JP4778669B2 - ソフトリソグラフィ及びフォトリソグラフィを使用して微小針(microneedles)構造を製造する方法 - Google Patents
ソフトリソグラフィ及びフォトリソグラフィを使用して微小針(microneedles)構造を製造する方法 Download PDFInfo
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/14—Devices for taking samples of blood ; Measuring characteristics of blood in vivo, e.g. gas concentration within the blood, pH-value of blood
- A61B5/1405—Devices for taking blood samples
- A61B5/1411—Devices for taking blood samples by percutaneous method, e.g. by lancet
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M37/00—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin
- A61M37/0015—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin by using microneedles
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/145—Measuring characteristics of blood in vivo, e.g. gas concentration, pH value; Measuring characteristics of body fluids or tissues, e.g. interstitial fluid, cerebral tissue
- A61B5/14507—Measuring characteristics of blood in vivo, e.g. gas concentration, pH value; Measuring characteristics of body fluids or tissues, e.g. interstitial fluid, cerebral tissue specially adapted for measuring characteristics of body fluids other than blood
- A61B5/1451—Measuring characteristics of blood in vivo, e.g. gas concentration, pH value; Measuring characteristics of body fluids or tissues, e.g. interstitial fluid, cerebral tissue specially adapted for measuring characteristics of body fluids other than blood for interstitial fluid
- A61B5/14514—Measuring characteristics of blood in vivo, e.g. gas concentration, pH value; Measuring characteristics of body fluids or tissues, e.g. interstitial fluid, cerebral tissue specially adapted for measuring characteristics of body fluids other than blood for interstitial fluid using means for aiding extraction of interstitial fluid, e.g. microneedles or suction
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/15—Devices for taking samples of blood
- A61B5/150007—Details
- A61B5/150015—Source of blood
- A61B5/150022—Source of blood for capillary blood or interstitial fluid
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/15—Devices for taking samples of blood
- A61B5/150007—Details
- A61B5/150206—Construction or design features not otherwise provided for; manufacturing or production; packages; sterilisation of piercing element, piercing device or sampling device
- A61B5/150274—Manufacture or production processes or steps for blood sampling devices
- A61B5/150282—Manufacture or production processes or steps for blood sampling devices for piercing elements, e.g. blade, lancet, canula, needle
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/15—Devices for taking samples of blood
- A61B5/150007—Details
- A61B5/150374—Details of piercing elements or protective means for preventing accidental injuries by such piercing elements
- A61B5/150381—Design of piercing elements
- A61B5/150412—Pointed piercing elements, e.g. needles, lancets for piercing the skin
- A61B5/150419—Pointed piercing elements, e.g. needles, lancets for piercing the skin comprising means for capillary action
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/15—Devices for taking samples of blood
- A61B5/150977—Arrays of piercing elements for simultaneous piercing
- A61B5/150984—Microneedles or microblades
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
- B81C1/00111—Tips, pillars, i.e. raised structures
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M37/00—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin
- A61M37/0015—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin by using microneedles
- A61M2037/0038—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin by using microneedles having a channel at the side surface
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M37/00—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin
- A61M37/0015—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin by using microneedles
- A61M2037/0053—Methods for producing microneedles
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/05—Microfluidics
- B81B2201/055—Microneedles
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2201/00—Manufacture or treatment of microstructural devices or systems
- B81C2201/03—Processes for manufacturing substrate-free structures
- B81C2201/034—Moulding
Description
れらウェーハのそれぞれが、フォトリソグラフィ技法を使用してフォトレジスト層をパターン化し、第一の場合、フォトレジスト層に穴が形成され、第二の場合、柱または他の同様な構造がフォトレジストに形成される。これらのパターンは、後に見るように相補的である。ここで両方のウェーハは、シラン処理されてPDMSで被覆される。PDMSを硬化し、PDMSは一旦硬化されると、それぞれのシリコンウェーハから取り外すかまたは引き離すことができるネガレプリカを形成する。フォトリソグラフィ段階は互いに相補的な穴と「柱」の両方を形成し、したがって、PDMSで作られた2つのネガレプリカもまた相補的である。これらのネガレプリカの1つが上下にひっくり返され、次にプレポリマーの層が「向きを変えた」PDMSのネガレプリカの上に置かれ、次に第二のネガレプリカがプレポリマーの上に置かれて、これによりプレポリマーを所定の位置に挟む。プレポリマーがここで硬化されて、2つのPDMS型が取り外されることにより別個のポリマー構造が後に残される。形成された形状が「閉止した」穴の微小針の場合には、これらの微小針の閉止した端部は、あるタイプの仕上げまたは研磨法を使用して開けることができる。
望むならば、図11Gの型材料156は、可撓特性を有する材料から作ることができる。そのような可撓性の型を使用して、全体形状(すなわち、それらの基板の形状)が凸形または凹形の微小針配列を形成することができる。ここで「図16(これは図16A〜図16Eを含む)」を参照すると、型156の初期長方形形状が、凸形の頂部型板500と凹形の底部型板502と共に図16Aに示される。
ポリマーの中空微小針は、図12A〜図12Gからなる「図12」に示すように、多層フォトレジストマスターを使用して作製することができる。図12Aを出発点として、SU−8などのフォトレジスト材料の層172が、シリコンウェーハ170の上にスピンコートされ、約90℃で焼成されて乾燥される。フォトレジストの厚さは、10〜100ミクロンの範囲とすることができる。次に、このフォトレジスト被膜172が、フォトリソグラフィを使用して円筒状穴でパターン化され、これにより図12Bに示されるように、直径が約10〜100ミクロンの穴の配列が得られる。穴は参照番号176で表わされ、一方、これらの穴176を取り囲む残るフォトレジスト被膜は174で表わされる。
グルコースオキシダーゼ、電解質、及びヒドロゲルから構成される導電性媒体中に浸漬された2つの電極からなるマクロスケールのグルコース電気化学的センサーは、利用可能な最も信頼性のある糖検知器の1つである。そのようなシステム中では、グルコースオキシダーゼが二酸化炭素及び水素に変換され、及び白金電極表面上での水素の触媒酸化により電気信号が生じる。電極を含む微小針デバイスは、電気化学的センサーとして使用することができ、間質液中での薬剤の電離療法的または電気泳動的投与のためにも使用することができる。微小針デバイスと一体になった電極を作り出す作製技法を以下詳細に説明する。蒸着技法を使用して金属またはポリマー微小針表面上に微小電極を構成する方法が開示される。
中空でない微小針は、長い壁の1つ以上の側に沿って走る外溝を有して製造することができる。例えば、図17は、伸長した側壁610及び先端の頂部表面612を有する中空でない微小針600を示す。微小針の長さは寸法線614により示され、100〜500ミクロンの範囲にすることができる。
Claims (30)
- 微小針(microneedles)を作製する方法であって、
(a)複数の微小構造を含む基板を提供すること;
(b)前記基板を前記複数の微小構造のネガ形態をとる第一の成型可能な材料層で被覆し、ソフトリソグラフィ手順を用いて前記第一の成型可能な材料を硬化させること;
(c)前記硬化した第一の成型可能な材料を前記基板から分離することにより、前記複数の微小構造を含む前記硬化した第一の成型可能な材料で微小型(micromold)を作り出すこと;及び
(d)第二の成型可能な材料を前記微小型上に塗布し、ソフトリソグラフィ法を使用して前記第二の成型可能な材料を硬化させ、次に前記硬化させた第二の成型可能な材料を前記微小型から分離することにより、該パターン化した微小型の前記複数の微小構造の三次元ネガ形態を有する前記硬化した第二の成型可能な材料から微小針構造を作り出すこと、
を含む方法。 - 前記微小針構造は、(a)複数の中空でない突出部、(b)貫通穴を形成する複数の中空突出部、(c)前記硬化した第二の成型可能な材料を通じて完全に突き出ないマイクロカップを形成する複数の中空突出部、または(d)少なくとも1つの表面外溝をそれぞれが有する複数の中空でない突出部、の内の1つを含む請求項1に記載の方法。
- 前記第一の成型可能な材料がポリジメチルシロキサン(PDMS)を含み、前記第二の成型可能な材料がプレポリマーを含み、前記基板がシリコンまたは金属物質の1つを含み、且つ前記微小針構造がポリマー材料を含む請求項1に記載の方法。
- 前記基板が、ウェーハ材料から開始して、前記ウェーハ材料を少なくとも1層のフォトレジスト材料で被覆し、前記フォトレジスト材料にフォトリソグラフィ法を使用して複数の微小構造をパターン化することで、前記パターン化したフォトレジスト材料が前記複数の微小構造を含むよう構成され、且つ前記第一の成型可能な材料が第二のソフトリソグラフィ法により加工及び硬化される、請求項1に記載の方法。
- 前記ウェーハがシリコンを含み、前記第一の成型可能な材料がポリジメチルシロキサン(PDMS)を含み、前記第二の成型可能な材料がプレポリマーを含み、且つ前記微小針構造がポリマー材料を含む、請求項4に記載の方法。
- (e)前記第一の複数の微小構造と比較した時に、形状が実質的に相補的である第二の複数の微小構造を含む第二の基板を提供すること;
(f)前記第二の基板を前記第二の複数の微小構造のネガ形態をとる第三の成型可能な材料層で被覆し、前記第三の成型可能な材料をソフトリソグラィ手順を用いて硬化させること;
(g)前記硬化した第三の成型可能な材料を前記第二の基板から分離することにより、前記第二の複数の微小構造を含む前記硬化した第三の成型可能な材料から第二の微小型を作り出すこと;
(h)第四の成型可能な材料を前記第二の微小型上に塗布し、ソフトリソグラフィ法を使用して前記第四の成型可能な材料を硬化させ、次に前記硬化させた第四の成型可能な材料を前記第二の微小型から分離することにより、該パターン化した第二の微小型の前記第二の複数の微小構造の三次元ネガ形態を有する前記硬化した第四の成型可能な材料から第二の微小針構造を作り出すこと;
(i)前記第一または第二の微小針構造の1つの上に第五の成型可能な材料層を塗布し、前記第一及び第二の微小針構造を向き合う関係に配置することにより、それらの間に前記第五の成型可能な材料層を挟み、ソフトリソグラフィ法を使用して前記第五の成型可能な材料層を硬化させ、次に前記硬化した第五の成型可能な材料を前記第一と第二との微小針構造の両方から分離することにより、前記第一と第二との微小針構造の両方の三次元ネガ形態を有する前記硬化した第五の成型可能な材料から第三の微小針構造を作り出すこと、を更に含む請求項1に記載の方法。 - 前記第一及び第三の成型可能な材料がポリジメチルシロキサン(PDMS)を含み、前記第二及び第四の成型可能な材料がプレポリマーを含み、前記基板がシリコンまたは金属物質の1つを含み、前記第五の成型可能な材料がプレポリマーを含み、且つ前記第一、第二、及び第三の微小針構造のそれぞれがポリマー材料を含む、請求項6に記載の方法。
- 前記第一の成型可能な材料が硬化後に可撓特性を示し、従って破断することなく所定の程度に変形可能であり、更に前記硬化した可撓性の第一の成型可能な材料から前記微小型を作り出した後に、該第二の成型可能な材料を前記微小型上に塗布する工程間に、前記微小型を変形させることにより、凹形または凸形いずれかの微小型を作り出すことを含む、請求項1に記載の方法。
- 微小針を作製する方法であって、
(a)基板材料を提供すること;
(b)前記基板材料を少なくとも1層のフォトレジスト材料で被覆し、フォトリソグラフィ法を使用して前記フォトレジスト材料に複数の微小構造をパターン化すること;及び
(c)前記複数の微小構造のネガ形態をとる成型可能な材料層で前記パターン化したフォトレジスト材料を被覆し、ソフトリソグラフィ法を使用して前記成型可能な材料を硬化させ、次に前記硬化した成型可能な材料を前記パターン化したフォトレジスト材料と前記基板材料との両方から分離すること、
を含む方法。 - 前記分離し硬化した成型可能な材料の前記少なくとも1つの表面を(a)電気メッキ、(b)電着、(c)無電界メッキ、(d)スパッタリング、(e)蒸着、または(f)プラズマ堆積(plasmadeposition)の方法の内の1つを使用して被覆することにより、独立した微小構造層を作り出すことを更に含む、請求項9に記載の方法。
- 前記独立した微小構造層が前記複数の微小構造を保護及び強化し、前記独立した微小構造層が電気メッキした金属または電気メッキしたポリマーの1つを含む、請求項10に記載の方法。
- 前記独立した微小構造層を前記硬化した成型可能な材料から分離することにより、電気メッキした金属、電気メッキしたポリマー、または電気メッキした複合材料の内の少なくとも1つから成る前記微小構造層を完全に含む、微小針配列構造を作り出すことを更に含む請求項10に記載の方法。
- 前記基板材料がシリコンを含み、且つ前記成型可能な材料がポリジメチルシロキサン(PDMS)を含む、請求項9に記載の方法。
- 微小針を作製する方法であって、
(a)基板材料を提供すること;
(b)前記基板材料を少なくとも1層のフォトレジスト材料で被膜し、フォトリソグラフィ法を使用して前記フォトレジスト材料に複数の微小構造をパターン化すること;
(c)第一の成型可能な材料を前記パターン化したフォトレジスト材料/基板の上に塗布して、ソフトリソグラフィ法を使用して前記第一の成型可能な材料を硬化させ、次に前記硬化した第一の成型可能な材料を前記パターン化したフォトレジスト材料/基板から分離することにより微小構造を作り出すこと;及び
(d)第二の成型可能な材料を前記微小構造の上に塗布し、前記第二の成型可能な材料を硬化した後に、前記硬化した第二の成型可能な材料を前記微小構造から分離することにより、前記微小構造の三次元ネガ形態を有する前記硬化した第二の成型可能な材料で微小針構造を作り出すこと、
を含む方法。 - 前記微小針構造が、(a)複数の中空でない突出部、(b)貫通穴を形成する複数の中空突出部、または(c)前記硬化した第二の成型可能な材料を通じて完全に突き出ないマイクロカップを形成する複数の中空突出部、の内の1つを含む請求項14に記載の方法。
- 前記複数のマイクロカップの1つの端部を開放するための研磨またはグラインディング法を更に含むことにより、貫通穴を形成する複数の中空突出部を作り出す請求項15に記載の方法。
- 前記基板がシリコンまたは金属物質の1つを含み、前記第一の成型可能な材料がポリジメチルシロキサン(PDMS)を含み、前記第二の成型可能な材料が前記第一の成型可能な材料の軟化温度よりも低い温度で軟化するポリマー材料を含む、請求項15に記載の方法。
- 前記第二の成型可能な材料を前記微小構造の上に塗布する該工程間に、第二の半型を使用して圧力をかけて、最も遠くに突き出る微小構造から、硬化していない過剰材料を除去することにより、前記微小針構造を、前記微小構造から分離して前記微小針構造の中に貫通穴を作り出す請求項14に記載の方法。
- 電極を有する微小針を作製する方法であって、
(a)基板材料を提供すること;
(b)前記基板材料を少なくとも1層のフォトレジスト材料で被覆し、フォトリソグラフィ法を使用して前記フォトレジスト材料に複数の微小構造をパターン化し、前記パターン化したフォトレジスト材料が前記複数の微小構造を含むようにすること;
(c)前記基板を前記複数の微小構造のネガ形態をとる成型可能な材料層で被覆し、前記成型可能な材料をソフトリソグラフィ法で硬化すること;
(d)前記硬化した成型可能な材料を前記基板から分離することによりマスクを作り出すこと;
(e)ベースから突き出る複数の個々の突出部を有する微小針配列構造を提供すること;
(f)前記マスクを前記微小針配列構造に近接して配置して、前記マスクを通して導電性物質を前記微小針配列構造の表面上に適用することにより、前記表面上に導電性通路の少なくとも1つのパターンを作り出すこと、
を含む方法。 - 前記導電性通路のそれぞれは、前記複数の突出部個々の少なくとも2つの間の間隔よりも大きい前記表面上の領域を覆うように大きさ及び配置が決められることにより、少なくとも1つの電極バンドを作り出す、請求項19に記載の方法。
- 前記導電性通路のそれぞれは、前記複数のそれぞれ個々の突出部よりも小さい前記表面上の領域を覆うように大きさ及び配置が決められることにより、複数の電気的に隔離された電極を作り出し、そのような電極の少なくとも1つが前記複数の突出部個々の唯1つに対応するようになる、請求項19に記載の方法。
- 前記複数の突出部個々の前記少なくとも1つが中空微小針を含み、該電気的に隔離された電極の少なくとも1つが、パッド表面及び長手方向部分を含み、前記長手方向部分は、蒸着法により前記中空微小針の内側表面の中へ広がる、請求項21に記載の方法。
- 前記微小構造で形成された複数の微小針の先端を硬化することを更に含む請求項1に記載の方法。
- 前記先端が、炭素繊維または複合材料を添加することにより硬化される請求項23に記載の方法。
- 前記複数の微小針を皮膚へ適用し、ここで前記複数の可撓性微小針が前記微小構造のベース構造から分離することにより、前記ベース構造が取り外された後に前記皮膚の角質層内に残り、且つ前記複数の可撓性微小針は中空であり;少なくとも一回は前記複数の可撓性中空微小針を通って流体を適用し、それにより前記角質層を通り;前記可撓性中空微小針が前記角質層内に長期間に亘って残ることを更に含む、請求項1に記載の方法。
- 微小針を作製する方法であって、
(a)ベースおよびフォトリソグラフィ手順の使用により形成された複数の微小構造を備える基板を提供すること;
(b)前記基板上に第一の成型可能な材料を塗布し、そして前記第一の成型可能な材料をソフトリソグラィ手順を用いて硬化させ、次いで、前記硬化させた第一の成型可能な材料を前記基板から分離し、微小構造を作り出すこと;
(c)前記微小構造上に第二の成型可能な材料を塗布し、そしてソフトリソグラィ手順の使用により前記第二の成型可能な材料の硬化の後に、前記硬化させた第二の成型可能な材料を前記微小構造から分離し、前記基板の三次元ネガ形態を有し、そして第二のベースおよび第二の複数の微小構造を備える前記硬化させた第二の成型可能な材料から微小針構造を作り出すこと;
(d)前記第二のベースと前記第二の複数の微小構造との間の接合部に隣接する前記第二の複数の微小構造の部分をエッチングすることにより分離型微小針を作り出すこと、を含む方法。 - 請求項2に記載の方法であって、前記微小針構造に近接してマスクを位置決めすること、および前記微小針構造の表面上に前記マスクを通じて導電性物質を塗布し、前記表面上に少なくとも1つのパターンの導電性通路を作り出すこと、をさらに含む方法。
- 前記導電性通路の各々が、前記微小針構造の微小針の少なくとも2つの間の間隔より大きい前記表面上の領域を覆うような大きさであり、かつ前記領域を覆うように位置決めされ、少なくとも1つの電極バンドを作り出す、請求項27に記載の方法。
- 前記導電性通路の各々が、前記微小針構造の微小針の各々より小さい前記表面上の領域を覆うような大きさであり、かつ前記領域を覆うように位置決めされ、複数の電気的に隔離された電極を、少なくとも1つのこのような電極が、前記複数の突出部の単一の1つに対応するように作り出す、請求項27に記載の方法。
- 第一の材料を含む基板および第二の材料を含む微小針を備える分離型微小針の配列であって、前記基板と前記微小針との間の材料性質における差異が、皮膚の角質層中への塗布に際し前記基板からの前記微小針の分離に至り、一旦前記基板が除去されると、前記角質層中に複数の微小針を残す、配列。
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JP2004524172A (ja) * | 2001-02-05 | 2004-08-12 | ベクトン・ディキンソン・アンド・カンパニー | マイクロ突起物アレイおよびマイクロ突起物の製造方法 |
JP2002239014A (ja) * | 2001-02-19 | 2002-08-27 | Sumitomo Precision Prod Co Ltd | 針状体及び針状体の製造方法 |
Cited By (1)
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KR101775224B1 (ko) | 2014-07-31 | 2017-09-19 | 인피니언 테크놀로지스 아게 | 마이크로 기계 구조물 및 이를 제조하는 방법 |
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JP2004526581A (ja) | 2004-09-02 |
EP1377338B1 (en) | 2008-08-06 |
CA2436207A1 (en) | 2002-09-19 |
DE60228065D1 (de) | 2008-09-18 |
EP1377338A2 (en) | 2004-01-07 |
EP1377338B9 (en) | 2008-11-05 |
ATE403465T1 (de) | 2008-08-15 |
WO2002072189A3 (en) | 2003-03-20 |
CA2436207C (en) | 2008-12-02 |
ES2311615T3 (es) | 2009-02-16 |
US20020133129A1 (en) | 2002-09-19 |
US6663820B2 (en) | 2003-12-16 |
US20040146611A1 (en) | 2004-07-29 |
WO2002072189A2 (en) | 2002-09-19 |
US7763203B2 (en) | 2010-07-27 |
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