JP4763061B2 - 物体、特に薄いディスクを洗浄する装置及び方法 - Google Patents
物体、特に薄いディスクを洗浄する装置及び方法 Download PDFInfo
- Publication number
- JP4763061B2 JP4763061B2 JP2008557693A JP2008557693A JP4763061B2 JP 4763061 B2 JP4763061 B2 JP 4763061B2 JP 2008557693 A JP2008557693 A JP 2008557693A JP 2008557693 A JP2008557693 A JP 2008557693A JP 4763061 B2 JP4763061 B2 JP 4763061B2
- Authority
- JP
- Japan
- Prior art keywords
- shower
- fluid
- tank
- ultrasonic
- carrier
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B11/00—Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto
- B08B11/02—Devices for holding articles during cleaning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67023—Apparatus for fluid treatment for general liquid treatment, e.g. etching followed by cleaning
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67057—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing with the semiconductor substrates being dipped in baths or vessels
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67313—Horizontal boat type carrier whereby the substrates are vertically supported, e.g. comprising rod-shaped elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67326—Horizontal carrier comprising wall type elements whereby the substrates are vertically supported, e.g. comprising sidewalls
Description
定 義
動作原理:
洗浄処理は、以下のように行われる:
2 担持装置
3 ガラス板
4 装着要素
5 一辺
6 ウェハ
7 空隙
8 補助装置
9 手段
10 収容装置
11 ロッド
12 装置
13 ハウジング
14 槽
15 シャワー装置
16 シャワー要素
17 交差流装置
18 超音波装置
19 超音波源
20 底
21 流体の流れ
Claims (15)
- 複数の薄いウェハ(6)を洗浄する装置で、ウェハ(6)が各々の一辺で担持装置(2)に固定されており、2つの隣接するウェハ(6)間に空隙(7)が形成されており、
− 流体を各空隙(7)内に注入するシャワー装置(15)、及び
− 流体を満たすことができ且つ担持装置(2)を収容できる寸法を有する槽(14)から実質上構成された装置において、
前記シャワー装置は、前記槽が流体で満たされない時に流体を2つの隣接するウェハ間の各空隙内に注入し、
前記槽内には、前記槽が流体で満たされたときに超音波洗浄処理を実施する超音波装置が配置されており、
前記シャワー装置(15)は2パーツ設計で複数のノズルを有する少なくとも1つのシャワー要素(16)を備え、両パーツが前記槽(14)の長軸と平行に延び且つそれぞれの流れ方向が反対方向となるように、それぞれの各パーツが前記槽の長辺に対し横向きに配置されており、前記シャワー装置は、前記超音波装置による前記超音波洗浄処理では前記槽内に流体の流れを発生させ、流体の流れが2つの隣接するウェハ間の各空隙内へ差し向けられることによって、超音波で緩んだ粒子を洗い流し、前記少なくとも1つのシャワー要素(16)の両パーツは、前記超音波洗浄処理において正面対向するノズルが同時に作動されないように制御可能であることを特徴とする装置。 - 前記ノズルは少なくとも1つのノズルを介して相互に機能的に接続され、同じ流体量が供給可能であることを特徴とする請求の範囲第1項に記載の装置。
- 前記少なくとも1つのシャワー要素(16)は両側において幾つかの区分に分割されており、複数区分の各々が1つのノズルバーを有することを特徴とする請求の範囲第1または2項に記載の装置。
- 前記シャワー要素(16)の両パーツの位置は(必要なら相互に別々に)調整可能であることを特徴とする請求の範囲第1から3項のいずれかに記載の装置。
- 前記シャワー装置(15)が移動不能な担持装置(2)に対して移動可能であるか、あるいは前記担持装置(2)が移動不能なシャワー装置(15)に対して移動可能であるか、あるいは前記担持装置(2)と前記シャワー装置(15)が相対的に移動可能であることを特徴とする前記請求の範囲第1項から4項のいずれかに記載の装置。
- 前記超音波装置(18)は少なくとも1つ設けられ、前記槽(14)内に任意選択的に移動不能あるいは移動可能に配置されていることを特徴とする前記請求の範囲第1項から5項のいずれかに記載の装置。
- 幾つかのシャワー要素(16)が前記槽(14)の深さに対して異なるレベルに配置されていることを特徴とする前記請求の範囲第1項から6項のいずれかに記載の装置。
- 少なくとも1つのシャワー要素(16)が前記槽(14)内に垂直方向に調整可能であることを特徴とする前記請求の範囲第1項から7項のいずれかに記載の装置。
- 前記超音波装置(18)は、前記担持装置(2)の水平の向きに対して傾斜配置された複数の超音波源(19)を備えることを特徴とする請求の範囲第6から8項のいずれかに記載の装置。
- 薄いウェハ(6)が各々の一辺で担持装置(2)に固定されており、2つの隣接するウェハ(6)間に空隙(7)が形成された装置を用いてウェハ(6)を洗浄する方法で、前記装置が流体を各空隙(7)内に注入するシャワー装置(15)と、流体を満たすことができ且つ担持装置(2)を収容できる寸法を有する槽(14)から実質上構成されており、
前記シャワー装置(15)は2パーツ設計で複数のノズルを有する少なくとも1つのシャワー要素(16)を備え、両パーツが前記槽(14)の長軸と平行に延び且つそれぞれの流れ方向が反対方向となるように、各パーツが前記槽の長辺に対し横向きに配置されているものにおいて、
a)基板ブロック(1)を含む前記担持装置(2)を、空のあるいは部分的に満たされた前記槽(14)内に挿入する処理ステップ、
b)前記シャワー装置(15)によって洗浄処理を実施するシャワー処理ステップ、及び
c)前記槽が流体で満たされたときに前記槽内に配置された超音波装置(18)によって洗浄処理を実施する超音波洗浄処理ステップ、
を備え、
前記シャワー処理ステップは、前記槽が流体で満たされない時に、前記シャワー装置が流体を2つの隣接するウェハ間の各空隙内に注入するステップであり、
前記超音波装置による前記超音波洗浄処理ステップでは、前記シャワー装置は、槽内に流体の流れを発生させ、流体の流れが2つの隣接するウェハ間の各空隙内へ差し向けられることによって、超音波で緩んだ粒子を洗い流し、前記少なくとも1つのシャワー要素(16)の両パーツは、前記超音波洗浄処理ステップにおいて正面対向するノズルが同時に作動されないように制御可能であることを特徴とする方法。 - 前記シャワー処理ステップb)は前記超音波洗浄処理ステップc)の前後に行われることを特徴とする請求の範囲第10項に記載の方法。
- 前記シャワー処理ステップb)及び前記超音波洗浄処理ステップc)は逐次数回行われることを特徴とする請求の範囲第10項に記載の方法。
- 前記シャワー処理ステップb)は温流体を用いて行われることを特徴とする請求の範囲第10から12項のいずれかに記載の方法。
- 前記超音波洗浄処理ステップc)は冷流体を用いて行われることを特徴とする請求の範囲第10から13項のいずれかに記載の方法。
- 最後の洗浄処理は、冷流体を用いたシャワー装置(15)によって洗浄処理を行うことを含むことを特徴とする請求の範囲第10から14項のいずれかに記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102006059810.5 | 2006-12-15 | ||
DE102006059810A DE102006059810A1 (de) | 2006-12-15 | 2006-12-15 | Vorrichtung und Verfahren zum Reinigen von Gegenständen, insbesondere von dünnen Scheiben |
PCT/EP2007/010734 WO2008071364A1 (de) | 2006-12-15 | 2007-12-10 | Vorrichtung und verfahren zum reinigen von gegenständen, insbesondere von dünnen scheiben |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009529781A JP2009529781A (ja) | 2009-08-20 |
JP4763061B2 true JP4763061B2 (ja) | 2011-08-31 |
Family
ID=39106175
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008557693A Expired - Fee Related JP4763061B2 (ja) | 2006-12-15 | 2007-12-10 | 物体、特に薄いディスクを洗浄する装置及び方法 |
Country Status (14)
Country | Link |
---|---|
US (1) | US20080295860A1 (ja) |
EP (1) | EP2102896B1 (ja) |
JP (1) | JP4763061B2 (ja) |
KR (2) | KR20080069676A (ja) |
CN (2) | CN101361167A (ja) |
AT (1) | ATE519221T1 (ja) |
DE (2) | DE102006059810A1 (ja) |
DK (1) | DK2102896T3 (ja) |
ES (1) | ES2371117T3 (ja) |
NO (1) | NO20082527L (ja) |
RU (1) | RU2390391C2 (ja) |
TW (2) | TWI344868B (ja) |
UA (1) | UA92773C2 (ja) |
WO (2) | WO2008071364A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101932410B1 (ko) | 2015-08-18 | 2018-12-31 | 주식회사 엘지화학 | 일체형 세척 및 건조 장치 |
Families Citing this family (38)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102007058260A1 (de) * | 2007-11-27 | 2009-05-28 | Gebr. Schmid Gmbh & Co. | Verfahren und Vorrichtung zur Reinigung eines gesägten Waferblocks |
KR101177038B1 (ko) * | 2007-12-10 | 2012-08-27 | 레나 게엠베하 | 물품의 세정 장치 및 방법 |
CN101896994B (zh) * | 2007-12-10 | 2012-04-04 | 里纳股份有限公司 | 用于清洁的设备和方法 |
DE102008004548A1 (de) * | 2008-01-15 | 2009-07-16 | Rec Scan Wafer As | Waferstapelreinigung |
WO2009114043A1 (en) * | 2008-03-07 | 2009-09-17 | Automation Technology, Inc. | Solar wafer cleaning systems, apparatus and methods |
DE102008053596A1 (de) | 2008-10-15 | 2010-04-22 | Gebr. Schmid Gmbh & Co. | Verfahren und Vorrichtung zur Reinigung eines Waferblocks sowie Trägereinrichtung für einen Waferblock |
DE102008053597A1 (de) | 2008-10-15 | 2010-04-22 | Gebr. Schmid Gmbh & Co. | Reinigungsvorrichtung für einen Waferblock |
DE102008053598A1 (de) * | 2008-10-15 | 2010-04-22 | Gebr. Schmid Gmbh & Co. | Verfahren zum Lösen von Wafern von einem Waferträger und Vorrichtung dafür |
US8261730B2 (en) * | 2008-11-25 | 2012-09-11 | Cambridge Energy Resources Inc | In-situ wafer processing system and method |
US8065995B2 (en) * | 2008-11-25 | 2011-11-29 | Cambridge Energy Resources Inc | Method and apparatus for cutting and cleaning wafers in a wire saw |
US7700535B1 (en) * | 2009-01-12 | 2010-04-20 | Ppt Research | Wafer/Ingot cleaning in wire saw cutting comprising an ethoxylated alcohol/polyalkylsiloxane mixture |
US8562748B1 (en) | 2009-01-30 | 2013-10-22 | WD Media, LLC | Multiple cleaning processes in a single tank |
US8163093B1 (en) | 2009-02-11 | 2012-04-24 | Wd Media, Inc. | Cleaning operations with dwell time |
JP5540072B2 (ja) * | 2009-04-01 | 2014-07-02 | キャボット マイクロエレクトロニクス コーポレイション | 自浄式ワイヤソー装置および方法 |
DE102009035343A1 (de) * | 2009-07-23 | 2011-01-27 | Gebr. Schmid Gmbh & Co. | Verfahren und Vorrichtung zur Reinigung von Substraten an einem Träger |
DE102009035342A1 (de) * | 2009-07-23 | 2011-01-27 | Gebr. Schmid Gmbh & Co. | Vorrichtung und Verfahren zur Reinigung von Substraten an einem Träger |
DE102009035341A1 (de) | 2009-07-23 | 2011-01-27 | Gebr. Schmid Gmbh & Co. | Vorrichtung zur Reinigung von Substraten an einem Träger |
JP2011061120A (ja) * | 2009-09-14 | 2011-03-24 | Sumitomo Metal Fine Technology Co Ltd | ウエハ搬送方法およびウエハ搬送装置 |
GB0919379D0 (en) * | 2009-11-04 | 2009-12-23 | Edwards Chemical Man Europ Ltd | Wafer prcessing |
GB2476315A (en) * | 2009-12-21 | 2011-06-22 | Rec Wafer Norway As | Cleaning a stack of thin wafers |
WO2012053500A1 (ja) * | 2010-10-19 | 2012-04-26 | 三洋電機株式会社 | 半導体装置の製造方法およびそれに用いられる基板カセット |
DE102010052635B4 (de) * | 2010-11-29 | 2014-01-02 | Rena Gmbh | Halte-Reinigungsvorrichtung und Verfahren zum abschnittsweisen Reinigen gesägter Wafer |
DE102011018523A1 (de) * | 2011-03-23 | 2012-09-27 | Schott Solar Ag | Herstellung von gesägten Wafern durch Vereinzelung mit einem kalten Fluid |
DE102011110592A1 (de) | 2011-08-18 | 2013-02-21 | Rena Gmbh | Verfahren zum Konditionieren von flachen Gegenständen |
DE102012001721A1 (de) * | 2012-01-31 | 2013-08-01 | Rena Gmbh | Spüleinrichtung zum Abspülen einer Behandlungsflüssigkeit und Verfahren dazu |
US20140150826A1 (en) * | 2012-11-30 | 2014-06-05 | Memc Singapore Pte. Ltd. (Uen200614794D) | Wafer cleaning apparatus and methods |
CN103302071B (zh) * | 2013-05-16 | 2015-12-23 | 昆山市超声仪器有限公司 | 超声波洗瓶机用翻转装置 |
JP2015028971A (ja) * | 2013-07-30 | 2015-02-12 | パナソニックIpマネジメント株式会社 | ウエハ洗浄装置およびウエハ洗浄方法 |
TWM508112U (zh) * | 2015-04-30 | 2015-09-01 | Chung King Entpr Co Ltd | 用於太陽能電池之基板載具 |
DE102016107840A1 (de) * | 2016-04-27 | 2017-11-02 | Elwema Automotive Gmbh | Verfahren und Vorrichtung zum Reinigen von Werkstücken aus Metall |
CN107717640A (zh) * | 2016-08-10 | 2018-02-23 | 云南民族大学 | 一种超声波辅助研磨抛光的方法 |
KR101905671B1 (ko) * | 2016-11-15 | 2018-10-10 | 한국에너지기술연구원 | 파손 방지 효과가 우수한 실리콘 웨이퍼 세척 장치 및 세척 방법 |
GB201819238D0 (en) | 2018-11-27 | 2019-01-09 | Rolls Royce Plc | Finishing a surface of a component made by additive manufacturing |
CN110369393B (zh) * | 2019-08-13 | 2021-04-06 | 安徽晶天新能源科技有限责任公司 | 一种硅片生产用超声波清洗机 |
CN111604305B (zh) * | 2020-05-18 | 2022-06-21 | 聊城市洛溪信息科技有限公司 | 一种细纺锭子清洗设备用夹持装置的无极调节方法 |
CN112570370B (zh) * | 2020-11-24 | 2022-04-29 | 森弘鑫智能设备(苏州)有限公司 | 一种超声波自动清洗装置 |
JP2022138907A (ja) * | 2021-03-11 | 2022-09-26 | キオクシア株式会社 | 基板洗浄装置および基板洗浄方法 |
CN113866097A (zh) * | 2021-09-09 | 2021-12-31 | 中国科学院大气物理研究所 | 光学仪器镜面自动清洁系统及其使用方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0669176A (ja) * | 1992-01-17 | 1994-03-11 | Mitsubishi Materials Corp | ウェーハ洗浄装置 |
JPH07263397A (ja) * | 1994-03-25 | 1995-10-13 | Hitachi Ltd | 超音波洗浄方法 |
JPH11288902A (ja) * | 1998-04-01 | 1999-10-19 | Tokyo Seimitsu Co Ltd | ウェーハ剥離洗浄装置 |
JP2000308857A (ja) * | 1999-04-27 | 2000-11-07 | Tokyo Electron Ltd | 液処理方法及び液処理装置 |
Family Cites Families (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2254824A (en) * | 1939-01-04 | 1941-09-02 | George P Large | Washing machine |
US3873071A (en) * | 1973-08-01 | 1975-03-25 | Tatebe Seishudo Kk | Ultrasonic wave cleaning apparatus |
US4358204A (en) * | 1980-09-22 | 1982-11-09 | Sidney Ellner | Ultrasonic cleaning apparatus |
DE3731410A1 (de) * | 1987-09-18 | 1989-04-06 | Duerr Gmbh & Co | Verfahren und anlage zum flutwaschen |
US5069235A (en) * | 1990-08-02 | 1991-12-03 | Bold Plastics, Inc. | Apparatus for cleaning and rinsing wafers |
US5279316A (en) * | 1992-08-18 | 1994-01-18 | P.C.T. Systems, Inc. | Multiprocessing sonic bath system for semiconductor wafers |
US5337446A (en) * | 1992-10-27 | 1994-08-16 | Autoclave Engineers, Inc. | Apparatus for applying ultrasonic energy in precision cleaning |
JP2888409B2 (ja) * | 1993-12-14 | 1999-05-10 | 信越半導体株式会社 | ウェーハ洗浄槽 |
US5950643A (en) * | 1995-09-06 | 1999-09-14 | Miyazaki; Takeshiro | Wafer processing system |
JP3274389B2 (ja) * | 1996-08-12 | 2002-04-15 | 株式会社東芝 | 半導体基板の洗浄方法 |
JP3286539B2 (ja) * | 1996-10-30 | 2002-05-27 | 信越半導体株式会社 | 洗浄装置および洗浄方法 |
JPH10223585A (ja) * | 1997-02-04 | 1998-08-21 | Canon Inc | ウェハ処理装置及びその方法並びにsoiウェハの製造方法 |
US6132523A (en) * | 1997-09-19 | 2000-10-17 | Sharp Kabushiki Kaisha | Method of cleaning a substrate in a cleaning tank using plural fluid flows |
US6119706A (en) * | 1997-09-22 | 2000-09-19 | Lucent Technologies Inc. | Apparatus for cleaning electronic components |
US6139591A (en) * | 1998-03-04 | 2000-10-31 | Tokyo Seimitsu Co., Ltd. | Wafer separating and cleaning apparatus and process |
TW499696B (en) | 1999-04-27 | 2002-08-21 | Tokyo Electron Ltd | Processing apparatus and processing method |
TW434668B (en) * | 2000-01-27 | 2001-05-16 | Ind Tech Res Inst | Wafer rinse apparatus and rinse method of the same |
ATE455492T1 (de) * | 2000-02-14 | 2010-02-15 | Panasonic Corp | Geschirrspülmaschine |
US6418945B1 (en) * | 2000-07-07 | 2002-07-16 | Semitool, Inc. | Dual cassette centrifugal processor |
US20020166569A1 (en) * | 2001-05-10 | 2002-11-14 | Speedfam-Ipec Corporation | Method and apparatus for semiconductor wafer cleaning |
US6668844B2 (en) * | 2001-07-16 | 2003-12-30 | Semitool, Inc. | Systems and methods for processing workpieces |
US20040025901A1 (en) * | 2001-07-16 | 2004-02-12 | Semitool, Inc. | Stationary wafer spin/spray processor |
US20060060232A1 (en) * | 2004-04-15 | 2006-03-23 | Tokyo Electron Limited | Liquid treatment device and liquid treatment method |
DE102005058269B4 (de) * | 2005-12-06 | 2011-12-01 | Stangl Semiconductor Equipment Ag | Vorrichtung zum Reinigen eines gesägten Waferblocks |
-
2006
- 2006-12-15 DE DE102006059810A patent/DE102006059810A1/de not_active Withdrawn
- 2006-12-15 DE DE202006020339U patent/DE202006020339U1/de not_active Expired - Lifetime
-
2007
- 2007-12-10 RU RU2008130519/12A patent/RU2390391C2/ru not_active IP Right Cessation
- 2007-12-10 KR KR1020087013865A patent/KR20080069676A/ko not_active Application Discontinuation
- 2007-12-10 UA UAA200809269A patent/UA92773C2/ru unknown
- 2007-12-10 US US12/094,765 patent/US20080295860A1/en not_active Abandoned
- 2007-12-10 WO PCT/EP2007/010734 patent/WO2008071364A1/de active Application Filing
- 2007-12-10 DK DK07856509.0T patent/DK2102896T3/da active
- 2007-12-10 CN CNA2007800017797A patent/CN101361167A/zh active Pending
- 2007-12-10 AT AT07856509T patent/ATE519221T1/de active
- 2007-12-10 ES ES07856509T patent/ES2371117T3/es active Active
- 2007-12-10 WO PCT/EP2007/010735 patent/WO2008071365A1/de active Application Filing
- 2007-12-10 CN CN2007800015698A patent/CN101361166B/zh not_active Expired - Fee Related
- 2007-12-10 JP JP2008557693A patent/JP4763061B2/ja not_active Expired - Fee Related
- 2007-12-10 EP EP07856509A patent/EP2102896B1/de not_active Not-in-force
- 2007-12-10 KR KR1020087019183A patent/KR20080089629A/ko not_active Application Discontinuation
- 2007-12-14 TW TW096148149A patent/TWI344868B/zh not_active IP Right Cessation
-
2008
- 2008-06-05 NO NO20082527A patent/NO20082527L/no not_active Application Discontinuation
- 2008-12-10 TW TW097148063A patent/TWI447832B/zh active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0669176A (ja) * | 1992-01-17 | 1994-03-11 | Mitsubishi Materials Corp | ウェーハ洗浄装置 |
JPH07263397A (ja) * | 1994-03-25 | 1995-10-13 | Hitachi Ltd | 超音波洗浄方法 |
JPH11288902A (ja) * | 1998-04-01 | 1999-10-19 | Tokyo Seimitsu Co Ltd | ウェーハ剥離洗浄装置 |
JP2000308857A (ja) * | 1999-04-27 | 2000-11-07 | Tokyo Electron Ltd | 液処理方法及び液処理装置 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101932410B1 (ko) | 2015-08-18 | 2018-12-31 | 주식회사 엘지화학 | 일체형 세척 및 건조 장치 |
Also Published As
Publication number | Publication date |
---|---|
CN101361166B (zh) | 2010-06-23 |
TWI344868B (en) | 2011-07-11 |
UA92773C2 (ru) | 2010-12-10 |
RU2390391C2 (ru) | 2010-05-27 |
CN101361166A (zh) | 2009-02-04 |
TW200941617A (en) | 2009-10-01 |
JP2009529781A (ja) | 2009-08-20 |
KR20080069676A (ko) | 2008-07-28 |
DE202006020339U1 (de) | 2008-04-10 |
EP2102896B1 (de) | 2011-08-03 |
WO2008071365A1 (de) | 2008-06-19 |
NO20082527L (no) | 2009-09-10 |
ES2371117T3 (es) | 2011-12-27 |
TW200848171A (en) | 2008-12-16 |
TWI447832B (zh) | 2014-08-01 |
DK2102896T3 (da) | 2011-11-21 |
KR20080089629A (ko) | 2008-10-07 |
US20080295860A1 (en) | 2008-12-04 |
DE102006059810A1 (de) | 2008-06-19 |
ATE519221T1 (de) | 2011-08-15 |
WO2008071364A1 (de) | 2008-06-19 |
EP2102896A1 (de) | 2009-09-23 |
RU2008130519A (ru) | 2010-01-27 |
CN101361167A (zh) | 2009-02-04 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4763061B2 (ja) | 物体、特に薄いディスクを洗浄する装置及び方法 | |
JP4705517B2 (ja) | 基板洗浄方法、基板洗浄装置、プログラム、および記録媒体 | |
CN101896994B (zh) | 用于清洁的设备和方法 | |
JP5340370B2 (ja) | 切断されたウェハをゾーン毎にクリーニングするための保持及びクリーニング装置及び方法 | |
KR101177038B1 (ko) | 물품의 세정 장치 및 방법 | |
CN101605615B (zh) | 超声波洗涤方法 | |
JP4890919B2 (ja) | 基板洗浄方法、基板洗浄装置、プログラム、および記録媒体 | |
US8012266B2 (en) | System and method for scrubbing CMP slurry systems | |
JP2008288541A (ja) | 枚葉式洗浄装置 | |
JP2005296868A (ja) | 超音波洗浄処理方法及びその装置 | |
US20140150826A1 (en) | Wafer cleaning apparatus and methods | |
JP2004363368A (ja) | 洗浄装置および研磨装置 | |
JP2009032710A (ja) | 基板処理装置 | |
JP5288974B2 (ja) | 洗浄装置、基板の製造方法、および太陽電池素子 | |
JP4829094B2 (ja) | 基板処理装置、基板処理方法、基板処理プログラム、および、プログラム記録媒体 | |
JP2006066793A (ja) | ウエハ洗浄方法及びその装置 | |
WO2009098042A1 (en) | Device for cleaning flat substrates | |
JP5009718B2 (ja) | スリットノズル待機ユニット | |
JP4842794B2 (ja) | 基板処理装置、基板処理方法、基板処理プログラム、および、プログラム記録媒体 | |
JPH0353524A (ja) | 洗浄装置及び洗浄方法 | |
KR101393385B1 (ko) | 화학 기계적 연마 공정에 사용된 캐리어 헤드의 세정 장치 | |
CN115855605A (zh) | 一种用于载玻片样品染色反应的清洗方法 | |
JP2012125859A (ja) | 研磨液供給装置 | |
JPH11162915A (ja) | 洗浄装置、及びウエハ形状材料の洗浄方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20100824 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20101118 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20110531 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20110608 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20140617 Year of fee payment: 3 |
|
R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
S533 | Written request for registration of change of name |
Free format text: JAPANESE INTERMEDIATE CODE: R313533 |
|
RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: R3D04 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20140617 Year of fee payment: 3 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20140617 Year of fee payment: 3 |
|
RD02 | Notification of acceptance of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: R3D02 |
|
LAPS | Cancellation because of no payment of annual fees |