GB0919379D0 - Wafer prcessing - Google Patents

Wafer prcessing

Info

Publication number
GB0919379D0
GB0919379D0 GBGB0919379.8A GB0919379A GB0919379D0 GB 0919379 D0 GB0919379 D0 GB 0919379D0 GB 0919379 A GB0919379 A GB 0919379A GB 0919379 D0 GB0919379 D0 GB 0919379D0
Authority
GB
United Kingdom
Prior art keywords
prcessing
wafer
wafer prcessing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GBGB0919379.8A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SOLAR SEMI ENGINEERING LIMITED
TRONRUD ENGINEERING AS
Original Assignee
EDWARDS CHEMICAL MAN EUROP Ltd
TRONRUD ENGINEERING AS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by EDWARDS CHEMICAL MAN EUROP Ltd, TRONRUD ENGINEERING AS filed Critical EDWARDS CHEMICAL MAN EUROP Ltd
Priority to GBGB0919379.8A priority Critical patent/GB0919379D0/en
Publication of GB0919379D0 publication Critical patent/GB0919379D0/en
Priority to TW099137939A priority patent/TW201125032A/en
Priority to PCT/EP2010/006716 priority patent/WO2011054510A2/en
Ceased legal-status Critical Current

Links

Classifications

    • H10P72/0416—
    • H10P72/13—
GBGB0919379.8A 2009-11-04 2009-11-04 Wafer prcessing Ceased GB0919379D0 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
GBGB0919379.8A GB0919379D0 (en) 2009-11-04 2009-11-04 Wafer prcessing
TW099137939A TW201125032A (en) 2009-11-04 2010-11-04 Wafer processing
PCT/EP2010/006716 WO2011054510A2 (en) 2009-11-04 2010-11-04 Wafer processing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB0919379.8A GB0919379D0 (en) 2009-11-04 2009-11-04 Wafer prcessing

Publications (1)

Publication Number Publication Date
GB0919379D0 true GB0919379D0 (en) 2009-12-23

Family

ID=41501927

Family Applications (1)

Application Number Title Priority Date Filing Date
GBGB0919379.8A Ceased GB0919379D0 (en) 2009-11-04 2009-11-04 Wafer prcessing

Country Status (3)

Country Link
GB (1) GB0919379D0 (en)
TW (1) TW201125032A (en)
WO (1) WO2011054510A2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2538437A1 (en) * 2011-06-23 2012-12-26 Meyer Burger AG Holding device for holding an arrangement of a plurality of wafers
DE102012221452A1 (en) * 2012-07-20 2014-01-23 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Device for separating wafers
EP2720258A1 (en) * 2012-10-12 2014-04-16 Meyer Burger AG Wafer handling system
EP2944444A1 (en) 2014-05-16 2015-11-18 Meyer Burger AG Wafer processing method

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3254115B2 (en) * 1995-09-13 2002-02-04 株式会社日平トヤマ Cracked work detection device and cracked work detection method
US5950643A (en) * 1995-09-06 1999-09-14 Miyazaki; Takeshiro Wafer processing system
JP3230566B2 (en) * 1996-02-29 2001-11-19 株式会社日平トヤマ Wafer separation and transfer equipment
DE19904834A1 (en) * 1999-02-07 2000-08-10 Acr Automation In Cleanroom Mechanism for detaching, separating, and storing thin, fragile disc-shaped substrates for solar cells etc. manufacture
DE102005028112A1 (en) * 2005-06-13 2006-12-21 Schmid Technology Systems Gmbh Method for positioning and maintaining the position of substrates, in particular of thin silicon wafers after wire sawing for their separation
DE102006052910B4 (en) * 2006-11-08 2008-12-04 Deutsche Solar Ag Wafer manufacturing process and apparatus
DE102006059810A1 (en) * 2006-12-15 2008-06-19 Rena Sondermaschinen Gmbh Apparatus and method for cleaning objects, in particular thin disks
DE102007021512A1 (en) * 2007-05-04 2008-11-13 Rena Sondermaschinen Gmbh Device for collecting flat objects in perpendicularly standing positioning and for fixing and conveying objects in a defined distance to each other, has two belts arranged parallel to each other
DE102007061410A1 (en) * 2007-12-11 2009-06-18 Gebr. Schmid Gmbh & Co. Method and apparatus for separating wafers from a wafer stack
DE102008060012A1 (en) * 2008-11-24 2010-05-27 Gebr. Schmid Gmbh & Co. Method for turning a sawn wafer block and device therefor
DE102008060014A1 (en) * 2008-11-24 2010-05-27 Gebr. Schmid Gmbh & Co. Method and apparatus for handling a sawn wafer block

Also Published As

Publication number Publication date
WO2011054510A2 (en) 2011-05-12
TW201125032A (en) 2011-07-16
WO2011054510A3 (en) 2011-10-13

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Legal Events

Date Code Title Description
COOA Change in applicant's name or ownership of the application

Owner name: SOLAR SEMI ENGINEERING LIMITED

Free format text: FORMER OWNERS: EDWARDS CHEMICAL MANAGEMENT EUROPE LIMITED;TRONRUD ENGINEERING AS;MENT EUROPE LIMITED

Owner name: TRONRUD ENGINEERING AS

Free format text: FORMER OWNERS: EDWARDS CHEMICAL MANAGEMENT EUROPE LIMITED;TRONRUD ENGINEERING AS;MENT EUROPE LIMITED

AT Applications terminated before publication under section 16(1)