe, Ni, Mn, and Co. For example, M may be Ga, and may contain the above metal elements other than Ga, such as Ga and Ni or Ga and Fe. In addition to the metal element contained as M, some of the above oxide semiconductors contain Fe, Ni, other transition metal elements, or oxides of the transition metal as impurity elements. In this specification, In
Among oxide semiconductor layers having a structure represented by MO ₃ (ZnO) _m (m> 0), M is Ga.
An oxide semiconductor having a structure containing In is referred to as an In—Ga—Zn—O-based oxide semiconductor, and a thin film thereof is referred to as I
Also referred to as an n-Ga-Zn-O-based non-single-crystal film.

In addition to the above, an In—Sn—Zn— oxide semiconductor applied to the oxide semiconductor layer
O-based, In-Al-Zn-O-based, Sn-Ga-Zn-O-based, Al-Ga-Zn-O-based, S
n-Al-Zn-O, In-Zn-O, Sn-Zn-O, Al-Zn-O, In
An —O-based, Sn—O-based, or Zn—O-based oxide semiconductor can be used. Further, silicon oxide may be included in the oxide semiconductor layer. Silicon oxide that inhibits crystallization in the oxide semiconductor layer (
By including SiOx (X> 0)), when heat treatment is performed after the formation of the oxide semiconductor layer in the manufacturing process, crystallization can be suppressed. Note that the oxide semiconductor layer is preferably in an amorphous state and may be partially crystallized.

The oxide semiconductor is preferably an oxide semiconductor containing In, and more preferably an oxide semiconductor containing In and Ga. Since the oxide semiconductor layer is i-type (intrinsic), dehydration or dehydrogenation is effective.

In the case where heat treatment is performed in an inert gas atmosphere of nitrogen or a rare gas (such as argon or helium) or under reduced pressure, the oxide semiconductor layer becomes oxygen-deficient due to the heat treatment, which reduces resistance. The oxide semiconductor layer is made to be in an oxygen-excess state by forming an oxide insulating film in contact with the oxide semiconductor layer (N ^-type , etc.) and then increasing the resistance, that is, making it an I-type. ing. Thus, a semiconductor device including a thin film transistor with favorable electrical characteristics and high reliability can be manufactured and provided.

In dehydration or dehydrogenation, heat treatment is performed at 350 ° C. or higher, preferably 400 ° C. or higher and lower than the strain point of the substrate in an inert gas atmosphere of nitrogen or a rare gas (such as argon or helium) or under reduced pressure. Impurities such as moisture contained in the oxide semiconductor layer are reduced.

The conditions for dehydration or dehydrogenation are the temperature desorption gas analysis method (TDS: Thermal Desorption Spectroscopy) for the oxide semiconductor layer after dehydration or dehydrogenation.
(opy), the heat treatment conditions are such that two peaks of water, at least one peak appearing in the vicinity of 300 ° C., are not detected even if the measurement is performed up to 450 ° C. Therefore, even when a thin film transistor using a dehydrated or dehydrogenated oxide semiconductor layer is measured up to 450 ° C. by TDS, a peak of water appearing at least at about 300 ° C. is not detected.

Then, the oxide semiconductor layer is cooled from the heating temperature T at which dehydration or dehydrogenation is performed to the oxide semiconductor layer without being exposed to the atmosphere in the same furnace where dehydration or dehydrogenation is performed. It is important that water or hydrogen not be mixed again. Dehydration or dehydrogenation is performed to reduce the resistance of the oxide semiconductor layer, that is, N-type (N ⁻ , N ^+, etc.), and then the resistance is increased to make it an I-type oxide semiconductor layer. When a thin film transistor is manufactured, a threshold voltage value of the thin film transistor can be positive, and a so-called normally-off switching element can be realized. It is desirable for the semiconductor device (display device) that the channel is formed with a positive threshold voltage as close as possible to 0 V as the gate voltage of the thin film transistor. Note that if the threshold voltage value of the thin film transistor is negative, a so-called normally-on state in which a current flows between the source electrode and the drain electrode even when the gate voltage is 0 V is likely to occur. In an active matrix display device, the electrical characteristics of the thin film transistors constituting the circuit are important, and the electrical characteristics affect the performance of the display device. In particular, the threshold voltage (Vth) is important among the electrical characteristics of thin film transistors. Even if the field effect mobility is high, if the threshold voltage value is high or the threshold voltage value is negative, it is difficult to control the circuit. In the case of a thin film transistor having a high threshold voltage value and a large absolute value of the threshold voltage, the switching function as the TFT cannot be achieved in a state where the drive voltage is low, which may cause a load. In the case of an n-channel thin film transistor, a transistor in which a channel is formed and drain current flows only after a positive voltage is applied to the gate voltage is desirable. A transistor in which a channel is not formed unless the driving voltage is increased or a transistor in which a channel is formed and a drain current flows even in a negative voltage state is not suitable as a thin film transistor used in a circuit.

Further, the gas atmosphere lowered from the heating temperature T may be switched to a gas atmosphere different from the gas atmosphere heated up to the heating temperature T. For example, without exposing to the atmosphere in the same furnace where dehydration or dehydrogenation is performed, the inside of the furnace is highly purified oxygen gas or N ₂ O gas, ultra-dry air (dew point is −40 ° C. or lower, preferably − 60 ° C. or less) and cooling is performed.

After the moisture content in the film is reduced by heat treatment for dehydration or dehydrogenation, it is gradually cooled (or cooled) in an atmosphere that does not contain moisture (dew point is −40 ° C. or lower, preferably −60 ° C. or lower).
By using the oxide semiconductor film, the electrical characteristics of the thin film transistor are improved, and a thin film transistor having both mass productivity and high performance is realized.

In this specification, under an inert gas atmosphere of nitrogen or a rare gas (such as argon or helium),
Alternatively, heat treatment under reduced pressure is referred to as heat treatment for dehydration or dehydrogenation. In this specification, it is not called dehydrogenation only that it is desorbed as H ₂ by this heat treatment, and dehydration or dehydrogenation including desorption of H, OH, etc. It will be called for convenience.

In the case where heat treatment is performed in an inert gas atmosphere of nitrogen or a rare gas (such as argon or helium) or under reduced pressure, the oxide semiconductor layer becomes oxygen-deficient due to the heat treatment, which reduces resistance. -type (N ^- reduction, etc.) make. Thereafter, a region overlapping with the drain electrode layer is formed as an oxygen-deficient high-resistance drain region (also referred to as an HRD region).

Specifically, the carrier concentration of the high-resistance drain region is in a range of 1 × 10 ¹⁷ / cm ³ or more, and at least higher than the carrier concentration of the channel formation region (less than 1 × 10 ¹⁷ / cm ³ ). is there. The carrier concentration in the present specification refers to the value of the carrier concentration obtained from the Hall effect measurement at room temperature.

Further, a low resistance drain region (L) is formed between the oxide semiconductor layer and the drain electrode layer made of a metal material.
(Also referred to as an RN region). Specifically, the carrier concentration of the low-resistance drain region is higher than that of the high-resistance drain region (HRD region), and is in the range of, for example, 1 × 10 ²⁰ / cm ³ or more and 1 × 10 ²¹ / cm ³ or less.

Then, at least part of the oxide semiconductor layer that has been dehydrated or dehydrogenated is in an oxygen-excess state, so that the resistance is increased, that is, the channel formation region is formed. Note that as the treatment for bringing the dehydrated or dehydrogenated oxide semiconductor layer into an oxygen-excess state, an oxide insulating film in contact with the dehydrated or dehydrogenated oxide semiconductor layer is formed by a sputtering method, or Heat treatment after forming the oxide insulating film, heat treatment in an atmosphere containing oxygen after forming the oxide insulating film, or heating in an inert gas atmosphere after forming the oxide insulating film and then in an oxygen atmosphere After cooling or heating in an inert gas atmosphere after the oxide insulating film is formed, ultra-dry air (dew point-
40 ° C. or lower, preferably −60 ° C. or lower).

In addition, since at least a part of the dehydrated or dehydrogenated oxide semiconductor layer (a portion overlapping with the gate electrode layer) is used as a channel formation region, a high oxygen resistance state can be obtained by selective oxygen excess. It can also be made I-type. A source electrode layer or a drain electrode layer made of a metal electrode such as Ti is formed on and in contact with the dehydrated or dehydrogenated oxide semiconductor layer, and an exposed region that does not overlap with the source electrode layer or the drain electrode layer is selectively oxygenated. A channel formation region can be formed as an excessive state. When the oxygen-excess state is selectively formed, a first high-resistance drain region that overlaps the source electrode layer and a second high-resistance drain region that overlaps the drain electrode layer are formed, and the first high-resistance drain region and A region between the second high-resistance drain region is a channel formation region. That is, a channel formation region is formed in a self-aligned manner between the source electrode layer and the drain electrode layer.

Thus, a semiconductor device including a thin film transistor with favorable electrical characteristics and high reliability can be manufactured and provided.

Note that by forming the high-resistance drain region in the oxide semiconductor layer overlapping with the drain electrode layer (and the source electrode layer), reliability when the driver circuit is formed can be improved. Specifically, by forming the high resistance drain region, a structure in which the conductivity can be changed stepwise from the drain electrode layer to the high resistance drain region and the channel formation region can be obtained. Therefore, when the drain electrode layer is operated by being connected to a wiring that supplies the high power supply potential VDD, even if a high electric field is applied between the gate electrode layer and the drain electrode layer, the high resistance drain region becomes a buffer and is locally A high electric field is not applied, and the withstand voltage of the transistor can be improved.

A low-resistance drain region (also referred to as an LRN region) may be formed between the drain electrode layer (and the source electrode layer) made of a metal material and the oxide semiconductor layer, and the low-resistance drain region (L
By forming the RN region, a structure in which the withstand voltage of the transistor is further improved can be obtained.

In addition, by forming the high-resistance drain region in the oxide semiconductor layer overlapping with the drain electrode layer (and the source electrode layer), leakage current in the channel formation region when the driver circuit is formed can be reduced. . Specifically, by forming the high-resistance drain region, the drain electrode layer, the high-resistance drain region on the drain electrode layer side, the channel as a path of the leakage current of the transistor flowing between the drain electrode layer and the source electrode layer The formation region, the high resistance drain region on the source electrode layer side, and the source electrode layer are arranged in this order. At this time, in the channel formation region,
Leakage current flowing from the low resistance N-type region on the drain electrode layer side to the channel region can be concentrated in the vicinity of the interface between the gate insulating layer and the channel formation region that becomes high resistance when the transistor is turned off. Leakage current at a part of the surface of the channel formation region away from the layer can be reduced.

In addition, a first high-resistance drain region overlapping the source electrode layer and a second high-resistance drain region overlapping the drain electrode layer
Depending on the width of the gate electrode layer, the high resistance drain region overlaps with part of the gate electrode layer through the gate insulating layer, and more effectively relaxes the electric field strength near the end of the drain electrode layer. Can do.

That is, a semiconductor device which is one embodiment of the present invention includes a driver circuit including a first thin film transistor and a pixel portion including a second thin film transistor over the same substrate. The second thin film transistor includes a bottom gate electrode on the substrate, a gate insulating layer on the bottom gate electrode, an oxide semiconductor layer on the gate insulating layer, and a second channel protective layer in contact with part of the oxide semiconductor layer A source electrode and a drain electrode on the second channel protective layer and the oxide semiconductor layer, and a pixel electrode layer on the second channel protective layer. Further, the bottom gate electrode, the gate insulating layer, the oxide semiconductor layer, the source electrode, the drain electrode, the second channel protective layer, and the pixel electrode layer of the second thin film transistor have a light-transmitting property. Further, the source electrode and the drain electrode of the first thin film transistor are different from the source electrode and the drain electrode of the second thin film transistor, and are a conductive material having a lower resistance than the source electrode and the drain electrode of the second thin film transistor. It is characterized by.

According to one embodiment of the present invention, in the above semiconductor device, the first thin film transistor includes the first thin film transistor.
A semiconductor device including: a first channel protective layer in contact with part of an oxide semiconductor layer of the thin film transistor; and a source electrode and a drain electrode over the first channel protective layer and the oxide semiconductor layer.

According to one embodiment of the present invention, in the above semiconductor device, the first thin film transistor includes the first thin film transistor.
The first channel protective layer is in contact with part of the oxide semiconductor layer of the thin film transistor, and the source electrode and the drain electrode are provided over the first channel protective layer and the oxide semiconductor layer. The semiconductor device further includes a back gate electrode over the channel formation region with a first channel protective layer interposed therebetween.

Another embodiment of the present invention is a semiconductor device in which in the above semiconductor device, the first channel protective layer and the second channel protective layer are insulating materials having the same light-transmitting property.

According to one embodiment of the present invention, in the above semiconductor device, a source electrode and a drain electrode of the first thin film transistor mainly include an element selected from Al, Cr, Cu, Ta, Ti, Mo, and W. It is a semiconductor device characterized by comprising a film or a laminated film combining these alloy films.

Another embodiment of the present invention is the above semiconductor device, wherein the source electrode layer, the drain electrode layer, and the pixel electrode layer of the second thin film transistor include indium oxide, an indium tin oxide alloy, an indium zinc oxide alloy, Alternatively, the semiconductor device is zinc oxide.

Another embodiment of the present invention is the above semiconductor device, further including a capacitor portion over the same substrate, the capacitor portion including a capacitor wiring and a capacitor electrode overlapping with the capacitor wiring. It is a light-transmitting semiconductor device.

A thin film transistor having stable electrical characteristics can be manufactured and provided. Therefore,
A semiconductor device including a thin film transistor with favorable electric characteristics and high reliability can be provided.

4A and 4B illustrate a thin film transistor. 10A and 10B illustrate a method for manufacturing a thin film transistor. 10A and 10B illustrate a method for manufacturing a thin film transistor. 4A and 4B illustrate a thin film transistor. 10A and 10B illustrate a method for manufacturing a thin film transistor. 10A and 10B illustrate a method for manufacturing a thin film transistor. 4A and 4B illustrate a thin film transistor. 4A and 4B illustrate a thin film transistor. 6A and 6B illustrate a semiconductor device. 6A and 6B illustrate a semiconductor device. 6A and 6B illustrate a semiconductor device. FIG. 10 illustrates a display device. FIG. 10 illustrates a display device. 6A and 6B illustrate a pixel equivalent circuit of a semiconductor device. FIG. 10 illustrates a display device. FIG. 10 illustrates a block diagram of a semiconductor device. FIG. 10 illustrates a display device. FIG. 10 illustrates a display device. FIG. 10 illustrates a display device. FIG. 10 illustrates a display device. FIG. 10 illustrates a display device. An external view showing an example of an electronic book. FIG. 6 is an external view illustrating an example of a television device and a digital photo frame. An external view showing an example of a gaming machine. The external view which shows an example of a portable computer and a mobile telephone. 6A and 6B illustrate a semiconductor device. 6A and 6B illustrate a semiconductor device. 6A and 6B illustrate a semiconductor device. 6A and 6B illustrate a semiconductor device. 6A and 6B illustrate a semiconductor device. 6A and 6B illustrate a semiconductor device. 6A and 6B illustrate a semiconductor device. 6A and 6B illustrate a semiconductor device. 6A and 6B illustrate a semiconductor device. 6A and 6B illustrate a semiconductor device. 6A and 6B illustrate a semiconductor device. 6A and 6B illustrate a semiconductor device. 6A and 6B illustrate a semiconductor device. 6A and 6B illustrate a semiconductor device. 6A and 6B illustrate a semiconductor device.

Embodiments will be described in detail with reference to the drawings. However, the present invention is not limited to the following description, and it is easily understood by those skilled in the art that modes and details can be variously changed without departing from the spirit and scope of the present invention. Therefore, the present invention should not be construed as being limited to the description of the embodiments below. Note that in structures of the invention described below, the same portions or portions having similar functions are denoted by the same reference numerals in different drawings, and description thereof is not repeated.

(Embodiment 1)
In this embodiment, a thin film transistor which is one embodiment of the present invention and a manufacturing method thereof will be described.

FIG. 1A is a cross-sectional view of thin film transistors 141 and 142 which are one embodiment of the present invention. The thin film transistors 141 and 142 are formed on the same substrate 100, and both are bottom gate thin film transistors. The thin film transistor 141 is disposed in the driver circuit, and the thin film transistor 142 is disposed in the pixel.

FIG. 1C1 is a plan view of a channel stop thin film transistor 141 provided in a driver circuit, and FIG. 1A is a cross-sectional view taken along line C1-C2 in FIG. FIG. 1B is a cross-sectional view taken along line C3-C4 in FIG.

1C2 is a plan view of a channel stop thin film transistor 142 provided in a pixel, and FIG. 1A is a cross-sectional view taken along line D1-D2 in FIG. 1C2. Also,
FIG. 1B is a cross-sectional view taken along line D3-D4 in FIG.

The thin film transistor 141 includes a first bottom gate electrode 111 provided over the substrate 100,
Gate insulating film 102, third oxide semiconductor layer 113c, and fourth oxide semiconductor region 113
an oxide semiconductor layer 113 made of d; a first channel protective layer 116; and a source electrode and a drain electrode. The source electrode and the drain electrode are first electrodes that transmit visible light.
A conductive layer in which a second conductive layer 115a is stacked on the conductive layer 114a, and a first layer that transmits visible light.
The conductive layer is formed using a conductive layer in which a second conductive layer 115b is stacked over the conductive layer 114b.
Further, the first protective insulating film 107, the second protective insulating film 108, and the second protective insulating film 108 which are in contact with and cover the first channel protective layer 116, and a third oxide A back gate electrode 129 overlapping with the semiconductor layer 113c is provided.

Note that a low-resistance fourth oxide semiconductor region 1 in contact with the lower surfaces of the source electrode and the drain electrode
13d is formed in a self-aligned manner with respect to the channel protective layer. The thin film transistor 141 described in this embodiment is one embodiment of a channel stop type.

In a liquid crystal display device, when a pixel portion and a driver circuit are formed over the same substrate, a thin film transistor, a sense amplifier, a constant voltage, or the like that forms a logic gate such as an inverter circuit, a NAND circuit, a NOR circuit, or a latch circuit in the driver circuit. In a thin film transistor forming an analog circuit such as a generation circuit or a VCO, only positive polarity or only negative polarity is applied between a source electrode and a drain electrode. Therefore, the width of one fourth oxide semiconductor region 113d requiring a breakdown voltage may be designed wider than the width of the other fourth oxide semiconductor region 113d. Further, the width in which the fourth oxide semiconductor region 113d overlaps with the bottom gate electrode may be increased.

Although the thin film transistor 141 provided in the driver circuit is described using a single-gate thin film transistor, a multi-gate thin film transistor including a plurality of channel formation regions can be formed as needed.

Further, a back gate electrode 129 is provided over the oxide semiconductor layer 113. By electrically connecting the back gate electrode 129 to the bottom gate electrode 111 and setting the same potential, a gate voltage is applied to the oxide semiconductor layer 113 disposed between the bottom gate electrode 111 and the back gate electrode 129 from above and below. can do. Further, when the bottom gate electrode 111 and the back gate electrode 129 are set to different potentials, for example, a fixed potential, GND, and 0 V, the electrical characteristics of the TFT, for example, the threshold voltage can be controlled. Note that in this specification, a conductive layer formed over the oxide semiconductor layer 113 is referred to as a back gate electrode 129 regardless of its potential. Therefore, the back gate electrode 129 may be in a floating state.

The first protective insulating film 107 is provided between the back gate electrode 129 and the oxide semiconductor layer 113.
And a second protective insulating film 108 are stacked.

The thin film transistor 142 includes a second bottom gate electrode 211 provided over the substrate 100,
Gate insulating film 102, third oxide semiconductor layer 213c, and fourth oxide semiconductor region 213
an oxide semiconductor layer 213 made of d; a second channel protective layer 216; and source and drain electrodes (214a, 214b). Further, a first protective insulating film 107 and a second protective insulating film 108 which are in contact with and cover the second channel protective layer 216 are provided.

Note that the low-resistance fourth oxide semiconductor region 2 in contact with the lower surfaces of the source electrode and the drain electrode
13d is formed in a self-aligning manner. The thin film transistor 142 described in this embodiment is one embodiment of a channel stop type. Note that a pixel electrode 128 which overlaps with the thin film transistor 142 is provided over the second protective insulating film 108.

However, the liquid crystal display device is AC driven to prevent deterioration of the liquid crystal. By this AC driving, the polarity of the signal potential applied to the pixel electrode layer is inverted to a positive polarity or a negative polarity at regular intervals. In the TFT connected to the pixel electrode layer, a pair of electrodes alternately serve as a source electrode and a drain electrode. In this specification, for convenience, one of the electrodes of the thin film transistor of the pixel is referred to as a source electrode and the other is referred to as a drain electrode. Functions as an electrode. In order to reduce leakage current, the width of the second bottom gate electrode of the thin film transistor 142 provided in the pixel may be narrower than the width of the first bottom gate electrode of the thin film transistor 141 of the driver circuit. In order to reduce leakage current, the bottom gate electrode of the thin film transistor 142 provided in the pixel may be designed so as not to overlap with the source electrode or the drain electrode.

Although the thin film transistor 142 provided in the pixel is described using a single-gate thin film transistor, a multi-gate thin film transistor including a plurality of channel formation regions can be formed as needed.

The thin film transistor 142 includes a third oxide semiconductor layer 213c that transmits visible light, a second bottom gate electrode 211 that uses a conductive film that transmits visible light, and source and drain electrodes (214a and 214b). A substrate 100 that transmits visible light, a second channel protective layer 216 that transmits visible light, a first protective insulating film 107, and a second protective insulating film 10.
8 is used. Therefore, the thin film transistor 142 is a so-called transparent transistor that transmits visible light.

2 and 3 are cross-sectional views illustrating manufacturing steps of the thin film transistors 141 and 142. FIG.

The substrate 100 transmits visible light and has an insulating surface. Specifically, glass substrates used in the electronics industry such as aluminosilicate glass, aluminoborosilicate glass, and barium borosilicate glass (also called “alkali-free glass substrate”), heat resistance that can withstand the processing temperature of this manufacturing process A plastic substrate having properties can be used. When the substrate 100 having an insulating surface is mother glass, the first generation (320 mm × 400 mm), the second generation (400
mm x 500 mm), 3rd generation (550 mm x 650 mm), 4th generation (680 mm x 8)
80mm, or 730mm x 920mm), 5th generation (1000mm x 1200mm or 1100mm x 1250mm), 6th generation 1500mm x 1800mm, 7th generation (1900mm x 2200mm), 8th generation (2160mm x 2460mm), 9th generation (2400mm x 2800mm, 2450mm x 3050mm), 10th generation (2950
(mm * 3400mm) etc. can be used.

Further, a base insulating layer may be provided between the substrate 100 and the first bottom gate electrode 111 and between the substrate 100 and the second bottom gate electrode 211. The base insulating layer may be formed of an insulating film that prevents the impurity element (for example, sodium) from diffusing from the substrate 100 to the thin film transistor, and is selected from, for example, silicon nitride, silicon oxide, silicon nitride oxide, or silicon oxynitride. Further, it can be formed by laminating with one or a plurality of films.

A first bottom gate electrode 111 and a second bottom gate electrode 211 are provided over a substrate 100 having an insulating surface. First bottom gate electrode 111 and second bottom gate electrode 211
Is formed using a conductive film that transmits visible light.

The first bottom gate electrode 111 and the second bottom gate electrode 211 are light-transmitting conductive materials such as indium oxide containing tungsten oxide, indium zinc oxide containing tungsten oxide, and indium containing titanium oxide. Oxide, indium tin oxide containing titanium oxide, indium tin oxide (hereinafter referred to as ITO), indium zinc oxide, indium tin oxide added with silicon oxide, In-Sn-Zn-O system, In -Al-Zn-
O-based, Sn-Ga-Zn-O-based, Al-Ga-Zn-O-based, Sn-Al-Zn-O-based, S
A light-transmitting conductive material such as n-Zn-O-based, Al-Zn-O-based, In-O-based, Sn-O-based, or Zn-O is used, and the film thickness is in the range of 50 nm to 300 nm. And appropriately selected.

In addition, for example, In (indium), Ga (
Oxide semiconductor target (In ₂ O ₃ : Ga ₂ O) containing gallium) and Zn (zinc)
₃ : ZnO = 1: 1: 1 (molar ratio)), an oxynitride film containing indium, gallium, and zinc, an Al—Zn—O-based non-single-crystal film, or containing nitrogen. Alternatively, an Al—Zn—O-based non-single-crystal film, that is, an Al—Zn—O—N-based non-single-crystal film (also referred to as an AZON film) may be used.

As a method for forming a light-transmitting conductive film, a sputtering method or a vacuum evaporation method (such as an electron beam evaporation method) is used.
Or, arc discharge ion plating method or spray method is used. Further, when using the sputtering method, film formation is performed using a target containing SiO _{2 in an amount} of 2 wt% to 10 wt%,
SiOx (X> 0) that inhibits crystallization is included in the light-transmitting conductive film so that crystallization is prevented during heat treatment for dehydration or dehydrogenation performed in a later step. It is preferable.

The wiring layer including the first bottom gate electrode 111 may be formed using a conductive material that transmits visible light, like the second bottom gate electrode 211, but has heat resistance such as molybdenum and tungsten. A metal material or an alloy material containing these as a main component may be used to form a single layer or a stacked layer.

The wiring layer including the first bottom gate electrode 111 is preferably formed using the same conductive film as the second bottom gate electrode 211 because the number of steps can be reduced. In addition, it is preferable that the wiring layer including the first bottom gate electrode 111 be formed using a heat-resistant metal material or an alloy material containing these as a main component because wiring resistance can be reduced.

For example, when the wiring layer including the first bottom gate electrode 111 has a two-layer structure,
A two-layer structure in which a molybdenum layer is laminated on an aluminum layer, a two-layer structure in which a molybdenum layer is laminated on a copper layer, or a two-layer structure in which a titanium nitride layer or a tantalum nitride is laminated on a copper layer; A two-layer structure in which a molybdenum layer is stacked is preferable. In the case of a three-layer structure, a three-layer structure in which a tungsten layer or tungsten nitride, an alloy of aluminum and silicon or an alloy of aluminum and titanium, and a titanium nitride or titanium layer is stacked is preferable.

In this embodiment, after a conductive film that transmits visible light is formed over the entire surface of the substrate 100, a first photolithography step is performed, a resist mask is formed over the conductive film, and unnecessary portions are removed by etching. Thus, a wiring and an electrode (a gate wiring including the first bottom gate electrode 111 and the second bottom gate electrode 211, a capacitor wiring, a terminal electrode, and the like) are formed.

Next, the gate insulating film 102 is formed over the first bottom gate electrode 111 and the second bottom gate electrode 211. In this embodiment mode, the gate insulating film 102 is formed using a single layer of silicon nitride.

The gate insulating film 102 can be formed using a single layer or stacked layers of silicon oxide, silicon nitride, silicon oxynitride, or silicon nitride oxide. Here, a silicon nitride film is used as a single layer.

As a method for forming the gate insulating film 102, for example, a plasma CVD method or a sputtering method can be used. When using the plasma CVD method, the source gas is S
A silicon oxynitride layer may be formed by a plasma CVD method using iH ₄ and one or both of oxygen and nitrogen. Alternatively, dinitrogen monoxide or the like may be used instead of oxygen and nitrogen.

Next, an oxide semiconductor film is formed over the gate insulating film 102.

An oxide semiconductor film includes an In—Ga—Zn—O-based non-single-crystal film, an In—Sn—Zn—O-based film, an In—
-Al-Zn-O-based, Sn-Ga-Zn-O-based, Al-Ga-Zn-O-based, Sn-Al-
Zn-O, In-Zn-O, Sn-Zn-O, Al-Zn-O, In-O, S
An n-O-based or Zn-O-based oxide semiconductor film is used. In this embodiment, In-Ga-Zn
A film is formed by a sputtering method using a -O-based oxide semiconductor target. The oxide semiconductor film can be formed by a sputtering method in a rare gas (typically argon) atmosphere, an oxygen atmosphere, or a rare gas (typically argon) and oxygen atmosphere. In the case of using a sputtering method, film formation is performed using a target containing 2 wt% or more and 10 wt% or less of SiO _2, and SiOx (X> 0) that inhibits crystallization is included in the oxide semiconductor film. It is preferable to suppress crystallization during the heat treatment for dehydration or dehydrogenation performed in this step.

Next, the oxide semiconductor film is processed into island-shaped first oxide semiconductor layers 113a and 213a by a second photolithography step (see FIG. 2A). Further, a resist mask for forming the island-shaped oxide semiconductor layer may be formed by an inkjet method. When the resist mask is formed by an ink-jet method, a manufacturing cost can be reduced because a photomask is not used.

Note that before the oxide semiconductor film is formed by a sputtering method, argon gas is introduced to generate plasma, and reverse sputtering is performed to remove dust or the like attached to the surface of the gate insulating film 102. .

Reverse sputtering is a method of modifying the surface by forming a plasma near the substrate by applying a voltage using an RF power source on the substrate side in an argon atmosphere without applying a voltage to the target side. Note that nitrogen, helium, oxygen, or the like may be used instead of the argon atmosphere.

Next, dehydration or dehydrogenation is performed on the first oxide semiconductor layers 113a and 213a. The temperature of the first heat treatment for dehydration or dehydrogenation is 350 ° C. or higher and lower than the strain point of the substrate, preferably 400 ° C. or higher. Here, a substrate is introduced into an electric furnace which is one of heat treatment apparatuses, and after heat treatment is performed on the oxide semiconductor layer in a nitrogen atmosphere, the oxide semiconductor layer is cooled without being exposed to the air. This prevents re-mixing of water and hydrogen into the oxide semiconductor layer. In this manner, second oxide semiconductor layers 113b and 213b are obtained (FIG. 2).
(See (B)).

In this embodiment, the same furnace is used from the heating temperature T at which the oxide semiconductor layer is dehydrated or dehydrogenated to a sufficient temperature so that water does not enter again. ℃
Slowly cool in a nitrogen atmosphere until the temperature drops. The dehydration or dehydrogenation is not limited to a nitrogen atmosphere, but is performed under an inert gas atmosphere such as helium, neon, or argon, or under reduced pressure.

Note that in the first heat treatment, it is preferable that water, hydrogen, or the like be not contained in nitrogen or a rare gas such as helium, neon, or argon. Or nitrogen introduced into the heat treatment apparatus,
Alternatively, the purity of a rare gas such as helium, neon, or argon is 6N (99.9999%) or more, preferably 7N (99.99999%) or more (that is, the impurity concentration is 1 ppm or less, preferably 0.1 ppm or less). It is preferable to do.

Depending on the conditions of the first heat treatment or the material of the oxide semiconductor layer, the material may crystallize into a microcrystalline film or a polycrystalline film.

The first heat treatment of the oxide semiconductor layer can be performed on the oxide semiconductor film before being processed into the island-shaped oxide semiconductor layer. In that case, after the first heat treatment, the substrate is taken out of the heating apparatus and a second photolithography step is performed.

In addition, before forming the oxide semiconductor film, an inert gas atmosphere (nitrogen, helium, neon,
An impurity such as hydrogen and water contained in the gate insulating layer may be removed by heat treatment (at 400 ° C. or higher and lower than the strain point of the substrate) in an oxygen atmosphere or under reduced pressure.

Next, an insulating film serving as a channel protective layer is formed in contact with the second oxide semiconductor layers 113b and 213b. The insulating film serving as a channel protective layer formed in contact with the second oxide semiconductor layers 113b and 213b is formed using an oxide insulating film and can have a thickness of at least 1 nm. Further, the oxide insulating film can be formed as appropriate by a method such as sputtering, in which an impurity such as water or hydrogen is not mixed into the oxide insulating film.

In this embodiment, a 300-nm-thick silicon oxide film is formed as the oxide insulating film by a sputtering method. The substrate temperature at the time of film formation may be from room temperature to 300 ° C., and is 100 ° C. in this embodiment. The silicon oxide film can be formed by a sputtering method in a rare gas (typically argon) atmosphere, an oxygen atmosphere, or a rare gas (typically argon) and oxygen atmosphere. Further, a silicon oxide target or a silicon target can be used as the target. For example, silicon oxide can be formed by a sputtering method in an oxygen and nitrogen atmosphere using a silicon target. The channel protective layer formed in contact with the low-resistance oxide semiconductor layer does not include impurities such as moisture, hydrogen ions, and OH ⁻ , and uses an inorganic insulating film that blocks entry of these from the outside. Typically, a silicon oxide film, a silicon nitride oxide film, an aluminum oxide film, an aluminum oxynitride film, or the like is used.

Next, a third photolithography step is performed, a resist mask is formed over the insulating film to be the channel protective layer, unnecessary portions are removed by etching, and the first channel protective layer 116 is removed.
And a second channel protective layer 216 is formed.

Next, a second heat treatment (preferably 200 ° C. or more and 400 ° C. or less, under an inert gas atmosphere,
For example, 250 ° C. or higher and 350 ° C. or lower) is performed (see FIG. 2C). For example, the second heat treatment is performed at 250 ° C. for 1 hour in a nitrogen atmosphere. When the second heat treatment is performed, part of the second oxide semiconductor layer 113b is heated in contact with the first channel protective layer 116, and part of the second oxide semiconductor layer 213b is second. The channel protective layer 216 is heated while being in contact therewith.
In addition, a region where the first channel protective layer 116 of the second oxide semiconductor layer 113b is not in contact with a region where the first channel protective layer 216 of the second oxide semiconductor layer 213b is not in contact is inactive. It is heated while exposed to a gas atmosphere.

Through the above steps, the oxide semiconductor film after film formation is subjected to heat treatment for dehydration or dehydrogenation to reduce resistance, and then the channel protection in contact with part of the oxide semiconductor film The layer is formed using an oxide insulating film, and a region overlapping with the channel protective layer is selectively brought into an oxygen-excess state. As a result, the channel formation region overlapping with the channel protective layer is i-type. In this specification, this I-type oxide semiconductor is referred to as a third oxide semiconductor. Accordingly, the second heat-treated second oxide semiconductor layer 113b in contact with the first channel protective layer 116 becomes the third oxide semiconductor layer 113c and is in contact with the second channel protective layer 216. The second oxide semiconductor layer 213b that has been subjected to the second heat treatment in the state becomes a third oxide semiconductor layer 213c.

On the other hand, the region where the first channel protective layer 116 of the second oxide semiconductor layer 113b is not in contact with the region where the first channel protective layer 216 of the second oxide semiconductor layer 213b is not in contact with each other. A high resistance drain region is formed in a consistent manner. In this specification, this high-resistance drain region is referred to as a fourth oxide semiconductor region. Therefore, the second oxide semiconductor layer 113b not in contact with the first channel protective layer 116 becomes the fourth oxide semiconductor region 113d, and the second oxide semiconductor layer not in contact with the second channel protective layer 216 is used. The layer 213b becomes the fourth oxide semiconductor region 213d.

Next, a conductive film that transmits visible light is formed over the gate insulating film 102 and the fourth oxide semiconductor regions 113d and 213d.

As a method for forming a light-transmitting conductive film, a sputtering method or a vacuum evaporation method (such as an electron beam evaporation method) is used.
Or, arc discharge ion plating method or spray method is used. As a material for the conductive film, a conductive material having a light-transmitting property with respect to visible light, for example, In—Sn—Zn—O-based, In—Al
-Zn-O system, Sn-Ga-Zn-O system, Al-Ga-Zn-O system, Sn-Al-Zn-
O-based, In-Zn-O-based, Sn-Zn-O-based, Al-Zn-O-based, In-O-based, Sn-O
A Zn—O-based metal oxide can be used, and a film thickness is appropriately selected within a range of 50 nm to 300 nm. In the case of using the sputtering method, the SiO ₂ content is 2 wt% or more and 10
Film formation is performed using a target containing less than or equal to% by weight, and the light-transmitting conductive film contains SiOx (X> 0) that hinders crystallization, and crystallizes during heat treatment performed in a later step. It is preferable to suppress this.

Next, a metal conductive film is formed over the conductive film that transmits visible light. As the metal conductive film, Al,
There is an element selected from Cr, Cu, Ta, Ti, Mo, W, an alloy containing the above-described element as a component, an alloy combining the above-described elements, or the like. Further, an aluminum layer on the titanium layer and a three-layer structure in which the titanium layer is laminated on the aluminum layer, or a three-layer structure in which the aluminum layer is laminated on the molybdenum layer and the molybdenum layer is laminated on the aluminum layer. A structure is preferable. Of course, the metal conductive film may have a single layer, a two-layer structure, or a stacked structure of four or more layers.

Next, a resist mask 134 is formed by a fourth photolithography process, and selective etching is performed to remove a conductive film that transmits visible light and an unnecessary portion of the metal conductive film, thereby removing visible light. An electrode layer in which a transparent conductive film and a metal conductive film are stacked is formed (FIG. 3A).
reference).

Note that in this etching, the first channel protective layer 116 and the second channel protective layer 216 function as etching stoppers for the third oxide semiconductor layers 113c and 213c; therefore, the third oxide semiconductor layers 113c and 213c are used. Is not etched.

The first channel protective layer 116 is provided over the channel formation region of the third oxide semiconductor layer 113c, and the second channel protection layer 216 is formed over the channel formation region of the third oxide semiconductor layer 213c.
Therefore, the channel formation regions of the third oxide semiconductor layers 113c and 213c are damaged during the process (film reduction due to plasma or etching agent during etching,
Protection from oxidation). Therefore, the reliability of the thin film transistors 141 and 142 can be improved.

Further, a resist mask may be formed by an inkjet method. When the resist mask is formed by an ink-jet method, a manufacturing cost can be reduced because a photomask is not used.

Next, after removing the resist mask 134, a fifth photolithography step is performed to form a wiring layer including a source electrode and a drain electrode (115a and 115b) and a resist mask 135 that covers the thin film transistor 141. Next, unnecessary conductive layers (215a and 215b) are removed by etching using the resist mask 135, so that light-transmitting source and drain electrodes (214a and 214b) are formed. At this stage, thin film transistors 141 and 142 are formed (see FIG. 3B).

Note that the fourth oxide semiconductor region which is a high-resistance drain region is formed in the drain electrode layer or the oxide semiconductor layer overlapping with the source electrode layer, so that reliability when a driver circuit is formed is improved. Can be achieved. Specifically, the conductivity can be changed stepwise from the drain electrode layer to the fourth oxide semiconductor region and the channel formation region. Therefore, when the drain electrode layer is operated by being connected to a wiring that supplies the high power supply potential VDD, the fourth oxidation which is the high resistance drain region even when a high electric field is applied between the gate electrode layer and the drain electrode layer. The physical semiconductor region serves as a buffer, and a local high electric field is not applied, so that the withstand voltage of the transistor can be improved. In addition, in the oxide semiconductor layer overlapping with the drain electrode layer, a fourth oxide semiconductor region which is a high-resistance drain region is formed, so that leakage current in a channel formation region when a driver circuit is formed is reduced. Can be achieved.

Specifically, in the thin film transistor 141, the conductive layer 115b that is a drain electrode formed using a metal conductive film with low wiring resistance includes a light-transmitting conductive layer 114b and a fourth oxide that is a high-resistance drain region. The semiconductor region 113d is electrically connected to the third oxide semiconductor layer 113c which is a channel formation region. Accordingly, the light-transmitting conductive layer 114 is formed.
It can be said that b is a low resistance drain region (also referred to as an LRN region). In the thin film transistor 142, the third oxide semiconductor layer 213c that is a channel formation region passes through the light-transmitting conductive film and the fourth oxide semiconductor region 213d that is a high-resistance drain region.
It is connected to the.

Next, the resist mask 135 is removed, and the first protective insulating film 107 is formed over the first channel protective layer 116 and the second channel protective layer 216. The first protective insulating film 107 has reduced moisture, hydrogen ions, OH ^{− and the} like in the film, and blocks entry from the outside. It is formed using an insulating inorganic material. Specifically, silicon oxide, silicon oxynitride, silicon nitride oxide, silicon nitride, aluminum oxide, aluminum nitride, or the like can be formed as a single layer or a stacked layer.

Here, first, a first protective insulating film 107a in contact with the gate insulating film 102 is formed using a silicon nitride film. By forming the gate insulating film 102 and the first protective insulating film 107a using a silicon nitride film, the same inorganic insulating films can be in contact with each other so as to surround the thin film transistors 141 and 142. The state can be made better. A protective insulating film having a different composition, for example, silicon oxynitride is stacked on the silicon nitride to form a first layer.
The protective insulating film 107 may be used.

As another configuration of the first protective insulating film 107, for example, a thickness of 300 n is formed using a sputtering method.
An m silicon oxide film may be formed, and silicon nitride may be stacked. The substrate temperature at the time of formation may be higher than or equal to room temperature and lower than or equal to 300 ° C., and is 100 ° C. in this embodiment. The silicon oxide film can be formed by a sputtering method in a rare gas (typically argon) atmosphere, an oxygen atmosphere, or a mixed gas atmosphere of a rare gas (typically argon) and oxygen. Further, a silicon oxide target or a silicon target may be used as the target. For example, silicon oxide can be formed by a sputtering method in an atmosphere containing oxygen using a silicon target.

Next, a second protective insulating film 108 that covers the thin film transistors 141 and 142 is formed over the first protective insulating film 107.

The second protective insulating film 108 is connected to the first channel protective layer 1 via the first protective insulating film 107.
16 and the second channel protective layer 216, and source and drain electrodes (115a, 11
5b, 214a, 214b).

For the second protective insulating film 108, for example, a photosensitive or non-photosensitive organic material having a thickness of 0.5 μm to 3 μm can be used. Examples of the photosensitive or non-photosensitive organic material that can be used for the second protective insulating film 108 include polyimide, acrylic, polyamide, polyimide amide, resist, benzocyclobutene, or a laminate of these. Can be mentioned. In addition to the organic material, a low dielectric constant material (low-k material), a siloxane resin, PSG (phosphorus glass), BPSG (phosphorus boron glass), or the like can be used. Further, by stacking a plurality of insulating films formed of these materials, the second
The protective insulating film 108 may be formed.

Note that the siloxane-based resin is Si—O—S formed using a siloxane-based material as a starting material.
It corresponds to a resin containing i-bond. Siloxane resins may use organic groups (for example, alkyl groups and aryl groups) and fluoro groups as substituents. The organic group may have a fluoro group.

A method for forming the second protective insulating film 108 is not particularly limited, and a sputtering method,
SOG method, spin coating, dipping, spray coating, droplet discharge method (ink jet method, screen printing, offset printing, etc.), doctor knife, roll coater, curtain coater, knife coater and the like can be used.

In this embodiment mode, photosensitive polyimide is formed as the second protective insulating film 108 by a coating method. After applying polyimide over the entire surface, exposure, development and baking are performed to form a second protective insulating film 108 made of polyimide having a flat surface and a thickness of 1.5 μm.

By providing the second protective insulating film 108, unevenness caused by the structure of the thin film transistors 141 and 142 can be reduced, and the top surface can be flattened. In addition, it is not limited to a resin layer, What is necessary is just to be able to form by the method (spin coating method or reflow method etc.) in which an upper surface becomes flat.

Next, the first protective insulating film 107 is opened by etching, and a contact hole 125 reaching the drain electrode 214b of the thin film transistor 142 is formed.

In the thin film transistor 141, when the back gate electrode 129 is connected to the first bottom gate electrode 111, the second protective insulating film 108 and the first protective film 108 are formed before the conductive film to be the back gate electrode 129 is formed. Openings are provided in predetermined portions (not shown) of the insulating film 107 and the gate insulating film 102.

Next, a conductive film that transmits visible light is formed over the second protective insulating film 108. As the conductive film that transmits visible light, the first bottom gate electrode 111 and the second bottom gate electrode 211 are used.
The same conductive film can be applied. In addition, the back gate electrode 129 and the pixel electrode 12
A process can be simplified by making 8 into the same material.

Next, a sixth photolithography step is performed to form a resist mask over the conductive film,
An unnecessary portion is removed by etching to form a wiring layer including the back gate electrode 129 and the pixel electrode 128. When the wiring layer including the back gate electrode 129 and the pixel electrode 128 is selectively etched to have a desired top surface shape, the second protective insulating film 108 functions as an etching stopper.

Note that the back gate electrode 129 may be provided so as to cover a region where the third oxide semiconductor layer 113c between the source electrode and the drain electrode overlaps with the first channel protective layer 116,
If the width of the back gate electrode 129 is shortened, the parasitic capacitance can be reduced.

In addition, the pixel electrode 128 is connected to the drain electrode 214b of the thin film transistor 142 through the contact hole 125 (see FIG. 3C).

Further, the thin film transistors 141 and 142 may be subjected to heat treatment in a nitrogen atmosphere or an air atmosphere (in the air). The heat treatment is preferably performed at a temperature of 350 ° C. or lower,
Any time after the formation of the insulating film to be the first protective insulating film 107 may be used. For example, heat treatment is performed at 350 ° C. for 1 hour in a nitrogen atmosphere. When the heat treatment is performed, the thin film transistor 1
Variations in the electrical characteristics of 41 and 142 can be reduced.

Through the above steps, the thin film transistors 141 and 142 illustrated in FIG. 1A can be formed.

Note that in FIGS. 2A and 2B, oxygen radical treatment is performed on the exposed second oxide semiconductor layers 113b and 213b before an insulating film serving as a channel protective layer is formed. May be. By performing the oxygen radical treatment, the vicinity of the exposed surface of the oxide semiconductor layer can be modified to form an oxygen-excess region. The oxygen radicals may be supplied by a plasma generator using a gas containing oxygen, or may be supplied by an ozone generator. By irradiating the thin film with supplied oxygen radicals or oxygen, the surfaces of the second oxide semiconductor layers 113b and 213b (the surface of the back channel portion) can be modified. Moreover, it is not limited to an oxygen radical process, You may perform the radical process of argon and oxygen. The radical treatment of argon and oxygen is to reform the thin film surface by introducing argon gas and oxygen gas to generate plasma.

7A and 7B illustrate structures of the thin film transistor 210 and the thin film transistor 220 in which a two-layer stacked film in which a silicon oxide film is formed over a silicon nitride film is used for the gate insulating film 102. FIG. In the case where the gate insulating film 102b in contact with the oxide semiconductor layer is a silicon oxide film, the gate insulating film 102b is etched when the channel protective layer is formed from the silicon oxide film, and the island-shaped oxide semiconductor layer of the gate insulating film 102b is formed. From the thickness of the region overlapping with the gate insulating film 102
The film thickness of the region that does not overlap the island-shaped oxide semiconductor layer b is reduced.

In the thin film transistors 210 and 220, the gate insulating film 102 and the first protective insulating film 107 are in contact with each other, and the gate insulating film 102 and the first protective insulating film 107 can be formed using the same inorganic insulating film material. By surrounding the thin film transistors 210 and 220 so that the same inorganic insulating films are in contact with each other, the sealing state of the thin film transistors can be improved. In the case where the same kind of inorganic insulating films are in contact with each other, the above-described inorganic insulating film can be used. In particular, a silicon nitride film is preferable because it has an excellent barrier property against impurities.

Further, a resist mask for forming the pixel electrode 128 may be formed by an inkjet method. When a resist mask is formed by the inkjet method, a photomask is not used.
Manufacturing cost can be reduced.

Through the above process, the thin film transistor 141 is formed over the same substrate using seven photomasks.
And the thin film transistor 142, or the thin film transistor 210 and the thin film transistor 2.
20 can be formed separately.

By providing the back gate electrode 129 at a position overlapping the channel formation region of the third oxide semiconductor layer 113c, before and after the BT test in a bias-thermal stress test (hereinafter referred to as a BT test) for examining the reliability of the thin film transistor. Thin film transistor 14 in
The amount of change in the threshold voltage of 1 can be reduced. Further, the potential of the back gate electrode 129 may be the same as or different from that of the bottom gate electrode 111. Further, the potential of the back gate electrode 129 may be GND, 0 V, or a floating state.

Since the semiconductor layer in the channel formation region included in the thin film transistor of this embodiment is a high resistance region, the electrical characteristics of the thin film transistor can be stabilized and an increase in off current can be prevented. Thus, a semiconductor device including a thin film transistor with favorable electrical characteristics and high reliability can be obtained.

Further, in the thin film transistors 141 and 142 and the thin film transistors 210 and 220, the fourth oxide semiconductor region is formed in the source region and the drain region where the source electrode and the drain electrode are in contact with each other. Is obtained.

Note that this embodiment can be combined with any of the other embodiments described in this specification as appropriate.

(Embodiment 2)
In this embodiment, a thin film transistor which is an embodiment of the present invention and is different from that in Embodiment 1 and a manufacturing method thereof will be described.

FIG. 4A is a cross-sectional view of thin film transistors 143 and 144 which are one embodiment of the present invention. The thin film transistors 143 and 144 are formed over the same substrate 100, and both are bottom-gate thin film transistors. The thin film transistor 143 is disposed in the driver circuit, and the thin film transistor 144 is disposed in the pixel.

4C1 is a plan view of a channel stop thin film transistor 143 provided in the driver circuit, and FIG. 4A is a cross-sectional view taken along line C1-C2 in FIG. 4C1. FIG. 4B is a cross-sectional view taken along line C3-C4 in FIG.

FIG. 4C2 is a plan view of a channel stop thin film transistor 144 provided in a pixel, and FIG. 4A is a cross-sectional view taken along line D1-D2 in FIG. 4C2. Also,
FIG. 4B is a cross-sectional view taken along line D3-D4 in FIG.

The thin film transistor 143 includes a first bottom gate electrode 111 provided over the substrate 100,
The gate insulating film 102, the third oxide semiconductor layer 113c, and the first channel protective layer 116
A source electrode and a drain electrode. The source electrode and drain electrode are
A conductive layer in which a second conductive layer 115a is stacked on the first conductive layer 114a; and the first conductive layer 11
It is formed using a conductive layer in which a second conductive layer 115b is stacked on 4b. Furthermore, the first
The first protective insulating film 107, the second protective insulating film 108, and the second protective insulating film 108 which are in contact with and cover the channel protective layer 116 and overlap with the third oxide semiconductor layer 113c A back gate electrode 129 is provided. The thin film transistor 143 described in this embodiment is one embodiment of a channel stop type.

In a liquid crystal display device, when a pixel portion and a driver circuit are formed over the same substrate, a thin film transistor, a sense amplifier, a constant voltage, or the like that forms a logic gate such as an inverter circuit, a NAND circuit, a NOR circuit, or a latch circuit in the driver circuit. In a thin film transistor forming an analog circuit such as a generation circuit or a VCO, only positive polarity or only negative polarity is applied between a source electrode and a drain electrode. Therefore, the width of either the source electrode or the drain electrode for which the withstand voltage of the third oxide semiconductor layer 113c is required may be designed wider than the other width. Further, the width in which the third oxide semiconductor layer 113c overlaps with the bottom gate electrode may be increased.

Although the thin film transistor 143 provided in the driver circuit is described as a single-gate thin film transistor, a multi-gate thin film transistor including a plurality of channel formation regions can be formed as needed.

In addition, a back gate electrode 129 is provided over the third oxide semiconductor layer 113c.
When the back gate electrode 129 is electrically connected to the bottom gate electrode 111 and set to the same potential, the third oxide semiconductor layer 113c arranged between the bottom gate electrode 111 and the back gate electrode 129 is gated from above and below. A voltage can be applied. Further, when the bottom gate electrode 111 and the back gate electrode 129 are set to different potentials, for example, a fixed potential, GND, and 0 V, the electrical characteristics of the TFT, for example, the threshold voltage can be controlled. Note that in this specification, a conductive layer formed over the third oxide semiconductor layer 113c is referred to as a back gate electrode 129 regardless of its potential. Therefore, the back gate electrode 12
9 may be in a floating state.

In addition, a first protective insulating film 107 and a second protective insulating film 108 are stacked between the back gate electrode 129 and the third oxide semiconductor layer 113c.

The thin film transistor 144 includes a second bottom gate electrode 211 provided over the substrate 100,
The gate insulating film 102, the third oxide semiconductor layer 213c, and the second channel protective layer 216
And source and drain electrodes (214a, 214b). In addition, the first protective insulating film 107 and the second protective insulating film 1 are in contact with and cover the second channel protective layer 216.
08 is provided. Therefore, the thin film transistor 144 described in this embodiment includes
This is one mode of a channel stop type. Note that a pixel electrode 128 which overlaps with the thin film transistor 144 is provided over the second protective insulating film 108.

However, the liquid crystal display device is AC driven to prevent deterioration of the liquid crystal. By this AC driving, the polarity of the signal potential applied to the pixel electrode layer is inverted to a positive polarity or a negative polarity at regular intervals. In the TFT connected to the pixel electrode layer, a pair of electrodes alternately serve as a source electrode and a drain electrode. In this specification, for convenience, one of the thin film transistors of the pixel is referred to as a source electrode and the other is referred to as a drain electrode. However, in actuality, one electrode alternately functions as a source electrode and a drain electrode during AC driving. . In order to reduce leakage current, the width of the second bottom gate electrode of the thin film transistor 144 provided in the pixel may be narrower than the width of the first bottom gate electrode of the thin film transistor 143 of the driver circuit. In order to reduce leakage current, the bottom gate electrode of the thin film transistor 144 provided in the pixel may be designed so as not to overlap with the source electrode or the drain electrode.

Although the thin film transistor 144 provided in the pixel is described as a single-gate thin film transistor, a multi-gate thin film transistor including a plurality of channel formation regions can be formed as needed.

The thin film transistor 144 includes a third oxide semiconductor layer 213c that transmits visible light;
Second bottom gate electrode 211 and source and drain electrodes (214a and 214b) using a conductive film that transmits visible light, substrate 100 that transmits visible light, and a second channel protective layer that transmits visible light 216, the first protective insulating film 107, and the second protective insulating film 108
Is used. Accordingly, the thin film transistor 144 is a so-called transparent transistor that transmits visible light.

As a material for the oxide semiconductor layer including the channel formation region, an oxide material having semiconductor characteristics may be used. Specifically, the oxide semiconductor material exemplified in Embodiment 1 can be used.

Note that the thin film transistor of this embodiment includes the third oxide semiconductor layers (113c and 213c).
) In the channel formation region.

5 and 6 are cross-sectional views illustrating manufacturing steps of the thin film transistors 143 and 144. FIG. Note that the first bottom gate electrode 111 and the second bottom gate electrode 211 are formed over the substrate 100 having an insulating surface, and the gate insulating film 102 covering the first bottom gate electrode 111 and the second bottom gate electrode 211 is formed. The steps up to the step of forming the oxide semiconductor film covering the gate insulating film 102 are the same as those in Embodiment 1, and thus detailed description thereof is omitted here, and the same portions as those in FIG. It demonstrates using the code | symbol of.

A first oxide semiconductor film is formed over the gate insulating film 102 in the same manner as in Embodiment 1.

Next, a second photolithography step is performed, a resist mask is formed over the first oxide semiconductor film, and the first oxide semiconductor film is etched to form island-shaped oxide semiconductor layers 113a and 213a. To do. Note that the etching here is not limited to wet etching, and dry etching may be used (see FIG. 5A).

Next, as in Embodiment 1, first heat treatment is performed on the first oxide semiconductor layers 113a and 213a. The first oxide semiconductor layers 113a and 213a are reduced in resistance by heat treatment and slow cooling in an inert gas atmosphere or under reduced pressure, and the second oxide semiconductor layers 113b and 213b are reduced in resistance, respectively. (See FIG. 5B).

Next, as in Embodiment 1, an insulating film serving as a channel protective layer is formed in contact with the second oxide semiconductor layers 113b and 213b.

In this embodiment mode, an insulating film serving as a channel protective layer is formed with a thickness of 300 n using a sputtering method.
An m silicon oxide film is formed.

Next, a third photolithography step is performed, a resist mask is formed over the insulating film to be the channel protective layer, unnecessary portions are removed by etching, and the first channel protective layer 116 is removed.
And a second channel protective layer 216 is formed.

In this embodiment mode, oxygen gas, N ₂ O gas atmosphere, or ultra-dry air (dew point is −40 ° C.
Below, preferably −60 ° C. or less) 200 ° C. or more and 400 ° C. or less, preferably 200 ° C. or more 3
The second heat treatment is performed under the condition of 00 ° C. or lower. For example, the second heat treatment is performed at 250 ° C. for 1 hour in an oxygen atmosphere.

The resistance of the second oxide semiconductor layers 113b and 213b is increased as a whole (see FIG. 5C).
.

Next, as in Embodiment 1, a conductive film that transmits visible light is formed over the gate insulating film 102 and the third oxide semiconductor layers 113c and 213c, and a metal conductive film is stacked over the conductive film.

Next, a fourth photolithography step is performed, a resist mask 134 is formed over the conductive film, and unnecessary portions of the conductive film and the conductive film that transmits visible light are removed by etching.
Conductive layers including a source electrode and a drain electrode (114a, 114b, 115a, 115b,
214a, 214b, 215a, 215b) (see FIG. 6A).

In this etching, the first channel protective layer 116 and the second channel protective layer 216 are used.
Functions as an etching stopper for the third oxide semiconductor layers 113c and 213c, so that the third oxide semiconductor layers 113c and 213c are not etched.

Since the first channel protective layer 116 and the second channel protective layer 216 are provided in contact with the channel formation regions of the third oxide semiconductor layers 113c and 213c, the third oxide semiconductor layers 113c and 213c are provided. It is possible to protect the channel forming region from damage during the process (film loss due to plasma or etching agent during etching, oxidation, etc.). Accordingly, the reliability of the thin film transistors 143 and 144 can be improved.

After the resist mask 134 is removed, a fifth photolithography step is performed to form a wiring layer including a source electrode and a drain electrode (115a and 115b) and a resist mask 135 that covers the thin film transistor 143. Next, unnecessary conductive layers (215a and 215b) are removed by etching using the resist mask 135, so that light-transmitting source and drain electrodes (214a and 214b) are formed.

Next, the resist mask 135 is removed, and the thin film transistors 143 and 14 are removed at this stage.
4 is formed (see FIG. 6B).

Next, the first protective insulating film 107 is formed over the first channel protective layer 116 and the second channel protective layer 216 in the same manner as in Embodiment Mode 1. A single layer or a stacked layer is formed using an insulating inorganic material.

In this embodiment, a 300-nm-thick silicon oxide film is formed as the first protective insulating film 107 by a sputtering method, and silicon nitride is stacked.

Next, as in Embodiment Mode 1, a second protective insulating film 108 covering the thin film transistors 143 and 144 is formed over the first protective insulating film 107.

The second protective insulating film 108 is connected to the first channel protective layer 1 via the first protective insulating film 107.
16 and the second channel protective layer 216, and source and drain electrodes (115a, 11
5b, 214a, 214b).

Next, the first protective insulating film 107 is opened by etching, and a contact hole 125 reaching the drain electrode 214b of the thin film transistor 144 is formed.

In the thin film transistor 143, in the case where the back gate electrode 129 is connected to the first bottom gate electrode 111, the second protective insulating film 108 and the first protective film 108 are formed before the conductive film to be the back gate electrode 129 is formed. Openings are provided in predetermined portions (not shown) of the insulating film 107 and the gate insulating film 102.

Next, as in Embodiment Mode 1, a conductive film that transmits visible light is formed over the second protective insulating film 108, unnecessary portions are removed by etching, and the back gate electrode 129 and the pixel electrode 12 are removed.
A wiring layer including 8 is formed.

Note that the back gate electrode 129 may be provided so as to cover a region overlapping with the first channel protective layer 116 of the third oxide semiconductor layer 113c between the source electrode and the drain electrode, and the width of the back gate electrode 129 is shortened. By doing so, the parasitic capacitance can be reduced.

In addition, the pixel electrode 128 is connected to the drain electrode 214b of the thin film transistor 144 through the contact hole 125 (see FIG. 6C).

Further, the thin film transistors 143 and 144 may be subjected to heat treatment in a nitrogen atmosphere or an air atmosphere (in the air). The heat treatment is preferably performed at a temperature of 350 ° C. or lower,
Any time after the formation of the insulating film to be the first protective insulating film 107 may be used. For example, heat treatment is performed at 350 ° C. for 1 hour in a nitrogen atmosphere. When the heat treatment is performed, the thin film transistor 1
Variations in the electrical characteristics of 43 and 144 can be reduced.

Through the above steps, thin film transistors 143 and 144 illustrated in FIG. 4A can be formed.

Note that in FIGS. 5A and 5B, the second oxide semiconductor layers 113b and 213b which are exposed in the same manner as in Embodiment 1 are formed before the insulating film serving as the channel protective layer is formed. On the other hand, oxygen radical treatment may be performed.

FIG. 8 shows a structure of thin film transistors 145 and 146 using the gate insulating film 102 in which a silicon nitride film and a silicon oxide film are stacked. From the silicon oxide film to the channel protective layer 11
When forming 6 and 216, the silicon oxide film of the gate insulating film 102 is etched, so that the thickness of the other region is smaller than the thickness of the silicon oxide film overlapping the island-shaped oxide semiconductor layer.

Further, a resist mask for forming the pixel electrode 128 may be formed by an inkjet method. When a resist mask is formed by the inkjet method, a photomask is not used.
Manufacturing cost can be reduced.

Through the above process, the thin film transistor 143 is formed over the same substrate using seven photomasks.
Thin film transistor 144 or thin film transistor 145 and thin film transistor 1
46 can be formed separately.

By providing the back gate electrode 129 at a position overlapping the channel formation region of the third oxide semiconductor layer 113c, before and after the BT test in a bias-thermal stress test (hereinafter referred to as a BT test) for examining the reliability of the thin film transistor. Thin film transistor 14 in
3 can be reduced. Further, the potential of the back gate electrode 129 may be the same as or different from that of the bottom gate electrode 111. Further, the potential of the back gate electrode 129 may be GND, 0 V, or a floating state.

Since the semiconductor layer in the channel formation region included in the thin film transistor of this embodiment is a high resistance region, the electrical characteristics of the thin film transistor can be stabilized and an increase in off current can be prevented. Thus, a semiconductor device including a thin film transistor with favorable electrical characteristics and high reliability can be obtained.

Note that this embodiment can be combined with any of the other embodiments described in this specification as appropriate.

(Embodiment 3)
In this embodiment, an example of manufacturing an active matrix liquid crystal display device using the active matrix substrate described in Embodiment 1 is described.

An example of a cross-sectional structure of the active matrix substrate is shown in FIG.

In Embodiment Mode 1, the thin film transistor of the driver circuit and the thin film transistor of the pixel portion are illustrated over the same substrate, but in this embodiment mode, in addition to the thin film transistor, a storage capacitor, a gate wiring (also referred to as a gate wiring layer), a source wiring A terminal portion (also referred to as a source wiring layer) is also illustrated and described. The terminal portion of the capacitor, the gate wiring, and the source wiring can be formed in the same process as the manufacturing process described in Embodiment 1, and can be manufactured without increasing the number of photomasks and the number of processes. Further, in the portion to be the display region of the pixel portion, the gate wiring, the source wiring, and the capacitor wiring layer are all formed of a light-transmitting conductive film, and a high aperture ratio is realized. Further, a metal wiring can be used for the source wiring layer in a portion other than the display region in order to reduce the wiring resistance.

In FIG. 9A, a thin film transistor 210 is a channel stop thin film transistor provided in a driver circuit, and a thin film transistor 220 electrically connected to the pixel electrode layer 227 is a channel stop thin film transistor provided in a pixel portion. .

In this embodiment, the thin film transistor 220 formed over the substrate 200 has the same structure as the thin film transistor 220 in Embodiment 1. Note that the first protective insulating layer 203 may be either a single layer or a stacked layer.

The material having the same light-transmitting property as the gate electrode layer of the thin film transistor 220 and the capacitor wiring layer 230 formed in the same process are interposed between the first gate insulating layer 202a and the second gate insulating layer 202b which are dielectrics. It overlaps with the capacitor electrode 231 to form a storage capacitor. Capacitance electrode 2
31 is formed using the same light-transmitting material as the source electrode layer or the drain electrode layer of the thin film transistor 220 and the same process. Therefore, in addition to the light-transmitting property of the thin film transistor 220, each storage capacitor also has a light-transmitting property, so that the aperture ratio can be improved.

It is important for the storage capacitor to have a light-transmitting property in order to improve the aperture ratio. In particular, in a small liquid crystal display panel of 10 inches or less, a high aperture ratio can be realized even if the pixel size is miniaturized in order to increase the display image by increasing the number of gate wirings. In addition, by using a light-transmitting film as a constituent member of the thin film transistor 220 and the storage capacitor,
In order to realize a wide viewing angle, a high aperture ratio can be realized even if one pixel is divided into a plurality of subpixels. That is, even when a high-density thin film transistor group is arranged, the aperture ratio can be increased, and the display area can be sufficiently secured. For example, 2 to 2 in one pixel
In the case of having four subpixels and a storage capacitor, the thin film transistor has a light-transmitting property, and each storage capacitor also has a light-transmitting property, so that the aperture ratio can be improved.

Note that the storage capacitor is provided below the pixel electrode layer 227, and the capacitor electrode 231 is provided in the pixel electrode layer 2.
27 is electrically connected.

In this embodiment mode, an example in which a storage capacitor is formed using the capacitor electrode 231 and the capacitor wiring layer 230 is described; however, the structure for forming the storage capacitor is not particularly limited. For example, the capacitor wiring layer is not provided, and the pixel electrode layer is overlapped with the gate wiring of the adjacent pixel through the planarization insulating layer, the protective insulating layer, and the first gate insulating layer and the second gate insulating layer. May be formed.

In addition, a plurality of gate wirings, source wirings, and capacitor wiring layers are provided depending on the pixel density. In the terminal portion, a plurality of first terminal electrodes having the same potential as the gate wiring, second terminal electrodes having the same potential as the source wiring, third terminal electrodes having the same potential as the capacitor wiring layer, and the like are arranged. Is done. Any number of terminal electrodes may be provided, and the practitioner may appropriately determine the number of terminal electrodes.

In the terminal portion, the first terminal electrode having the same potential as the gate wiring can be formed using the same light-transmitting material as the pixel electrode layer 227. The first terminal electrode is electrically connected to the gate wiring through a contact hole reaching the gate wiring. As the contact hole reaching the gate wiring, the same protective mask as the contact hole for electrically connecting the drain electrode layer of the thin film transistor 220 and the pixel electrode layer 227 is used. Insulating layer 203, second gate insulating layer 202b, and first gate insulating layer 202a
Is formed by selective etching.

The gate electrode layer of the thin film transistor 210 provided in the driver circuit may be electrically connected to the conductive layer 217 provided above the oxide semiconductor layer. In that case, the same protective mask as the contact hole for electrically connecting the drain electrode layer of the thin film transistor 220 and the pixel electrode layer 227 is used, and the second protective insulating layer 204 and the first protective insulating layer 203 are used. Then, the second gate insulating layer 202b and the first gate insulating layer 202a are selectively etched to form contact holes. Through this contact hole, the conductive layer 217 and the gate electrode layer of the thin film transistor 210 disposed in the driver circuit are electrically connected.

The second terminal electrode 235 having the same potential as the source wiring 234 of the driver circuit is connected to the pixel electrode layer 22.
7 can be formed of a material having the same light-transmitting property as that of No.7. The second terminal electrode 235 is electrically connected to the source wiring through a contact hole reaching the source wiring 234. The source wiring is a metal wiring and is formed using the same material and the same process as the source electrode layer of the thin film transistor 210 and has the same potential.

The third terminal electrode having the same potential as the capacitor wiring layer 230 can be formed using the same light-transmitting material as the pixel electrode layer 227. The contact hole reaching the capacitor wiring layer 230 is a contact hole 22 for the capacitor electrode 231 to be electrically connected to the pixel electrode layer 227.
4 can be formed by the same photomask and the same process.

In the case of manufacturing an active matrix liquid crystal display device, a liquid crystal layer is provided between an active matrix substrate and a counter substrate provided with a counter electrode (also referred to as a counter electrode layer) so as to face the active matrix substrate. Fix the board. Note that a common electrode electrically connected to the counter electrode provided on the counter substrate is provided over the active matrix substrate, and a fourth terminal electrode electrically connected to the common electrode is provided in the terminal portion. The fourth terminal electrode is a terminal for setting the common electrode to a fixed potential such as GND or 0V. The fourth terminal electrode can be formed using the same light-transmitting material as the pixel electrode layer 227.

There is no particular limitation on the structure for electrically connecting the source electrode layer of the thin film transistor 220 and the source electrode layer of the thin film transistor 210; for example, a connection electrode for connecting the source electrode layer of the thin film transistor 220 and the source electrode layer of the thin film transistor 210 may be used. Pixel electrode layer 227
You may form in the same process. Further, in a portion other than the display area, the thin film transistor 2
The 20 source electrode layers and the source electrode layer of the thin film transistor 210 may be stacked in contact with each other.

Note that a cross-sectional structure of the gate wiring layer 232 of the driver circuit is illustrated in FIG. Since this embodiment is an example of a small liquid crystal display panel of 10 inches or less, the gate wiring layer 232 of the driver circuit is formed using the same light-transmitting material as the gate electrode layer of the thin film transistor 220.

In addition, if the same material is used for the gate electrode layer, the source electrode layer, the drain electrode layer, the pixel electrode layer, or other electrode layers, or other wiring layers, a common sputtering target or a common manufacturing apparatus can be used. The material cost and the cost required for the etchant (or etching gas) used during etching can be reduced, and as a result, the manufacturing cost can be reduced.

In the structure of FIG. 9A, when a photosensitive resin material is used for the second protective insulating layer 204, a step of forming a resist mask can be omitted.

FIG. 9B illustrates a cross-sectional structure that is partly different from that in FIG. FIG. 9 (B) is similar to FIG.
A) is the same except that the second protective insulating layer 204 is not present. Therefore, the same portions are denoted by the same reference numerals, and detailed description of the same portions is omitted. In FIG. 9B, the first protective insulating layer 20
3, the pixel electrode layer 227, the conductive layer 217, and the second terminal electrode 235 are formed.

With the structure in FIG. 9B, the step of forming the second protective insulating layer 204 can be omitted.

This embodiment can be freely combined with any of the other embodiments.

(Embodiment 4)
In this embodiment, when the size of the liquid crystal display panel exceeds 10 inches, 60 inches, or even 120 inches, the wiring resistance of the light-transmitting wiring may be a problem. An example in which a part of the metal wiring is used to reduce the wiring resistance will be described.

Note that in FIG. 10A, the same portions as those in FIG. 9A are denoted by the same reference numerals, and detailed description of the same portions is omitted.

FIG. 10A illustrates a thin film transistor 210 in which part of a gate wiring of a driver circuit is a metal wiring.
In this example, the gate electrode layer is formed in contact with a wiring having the same light-transmitting property. Since the metal wiring is formed, the number of photomasks is increased as compared with the third embodiment.

First, a heat-resistant conductive material film (having a thickness of 100 nm to 500 nm) that can withstand the first heat treatment for dehydration or dehydrogenation is formed over the substrate 200.

In this embodiment, a tungsten film with a thickness of 370 nm and a tantalum nitride film with a thickness of 50 nm are formed. Here, the conductive film is a laminate of a tantalum nitride film and a tungsten film. However, the conductive film is not particularly limited. An alloy film in which the above-described elements are combined, or a nitride containing the above-described elements as a component is formed. The heat-resistant conductive material film is not limited to a single layer containing the above-described element, and a stack of two or more layers can be used.

Metal wiring is formed by the first photolithography process, and the first metal wiring layer 236 and the second metal wiring layer 236 are formed.
The metal wiring layer 237 is formed. For etching tungsten film and tantalum nitride film, I
CP (Inductively Coupled Plasma)
An etching method may be used. Using the ICP etching method, the film is formed into a desired taper shape by appropriately adjusting the etching conditions (the amount of power applied to the coil-type electrode, the amount of power applied to the substrate-side electrode, the electrode temperature on the substrate side, etc.) Can be etched. By forming the first metal wiring layer 236 and the second metal wiring layer 237 into a tapered shape, film formation defects of the light-transmitting conductive film formed in contact with the first metal wiring layer 236 and the second metal wiring layer 237 can be reduced.

Next, after forming a light-transmitting conductive film, a gate wiring layer 238, a gate electrode layer of the thin film transistor 210, a gate electrode layer of the thin film transistor 220, and a capacitor wiring layer 230 are formed by a second photolithography process. As the light-transmitting conductive film, the conductive material having a light-transmitting property with respect to visible light described in Embodiment 1 is used.

Note that depending on the material of the light-transmitting conductive film, for example, when there is an interface where the gate wiring layer 238 is in contact with the first metal wiring layer 236 or the second metal wiring layer 237, an oxide film is formed by a subsequent heat treatment or the like. May be formed and the contact resistance may be increased. Therefore, the second metal wiring layer 237 may be formed.
It is preferable to use a metal nitride film that prevents oxidation of the first metal wiring layer 236.

Next, a gate insulating layer, an oxide semiconductor layer, and the like are formed in the same process as in Embodiment 1. In the subsequent steps, an active matrix substrate is manufactured according to the first embodiment.

In this embodiment, an example in which the planarization insulating layer in the terminal portion is selectively removed using a photomask after the second protective insulating layer 204 is formed is described. In the terminal portion, it is preferable that no planarization insulating layer is present in order to achieve good connection with the FPC.

In FIG. 10A, the second terminal electrode 235 is formed over the first protective insulating layer 203.
In FIG. 10A, the gate wiring layer 238 that overlaps with part of the second metal wiring layer 237 is shown; however, the gate that covers all of the first metal wiring layer 236 and the second metal wiring layer 237 is shown. A wiring layer may be used. That is, the first metal wiring layer 236 and the second metal wiring layer 237 can be called auxiliary wirings for reducing the resistance of the gate wiring layer 238.

In the terminal portion, the first terminal electrode having the same potential as that of the gate wiring is connected to the first protective insulating layer 20.
3 and is electrically connected to the second metal wiring layer 237. The wiring routed from the terminal portion is also formed of metal wiring.

In addition, the gate wiring layer and the capacitor wiring layer in a portion other than the display area use metal wiring, that is, the first metal wiring layer 236 and the second metal wiring layer 237 as auxiliary wiring in order to reduce wiring resistance. You can also.

FIG. 10B illustrates a cross-sectional structure which is partly different from that in FIG. FIG. 10 (B)
10A and FIG. 10A are the same except for the material of the gate electrode layer of the thin film transistor of the driver circuit, the same portions are denoted by the same reference numerals, and detailed description of the same portions is omitted.

FIG. 10B illustrates an example in which the gate electrode layer of the thin film transistor in the driver circuit is a metal wiring. In the driver circuit, the gate electrode layer is not limited to a light-transmitting material.

In FIG. 10B, the thin film transistor 240 of the driver circuit includes a gate electrode layer in which a second metal wiring layer 241 is stacked over a first metal wiring layer 242. The first metal wiring layer 2
42 can be formed by the same material and the same process as the first metal wiring layer 236. Also,
The second metal wiring layer 241 can be formed using the same material and the same process as the second metal wiring layer 237.

In addition, when the first metal wiring layer 242 is electrically connected to the conductive layer 217, the second metal wiring layer 241 for preventing oxidation of the first metal wiring layer 242 is preferably a metal nitride film. .

In this embodiment, a part of metal wiring is used to reduce wiring resistance, and even if the size of the liquid crystal display panel exceeds 10 inches, 60 inches, or even 120 inches, the display image has high definition. As a result, a high aperture ratio can be realized.

This embodiment can be freely combined with any of the other embodiments.

(Embodiment 5)
In this embodiment, an example of the structure of the storage capacitor, which is different from that in Embodiment 3, is illustrated in FIGS. FIG. 11A is the same as FIG. 9A except for the structure of the storage capacitor, and thus the same portions are denoted by the same reference numerals and detailed description of the same portions is omitted. Note that FIG. 11A illustrates a cross-sectional structure of a thin film transistor 220 and a storage capacitor which are arranged in a pixel.

In FIG. 11A, a channel protective layer 216 including an oxide insulating layer, a first protective insulating layer 203, and a second protective insulating layer 204 are used as a dielectric, and the pixel electrode layer 227 and the pixel electrode layer 227 are formed.
In this example, a storage capacitor is formed with the capacitor wiring layer 250 overlapping with the capacitor. Since the capacitor wiring layer 250 is formed using the same light-transmitting material and the same process as the source electrode layer of the thin film transistor 220 disposed in the pixel, the capacitor wiring layer 250 is laid out so as not to overlap with the source wiring layer of the thin film transistor 220.

In the storage capacitor illustrated in FIG. 11A, the pair of electrodes and the dielectric have a light-transmitting property, and the entire storage capacitor has a light-transmitting property.

FIG. 11B illustrates an example of a structure of a storage capacitor which is different from that in FIG. FIG. 11 (B)
11A is the same as that of FIG. 11A except for the configuration of the storage capacitor, and the same portions are denoted by the same reference numerals and detailed description of the same portions is omitted.

In FIG. 11B, the dielectric is formed using the first gate insulating layer 202a and the second gate insulating layer 202b.
In this example, the storage capacitor is formed by stacking the capacitor wiring layer 230 and the oxide semiconductor layer 251 and the capacitor electrode 231 which overlap with the capacitor wiring layer 230. The capacitor electrode 231 is stacked in contact with the oxide semiconductor layer 251 and functions as one electrode of a storage capacitor. Note that the oxide semiconductor layer 251 is formed using the same light-transmitting material and the same step as the source electrode or the drain electrode of the thin film transistor 220. Further, the capacitor wiring layer 230 is formed so as not to overlap with the gate wiring layer of the thin film transistor 220 because it is formed using the same light-transmitting material and the same process as the gate electrode of the thin film transistor 220.

Further, the capacitor electrode 231 is electrically connected to the pixel electrode layer 227.

In the storage capacitor illustrated in FIG. 11B, the pair of electrodes and the dielectric have a light-transmitting property, and the entire storage capacitor has a light-transmitting property.

The storage capacitor illustrated in FIGS. 11A and 11B has a light-transmitting property and has a smaller pixel size in order to increase the definition of a display image by increasing the number of gate wirings. However, a sufficient capacity can be obtained and a high aperture ratio can be realized.

This embodiment can be freely combined with any of the other embodiments.

(Embodiment 6)
In this embodiment, an example in which at least part of a driver circuit and a thin film transistor placed in a pixel portion are formed over the same substrate will be described below.

The thin film transistor provided in the pixel portion is formed according to Embodiment Mode 1 or 2. In addition, since the thin film transistor described in Embodiment 1 or 2 is an n-channel TFT, a part of the driver circuit that can be formed using the n-channel TFT is provided over the same substrate as the thin film transistor in the pixel portion. Form.

An example of a block diagram of an active matrix display device is illustrated in FIG. A pixel portion 5301, a first scan line driver circuit 5302, a second scan line driver circuit 5303, and a signal line driver circuit 5304 are provided over the substrate 5300 of the display device. In the pixel portion 5301, a plurality of signal lines are extended from the signal line driver circuit 5304, and a plurality of scan lines are extended from the first scan line driver circuit 5302 and the second scan line driver circuit 5303. Has been placed. Note that pixels each having a display element are arranged in a matrix in the intersection region between the scanning line and the signal line. Further, the substrate 5300 of the display device is an FPC (Flexible Printed Ci).
timing control circuit 5305 (controller, control I
C).

In FIG. 16A, the first scan line driver circuit 5302, the second scan line driver circuit 5303, and the signal line driver circuit 5304 are formed over the same substrate 5300 as the pixel portion 5301. For this reason, the number of components such as a drive circuit provided outside is reduced, so that cost can be reduced. In addition, when the driver circuit is provided outside the substrate 5300, the number of connections in the connection portion by extending the wiring can be reduced, so that the reliability or the yield can be improved.

Note that the timing control circuit 5305 is, for example, a first scan line driver circuit start signal (GSP1) (also referred to as a start pulse) and a scan line driver circuit clock signal (for the first scan line driver circuit 5302). GCK1) is supplied. In addition, the timing control circuit 530
5 supplies, to the second scanning line driving circuit 5303, for example, a second scanning line driving circuit start signal (GSP2) and a scanning line driving circuit clock signal (GCK2). The signal line driver circuit 5304 receives a signal line driver circuit start signal (SSP), a signal line driver circuit clock signal (SCK), video signal data (DATA) (also simply referred to as a video signal), and a latch signal (LAT). Shall be supplied. Each clock signal may be a plurality of clock signals with shifted periods, or may be supplied together with a signal (CKB) obtained by inverting the clock signal. Note that the first scan line driver circuit 5302 and the second scan line driver circuit 53 are provided.
One of 03 can be omitted.

In FIG. 16B, circuits with low driving frequencies (for example, the first scan line driver circuit 5302 and the second scan line driver circuit 5303) are formed over the same substrate 5300 as the pixel portion 5301, and the signal line driver circuit 5304 is formed. Is formed on a different substrate from the pixel portion 5301. With this structure, a driver circuit formed over the substrate 5300 can be formed using a thin film transistor whose field-effect mobility is lower than that of a transistor including a single crystal semiconductor. Therefore, an increase in the size of the display device, a reduction in the number of steps, a reduction in cost, an improvement in yield, or the like can be achieved.

The thin film transistor described in Embodiment 1 or 2 is an n-channel TFT. FIG.
7A and 17B illustrate an example of the structure and operation of a signal line driver circuit including n-channel TFTs.

The signal line driver circuit includes a shift register 5601 and a switching circuit 5602.
The switching circuit 5602 includes a plurality of circuits called switching circuits 5602_1 to 5602_N (N is a natural number). The switching circuits 5602_1 to 5602_N each include a plurality of transistors called thin film transistors 5603_1 to 5603_k (k is a natural number). An example in which the thin film transistors 5603_1 to 5603_k are N-channel TFTs is described.

A connection relation of the signal line driver circuit is described by using the switching circuit 5602 1 as an example. The first terminals of the thin film transistors 5603_1 to 5603_k each have a wiring 5604_1.
To 5604_k. Second terminals of the thin film transistors 5603_1 to 5603_k are connected to signal lines S1 to Sk, respectively. Thin film transistors 5603_1 to 5603_
The gate of k is connected to the wiring 5605_1.

The shift register 5601 sequentially outputs H-level (H signal, also referred to as high power supply potential level) signals to the wirings 5605_1 to 5605_N, and the switching circuits 5602_1 to 562.
It has a function of selecting 02_N in order.

The switching circuit 5602_1 includes wirings 5604_1 to 5604_k and signal lines S1 to Sk.
For controlling the conduction state between the first terminal and the second terminal, that is, the wiring 5604_
It has a function of controlling whether or not the potential of 1 to 5604_k is supplied to the signal lines S1 to Sk.
As described above, the switching circuit 5602 1 has a function as a selector. The thin film transistors 5603_1 to 5603_k each include wirings 5604_1 to 5604_k.
For controlling the conduction state between the signal lines S1 and Sk, that is, the wirings 5604_1 to 5604_k.
Has a function of supplying the potentials to the signal lines S1 to Sk. Thus, the thin film transistor 56
03_1 to 5603_k each have a function as a switch.

Note that video signal data (DATA) is input to each of the wirings 5604_1 to 5604_k. The video signal data (DATA) is often an image signal or an analog signal corresponding to the image signal.

Next, operation of the signal line driver circuit in FIG. 17A is described with reference to a timing chart in FIG. FIG. 17B illustrates an example of the signals Sout_1 to Sout_N and the signals Vdata_1 to Vdata_k. Each of the signals Sout_1 to Sout_N is an example of an output signal of the shift register 5601, and the signals Vdata_1 to Vdata.
_K is an example of a signal input to each of the wirings 5604_1 to 5604_k. In addition,
One operation period of the signal line driver circuit corresponds to one gate selection period in the display device. As an example, one gate selection period is divided into a period T1 to a period TN. The periods T1 to TN are periods for writing video signal data (DATA) to the pixels belonging to the selected row.

In the periods T1 to TN, the shift register 5601 transmits an H-level signal to the wiring 560.
Output sequentially to 5_1 to 5605_N. For example, in the period T1, the shift register 5
601 outputs a high-level signal to the wiring 5605_1. Then, the thin film transistors 5603_1 to 5603_k are turned on, so that the wirings 5604_1 to 5604_k and the signal lines S1 to Sk are brought into conduction. At this time, the wirings 5604_1 to 5604_k
Data (S1) to Data (Sk) are input. Data (S1) to Data (Sk
) Are written to the pixels in the first to kth columns among the pixels belonging to the selected row through the thin film transistors 5603_1 to 5603_k, respectively. Thus, in the periods T1 to TN, video signal data (DATA) is sequentially written to the pixels belonging to the selected row by k columns.

As described above, the number of video signal data (DATA) or the number of wirings can be reduced by writing video signal data (DATA) to pixels by a plurality of columns.
Therefore, the number of connections with external circuits can be reduced. In addition, since the video signal is written to the pixels in a plurality of columns, the writing time can be extended and insufficient writing of the video signal can be prevented.

Note that as the shift register 5601 and the switching circuit 5602, a circuit including the thin film transistor described in Embodiment 1 or 2 can be used. In this case, the polarity of all the transistors included in the shift register 5601 can be configured using only an N-channel or P-channel polarity.

One mode of a shift register used for part of the scan line driver circuit and / or the signal line driver circuit is described with reference to FIGS.

The scan line driver circuit includes a shift register. In some cases, a level shifter, a buffer, or the like may be provided. In the scan line driver circuit, when a clock signal (CK) and a start pulse signal (SP) are input to the shift register, a selection signal is generated. The generated selection signal is buffered and amplified in the buffer and supplied to the corresponding scanning line. A gate electrode of a transistor of a pixel for one line is connected to the scanning line. Since the transistors of pixels for one line must be turned on all at once, a buffer that can flow a large current is used.

The shift register includes the first pulse output circuit 10_1 to the Nth pulse output circuit 10_N (
N is a natural number of 3 or more) (see FIG. 18A). In the first pulse output circuit 10_1 to the Nth pulse output circuit 10_N of the shift register illustrated in FIG. 18A, the first clock signal CK1 from the first wiring 11 and the second clock output from the second wiring 12 are second. Clock signal CK2
The third clock signal CK3 is supplied from the third wiring 13, and the fourth clock signal CK4 is supplied from the fourth wiring 14. In the first pulse output circuit 10_1, the start pulse SP1 (first start pulse) from the fifth wiring 15 is input. In the second and subsequent nth pulse output circuits 10_n (n is a natural number of 2 or more and N or less), a signal (referred to as the previous stage signal OUT (n-1)) from the previous stage pulse output circuit (n is 2). The above natural number) is input. In the first pulse output circuit 10_1, a signal is input from the third pulse output circuit 10_3 at the second stage. Similarly, in the n-th pulse output circuit 10_n in the second and subsequent stages, a signal from the (n + 2) -th pulse output circuit 10_ (n + 2) in the second stage and the subsequent stage (OUT signal OUT (n
+2)) is input. Therefore, the first output signals (OUT (1) (SR) to OU) to be input from the pulse output circuit at each stage to the pulse output circuit at the subsequent stage and / or two previous stages are output.
T (N) (SR)), second output signals (OUT (1) to OUT () input to another wiring or the like.
N)) is output. Note that as shown in FIG. 18A, since the latter stage signal OUT (n + 2) is not input to the last two stages of the shift register, as an example, the second start pulse SP2 and the third stage are separately provided. The start pulse SP3 may be input.

Note that the clock signal (CK) is a signal that repeats an H level and an L level (also referred to as an L signal or a low power supply potential level) at regular intervals. Here, the first clock signal (CK1) to the fourth clock signal (CK4) are sequentially delayed by ¼ period. In this embodiment, driving of the pulse output circuit is controlled by using the first clock signal (CK1) to the fourth clock signal (CK4). Note that the clock signal is GCK depending on the input drive circuit.
, SCK may be used, but here it will be described as CK.

The first input terminal 21, the second input terminal 22, and the third input terminal 23 are connected to the first wirings 11 to 11, respectively.
It is electrically connected to one of the fourth wirings 14. For example, in FIG.
In the first pulse output circuit 10_1, the first input terminal 21 is electrically connected to the first wiring 11, the second input terminal 22 is electrically connected to the second wiring 12, and the third pulse output circuit 10_1 The input terminal 23 is electrically connected to the third wiring 13. In the second pulse output circuit 10_2, the first input terminal 21 is electrically connected to the second wiring 12, the second input terminal 22 is electrically connected to the third wiring 13, and the second pulse output circuit 10_2 is electrically connected to the third wiring 13. 3 input terminals 23 are electrically connected to the fourth wiring 14.

Each of the first pulse output circuit 10_1 to the Nth pulse output circuit 10_N includes a first input terminal 21, a second input terminal 22, a third input terminal 23, a fourth input terminal 24, and a fifth input terminal. It is assumed that an input terminal 25, a first output terminal 26, and a second output terminal 27 are included (see FIG. 18B). In the first pulse output circuit 10_1, the first clock signal CK1 is input to the first input terminal 21, the second clock signal CK2 is input to the second input terminal 22, and the third
The third clock signal CK3 is input to the input terminal 23, the start pulse is input to the fourth input terminal 24, the post-stage signal OUT (3) is input to the fifth input terminal 25, and the first output terminal 26, the first output signal OUT (1) (SR) is output from the second output terminal 27, and the second output signal OUT (1) is output from the second output terminal 27.

Note that each of the first pulse output circuit 10_1 to the Nth pulse output circuit 10_N uses the four-terminal thin film transistor described in the above embodiment in addition to a three-terminal thin film transistor (also referred to as a thin film transistor). it can. Note that in this specification, in the case where a thin film transistor includes two gate electrodes with a semiconductor layer interposed therebetween, a gate electrode below the semiconductor layer is a lower gate electrode, and an upper gate electrode with respect to the semiconductor layer is an upper gate electrode. Call.

In the case where an oxide semiconductor is used for a semiconductor layer including a channel formation region of a thin film transistor, the threshold voltage may shift to a negative side or a positive side depending on a manufacturing process. Therefore, in a thin film transistor using an oxide semiconductor for a semiconductor layer including a channel formation region,
A configuration capable of controlling the threshold voltage is preferable. The threshold voltage of the four-terminal thin film transistor can be controlled to a desired value by controlling the potential of the upper and / or lower gate electrodes.

Next, an example of a specific circuit configuration of the pulse output circuit illustrated in FIG.
This will be described in (C).

The pulse output circuit illustrated in FIG. 18C includes a first transistor 31 to a thirteenth transistor 43. In addition to the first input terminal 21 to the fifth input terminal 25, the first output terminal 26, and the second output terminal 27 described above, the power supply line 51 to which the first high power supply potential VDD is supplied, A signal or power supply potential is supplied to the first transistor 31 to the thirteenth transistor 43 from the power supply line 52 to which the second high power supply potential VCC is supplied and the power supply line 53 to which the low power supply potential VSS is supplied. Here, the power supply potential of each power supply line in FIG. 18C is as follows. The first power supply potential VDD is higher than the second power supply potential VCC, and the second power supply potential VCC.
Is higher than the third power supply potential VSS. Note that the first clock signal (CK1) to
The fourth clock signal (CK4) is a signal that repeats the H level and the L level at regular intervals, and is assumed to be VDD when it is H level and VSS when it is L level. Note that by making the potential VDD of the power supply line 51 higher than the potential VCC of the power supply line 52, the potential applied to the gate electrode of the transistor can be kept low without affecting the operation, and the threshold value of the transistor Shift can be reduced and deterioration can be suppressed. Note that among the first transistor 31 to the thirteenth transistor 43, a four-terminal thin film transistor is preferably used for the first transistor 31 and the sixth transistor 36 to the ninth transistor 39. The operation of the first transistor 31 and the sixth transistor 36 to the ninth transistor 39 is a transistor in which the potential of a node to which one of the source and drain electrodes is connected is switched by a control signal of the gate electrode. In this transistor, the response to the control signal input to the gate electrode is fast (the on-state current rises sharply), so that the malfunction of the pulse output circuit can be reduced. Therefore, a threshold voltage can be controlled by using a four-terminal thin film transistor, and a pulse output circuit that can reduce malfunctions can be obtained.

18C, the first transistor 31 has a first terminal electrically connected to the power supply line 51, a second terminal electrically connected to the first terminal of the ninth transistor 39, and a gate electrode. Are electrically connected to the fourth input terminal 24. The second transistor 32 has a first terminal electrically connected to the power supply line 53, a second terminal electrically connected to the first terminal of the ninth transistor 39, and a gate electrode connected to the fourth transistor 34. It is electrically connected to the gate electrode. The third transistor 33 has a first terminal electrically connected to the first input terminal 21,
The second terminal is electrically connected to the first output terminal 26. The fourth transistor 34 is
The first terminal is electrically connected to the power supply line 53, and the second terminal is electrically connected to the first output terminal 26. The fifth transistor 35 has a first terminal electrically connected to the power line 53,
The second terminal is electrically connected to the gate electrode of the second transistor 32 and the gate electrode of the fourth transistor 34, and the gate electrode is electrically connected to the fourth input terminal 24. The sixth transistor 36 has a first terminal electrically connected to the power supply line 52, a second terminal electrically connected to the gate electrode of the second transistor 32 and the gate electrode of the fourth transistor 34, and a gate The electrode is electrically connected to the fifth input terminal 25. The seventh transistor 37 has a first terminal electrically connected to the power supply line 52 and a second terminal connected to the eighth transistor 38.
And the gate electrode is electrically connected to the third input terminal 23. The eighth transistor 38 has a first terminal electrically connected to the gate electrode of the second transistor 32 and the gate electrode of the fourth transistor 34, and a gate electrode electrically connected to the second input terminal 22. ing. The ninth transistor 39 has a first terminal electrically connected to the second terminal of the first transistor 31 and the second terminal of the second transistor 32, and a second terminal connected to the gate electrode of the third transistor 33 and The tenth transistor 40 is electrically connected to the gate electrode, and the gate electrode is electrically connected to the power supply line 52. The tenth transistor 40 has a first terminal electrically connected to the first input terminal 21, a second terminal electrically connected to the second output terminal 27, and a gate electrode connected to the ninth transistor 39. It is electrically connected to the second terminal. The eleventh transistor 41 has a first terminal electrically connected to the power supply line 53, a second terminal electrically connected to the second output terminal 27, and a gate electrode connected to the gate electrode of the second transistor 32 and The fourth transistor 34 is electrically connected to the gate electrode. The twelfth transistor 42 has a first terminal electrically connected to the power supply line 53, a second terminal electrically connected to the second output terminal 27, and a gate electrode connected to the gate electrode of the seventh transistor 37. Electrically connected. The thirteenth transistor 43 has a first terminal connected to the power line 5.
3, the second terminal is electrically connected to the first output terminal 26, and the gate electrode is electrically connected to the gate electrode of the seventh transistor 37.

In FIG. 18C, the gate electrode of the third transistor 33, the tenth transistor 4
A connection point between the zero gate electrode and the second terminal of the ninth transistor 39 is a node A.
In addition, the gate electrode of the second transistor 32, the gate electrode of the fourth transistor 34, the second terminal of the fifth transistor 35, the second terminal of the sixth transistor 36, the first terminal of the eighth transistor 38, And the connection point of the gate electrode of the eleventh transistor 41 is the node B
And

In FIG. 19A, the pulse output circuit described in FIG. 18C is replaced with the first pulse output circuit 10_.
1, the first input terminal 21 to the fifth input terminal 25 and the first output terminal 26 are applied.
And a signal input to or output from the second output terminal 27.

Specifically, the first clock signal CK 1 is input to the first input terminal 21, the second clock signal CK 2 is input to the second input terminal 22, and the third clock is input to the third input terminal 23. The signal CK3 is input, the start pulse is input to the fourth input terminal 24, the post-stage signal OUT (3) is input to the fifth input terminal 25, and the first output signal OUT is output from the first output terminal 26.
(1) (SR) is output, and the second output signal OUT (1) is output from the second output terminal 27.

Note that a thin film transistor is an element having at least three terminals including a gate, a drain, and a source. In addition, a semiconductor in which a channel region is formed in a region overlapping with the gate is included, and current flowing between the drain and the source through the channel region can be controlled by controlling the potential of the gate. Here, since the source and the drain vary depending on the structure and operating conditions of the thin film transistor, it is difficult to limit which is the source or the drain. Thus, a region functioning as a source and a drain may not be referred to as a source or a drain. In that case, as an example, each of the first
Sometimes referred to as a terminal or a second terminal.

18C and 19A, a capacitor for performing a bootstrap operation by bringing the node A into a floating state may be additionally provided. Further, in order to hold the potential of the node B, a capacitor in which one electrode is electrically connected to the node B may be separately provided.

Here, FIG. 19B illustrates a timing chart of a shift register including a plurality of pulse output circuits illustrated in FIG. Note that in the case where the shift register is a scan line driver circuit, a period 61 in FIG. 19B corresponds to a vertical blanking period and a period 62 corresponds to a gate selection period.

As shown in FIG. 19A, by providing the ninth transistor 39 to which the second power supply potential VCC is applied at the gate, the following advantages are obtained before and after the bootstrap operation. .

When the ninth transistor 39 to which the second power supply potential VCC is applied to the gate electrode does not exist, when the potential of the node A is increased by the bootstrap operation, the second transistor 31 of the first transistor 31 is increased.
The potential of the source which is a terminal rises and becomes higher than the first power supply potential VDD. Then, the source of the first transistor 31 is switched to the first terminal side, that is, the power supply line 51 side. Therefore, in the first transistor 31, a large bias voltage is applied between the gate and the source and between the gate and the drain, so that a large stress is applied, which can cause deterioration of the transistor. Therefore, the ninth power supply potential VCC is applied to the gate electrode.
By providing the transistor 39, although the potential of the node A is increased by the bootstrap operation, the potential of the second terminal of the first transistor 31 can be prevented from increasing. That is, by providing the ninth transistor 39, the value of the negative bias voltage applied between the gate and the source of the first transistor 31 can be reduced. Therefore, with the circuit configuration of this embodiment, the negative bias voltage applied between the gate and the source of the first transistor 31 can be reduced, so that deterioration of the first transistor 31 due to stress is suppressed. be able to.

Note that the ninth transistor 39 is provided at the second position of the first transistor 31.
Any structure may be used as long as it is connected between the terminal and the gate of the third transistor 33 via the first terminal and the second terminal. Note that in the case of a shift register including a plurality of pulse output circuits in this embodiment, the ninth transistor 39 may be omitted in a signal line driver circuit having more stages than a scanning line driver circuit, and the number of transistors is reduced. It is an advantage.

Note that by using an oxide semiconductor as the semiconductor layers of the first transistor 31 to the thirteenth transistor 43, off-state current of the thin film transistor can be reduced, on-state current and field-effect mobility can be increased, and deterioration can be prevented. Since the degree can be reduced, malfunctions in the circuit can be reduced. Transistors using oxide semiconductors are
Compared to a transistor using amorphous silicon, the degree of deterioration of the transistor due to application of a high potential to the gate electrode is small. Therefore, even if the first power supply potential VDD is supplied to the power supply line that supplies the second power supply potential VCC, the same operation can be obtained, and the number of power supply lines routed between the circuits can be reduced. The circuit can be reduced in size.

Note that the clock signal supplied to the gate electrode of the seventh transistor 37 by the third input terminal 23 and the clock signal supplied to the gate electrode of the eighth transistor 38 by the second input terminal 22 are The clock signal supplied to the gate electrode of the transistor 37 by the second input terminal 22, and the third input terminal 23 to the gate electrode of the eighth transistor 38.
Even if the connection relation is changed so that the clock signal is supplied by, the same effect is obtained. Note that in the shift register illustrated in FIG. 19A, when the seventh transistor 37 and the eighth transistor 38 are both on, the seventh transistor 37 is off and the eighth transistor 38 is on. When the seventh transistor 37 is turned off and the eighth transistor 38 is turned off, the second input terminal 22 and the third input terminal 23 are turned off.
The potential decrease of the node B caused by the decrease of the potential of the second transistor occurs twice due to the decrease of the potential of the gate electrode of the seventh transistor 37 and the decrease of the potential of the gate electrode of the eighth transistor 38. It becomes. On the other hand, in the shift register shown in FIG. 19A, the seventh transistor 37 and the eighth transistor 38 are both turned on as in the period of FIG.
The seventh transistor 37 is turned on and the eighth transistor 38 is turned off, and then the seventh transistor 37 is turned off and the eighth transistor 38 is turned off, so that the second input terminal 22 and the second transistor Thus, the decrease in the potential of the node B caused by the decrease in the potential of the third input terminal 23 can be reduced at once by the decrease in the potential of the gate electrode of the eighth transistor 38. Therefore, the variation in the potential of the node B as a clock signal supplied to the gate electrode of the seventh transistor 37 by the third input terminal 23 and as a clock signal supplied to the eighth gate electrode by the second input terminal 22. Since the noise can be reduced, it is preferable.

As described above, by setting the signal to be periodically supplied to the node B during the period in which the potentials of the first output terminal 26 and the second output terminal 27 are held at the L level, the pulse output is performed. A malfunction of the circuit can be suppressed.

(Embodiment 7)
A thin film transistor is manufactured, and a semiconductor device having a display function (also referred to as a display device) can be manufactured using the thin film transistor in a pixel portion and further in a driver circuit. Further, a part or the whole of the driver circuit can be formed over the same substrate as the pixel portion by using a thin film transistor, so that a system-on-panel can be formed.

The display device includes a display element. As the display element, a liquid crystal element (also referred to as a liquid crystal display element) or a light-emitting element (also referred to as a light-emitting display element) can be used. A light-emitting element includes an element whose luminance is controlled by current or voltage, specifically, an inorganic EL (Electr EL).
o Luminescence), organic EL, and the like. In addition, a display medium whose contrast is changed by an electric effect, such as electronic ink, can be used.

The display device includes a panel in which the display element is sealed, and a module in which an IC including a controller is mounted on the panel. Further, in the process of manufacturing the display device, the element substrate which corresponds to one embodiment before the display element is completed is provided with a means for supplying current to the display element in each of the plurality of pixels. Specifically, the element substrate may be in a state in which only the pixel electrode (also referred to as a pixel electrode layer) of the display element is formed, or after the conductive film to be the pixel electrode is formed and etched. Thus, it may be in a state before the pixel electrode is formed, and all forms are applicable.

Note that a display device in this specification means an image display device, a display device, or a light source (including a lighting device). Also, a connector such as an FPC (Flexible pr
integrated circuit) or TAB (Tape Automated Bon)
ding) tape or TCP (Tape Carrier Package) attached module, TAB tape or TCP is provided with a printed wiring board, or a display element is an IC (integrated circuit) by COG (Chip On Glass) method. All directly mounted modules are included in the display device.

An appearance and a cross section of a liquid crystal display panel, which is one embodiment of a semiconductor device, will be described with reference to FIGS. 12A1 and 12A2 are plan views of a panel in which thin film transistors 4010 and 4011 and a liquid crystal element 4013 are sealed between a first substrate 4001 and a second substrate 4006 with a sealant 4005. FIG. FIG. 12 (B) shows the M of FIG. 12 (A1) (A2).
This corresponds to a cross-sectional view at −N.

A sealant 4005 is provided so as to surround the pixel portion 4002 provided over the first substrate 4001 and the scan line driver circuit 4004. A second substrate 4006 is provided over the pixel portion 4002 and the scan line driver circuit 4004. Therefore, the pixel portion 4002 and the scan line driver circuit 4004 include a first substrate 4001, a sealant 4005, and a second substrate 4006.
Are sealed together with the liquid crystal layer 4008. A signal line driver circuit 4003 formed of a single crystal semiconductor film or a polycrystalline semiconductor film is mounted over a separately prepared substrate in a region different from the region surrounded by the sealant 4005 over the first substrate 4001. Has been.

Note that a connection method of a separately formed drive circuit is not particularly limited, and a COG method,
A wire bonding method, a TAB method, or the like can be used. FIG. 12 (A1)
Is an example in which the signal line driver circuit 4003 is mounted by a COG method. FIG.
In this example, the signal line driver circuit 4003 is mounted by a TAB method.

In addition, the pixel portion 4002 provided over the first substrate 4001 and the scan line driver circuit 4004 include
In FIG. 12B, a thin film transistor 4010 included in the pixel portion 4002 and a thin film transistor 4011 included in the scan line driver circuit 4004 are included.
And are illustrated. Over the thin film transistors 4010 and 4011, protective insulating layers 4020 and 4
021 is provided.

As the thin film transistors 4010 and 4011, the highly reliable thin film transistor including the oxide semiconductor layer described in Embodiment 1 or 2 can be used. As the thin film transistor 4011 for the driver circuit, the thin film transistors 141 and 143 described in Embodiment Mode 1 or 2 are used.
Thin film transistors 142 and 144 can be used as the thin film transistor 4010 for the pixel. In this embodiment mode, the thin film transistors 4010 and 4011 are n-channel thin film transistors.

A back gate electrode 4040 is provided over the insulating layer 4021 so as to overlap with a channel formation region of the oxide semiconductor layer of the thin film transistor 4011 for the driver circuit. By providing the back gate electrode 4040 so as to overlap with the channel formation region of the oxide semiconductor layer, the amount of change in the threshold voltage of the thin film transistor 4011 before and after the BT test can be reduced. Further, the potential of the back gate electrode 4040 may be the same as or different from that of the gate electrode layer of the thin film transistor 4011, and can function as a second gate electrode layer. Further, the potential of the back gate electrode 4040 may be GND, 0 V, or a floating state.

In addition, the pixel electrode layer 4030 included in the liquid crystal element 4013 is electrically connected to the thin film transistor 4010. The counter electrode layer 4031 of the liquid crystal element 4013 is formed on the second substrate 40.
06 is formed. A portion where the pixel electrode layer 4030, the counter electrode layer 4031, and the liquid crystal layer 4008 overlap corresponds to the liquid crystal element 4013. Note that the pixel electrode layer 4030 and the counter electrode layer 4031 are provided with insulating layers 4032 and 4033 that function as alignment films, respectively.
A liquid crystal layer 4008 is sandwiched between insulating layers 4032 and 4033.

Note that a light-transmitting substrate can be used as the first substrate 4001 and the second substrate 4006, and glass, ceramics, or plastics can be used. As plastic, FRP (Fiberglass-Reinforced Plastics) plate, PV
An F (polyvinyl fluoride) film, a polyester film, or an acrylic resin film can be used.

Reference numeral 4035 denotes a columnar spacer 4035 obtained by selectively etching an insulating film.
And provided to control the distance (cell gap) between the pixel electrode layer 4030 and the counter electrode layer 4031. A spherical spacer may be used. The counter electrode layer 4031 is electrically connected to a common potential line provided over the same substrate as the thin film transistor 4010. Using the common connection portion, the counter electrode layer 4031 and the common potential line can be electrically connected to each other through conductive particles disposed between the pair of substrates. Note that the conductive particles are included in the sealant 4005.

Alternatively, a liquid crystal exhibiting a blue phase for which an alignment film is unnecessary may be used. The blue phase is one of the liquid crystal phases. When the temperature of the cholesteric liquid crystal is increased, the blue phase appears immediately before the transition from the cholesteric phase to the isotropic phase. Since the blue phase appears only in a narrow temperature range, a liquid crystal composition mixed with 5% by weight or more of a chiral agent is used for the liquid crystal layer 4008 in order to improve the temperature range. A liquid crystal composition containing a liquid crystal exhibiting a blue phase and a chiral agent has a response speed of 1 msec.
Since it is short as follows and is optically isotropic, alignment treatment is unnecessary, and viewing angle dependency is small.

In addition to the transmissive liquid crystal display device, a transflective liquid crystal display device can also be applied.

In the liquid crystal display device, a polarizing plate is provided on the outer side (viewing side) of the substrate, a colored layer (color filter) is provided on the inner side, and an electrode layer used for the display element is shown in this order. It may be provided. In addition, the stacked structure of the polarizing plate and the colored layer is not limited to this embodiment mode, and may be set as appropriate depending on the material and manufacturing process conditions of the polarizing plate and the colored layer. In addition to the display portion, a light shielding film functioning as a black matrix may be provided.

In the thin film transistor 4011, an insulating layer 4042 is formed as a channel protective layer. 4
042 may be formed using a material and a method similar to those of the channel protective layers 116 and 216 described in Embodiment 1. In addition, the structure is covered with an insulating layer 4021 which functions as a planarization insulating film in order to reduce surface roughness of the thin film transistor. Here, silicon oxide films are formed as the insulating layers 4041 and 4042 by the sputtering method described in Embodiment 1.

In addition, a protective insulating layer 4020 is formed over the insulating layers 4041 and 4042. The protective insulating layer 4020 may be formed using a material and a method similar to those of the protective insulating film 107 described in Embodiment 1. Here, a silicon nitride film is formed as the insulating layer 4020 by a PCVD method.

In addition, the insulating layer 4021 is formed as the planarization insulating film. The insulating layer 4021 may be formed using a material and a method similar to those of the protective insulating film 108 described in Embodiment 1, and may be polyimide,
An organic material having heat resistance such as acrylic, benzocyclobutene, polyamide, or epoxy can be used. In addition to the organic material, a low dielectric constant material (low-k material), a siloxane resin, PSG (phosphorus glass), BPSG (phosphorus boron glass), or the like can be used. Note that by stacking a plurality of insulating films formed of these materials, the insulating layer 402
1 may be formed.

Note that the siloxane-based resin is Si—O—S formed using a siloxane-based material as a starting material.
It corresponds to a resin containing i-bond. Siloxane resins may use organic groups (for example, alkyl groups and aryl groups) and fluoro groups as substituents. The organic group may have a fluoro group.

The formation method of the insulating layer 4021 is not particularly limited, and depending on the material, sputtering, SOG, spin coating, dip, spray coating, droplet discharge (inkjet method, screen printing, offset printing, etc.), doctor A knife, roll coater, curtain coater, knife coater or the like can be used. By combining the baking process of the insulating layer 4021 and annealing of the semiconductor layer, a semiconductor device can be efficiently manufactured.

The pixel electrode layer 4030 and the counter electrode layer 4031 are formed using indium oxide containing tungsten oxide, indium zinc oxide containing tungsten oxide, indium oxide containing titanium oxide,
Indium tin oxide containing titanium oxide, indium tin oxide (hereinafter referred to as ITO),
A light-transmitting conductive material such as indium zinc oxide or indium tin oxide to which silicon oxide is added can be used.

The pixel electrode layer 4030 and the counter electrode layer 4031 can be formed using a conductive composition including a conductive high molecule (also referred to as a conductive polymer). The pixel electrode formed using the conductive composition preferably has a sheet resistance of 10,000 Ω / □ or less and a light transmittance of 70% or more at a wavelength of 550 nm. Moreover, it is preferable that the resistivity of the conductive polymer contained in the conductive composition is 0.1 Ω · cm or less.

As the conductive polymer, a so-called π-electron conjugated conductive polymer can be used. For example, polyaniline or a derivative thereof, polypyrrole or a derivative thereof, polythiophene or a derivative thereof, or a copolymer of two or more kinds thereof can be given.

In addition, a separately formed signal line driver circuit 4003 and a scan line driver circuit 4004 or the pixel portion 4
Various signals and potentials applied to 002 are supplied from the FPC 4018.

The connection terminal electrode 4015 is formed using the same conductive film as the pixel electrode layer 4030 included in the liquid crystal element 4013, and the terminal electrode 4016 is formed using the same conductive film as the source electrode layer and the drain electrode layer of the thin film transistor 4011.

The connection terminal electrode 4015 is electrically connected to a terminal included in the FPC 4018 through an anisotropic conductive film 4019.

FIG. 12 illustrates an example in which the signal line driver circuit 4003 is separately formed and mounted on the first substrate 4001; however, the present invention is not limited to this structure. The scan line driver circuit may be separately formed and mounted, or only part of the signal line driver circuit or only part of the scan line driver circuit may be separately formed and mounted.

FIG. 21 illustrates an example in which a liquid crystal display module is formed as a semiconductor device using a TFT substrate 2600 manufactured by a manufacturing method disclosed in this specification.

FIG. 21 illustrates an example of a liquid crystal display module. A TFT substrate 2600 and a counter substrate 2601 are fixed to each other with a sealant 2602, and a pixel portion 2603 including a TFT and the like, a display element 2604 including a liquid crystal layer, and a coloring layer 2605 are provided therebetween. A display area is formed. Colored layer 2605
Is necessary for color display. In the case of the RGB method, a colored layer corresponding to each color of red, green, and blue is provided corresponding to each pixel. A polarizing plate 2606, a polarizing plate 2607, and a diffusion plate 2613 are provided outside the TFT substrate 2600 and the counter substrate 2601. The light source is composed of a cold cathode tube 2610 and a reflector 2611. The circuit board 2612 is connected to the wiring circuit portion 2608 of the TFT substrate 2600 by a flexible wiring board 2609, and an external circuit such as a control circuit or a power circuit is incorporated. Yes. Moreover, you may laminate | stack in the state which had the phase difference plate between the polarizing plate and the liquid-crystal layer.

The liquid crystal display module has TN (Twisted Nematic) mode, IPS (I
n-Plane-Switching) mode, FFS (Fringe Field S)
switching) mode, MVA (Multi-domain Vertical A)
license) mode, PVA (Patterned Vertical Align)
nment) mode, ASM (Axial Symmetrical aligned)
Micro-cell mode, OCB (Optical Compensated B)
irefringence mode, FLC (Ferroelectric Liquid)
d Crystal) mode, AFLC (Antiferroelectric Liq)
uid Crystal) mode or the like can be used.

Through the above process, a highly reliable liquid crystal display panel as a semiconductor device can be manufactured.

This embodiment can be implemented in appropriate combination with the structures described in the other embodiments.

(Embodiment 8)

An example of electronic paper will be described as an embodiment of a semiconductor device.

You may use for the electronic paper which drives an electronic ink using the element electrically connected with a switching element. Electronic paper is also called an electrophoretic display device (electrophoretic display), and has the same readability as paper, low power consumption compared to other display devices, and the advantage that it can be made thin and light. ing.

The electrophoretic display can be considered in various forms, and a plurality of microcapsules including first particles having a positive charge and second particles having a negative charge are dispersed in a solvent or a solute. In other words, by applying an electric field to the microcapsules, the particles in the microcapsules are moved in opposite directions to display only the color of the particles assembled on one side. Note that the first particle or the second particle contains a dye and does not move in the absence of an electric field. In addition, the color of the first particles and the color of the second particles are different (including colorless).

In this way, the electrophoretic display moves a substance having a high dielectric constant to a high electric field region.
This is a display using the so-called dielectrophoretic effect. The electrophoretic display does not require a polarizing plate necessary for a liquid crystal display device.

A solution in which the above microcapsules are dispersed in a solvent is referred to as electronic ink. This electronic ink can be printed on a surface of glass, plastic, cloth, paper, or the like. Color display is also possible by using particles having color filters or pigments.

In addition, an active matrix display device can be completed by arranging a plurality of the above microcapsules so as to be appropriately sandwiched between two electrodes on an active matrix substrate, and display can be performed by applying an electric field to the microcapsules. it can. For example, the active matrix substrate obtained by the thin film transistor of Embodiment 1 or 2 can be used.

Note that the first particle and the second particle in the microcapsule are a conductor material, an insulator material,
A material selected from semiconductor materials, magnetic materials, liquid crystal materials, ferroelectric materials, electroluminescent materials, electrochromic materials, and magnetophoretic materials, or a composite material thereof may be used.

FIG. 20 illustrates active matrix electronic paper as an example of a semiconductor device. The thin film transistor 581 used for the semiconductor device can be manufactured in a manner similar to the thin film transistor described in Embodiment 1, and is a highly reliable thin film transistor including an oxide semiconductor layer. The thin film transistor described in any of Embodiments 2 to 4 can also be used as the thin film transistor 581 of this embodiment.

The electronic paper in FIG. 20 is an example of a display device using a twisting ball display system. The twist ball display method is a method in which spherical particles separately painted in white and black are arranged between a first electrode layer and a second electrode layer which are electrode layers used for a display element, and the first electrode layer and the second electrode layer are arranged. In this method, display is performed by controlling the orientation of spherical particles by generating a potential difference between the two electrode layers.

A thin film transistor 581 formed over the substrate 580 is a bottom-gate thin film transistor and is covered with an insulating layer 583. A source electrode layer or a drain electrode layer of the thin film transistor 581 is in contact with and electrically connected to the first electrode layer 587 through an opening formed in the insulating layer 583 and the insulating layer 585. A second electrode formed on the first electrode layer 587 and the substrate 596;
Between the electrode layers 588, spherical particles 589 including a cavity 594 having a black region 590 a and a white region 590 b and filled with a liquid are provided.
89 is filled with a filler 595 such as a resin. The first electrode layer 587 corresponds to a pixel electrode, and the second electrode layer 588 corresponds to a common electrode. The second electrode layer 588 is electrically connected to a common potential line provided over the same substrate as the thin film transistor 581. With the use of the common connection portion, the second electrode layer 588 and the common potential line can be electrically connected to each other through conductive particles arranged between the pair of substrates.

Further, instead of the twisting ball, an electrophoretic element can be used. A diameter of 10 μm to 20 in which transparent liquid, positively charged white fine particles, and negatively charged black fine particles are enclosed.
Use microcapsules of about 0 μm. In the microcapsule provided between the first electrode layer and the second electrode layer, when an electric field is applied by the first electrode layer and the second electrode layer, the white particles and the black particles are in opposite directions. And can display white or black. A display element to which this principle is applied is an electrophoretic display element, and a device using the electrophoretic display element is generally called electronic paper. Since the electrophoretic display element has higher reflectance than the liquid crystal display element, an auxiliary light is unnecessary, power consumption is small, and the display portion can be recognized even in a dim place. Further, even when power is not supplied to the display portion, an image once displayed can be held; therefore, a semiconductor device with a display function from a radio wave source (simply a display device or a semiconductor having a display device) Even when the device is also moved away, the displayed image can be stored.

Through the above steps, highly reliable electronic paper as a semiconductor device can be manufactured.

This embodiment can be implemented in appropriate combination with the structures described in the other embodiments.

(Embodiment 9)
An example of a light-emitting display device will be described as a semiconductor device. As a display element included in the display device, a light-emitting element utilizing electroluminescence is used here. A light-emitting element using electroluminescence is distinguished depending on whether the light-emitting material is an organic compound or an inorganic compound. Generally, the former is called an organic EL element and the latter is called an inorganic EL element.

In the organic EL element, by applying a voltage to the light emitting element, electrons and holes are respectively injected from the pair of electrodes into the layer containing the light emitting organic compound, and a current flows. Then, these carriers (electrons and holes) recombine, whereby the light-emitting organic compound forms an excited state, and emits light when the excited state returns to the ground state. Due to such a mechanism, such a light-emitting element is referred to as a current-excitation light-emitting element.

Inorganic EL elements are classified into a dispersion-type inorganic EL element and a thin-film inorganic EL element depending on the element structure. The dispersion-type inorganic EL element has a light-emitting layer in which particles of a light-emitting material are dispersed in a binder, and the light emission mechanism is donor-acceptor recombination light emission using a donor level and an acceptor level. The thin-film inorganic EL element has a light emitting layer sandwiched between dielectric layers,
Furthermore, it has a structure in which it is sandwiched between electrodes, and the light emission mechanism is localized light emission that utilizes inner-shell electron transition of metal ions. Note that description is made here using an organic EL element as a light-emitting element.

FIG. 14 is a diagram illustrating an example of a pixel configuration to which digital time grayscale driving can be applied as an example of a semiconductor device.

A structure and operation of a pixel to which digital time gray scale driving can be applied will be described. Here, an example is shown in which two n-channel transistors each using an oxide semiconductor layer for a channel formation region are used for one pixel.

The pixel 6400 includes a switching transistor 6401 and a light emitting element driving transistor 6.
402, a light-emitting element 6404, and a capacitor 6403. The switching transistor 6401 has a gate connected to the scan line 6406, a first electrode (one of the source electrode and the drain electrode) connected to the signal line 6405, and a second electrode (the other of the source electrode and the drain electrode) driven the light emitting element. The transistor 6402 is connected to the gate. The light-emitting element driving transistor 6402 has a gate connected to the power supply line 6407 through the capacitor 6403, a first electrode connected to the power supply line 6407, and a second electrode connected to the first electrode (pixel electrode) of the light-emitting element 6404. It is connected. The second electrode of the light emitting element 6404 corresponds to the common electrode 6408.
The common electrode 6408 is electrically connected to a common potential line formed over the same substrate.

Note that a low power supply potential is set for the second electrode (the common electrode 6408) of the light-emitting element 6404. Note that the low power supply potential is a potential that satisfies the low power supply potential <the high power supply potential with reference to the high power supply potential set in the power supply line 6407. For example, GND, 0V, or the like is set as the low power supply potential. Also good. The potential difference between the high power supply potential and the low power supply potential is applied to the light emitting element 6404 and a current is caused to flow through the light emitting element 6404 so that the light emitting element 6404 emits light. Each potential is set to be equal to or higher than the forward threshold voltage. Note that a high power supply potential may be set for the common electrode 6408 and a low power supply potential may be set for the power supply line 6407. In that case, since the current flowing through the light-emitting element 6404 is reversed, the structure of the light-emitting element 6404 may be changed as appropriate.

Note that the capacitor 6403 can be omitted by using the gate capacitor of the light emitting element driving transistor 6402 instead. Regarding the gate capacitance of the light-emitting element driving transistor 6402, a capacitance may be formed between the channel region and the gate electrode.

Here, in the case of the voltage input voltage driving method, a video signal that causes the light emitting element driving transistor 6402 to have two states, that is, whether the light emitting element driving transistor 6402 is sufficiently turned on or turned off. Enter. That is, the light-emitting element driving transistor 6402
Operates in the linear region. In order to operate the light-emitting element driving transistor 6402 in a linear region, a voltage higher than the voltage of the power supply line 6407 is applied to the gate of the light-emitting element driving transistor 6402. Note that a voltage equal to or higher than (power supply line voltage + Vth of the light emitting element driving transistor 6402) is applied to the signal line 6405.

Further, in the case of performing analog grayscale driving instead of digital time grayscale driving, the same pixel configuration as that in FIG. 14 can be used by changing signal input.

When analog gradation driving is performed, a voltage equal to or higher than the forward voltage of the light emitting element 6404 + Vth of the light emitting element driving transistor 6402 is applied to the gate of the light emitting element driving transistor 6402. The forward voltage of the light-emitting element 6404 refers to a voltage for obtaining desired luminance, and includes at least a forward threshold voltage. Note that when a video signal that causes the light-emitting element driving transistor 6402 to operate in a saturation region is input, a current can flow through the light-emitting element 6404. In order to operate the light emitting element driving transistor 6402 in the saturation region, the power line 6
The potential of 407 is higher than the gate potential of the light emitting element driving transistor 6402. By making the video signal analog, a current corresponding to the video signal is caused to flow through the light emitting element 6404.
Analog gradation driving can be performed.

Note that the pixel structure illustrated in FIG. 14 is not limited thereto. For example, a switch, a resistor, a capacitor, a transistor, a logic circuit, or the like may be newly added to the pixel illustrated in FIG.

Next, the structure of the light-emitting element will be described with reference to FIG. Here, T for light emitting element driving
The cross-sectional structure of the pixel will be described with reference to an example in which the FT is n-type and the upper electrode is an anode and the lower electrode is a cathode for two electrodes of the light emitting element. FIG. 15 (A)
(B) TFTs 7001 and 7 which are light emitting element driving TFTs used in the semiconductor device of (C).
Reference numerals 0111 and 7021 are highly reliable thin film transistors which can be manufactured in a manner similar to the thin film transistor provided in the pixel described in Embodiment 1 and include an oxide semiconductor layer. The thin film transistors provided in the pixels described in Embodiment Modes 2 to 4 are TFTs 7001, 7011, and 702.
It can also be applied as 1.

In order to extract light emitted from the light-emitting element, at least one of the anode and the cathode may be transparent. Then, a thin film transistor and a light emitting element are formed on the substrate, and a top emission that extracts light from a surface opposite to the substrate, a bottom emission that extracts light from a surface on the substrate, and a surface opposite to the substrate and the substrate are provided. There is a light-emitting element having a dual emission structure in which light emission is extracted from the pixel, and the pixel structure can be applied to a light-emitting element having any emission structure.

A light-emitting element having a top emission structure will be described with reference to FIG.

In FIG. 15A, a light emitting element driving TFT 7001 is an n-type, and the light emitting element 700
2 is a cross-sectional view of a pixel in a case where light emitted from 2 exits to the anode 7005 side. FIG.
), A cathode 7003 of the light emitting element 7002 and a TFT 7001 which is a light emitting element driving TFT.
Are electrically connected, and a light emitting layer 7004 and an anode 7005 are sequentially stacked over the cathode 7003. Various materials can be used for the cathode 7003 as long as it has a low work function and reflects light. For example, Ca, Al, MgAg, AlLi, etc. are desirable. The light emitting layer 7004 may be formed of a single layer or may be formed of a plurality of stacked layers. In the case of a plurality of layers, an electron injection layer, an electron transport layer, a light emitting layer, a hole transport layer, and a hole injection layer are stacked in this order on the cathode 7003. Note that it is not necessary to provide all of these layers. The anode 7005 is formed using a light-transmitting conductive material such as indium oxide containing tungsten oxide, indium zinc oxide containing tungsten oxide, indium oxide containing titanium oxide, or titanium oxide. A light-transmitting conductive film such as indium tin oxide, indium tin oxide (hereinafter referred to as ITO), indium zinc oxide, or indium tin oxide to which silicon oxide is added may be used.

A partition wall 7009 is provided between the cathode 7003 and the cathode 7008 of the adjacent pixel so as to cover each end portion. A partition 7009 is formed using an organic resin film such as polyimide, acrylic, polyamide, or epoxy, an inorganic insulating film, or organic polysiloxane. The partition wall 7009 is
In particular, a photosensitive resin material is preferably used so that the side surface of the partition wall 7009 is an inclined surface formed with a continuous curvature. In the case where a photosensitive resin material is used for the partition 7009, a step of forming a resist mask can be omitted.

A region where the light-emitting layer 7004 is sandwiched between the cathode 7003 and the anode 7005 corresponds to the light-emitting element 7002. In the case of the pixel shown in FIG. 15A, light emitted from the light-emitting element 7002 is emitted to the anode 7005 side as shown by an arrow.

Next, a light-emitting element having a bottom emission structure will be described with reference to FIG. A cross-sectional view of a pixel in the case where a light emitting element driving TFT 7011 is n-type and light emitted from the light emitting element 7012 is emitted to the cathode 7013 side is shown. In FIG. 15B, a cathode 7013 of a light-emitting element 7012 is formed over a light-transmitting conductive film 7017 electrically connected to the light-emitting element driving TFT 7011.
A light emitting layer 7014 and an anode 7015 are stacked in this order on a cathode 7013. Note that in the case where the anode 7015 has a light-transmitting property, a shielding film 7016 for reflecting or shielding light may be formed so as to cover the anode 7015. The cathode 7013 is the same as that shown in FIG.
As in the case of (A), various materials can be used as long as the conductive material has a small work function. However, the film thickness is set so as to transmit light (preferably, about 5 nm to 30 nm). For example, an aluminum film having a thickness of 20 nm can be used as the cathode 7013. The light emitting layer 7014 may be formed of a single layer or a plurality of layers stacked as in FIG. 15A. The anode 7015 is not required to transmit light, but can be formed using a light-transmitting conductive material as in FIG. The shielding film 7016 can be formed using, for example, a metal that reflects light, but is not limited to a metal film. For example, a resin to which a black pigment is added can also be used.

A partition wall 7019 is provided between the conductive film 7017 and the conductive film 7018 of the adjacent pixel so as to cover each end portion. A partition 7019 is formed using an organic resin film such as polyimide, acrylic, polyamide, or epoxy, an inorganic insulating film, or organic polysiloxane. Septum 7019
In particular, it is preferable to use a photosensitive resin material so that the side surface of the partition wall 7019 has an inclined surface formed with a continuous curvature. In the case where a photosensitive resin material is used for the partition 7019, a step of forming a resist mask can be omitted.

A region where the light emitting layer 7014 is sandwiched between the cathode 7013 and the anode 7015 is a light emitting element 7012.
It corresponds to. In the case of the pixel illustrated in FIG. 15B, light emitted from the light-emitting element 7012 is
As indicated by the arrow, the light is emitted to the cathode 7013 side.

Next, a light-emitting element having a dual emission structure will be described with reference to FIG. FIG. 15 (C)
Then, the light-transmitting conductive film 702 electrically connected to the light-emitting element driving TFT 7021 is used.
A cathode 7023 of the light emitting element 7022 is formed on the cathode 723, and the light emitting layer 7 is formed on the cathode 7023.
024 and the anode 7025 are sequentially stacked. As in the case of FIG. 15A, various materials can be used for the cathode 7023 as long as they are conductive materials having a low work function. However, the film thickness is set so as to transmit light. For example, Al having a thickness of 20 nm is used as the cathode 702.
3 can be used. In addition, as in FIG. 15A, the light-emitting layer 7024 may be formed of a single layer or a stack of a plurality of layers.
The anode 7025 can be formed using a light-transmitting conductive material as in FIG. 15A.

A partition wall 7029 is provided between the conductive film 7027 and the conductive film 7028 of the adjacent pixel so as to cover each end portion. A partition 7029 is formed using an organic resin film such as polyimide, acrylic, polyamide, or epoxy, an inorganic insulating film, or organic polysiloxane. Septum 7029
In particular, it is preferable to use a photosensitive resin material so that the side surface of the partition wall 7029 has an inclined surface formed with a continuous curvature. In the case where a photosensitive resin material is used for the partition wall 7029, a step of forming a resist mask can be omitted.

A portion where the cathode 7023, the light emitting layer 7024, and the anode 7025 overlap is a light emitting element 70.
This corresponds to 22. In the case of the pixel shown in FIG. 15C, light emitted from the light-emitting element 7022 is emitted to both the anode 7025 side and the cathode 7023 side as indicated by arrows.

Note that although an organic EL element is described here as a light-emitting element, an inorganic E element is used as a light-emitting element.
An L element can also be provided.

Although an example in which a thin film transistor (light emitting element driving TFT) for controlling driving of the light emitting element and the light emitting element are electrically connected is shown, a current control TFT is provided between the light emitting element driving TFT and the light emitting element. May be connected.

Note that the semiconductor device is not limited to the configuration shown in FIG. 15, and various modifications based on the technical idea disclosed in this specification are possible.

Next, the appearance and a cross section of a light-emitting display panel (also referred to as a light-emitting panel), which is one embodiment of a semiconductor device, will be described with reference to FIGS. FIG. 13A is a plan view of a panel in which a thin film transistor and a light-emitting element formed over a first substrate are sealed with a sealant between the second substrate and FIG. 13B. FIG. 13A corresponds to a cross-sectional view taken along line HI in FIG.

A pixel portion 4502 and signal line driver circuits 4503 a and 450 provided over the first substrate 4501.
3b and the scanning line driving circuits 4504a and 4504b, so as to surround the sealing material 4505.
Is provided. A second substrate 4506 is provided over the pixel portion 4502, the signal line driver circuits 4503a and 4503b, and the scan line driver circuits 4504a and 4504b. Accordingly, the pixel portion 4502, the signal line driver circuits 4503a and 4503b, and the scan line driver circuit 45 are used.
04a and 4504b are sealed together with a filler 4507 by a first substrate 4501, a sealant 4505, and a second substrate 4506. Thus, it is preferable to package (enclose) with a protective film (bonded film, ultraviolet curable resin film, etc.) or a cover material that has high air tightness and little degassing so as not to be exposed to the outside air.

In addition, a pixel portion 4502 and signal line driver circuits 4503a and 4503 provided over the first substrate 4501 are provided.
503b and the scan line driver circuits 4504a and 4504b each include a plurality of thin film transistors. FIG. 13B illustrates a thin film transistor 4510 included in the pixel portion 4502 and a thin film transistor 4509 included in the signal line driver circuit 4503a. doing.

As the thin film transistors 4509 and 4510, the highly reliable thin film transistor including the oxide semiconductor layer described in Embodiment 1 or 2 can be used. As the thin film transistor 4509 provided in the driver circuit, the thin film transistor 141 described in Embodiment 1 or 2,
143, as the thin film transistor 4510 arranged in the pixel, the thin film transistor 142
144 can be used. In this embodiment, thin film transistors 4509 and 4
Reference numeral 510 denotes an n-channel thin film transistor.

A back gate electrode 4540 is provided over the insulating layer 4544 so as to overlap with a channel formation region of the oxide semiconductor layer of the thin film transistor 4509 for the driver circuit. By providing the back gate electrode 4540 so as to overlap with the channel formation region of the oxide semiconductor layer, the amount of change in the threshold voltage of the thin film transistor 4509 before and after the BT test can be reduced. In addition, the potential of the back gate electrode 4540 may be the same as or different from that of the gate electrode layer of the thin film transistor 4509, and can function as a second gate electrode layer. Further, the potential of the back gate electrode 4540 may be GND, 0 V, or a floating state.

The thin film transistor 4509 has an insulating layer 4541 as a channel protective layer, and the thin film transistor 4510 has an insulating layer 4542 as a channel protective layer. Insulating layer 4
541 and 4542 may be formed using a material and a method similar to those of the channel protective layers 116 and 216 described in Embodiment 1. In addition, in order to reduce surface unevenness of the thin film transistor, the structure is covered with an insulating layer 4544 functioning as a planarization insulating film. Here, the insulating layer 4541,
As 4542, a silicon oxide film is formed by the sputtering method exemplified in Embodiment 1.

A protective insulating layer 4543 is formed over the thin film transistors 4509 and 4510. The protective insulating layer 4543 can be formed using a material and a method similar to those of the protective insulating film 107 described in Embodiment 1. Here, a silicon nitride film is formed as the protective insulating layer 4543 by a PCVD method.

In addition, an insulating layer 4544 is formed as the planarization insulating film. The insulating layer 4544 may be formed using a material and a method similar to those of the second protective insulating film 108 described in Embodiment 1. Here, acrylic is used for the insulating layer 4544.

4511 corresponds to a light-emitting element, and a first electrode layer 4517 that is a pixel electrode included in the light-emitting element 4511 is electrically connected to a source electrode layer or a drain electrode layer of the thin film transistor 4510. Note that the structure of the light-emitting element 4511 is a stacked structure of the first electrode layer 4517, the electroluminescent layer 4512, and the second electrode layer 4513; however, the structure is not limited to the structure shown. The structure of the light-emitting element 4511 can be changed as appropriate depending on the direction of light extracted from the light-emitting element 4511 or the like.

A partition 4520 is formed using an organic resin film, an inorganic insulating film, or organic polysiloxane.
In particular, a photosensitive material is preferably used so that an opening is formed over the first electrode layer 4517 and the side wall of the opening has an inclined surface formed with a continuous curvature.

The electroluminescent layer 4512 may be composed of a single layer or a plurality of layers stacked.

A protective film may be formed over the second electrode layer 4513 and the partition 4520 so that oxygen, hydrogen, moisture, carbon dioxide, or the like does not enter the light-emitting element 4511. As the protective film, a silicon nitride film,
A silicon nitride oxide film, a DLC film, or the like can be formed.

In addition, signal line driver circuits 4503a and 4503b, and scan line driver circuits 4504a and 4504b are used.
Alternatively, various signals and potentials supplied to the pixel portion 4502 are FPCs 4518a and 4518.
b.

The connection terminal electrode 4515 is formed from the same conductive film as the first electrode layer 4517 included in the light-emitting element 4511, and the terminal electrode 4516 is formed from the same conductive film as the source electrode layer and the drain electrode layer included in the thin film transistor 4509. .

The connection terminal electrode 4515 is electrically connected to a terminal included in the FPC 4518a through an anisotropic conductive film 4519.

For the substrate positioned in the direction in which light is extracted from the light-emitting element 4511, the second substrate must be light-transmitting. In that case, a light-transmitting material such as a glass plate, a plastic plate, a polyester film, or an acrylic film is used.

Further, as the filler 4507, an ultraviolet curable resin or a thermosetting resin can be used in addition to an inert gas such as nitrogen or argon, such as PVC (polyvinyl chloride), acrylic,
Polyimide, epoxy resin, silicone resin, PVB (polyvinyl butyral) or EV
A (ethylene vinyl acetate) can be used. For example, nitrogen may be used as the filler.

In addition, if necessary, a polarizing plate or a circularly polarizing plate (including an elliptical polarizing plate) on the emission surface of the light emitting element,
An optical film such as a retardation plate (λ / 4 plate, λ / 2 plate) or a color filter may be provided as appropriate. Further, an antireflection film may be provided on the polarizing plate or the circularly polarizing plate. For example, anti-glare treatment can be performed that diffuses reflected light due to surface irregularities and reduces reflection.

The signal line driver circuits 4503a and 4503b and the scan line driver circuits 4504a and 4504b may be mounted with a driver circuit formed using a single crystal semiconductor film or a polycrystalline semiconductor film over a separately prepared substrate. Further, only the signal line driver circuit, or a part thereof, or only the scanning line driver circuit, or only a part thereof may be separately formed and mounted, and is not limited to the configuration in FIG.

Through the above process, a highly reliable light-emitting display device (display panel) as a semiconductor device can be manufactured.

This embodiment can be implemented in appropriate combination with the structures described in the other embodiments.

(Embodiment 10)
The semiconductor device disclosed in this specification can be applied as electronic paper. Electronic paper can be used for electronic devices in various fields as long as they display information. For example, the electronic paper can be applied to an electronic book (electronic book), a poster, an advertisement in a vehicle such as a train, and a display on various cards such as a credit card. An example of the electronic device is illustrated in FIG.

FIG. 22 illustrates an example of an electronic book 2700. For example, the e-book reader 2700 has a housing 2
It is composed of two housings 701 and 2703. Housing 2701 and housing 27
03 is integrated with a shaft portion 2711 and can be opened and closed with the shaft portion 2711 as an axis. With such a configuration, an operation like a paper book can be performed.

A display portion 2705 and a display portion 2707 are incorporated in the housing 2701 and the housing 2703, respectively. The display unit 2705 and the display unit 2707 may be configured to display a continuous screen or may be configured to display different screens. By adopting a configuration in which different screens are displayed, for example, a sentence can be displayed on the right display unit (display unit 2705 in FIG. 22) and an image can be displayed on the left display unit (display unit 2707 in FIG. 22). .

FIG. 22 shows an example in which the housing 2701 is provided with an operation unit and the like. For example, the housing 2
701 includes a power source 2721, operation keys 2723, a speaker 2725, and the like. Pages can be turned with the operation keys 2723. Note that a keyboard, a pointing device, or the like may be provided on the same surface as the display portion of the housing. In addition, an external connection terminal (such as an earphone terminal, a USB terminal, or a terminal that can be connected to various cables such as an AC adapter and a USB cable), a recording medium insertion unit, and the like may be provided on the back and side surfaces of the housing. . Further, the e-book reader 2700 may have a structure having a function as an electronic dictionary.

Further, the e-book reader 2700 may have a configuration capable of transmitting and receiving information wirelessly. By radio
It is also possible to purchase desired book data from an electronic book server and download it.

(Embodiment 11)
The semiconductor device disclosed in this specification can be applied to a variety of electronic devices (including game machines). Examples of the electronic device include a television device (also referred to as a television or a television receiver), a monitor for a computer, a digital camera, a digital video camera, a digital photo frame, a mobile phone (also referred to as a mobile phone or a mobile phone device). ), Large game machines such as portable game machines, portable information terminals, sound reproducing devices, and pachinko machines.

FIG. 23A illustrates an example of a television device 9600. Television device 96
00 includes a display portion 9603 incorporated in a housing 9601. Images can be displayed on the display portion 9603. Further, here, a housing 9601 is provided by a stand 9605.
The structure which supported is shown.

The television device 9600 can be operated with an operation switch provided in the housing 9601 or a separate remote controller 9610. Channels and volume can be operated with operation keys 9609 provided in the remote controller 9610, and an image displayed on the display portion 9603 can be operated. The remote controller 9610 may be provided with a display portion 9607 for displaying information output from the remote controller 9610.

Note that the television set 9600 is provided with a receiver, a modem, and the like. General TV broadcasts can be received by a receiver, and connected to a wired or wireless communication network via a modem, so that it can be unidirectional (sender to receiver) or bidirectional (sender and receiver). It is also possible to perform information communication between each other or between recipients).

FIG. 23B illustrates an example of a digital photo frame 9700. For example, a digital photo frame 9700 has a display portion 9703 incorporated in a housing 9701. The display portion 9703 can display various images. For example, by displaying image data captured by a digital camera or the like, the display portion 9703 can function in the same manner as a normal photo frame.

Note that the digital photo frame 9700 includes an operation unit, an external connection terminal (USB terminal, US
A terminal that can be connected to various cables such as a B cable), a recording medium insertion portion, and the like. These configurations may be incorporated on the same surface as the display portion, but it is preferable to provide them on the side surface or the back surface because the design is improved. For example, digital photo frame 9700
A memory storing image data photographed by a digital camera can be inserted into the recording medium insertion unit, and the image data can be captured, and the captured image data can be displayed on the display unit 9703.

Further, the digital photo frame 9700 may be configured to transmit and receive information wirelessly. A configuration may be employed in which desired image data is captured and displayed wirelessly.

FIG. 24A illustrates a portable game machine including two housings, a housing 9881 and a housing 9891, which are connected with a joint portion 9893 so that the portable game machine can be opened or folded. A display portion 9882 is incorporated in the housing 9881, and a display portion 9883 is incorporated in the housing 9891. In addition, the portable game machine illustrated in FIG. 24A includes a speaker portion 9984, a recording medium insertion portion 988, and the like.
6, LED lamp 9890, input means (operation key 9885, connection terminal 9887, sensor 9
888 (force, displacement, position, velocity, acceleration, angular velocity, rotation speed, distance, light, liquid, magnetism, temperature,
Including a function of measuring chemical substances, sound, time, hardness, electric field, current, voltage, power, radiation, flow rate, humidity, gradient, vibration, odor or infrared), microphone 9889) and the like. Needless to say, the structure of the portable game machine is not limited to that described above, and may be any structure as long as it includes at least a semiconductor device disclosed in this specification, and can have a structure in which other accessory facilities are provided as appropriate. The portable game machine shown in FIG. 24A reads a program or data recorded in a recording medium and displays the program or data on a display unit, or performs wireless communication with another portable game machine to share information. It has a function. Note that the function of the portable game machine illustrated in FIG. 24A is not limited to this, and the portable game machine can have a variety of functions.

FIG. 24B illustrates an example of a slot machine 9900 which is a large-sized game machine. In the slot machine 9900, a display portion 9903 is incorporated in a housing 9901. In addition, the slot machine 9900 includes operation means such as a start lever and a stop switch, a coin slot, a speaker, and the like. Needless to say, the structure of the slot machine 9900 is not limited to that described above, and may be any structure as long as it includes at least a semiconductor device disclosed in this specification.

FIG. 25A is a perspective view illustrating an example of a portable computer.

A portable computer in FIG. 25A has an upper housing 9301 having a display portion 9303 with a hinge unit connecting the upper housing 9301 and the lower housing 9302 closed, and a lower housing 9302 having a keyboard 9304. Are convenient to carry, and when the user performs keyboard input, the hinge unit is opened and an input operation can be performed while viewing the display portion 9303.

In addition to the keyboard 9304, the lower housing 9302 includes a pointing device 9306 that performs an input operation. When the display portion 9303 is a touch input panel, an input operation can be performed by touching part of the display portion. The lower housing 9302 has arithmetic function units such as a CPU and a hard disk. Further, the lower housing 9302 is provided with another device such as a U
It has an external connection port 9305 into which a communication cable compliant with the SB communication standard is inserted.

The upper housing 9301 can be further slid into the upper housing 9301 and stored therein.
07, and a wide display screen can be realized. Further, the display unit 93 that can be stored is provided.
The user can adjust the screen orientation of 07. Further, when the storable display portion 9307 is a touch input panel, an input operation can be performed by touching a part of the storable display portion.

The display portion 9303 or the retractable display portion 9307 uses a video display device such as a liquid crystal display panel, a light-emitting display panel such as an organic light-emitting element or an inorganic light-emitting element.

In addition, the portable computer in FIG. 25A can be provided with a receiver and the like and can receive a television broadcast to display an image on the display portion or the display portion. In addition, the upper housing 93
The display unit 930 remains closed with the hinge unit connecting the 01 and the lower housing 9302 closed.
7 can be slid to expose the entire screen, and the screen angle can be adjusted to allow the user to watch TV broadcasts. In this case, since the hinge unit is opened and the display portion 9303 is not displayed and only the circuit for displaying the television broadcast is activated, the power consumption can be minimized, and the battery capacity can be limited. It is useful in portable computers that are used.

FIG. 25B is a perspective view showing an example of a mobile phone having a form that can be worn on a user's arm like a wristwatch.

This cellular phone includes a communication device having a telephone function and a battery, a main body having a battery, a band portion 9204 for mounting the main body on an arm, an adjustment portion 9205 for adjusting a fixed state of the band portion with respect to the arm, a display portion 9201, and a speaker 9207. , And a microphone 9208.

In addition, the main body has an operation switch 9203, and in addition to a power input switch, a display changeover switch, an imaging start instruction switch, for example, when a button is pressed, an Internet program is started, for example, to associate each function. Can do.

This input operation of the cellular phone is performed by touching the display portion 9201 with a finger, an input pen, or the like, by operating the operation switch 9203, or by inputting voice to the microphone 9208. Note that FIG. 25B illustrates a display button 9202 displayed on the display portion 9201, and input can be performed by touching with a finger or the like.

In addition, the main body includes a camera unit 9206 having an imaging unit that converts a subject image formed through the photographing lens into an electronic image signal. Note that the camera unit is not necessarily provided.

In addition, the cellular phone illustrated in FIG. 25B includes a television broadcast receiver and the like, can receive television broadcast and display video on the display portion 9201, and can be a storage device such as a memory. The TV broadcast can be recorded in the memory. In addition, FIG.
The mobile phone shown in FIG. 6 may have a function of collecting position information such as GPS.

The display portion 9201 uses a video display device such as a liquid crystal display panel, a light-emitting display panel such as an organic light-emitting element or an inorganic light-emitting element. Since the cellular phone shown in FIG. 25B is small and lightweight, its battery capacity is limited, and a display device used for the display portion 9201 is preferably a panel that can be driven with low power consumption.

Note that FIG. 25B illustrates an electronic device of a type attached to an “arm”; however, there is no particular limitation, and any electronic device having a shape that can be carried is acceptable.

(Embodiment 12)
In this embodiment, as an example of a semiconductor device, a display device including the thin film transistor described in any of Embodiments 1 to 5 will be described with reference to FIGS. In this embodiment, an example of a liquid crystal display device using a liquid crystal element as a display element will be described with reference to FIGS. The thin film transistors described in any of Embodiments 1 to 5 can be applied to the TFTs 628 and 629 used in the liquid crystal display devices in FIGS. 26 to 39, and the electrical characteristics and characteristics that can be similarly manufactured in the steps described in Embodiments 1 to 5 can be applied. It is a highly reliable thin film transistor. The TFT 628 has a channel protective layer 608, and the TFT 629 has a channel protective layer 611, and is an inverted staggered thin film transistor having an oxide semiconductor layer as a channel formation region.

First, a VA (vertical alignment) liquid crystal display device is described. A VA liquid crystal display device is a type of a method for controlling the alignment of liquid crystal molecules of a liquid crystal display panel. The VA liquid crystal display device is a method in which liquid crystal molecules face a vertical direction with respect to a panel surface when no voltage is applied. In the present embodiment, the pixel (pixel) is divided into several regions (sub-pixels), and each molecule is devised to tilt the molecules in different directions. This is called multi-domain or multi-domain design. In the following description, a liquid crystal display device considering multi-domain design will be described.

27 and 28 show a pixel electrode and a counter electrode, respectively. FIG. 27 is a plan view of the substrate side on which the pixel electrode is formed, and FIG. 26 shows a cross-sectional structure corresponding to the cutting line EF shown in the drawing. FIG. 28 is a plan view of the substrate side on which the counter electrode is formed. The following description will be given with reference to these drawings.

In FIG. 26, the TFT 600, the pixel electrode layer 624 connected to the TFT 628, the substrate 600 on which the storage capacitor portion 630 is formed, and the counter substrate 601 on which the counter electrode layer 640 and the like are formed are overlaid and liquid crystal is injected. Indicates the state.

A colored film 636 and a counter electrode layer 640 are formed over the counter substrate 601, and a protrusion 644 is formed over the counter electrode layer 640. An alignment film 648 is formed over the pixel electrode layer 624, and similarly, an alignment film 646 is formed over the counter electrode layer 640 and the protrusion 644. A liquid crystal layer 650 is formed between the substrate 600 and the counter substrate 601.

On the substrate 600, the TFT 628, the pixel electrode layer 624 connected to the TFT 628, and the storage capacitor 6
30 is formed. The pixel electrode layer 624 includes the TFT 628, the wiring 616, and the storage capacitor portion 6.
The contact hole 623 that penetrates the insulating film 620 covering 30 and the insulating film 622 covering the insulating film 620 is connected to the wiring 618. As the TFT 628, the thin film transistor described in any of Embodiments 1 to 5 can be used as appropriate. The storage capacitor portion 630 includes a first capacitor wiring 604 formed simultaneously with the gate wiring 602 of the TFT 628, a gate insulating film 606, and a second capacitor wiring 617 formed simultaneously with the wirings 616 and 618.

The pixel electrode layer 624, the liquid crystal layer 650, and the counter electrode layer 640 overlap with each other, so that a liquid crystal element is formed.

FIG. 27 shows a structure on the substrate 600. The pixel electrode layer 624 is formed using the material described in Embodiment Mode 1. A slit 625 is provided in the pixel electrode layer 624. The slit 625 is for controlling the alignment of the liquid crystal.

The TFT 629 and the pixel electrode layer 626 and the storage capacitor portion 631 connected to the TFT 629 shown in FIG.
Each can be formed in the same manner as the TFT 628, the pixel electrode layer 624, and the storage capacitor portion 630. Both the TFT 628 and the TFT 629 are connected to the wiring 616. A pixel (pixel) of the liquid crystal display panel includes a pixel electrode layer 624 and a pixel electrode layer 626. The pixel electrode layer 624 and the pixel electrode layer 626 are subpixels.

FIG. 28 shows a planar structure on the counter substrate side. A counter electrode layer 640 is formed over the light shielding film 632. The counter electrode layer 640 is preferably formed using a material similar to that of the pixel electrode layer 624. On the counter electrode layer 640, a protrusion 644 for controlling the alignment of the liquid crystal is formed. Note that in FIG. 28, the pixel electrode layer 624 and the pixel electrode layer 626 formed over the substrate 600 are indicated by broken lines, and the counter electrode layer 640 and the pixel electrode layer 624 and the pixel electrode layer 626 are overlapped with each other. Show.

An equivalent circuit of this pixel structure is shown in FIG. The TFTs 628 and 629 are both connected to the gate wiring 602 and the wiring 616. In this case, the liquid crystal element 651 and the liquid crystal element 652 can be operated differently by changing the potentials of the capacitor wiring 604 and the capacitor wiring 605. That is, by controlling the potentials of the capacitor wiring 604 and the capacitor wiring 605 individually, the orientation of the liquid crystal is precisely controlled to widen the viewing angle.

When a voltage is applied to the pixel electrode layer 624 provided with the slit 625, electric field distortion (an oblique electric field) is generated in the vicinity of the slit 625. By arranging the slits 625 and the protrusions 644 on the counter substrate 601 to alternately engage with each other, an oblique electric field is effectively generated to control the alignment of the liquid crystal, so that the direction in which the liquid crystal is aligned can be determined. It is different depending on. That is,
The viewing angle of the liquid crystal display panel is expanded by making it multi-domain.

Next, a VA liquid crystal display device different from the above is described with reference to FIGS.

30 and 31 show a pixel structure of a VA liquid crystal display panel. FIG. 31 shows a substrate 600.
FIG. 30 shows a cross-sectional structure corresponding to the cutting line YZ shown in the figure.

In this pixel structure, a single pixel has a plurality of pixel electrodes, and a TFT is connected to each pixel electrode. Each TFT is configured to be driven by a different gate signal. In other words, a multi-domain designed pixel has a configuration in which signals applied to individual pixel electrodes are controlled independently.

The pixel electrode layer 624 is connected to the TFT 628 through a wiring 618 in a contact hole 623 that penetrates the insulating film 622. The pixel electrode layer 626 is connected to the TFT 629 through a wiring 619 in a contact hole 627 that penetrates the insulating film 622. The gate wiring 602 of the TFT 628 and the gate wiring 603 of the TFT 629 are separated so that different gate signals can be given. On the other hand, the wiring 616 functioning as a data line is used in common by the TFT 628 and the TFT 629. TFT628
As the TFT 629, the thin film transistor described in any of Embodiments 1 to 5 can be used as appropriate. Note that the gate insulating film 6 is formed over the gate wiring 602, the gate wiring 603, and the capacitor wiring 690.
06 is formed.

The pixel electrode layer 624 and the pixel electrode layer 626 have different shapes, and the pixel electrode layer 626 is formed so as to surround the outside of the pixel electrode layer 624 that extends in a V shape. The voltage applied to the pixel electrode layer 624 and the pixel electrode layer 626 is different depending on the TFT 628 and the TFT 629, thereby controlling the alignment of the liquid crystal. An equivalent circuit of this pixel structure is shown in FIG. The TFT 628 is connected to the gate wiring 602, and the TFT 629 is connected to the gate wiring 603. T
Both the FT 628 and the TFT 629 are connected to the wiring 616. By giving different gate signals to the gate wiring 602 and the gate wiring 603, the liquid crystal element 651 and the liquid crystal element 652 can be operated differently. That is, by individually controlling the operations of the TFTs 628 and 629, the liquid crystal orientation of the liquid crystal elements 651 and 652 can be precisely controlled to widen the viewing angle.

A colored film 636 and a counter electrode layer 640 are formed over the counter substrate 601. In addition, a planarization film 637 is formed between the coloring film 636 and the counter electrode layer 640 to prevent liquid crystal alignment disorder. FIG. 32 shows a planar structure on the counter substrate side. The counter electrode layer 640 is a common electrode between different pixels, but a slit 641 is formed. By disposing the slits 641 and the pixel electrode layers 624 and the slits 625 on the pixel electrode layer 626 side so as to alternately engage with each other, an oblique electric field can be effectively generated to control the alignment of the liquid crystal. Thereby, the direction in which the liquid crystal is aligned can be varied depending on the location, and the viewing angle is widened.
Note that in FIG. 32, the pixel electrode layer 624 and the pixel electrode layer 626 formed over the substrate 600 are indicated by broken lines, and the counter electrode layer 640 is overlapped with the pixel electrode layer 624 and the pixel electrode layer 626. Show.

An alignment film 648 is formed over the pixel electrode layer 624 and the pixel electrode layer 626, and an alignment film 646 is also formed over the counter electrode layer 640. A liquid crystal layer 650 is formed between the substrate 600 and the counter substrate 601. In addition, the pixel electrode layer 624, the liquid crystal layer 650, and the counter electrode layer 640
Are overlapped to form the first liquid crystal element. In addition, the pixel electrode layer 626, the liquid crystal layer 650, and the counter electrode layer 640 overlap with each other, whereby a second liquid crystal element is formed. The pixel structure of the display panel described with reference to FIGS. 30 to 33 has a multi-domain structure in which a first liquid crystal element and a second liquid crystal element are provided in one pixel.

Next, a horizontal electric field liquid crystal display device is described. The horizontal electric field method is a method of expressing gradation by driving a liquid crystal by applying an electric field in a horizontal direction to liquid crystal molecules in a cell. According to this method, the viewing angle can be expanded to about 180 degrees. In the following description, a liquid crystal display device adopting a horizontal electric field method will be described.

FIG. 34 shows a state in which the substrate 600 on which the electrode layer 607, the TFT 628, and the pixel electrode layer 624 connected to the TFT 628 are formed and the counter substrate 601 are overlapped and liquid crystal is injected. On the counter substrate 601, a coloring film 636, a planarization film 637, and the like are formed. Note that a counter electrode is not provided on the counter substrate 601 side. A liquid crystal layer 650 is formed between the substrate 600 and the counter substrate 601 with the alignment film 646 and the alignment film 648 interposed therebetween.

On the substrate 600, an electrode layer 607, a capacitor wiring 604 connected to the electrode layer 607, and T
FT 628 is formed. The capacitor wiring 604 can be formed at the same time as the gate wiring 602 of the TFT 628. As the TFT 628, the thin film transistor described in any of Embodiments 1 to 5 can be used. The electrode layer 607 can be formed using a material similar to that of the pixel electrode layer described in Embodiments 1 to 5. Further, the electrode layer 607 is formed in a shape partitioned into substantially pixel shapes. Note that a gate insulating film 606 is formed over the electrode layer 607 and the capacitor wiring 604.

A wiring 616 and a wiring 618 of the TFT 628 are formed over the gate insulating film 606. Wiring 61
A data line 6 for carrying a video signal in the liquid crystal display panel is a wiring extending in one direction, and at the same time, is connected to a source region or a drain region of the TFT 628 and becomes one of a source electrode and a drain electrode. A wiring 618 serves as the other electrode of the source and drain and is connected to the pixel electrode layer 624.

An insulating film 620 is formed over the wirings 616 and 618. In addition, over the insulating film 620, the pixel electrode layer 6 connected to the wiring 618 in a contact hole formed in the insulating film 620.
24 is formed. The pixel electrode layer 624 is formed using a material similar to that of the pixel electrode described in Embodiment 1.

In this manner, the TFT 628 and the pixel electrode layer 624 connected to the TFT 628 are formed over the substrate 600. Note that the storage capacitor is formed between the electrode layer 607 and the pixel electrode layer 624.

FIG. 35 is a plan view showing the configuration of the pixel electrode. FIG. 34 shows a cross-sectional structure corresponding to the cutting line OP shown in FIG. A slit 625 is provided in the pixel electrode layer 624. The slit 625 is for controlling the alignment of the liquid crystal. In this case, an electric field is generated between the electrode layer 607 and the pixel electrode layer 624. A gate insulating film 606 is formed between the electrode layer 607 and the pixel electrode layer 624, and the thickness of the gate insulating film 606 is 50 to 200 nm.
Since the thickness of the liquid crystal layer is 10 μm, which is sufficiently thin, an electric field is generated in a direction substantially parallel to the substrate 600 (horizontal direction). The orientation of the liquid crystal is controlled by this electric field. Liquid crystal molecules are rotated horizontally using an electric field in a direction substantially parallel to the substrate. In this case, since the liquid crystal molecules are horizontal in any state, there is little influence of contrast or the like depending on the viewing angle, and the viewing angle is widened. In addition, since the electrode layer 607 and the pixel electrode layer 624 are both light-transmitting electrodes, the aperture ratio can be improved.

Next, another example of a horizontal electric field liquid crystal display device is described.

36 and 37 show a pixel structure of an IPS liquid crystal display device. FIG. 37 is a plan view, and FIG. 36 shows a cross-sectional structure corresponding to the cutting line V-W shown in the drawing. The following description will be given with reference to both the drawings.

36 shows a substrate 600 on which a TFT 628 and a pixel electrode layer 624 connected thereto are formed,
The counter substrate 601 is overlaid and liquid crystal is injected. A coloring film 636, a planarization film 637, and the like are formed over the counter substrate 601. Note that a counter electrode is not provided on the counter substrate 601 side. An alignment film 646 and an alignment film 64 are provided between the substrate 600 and the counter substrate 601.
A liquid crystal layer 650 is formed via 8.

A common potential line 609 and a TFT 628 are formed over the substrate 600. Common potential line 60
9 can be formed simultaneously with the gate wiring 602 of the TFT 628. As the TFT 628, the thin film transistor described in any of Embodiments 1 to 5 can be used.

A wiring 616 and a wiring 618 of the TFT 628 are formed over the gate insulating film 606. Wiring 61
A data line 6 for carrying a video signal in the liquid crystal display panel is a wiring extending in one direction, and at the same time, is connected to a source region or a drain region of the TFT 628 and becomes one of a source electrode and a drain electrode. A wiring 618 serves as the other electrode of the source and drain and is connected to the pixel electrode layer 624.

An insulating film 620 is formed over the wirings 616 and 618. Further, a pixel electrode layer 624 connected to the wiring 618 is formed over the insulating film 620 through a contact hole 623 formed in the insulating film 620. The pixel electrode layer 624 is formed using a material similar to that of the pixel electrode described in any of Embodiments 1 to 5. As shown in FIG. 37, the pixel electrode layer 624 is formed so as to generate a lateral electric field with a comb-shaped electrode formed simultaneously with the common potential line 609. In addition, comb-shaped portions of the pixel electrode layer 624 are formed so as to alternately mesh with comb-shaped electrodes formed simultaneously with the common potential line 609.

When an electric field is generated between the potential applied to the pixel electrode layer 624 and the potential of the common potential line 609,
The orientation of the liquid crystal is controlled by this electric field. Liquid crystal molecules are rotated horizontally using an electric field in a direction substantially parallel to the substrate. In this case, since the liquid crystal molecules are horizontal in any state, there is little influence of contrast or the like depending on the viewing angle, and the viewing angle is widened.

In this manner, the TFT 628 and the pixel electrode layer 624 connected to the TFT 628 are formed over the substrate 600. The storage capacitor is formed by providing a gate insulating film 606 between the common potential line 609 and the capacitor electrode 615. The capacitor electrode 615 and the pixel electrode layer 624 are in contact holes 63.
3 is connected.

Next, a form of a TN liquid crystal display device is described.

38 and 39 show a pixel structure of a TN liquid crystal display device. FIG. 39 is a plan view, and FIG. 38 shows a cross-sectional structure corresponding to the cutting line KL shown in the figure. The following description will be given with reference to both the drawings.

The pixel electrode layer 624 is connected to the TFT 628 through a contact hole 623 and a wiring 618 formed in the insulating film 620. The wiring 616 functioning as a data line is formed of the TFT 62
8 is connected. Any of the TFTs described in Embodiments 1 to 5 can be applied to the TFT 628.

The pixel electrode layer 624 is formed using the pixel electrode described in any of Embodiments 1 to 5. The capacitor wiring 604 can be formed at the same time as the gate wiring 602 of the TFT 628. A gate insulating film 606 is formed over the gate wiring 602 and the capacitor wiring 604. A storage capacitor is formed between the capacitor wiring 604 and the capacitor electrode 615 with a gate insulating film 606 interposed therebetween.

A colored film 636 and a counter electrode layer 640 are formed over the counter substrate 601. In addition, a planarization film 637 is formed between the coloring film 636 and the counter electrode layer 640 to prevent liquid crystal alignment disorder. The liquid crystal layer 650 is formed between the pixel electrode layer 624 and the counter electrode layer 640 with an alignment film 648 and an alignment film 646 interposed therebetween.

The pixel electrode layer 624, the liquid crystal layer 650, and the counter electrode layer 640 overlap with each other, so that a liquid crystal element is formed.

Further, the coloring film 636 may be formed on the substrate 600 side. In addition, a polarizing plate is attached to the surface of the substrate 600 opposite to the surface on which the thin film transistor is formed, and the counter substrate 601 is attached.
A polarizing plate is bonded to the surface opposite to the surface on which the counter electrode layer 640 is formed.

Through the above process, a liquid crystal display device can be manufactured as a display device. The liquid crystal display device of this embodiment is a liquid crystal display device with a high aperture ratio.

(Embodiment 13)
In this embodiment, an example in which an oxide semiconductor layer is surrounded by a nitride insulating film as viewed from a cross section is illustrated in FIGS. 40 is the same as the oxide insulating layer 416 except that the top surface shape and end position of the oxide insulating layer 416 are different from those in FIG. 1A and the structure of the gate insulating layer. Therefore, detailed description of the same portions is omitted. To do.

The thin film transistor 410 provided in the driver circuit is a channel stop thin film transistor. Over a substrate 400 having an insulating surface, a gate electrode layer 411, a gate insulating layer 402 including a nitride insulating film, at least an oxide semiconductor layer 413, 1 low resistance N-type region 414a
, And an oxide semiconductor layer having a second low-resistance N-type region 414b, a source electrode layer 415a,
And a drain electrode layer 415b. An oxide insulating layer 416 that functions as a channel protective layer is provided in contact with the channel formation region of the oxide semiconductor layer 413.

The thin film transistor 420 provided in the pixel is a channel stop thin film transistor like the thin film transistor 410, and includes a gate electrode layer 421, a gate insulating layer 402 including a nitride insulating film, an oxide semiconductor layer 422, and a source electrode layer 425a. And a drain electrode layer 425b. An oxide insulating layer 426 that functions as a channel protective layer is provided in contact with the channel formation region of the oxide semiconductor layer 422.

Note that when the oxide insulating layer 416 and the oxide insulating layer 426 are formed by a photolithography step, the gate insulating layer 402 outside the thin film transistors 410 and 420 is formed.
Process so that is exposed.

Further, a protective insulating layer 403 made of a nitride insulating film is formed so as to cover the upper surfaces and side surfaces of the thin film transistors 410 and 420.

A first low resistance N-type region 414a is formed in a self-aligning manner in contact with the lower surface of the source electrode layer 415a. A second low resistance N-type region 414b is formed in a self-aligning manner in contact with the lower surface of the drain electrode layer 405b. In addition, the channel formation region of the oxide semiconductor layer 413 is in contact with the oxide insulating layer 416 and has a small thickness, so that the first low-resistance N-type region 4 is formed.
14a and the second low-resistance N-type region 414b are higher resistance regions (I-type regions).

In addition, the gate insulating layer 402 formed of a nitride insulating film is in contact with the lower surface of the channel formation region of the oxide semiconductor layer 413, the first low-resistance N-type region 414a, and the second low-resistance N-type region 414b.
Is formed.

The protective insulating layer 403 formed of a nitride insulating film is formed of moisture such as a silicon nitride film, a silicon oxynitride film, an aluminum nitride film, or an aluminum oxynitride film obtained by sputtering, hydrogen ions, O
An inorganic insulating film that does not contain impurities such as H ⁻ and blocks entry of these from the outside is used.

In this embodiment mode, the protective insulating layer 403 made of a nitride insulating film is used as the thin film transistor 4.
10 and an RF sputtering method so as to surround the upper surface and side surfaces of the thin film transistor 420,
A silicon nitride film with a thickness of 100 nm is provided. Further, outside the thin film transistor 410 and the thin film transistor 420, the protective insulating layer 403 is formed of a gate insulating layer 40 made of a nitride insulating film.
2 is in contact with the structure.

With the structure shown in FIG. 40, entry of moisture from the outside can be prevented in the manufacturing process after the formation of the protective insulating layer 403 made of a nitride insulating film. Further, even after a device is completed as a semiconductor device, for example, a liquid crystal display device, intrusion of moisture from the outside can be prevented for a long time, and the long-term reliability of the device can be improved.

In this embodiment mode, a structure in which one thin film transistor is surrounded by a nitride insulating film is shown; however, there is no particular limitation, and a plurality of thin film transistors may be surrounded by a nitride insulating film. A configuration may be adopted in which the insulating layers are collectively surrounded by nitride insulating films. A region where the protective insulating layer 403 and the gate insulating layer 402 are in contact with each other may be provided so as to surround at least the periphery of the pixel portion of the active matrix substrate.

This embodiment can be freely combined with any of the other embodiments.

10 pulse output circuit 11 wiring 12 wiring 13 wiring 14 wiring 15 wiring 21 input terminal 22 input terminal 23 input terminal 24 input terminal 25 input terminal 26 output terminal 27 output terminal 31 transistor 32 transistor 33 transistor 34 transistor 35 transistor 36 transistor 37 transistor 38 Transistor 39 Transistor 40 Transistor 41 Transistor 42 Transistor 43 Transistor 51 Power supply line 52 Power supply line 53 Power supply line 61 Period 62 Period 100 Substrate 102 Gate insulating film 102b Gate insulating film 107 Protective insulating film 107a Protective insulating film 108 Protective insulating film 111 Bottom gate electrode 113 oxide semiconductor layer 113a oxide semiconductor layer 113b oxide semiconductor layer 113c oxide semiconductor layer 113d oxide semiconductor region 114a Layer 114b conductive layer 115a conductive layer 115b conductive layer 116 channel protective layer 125 contact hole 128 pixel electrode 129 back gate electrode 134 resist mask 135 resist mask 141 thin film transistor 142 thin film transistor 143 thin film transistor 144 thin film transistor 146 thin film transistor 200 substrate 202a gate insulating layer 202b gate Insulating layer 203 Protective insulating layer 204 Protective insulating layer 210 Thin film transistor 211 Bottom gate electrode 213 Oxide semiconductor layer 213a Oxide semiconductor layer 213b Oxide semiconductor layer 213c Oxide semiconductor layer 213d Oxide semiconductor region 214a Source electrode or drain electrode 214b Source electrode Or drain electrode 215a conductive layer 215b conductive layer 216 channel protection 217 conductive layer 220 thin film transistor 224 contact hole 227 pixel electrode layer 230 capacitive wiring layer 231 capacitive electrode 232 gate wiring layer 234 source wiring 235 terminal electrode 236 metal wiring layer 237 metal wiring layer 238 gate wiring layer 240 thin film transistor 241 metal wiring layer 242 metal wiring Layer 250 capacitor wiring layer 251 oxide semiconductor layer 400 substrate 402 gate insulating layer 403 protective insulating layer 405b drain electrode layer 410 thin film transistor 411 gate electrode layer 413 oxide semiconductor layer 414a low resistance N-type region 414b low resistance N-type region 415a source electrode Layer 415b drain electrode layer 416 oxide insulating layer 420 thin film transistor 421 gate electrode layer 422 oxide semiconductor layer 425a source electrode layer 425b drain electrode layer 426 oxide insulating layer 5 80 Substrate 581 Thin film transistor 583 Insulating layer 585 Insulating layer 587 Electrode layer 588 Electrode layer 589 Spherical particle 590a Black region 590b White region 594 Cavity 595 Filler 596 Substrate 600 Substrate 601 Counter substrate 602 Gate wiring 603 Gate wiring 604 Capacitance wiring 605 Capacitance wiring 606 Gate insulating film 607 Electrode layer 608 Channel protective layer 609 Common potential line 611 Channel protective layer 615 Capacitance electrode 616 Wiring 617 Capacitance wiring 618 Wiring 619 Wiring 620 Insulating film 622 Insulating film 623 Contact hole 624 Pixel electrode layer 625 Slit 626 Pixel electrode layer 627 Contact hole 628 TFT
629 TFT
630 Retention capacitance portion 631 Retention capacitance portion 632 Light shielding film 633 Contact hole 636 Colored film 637 Flattening film 640 Counter electrode layer 641 Slit 644 Protrusion 646 Alignment film 648 Alignment film 651 Liquid crystal element 652 Liquid crystal element 690 Capacitance wiring 2600 TFT substrate 2601 Counter substrate 2602 Sealing material 2603 Pixel portion 2604 Display element 2605 Colored layer 2606 Polarizing plate 2607 Polarizing plate 2608 Wiring circuit portion 2609 Flexible wiring substrate 2610 Cold cathode tube 2611 Reflecting plate 2612 Circuit substrate 2613 Diffusing plate 2700 Electronic book 2701 Case 2703 Case Body 2705 Display unit 2707 Display unit 2711 Shaft unit 2721 Power supply 2723 Operation key 2725 Speaker 4001 Substrate 4002 Pixel unit 4003 Signal line driver circuit 4004 Scan line driver circuit 400 Sealing material 4006 substrate 4008 liquid crystal layer 4010 thin film transistors 4011 TFT 4013 liquid crystal element 4015 connection terminal electrode 4016 terminal electrodes 4018 FPC
4019 Anisotropic conductive film 4020 Insulating layer 4021 Insulating layer 4030 Pixel electrode layer 4031 Counter electrode layer 4032 Insulating layer 4035 Spacer 4040 Back gate electrode 4041 Insulating layer 4042 Insulating layer 4501 Substrate 4502 Pixel portion 4503a Signal line driver circuit 4504a Scan line driver circuit 4505 Sealant 4506 Substrate 4507 Filler 4509 Thin film transistor 4510 Thin film transistor 4511 Light emitting element 4512 Electroluminescent layer 4513 Electrode layer 4515 Connection terminal electrode 4516 Terminal electrode 4517 Electrode layer 4518a FPC
4518b FPC
4519 Anisotropic conductive film 4520 Partition 4540 Back gate electrode 4541 Insulating layer 4542 Insulating layer 4543 Insulating layer 4544 Insulating layer 5300 Substrate 5301 Pixel portion 5302 Scan line driver circuit 5303 Scan line driver circuit 5304 Signal line driver circuit 5305 Timing control circuit 5601 Shift Register 5602 Switching circuit 5603 Thin film transistor 5604 Wiring 5605 Wiring 6400 Pixel 6401 Switching transistor 6402 Driving transistor 6403 Capacitance element 6404 Light emitting element 6405 Signal line 6406 Scanning line 6407 Power supply line 6408 Common electrode 7001 TFT
7002 Light-emitting element 7003 Cathode 7004 Light-emitting layer 7005 Anode 7008 Cathode 7009 Partition 7011 Driving TFT
7012 Light emitting element 7013 Cathode 7014 Light emitting layer 7015 Anode 7016 Shielding film 7017 Conductive film 7018 Conductive film 7019 Partition 7021 Driving TFT
7022 Light emitting element 7023 Cathode 7024 Light emitting layer 7025 Anode 7027 Conductive film 7028 Conductive film 7029 Bulkhead 9201 Display unit 9202 Display button 9203 Operation switch 9204 Band unit 9205 Adjusting unit 9206 Camera unit 9207 Speaker 9208 Microphone 9301 Upper housing 9302 Lower housing 9303 Display Unit 9304 Keyboard 9305 External connection port 9306 Pointing device 9307 Display unit 9600 Television apparatus 9601 Case 9603 Display unit 9605 Stand 9607 Display unit 9609 Operation key 9610 Remote controller 9700 Digital photo frame 9701 Case 9703 Display unit 9881 Case 9882 Display Part 9883 display part 9984 speaker part 9885 input means (operation key)
9886 Recording medium insertion portion 9887 Connection terminal 9888 Sensor 9889 Microphone 9890 LED lamp 9891 Case 9893 Connection portion 9900 Slot machine 9901 Case 9903 Display portion

Claims (3)

On the substrate, a first gate electrode included in the transistor of the driver circuit portion and a second gate electrode included in the transistor of the pixel portion are formed,
Forming a gate insulating layer on the first gate electrode and the second gate electrode;
A first oxide semiconductor layer is formed on the gate insulating layer so as to partially overlap the first gate electrode, and a second oxide is partially overlapped with the second gate electrode. Forming a semiconductor layer,
Forming a first channel protective layer in contact with a part on the first oxide semiconductor layer, and forming a second channel protective layer in contact with a part on the second oxide semiconductor layer;
Forming a light-transmitting conductive film over the first channel protective layer, the first oxide semiconductor layer, the second channel protective layer, and the second oxide semiconductor layer;
Gold Shokushirube conductive film is formed over the conductive film having the light-transmitting,
The conductive film and the gold Shokushirube film having a light transmitting property using the first resist mask by etching, a part of a portion of the first channel protective layer and the second channel protective layer exposing the conductive film and the first gold Shokushirube film having a first light-transmitting on the first channel protective layer and the first oxide semiconductor layer, the second channel protective layer forming upper and the conductive film and the second metal Shokushirube film having a second light-transmitting said second oxide semiconductor layer at the same time,
Etching the second metal Shokushirube film using the second resist mask covering the first metal conductive film,
The method for manufacturing a semiconductor device, wherein the second gate electrode, the gate insulating layer, the second oxide semiconductor layer, and the second channel protective layer have a light-transmitting property . In claim 1,
After etching the second metal Shokushirube film, the first channel protective layer, the second channel protective layer, the first gold Shokushirube film, and a second light-transmitting Forming an insulating film on the conductive film;
Forming a pixel electrode layer electrically connected to the second light-transmitting conductive film and a conductive film overlapping with a part of the first oxide semiconductor layer over the insulating film; A method for manufacturing a semiconductor device. In claim 1 or 2 ,
The method for manufacturing a semiconductor device, wherein the first oxide semiconductor layer and the second oxide semiconductor layer include indium, gallium, and zinc.

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