JP5398388B2 - 不揮発性半導体記憶装置 - Google Patents
不揮発性半導体記憶装置 Download PDFInfo
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- JP5398388B2 JP5398388B2 JP2009155825A JP2009155825A JP5398388B2 JP 5398388 B2 JP5398388 B2 JP 5398388B2 JP 2009155825 A JP2009155825 A JP 2009155825A JP 2009155825 A JP2009155825 A JP 2009155825A JP 5398388 B2 JP5398388 B2 JP 5398388B2
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- element isolation
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- 239000004065 semiconductor Substances 0.000 title claims description 19
- 230000015654 memory Effects 0.000 claims description 88
- 238000003860 storage Methods 0.000 claims description 40
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 30
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 27
- 230000001590 oxidative effect Effects 0.000 claims description 7
- 230000004075 alteration Effects 0.000 claims 1
- 238000009413 insulation Methods 0.000 claims 1
- 230000000149 penetrating effect Effects 0.000 claims 1
- 238000002955 isolation Methods 0.000 description 44
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 21
- 229910052814 silicon oxide Inorganic materials 0.000 description 21
- 239000000758 substrate Substances 0.000 description 19
- 229910004298 SiO 2 Inorganic materials 0.000 description 18
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 17
- 238000010438 heat treatment Methods 0.000 description 16
- 238000004519 manufacturing process Methods 0.000 description 16
- 229910052710 silicon Inorganic materials 0.000 description 16
- 239000010703 silicon Substances 0.000 description 16
- 238000000034 method Methods 0.000 description 15
- 230000014759 maintenance of location Effects 0.000 description 10
- 239000007800 oxidant agent Substances 0.000 description 10
- 239000000463 material Substances 0.000 description 9
- 239000010410 layer Substances 0.000 description 7
- 229910052735 hafnium Inorganic materials 0.000 description 6
- -1 hafnium aluminate Chemical class 0.000 description 6
- 230000002093 peripheral effect Effects 0.000 description 6
- QVQLCTNNEUAWMS-UHFFFAOYSA-N barium oxide Chemical compound [Ba]=O QVQLCTNNEUAWMS-UHFFFAOYSA-N 0.000 description 5
- 238000001020 plasma etching Methods 0.000 description 5
- 229920001709 polysilazane Polymers 0.000 description 5
- IATRAKWUXMZMIY-UHFFFAOYSA-N strontium oxide Chemical compound [O-2].[Sr+2] IATRAKWUXMZMIY-UHFFFAOYSA-N 0.000 description 5
- 238000012546 transfer Methods 0.000 description 5
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 4
- 230000008878 coupling Effects 0.000 description 4
- 238000010168 coupling process Methods 0.000 description 4
- 238000005859 coupling reaction Methods 0.000 description 4
- 238000005468 ion implantation Methods 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 238000000231 atomic layer deposition Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 3
- 239000000395 magnesium oxide Substances 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- 125000006850 spacer group Chemical group 0.000 description 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 238000003491 array Methods 0.000 description 2
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 2
- 229910002113 barium titanate Inorganic materials 0.000 description 2
- 229910021523 barium zirconate Inorganic materials 0.000 description 2
- DQBAOWPVHRWLJC-UHFFFAOYSA-N barium(2+);dioxido(oxo)zirconium Chemical compound [Ba+2].[O-][Zr]([O-])=O DQBAOWPVHRWLJC-UHFFFAOYSA-N 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 2
- 229910000449 hafnium oxide Inorganic materials 0.000 description 2
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 description 2
- 229910052746 lanthanum Inorganic materials 0.000 description 2
- 230000007774 longterm Effects 0.000 description 2
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 2
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 description 2
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 2
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 2
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 2
- 229910001936 tantalum oxide Inorganic materials 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 2
- 229910001928 zirconium oxide Inorganic materials 0.000 description 2
- GFQYVLUOOAAOGM-UHFFFAOYSA-N zirconium(iv) silicate Chemical compound [Zr+4].[O-][Si]([O-])([O-])[O-] GFQYVLUOOAAOGM-UHFFFAOYSA-N 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 229910003855 HfAlO Inorganic materials 0.000 description 1
- 229910004129 HfSiO Inorganic materials 0.000 description 1
- 229910004200 TaSiN Inorganic materials 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- 229910006501 ZrSiO Inorganic materials 0.000 description 1
- UGACIEPFGXRWCH-UHFFFAOYSA-N [Si].[Ti] Chemical compound [Si].[Ti] UGACIEPFGXRWCH-UHFFFAOYSA-N 0.000 description 1
- 238000007792 addition Methods 0.000 description 1
- VYBYZVVRYQDCGQ-UHFFFAOYSA-N alumane;hafnium Chemical compound [AlH3].[Hf] VYBYZVVRYQDCGQ-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 229920001220 nitrocellulos Polymers 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 239000005368 silicate glass Substances 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
- H10B41/40—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the peripheral circuit region
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/788—Field effect transistors with field effect produced by an insulated gate with floating gate
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
- H10B41/20—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by three-dimensional arrangements, e.g. with cells on different height levels
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
- H10B41/20—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by three-dimensional arrangements, e.g. with cells on different height levels
- H10B41/23—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by three-dimensional arrangements, e.g. with cells on different height levels with source and drain on different levels, e.g. with sloping channels
- H10B41/27—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by three-dimensional arrangements, e.g. with cells on different height levels with source and drain on different levels, e.g. with sloping channels the channels comprising vertical portions, e.g. U-shaped channels
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
- H10B41/30—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the memory core region
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B43/00—EEPROM devices comprising charge-trapping gate insulators
- H10B43/20—EEPROM devices comprising charge-trapping gate insulators characterised by three-dimensional arrangements, e.g. with cells on different height levels
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B43/00—EEPROM devices comprising charge-trapping gate insulators
- H10B43/30—EEPROM devices comprising charge-trapping gate insulators characterised by the memory core region
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B43/00—EEPROM devices comprising charge-trapping gate insulators
- H10B43/40—EEPROM devices comprising charge-trapping gate insulators characterised by the peripheral circuit region
Description
本発明の第1の実施形態に係る不揮発性メモリは、NAND型のフラッシュメモリとなっており、この不揮発性メモリのセルアレイの等価回路は、図1に示すとおりである。
図2は、このセルアレイの平面図であり、図3(a)は、図2のI-I´方向の断面図、図3(b)は、図3(a)の点線で囲まれた領域の拡大図となっている。なお、図2のII-II´方向の断面は、通常のNAND型フラッシュメモリと同一であるので、図示は省略する。
次に、本実施形態のメモリセルトランジスタMTiの製造方法について図4A〜図4Dを参照しながら説明する。ここでは、素子分離絶縁膜103にALD−SiO2膜、トンネル酸化膜102にシリコン酸化膜、電荷蓄積膜105にシリコン窒化膜を用いた場合について説明する。
以上、メモリセルトランジスタの製造方法について説明したが、上記製造方法によれば、変質シリコン窒化膜155b形成の際に加えられる熱処理が、選択トランジスタST1、ST2等の周辺トランジスタのチャネル領域のイオン濃度等に影響を及ぼすことになる。
本発明の第2の実施形態に係る不揮発性メモリは、メモリ集積度を高めるために、セルアレイを3次元的に積層させた構造となっている。図8は、このセルアレイの一部の等価回路図である。
以上、発明の実施の形態を説明したが、本発明はこれらに限定されるものではなく、発明の趣旨を逸脱しない範囲内において、種々の変更、追加等が可能である。
Claims (2)
- 複数交互に積層された配線導電膜及び配線間絶縁膜と、
前記複数の配線導電膜及び前記複数の配線間絶縁膜の積層方向に延びて、これらを貫通するメモリホールと、
前記メモリホールの側壁に順次形成されたブロック絶縁膜、電荷蓄積膜、及びトンネル絶縁膜と、
前記ブロック絶縁膜、前記電荷蓄積膜、及び前記トンネル絶縁膜を介して前記メモリホール内に形成されたメモリ柱状半導体膜と
を備え、
前記電荷蓄積膜は、
前記積層方向の前記配線導電膜の位置に形成され所定の電荷トラップ特性を有するチャージ膜と、
前記積層方向の前記配線間絶縁膜の位置に形成され前記チャージ膜よりも電荷トラップ特性の劣る変質チャージ膜と
を備え、
前記変質チャージ膜は、前記積層方向に沿った断面において、前記トンネル絶縁膜との境界面の長さが、前記ブロック絶縁膜との境界面の長さよりも短く形成されている
ことを特徴とする不揮発性半導体記憶装置。 - 前記チャージ膜はシリコン窒化膜であり、前記変質チャージ膜は、前記シリコン窒化膜が酸化されて形成される
ことを特徴とする請求項1記載の不揮発性半導体記憶装置。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009155825A JP5398388B2 (ja) | 2009-06-30 | 2009-06-30 | 不揮発性半導体記憶装置 |
US12/826,057 US8476696B2 (en) | 2009-06-30 | 2010-06-29 | Nonvolatile semiconductor memory device and method of manufacturing the same |
US13/922,929 US8710581B2 (en) | 2009-06-30 | 2013-06-20 | Nonvolatile semiconductor memory device and method of manufacturing the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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JP2009155825A JP5398388B2 (ja) | 2009-06-30 | 2009-06-30 | 不揮発性半導体記憶装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2011014638A JP2011014638A (ja) | 2011-01-20 |
JP5398388B2 true JP5398388B2 (ja) | 2014-01-29 |
Family
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JP2009155825A Active JP5398388B2 (ja) | 2009-06-30 | 2009-06-30 | 不揮発性半導体記憶装置 |
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US (2) | US8476696B2 (ja) |
JP (1) | JP5398388B2 (ja) |
Cited By (1)
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US9997535B2 (en) | 2016-03-18 | 2018-06-12 | Toshiba Memory Corporation | Semiconductor memory device and method of manufacturing the same |
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JP5398388B2 (ja) * | 2009-06-30 | 2014-01-29 | 株式会社東芝 | 不揮発性半導体記憶装置 |
JP5624567B2 (ja) * | 2012-02-03 | 2014-11-12 | 株式会社東芝 | 不揮発性半導体記憶装置及びその製造方法 |
JP2013182949A (ja) * | 2012-02-29 | 2013-09-12 | Toshiba Corp | 不揮発性半導体記憶装置およびその製造方法 |
JP2014053571A (ja) | 2012-09-10 | 2014-03-20 | Toshiba Corp | 強誘電体メモリ及びその製造方法 |
JP2014187329A (ja) * | 2013-03-25 | 2014-10-02 | Toshiba Corp | 半導体記憶装置の製造方法及び半導体記憶装置 |
US9252151B2 (en) | 2013-07-08 | 2016-02-02 | Sandisk Technologies Inc. | Three dimensional NAND device with birds beak containing floating gates and method of making thereof |
JP2015056601A (ja) * | 2013-09-13 | 2015-03-23 | 株式会社東芝 | 半導体装置およびその製造方法 |
EP3038141B1 (en) * | 2014-12-23 | 2019-08-28 | IMEC vzw | Method of reading a memory cell of a vertical ferroelectric memory device |
US10020364B2 (en) * | 2015-03-12 | 2018-07-10 | Toshiba Memory Corporation | Nonvolatile semiconductor memory device and method of manufacturing the same |
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US9711530B1 (en) | 2016-03-25 | 2017-07-18 | Sandisk Technologies Llc | Locally-trap-characteristic-enhanced charge trap layer for three-dimensional memory structures |
US9812463B2 (en) | 2016-03-25 | 2017-11-07 | Sandisk Technologies Llc | Three-dimensional memory device containing vertically isolated charge storage regions and method of making thereof |
US9991277B1 (en) | 2016-11-28 | 2018-06-05 | Sandisk Technologies Llc | Three-dimensional memory device with discrete self-aligned charge storage elements and method of making thereof |
US9960180B1 (en) | 2017-03-27 | 2018-05-01 | Sandisk Technologies Llc | Three-dimensional memory device with partially discrete charge storage regions and method of making thereof |
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JP2000286349A (ja) | 1999-03-31 | 2000-10-13 | Sony Corp | 半導体装置およびその製造方法 |
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