SG134178A1 - Microstructure formation technique - Google Patents

Microstructure formation technique

Info

Publication number
SG134178A1
SG134178A1 SG200600144-0A SG2006001440A SG134178A1 SG 134178 A1 SG134178 A1 SG 134178A1 SG 2006001440 A SG2006001440 A SG 2006001440A SG 134178 A1 SG134178 A1 SG 134178A1
Authority
SG
Singapore
Prior art keywords
microstructure
formation technique
microstructure formation
fabricating
mould
Prior art date
Application number
SG200600144-0A
Inventor
Li Zhongli
Xu Yuan
Lim Chee Yen
Jiang Huixin
Yuan Ling Christina Tan
Original Assignee
Agency Science Tech & Res
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency Science Tech & Res filed Critical Agency Science Tech & Res
Priority to SG200600144-0A priority Critical patent/SG134178A1/en
Publication of SG134178A1 publication Critical patent/SG134178A1/en

Links

Abstract

A method of fabricating a microstructure and a method of fabricating a mould for microstructures. The method of fabricating the microstructure comprises the steps of providing a mould comprising a template structure; forming a first material layer on a surface of the template structure; forming a microstructure layer on the first material layer; releasing the microstructure layer from the mould.
SG200600144-0A 2006-01-09 2006-01-09 Microstructure formation technique SG134178A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
SG200600144-0A SG134178A1 (en) 2006-01-09 2006-01-09 Microstructure formation technique

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SG200600144-0A SG134178A1 (en) 2006-01-09 2006-01-09 Microstructure formation technique

Publications (1)

Publication Number Publication Date
SG134178A1 true SG134178A1 (en) 2007-08-29

Family

ID=38799262

Family Applications (1)

Application Number Title Priority Date Filing Date
SG200600144-0A SG134178A1 (en) 2006-01-09 2006-01-09 Microstructure formation technique

Country Status (1)

Country Link
SG (1) SG134178A1 (en)

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002072189A2 (en) * 2001-03-14 2002-09-19 The Procter & Gamble Company Method of manufacturing microneedle structures using soft lithography and photolithography
US20030173690A1 (en) * 2002-03-18 2003-09-18 Sumitomo Chemical Company, Limited Die for molding optical panel, process for production thereof, and use thereof
US20040126707A1 (en) * 2002-12-27 2004-07-01 Industrial Technology Research Institute Method for manufacturing 3-D high aspect-ratio microneedle array device
US20040200368A1 (en) * 2003-03-20 2004-10-14 Masahiko Ogino Mold structures, and method of transfer of fine structures
US20040243063A1 (en) * 2000-08-21 2004-12-02 The Cleveland Clinic Foundation Microneedle array module and method of fabricating the same
US20050147925A1 (en) * 2002-04-05 2005-07-07 Harchanko John S. System and method for analog replication of microdevices having a desired surface contour
US20050170639A1 (en) * 2004-01-30 2005-08-04 Ping Mei Forming a semiconductor device

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040243063A1 (en) * 2000-08-21 2004-12-02 The Cleveland Clinic Foundation Microneedle array module and method of fabricating the same
WO2002072189A2 (en) * 2001-03-14 2002-09-19 The Procter & Gamble Company Method of manufacturing microneedle structures using soft lithography and photolithography
US20040146611A1 (en) * 2001-03-14 2004-07-29 The Procter & Gamble Company Method of manufacturing microneedle structures using soft lithography and photolithography
US20030173690A1 (en) * 2002-03-18 2003-09-18 Sumitomo Chemical Company, Limited Die for molding optical panel, process for production thereof, and use thereof
US20050147925A1 (en) * 2002-04-05 2005-07-07 Harchanko John S. System and method for analog replication of microdevices having a desired surface contour
US20040126707A1 (en) * 2002-12-27 2004-07-01 Industrial Technology Research Institute Method for manufacturing 3-D high aspect-ratio microneedle array device
US20040200368A1 (en) * 2003-03-20 2004-10-14 Masahiko Ogino Mold structures, and method of transfer of fine structures
US20050170639A1 (en) * 2004-01-30 2005-08-04 Ping Mei Forming a semiconductor device

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