GB0919379D0 - Wafer prcessing - Google Patents
Wafer prcessingInfo
- Publication number
- GB0919379D0 GB0919379D0 GB0919379A GB0919379A GB0919379D0 GB 0919379 D0 GB0919379 D0 GB 0919379D0 GB 0919379 A GB0919379 A GB 0919379A GB 0919379 A GB0919379 A GB 0919379A GB 0919379 D0 GB0919379 D0 GB 0919379D0
- Authority
- GB
- United Kingdom
- Prior art keywords
- prcessing
- wafer
- wafer prcessing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB0919379A GB0919379D0 (en) | 2009-11-04 | 2009-11-04 | Wafer prcessing |
TW99137939A TW201125032A (en) | 2009-11-04 | 2010-11-04 | Wafer processing |
PCT/EP2010/006716 WO2011054510A2 (en) | 2009-11-04 | 2010-11-04 | Wafer processing |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB0919379A GB0919379D0 (en) | 2009-11-04 | 2009-11-04 | Wafer prcessing |
Publications (1)
Publication Number | Publication Date |
---|---|
GB0919379D0 true GB0919379D0 (en) | 2009-12-23 |
Family
ID=41501927
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB0919379A Ceased GB0919379D0 (en) | 2009-11-04 | 2009-11-04 | Wafer prcessing |
Country Status (3)
Country | Link |
---|---|
GB (1) | GB0919379D0 (en) |
TW (1) | TW201125032A (en) |
WO (1) | WO2011054510A2 (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2538437A1 (en) * | 2011-06-23 | 2012-12-26 | Meyer Burger AG | Holding device for holding an arrangement of a plurality of wafers |
DE102012221452A1 (en) * | 2012-07-20 | 2014-01-23 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Device for separating wafers |
EP2720258A1 (en) * | 2012-10-12 | 2014-04-16 | Meyer Burger AG | Wafer handling system |
EP2944444A1 (en) | 2014-05-16 | 2015-11-18 | Meyer Burger AG | Wafer processing method |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5950643A (en) * | 1995-09-06 | 1999-09-14 | Miyazaki; Takeshiro | Wafer processing system |
JP3254115B2 (en) * | 1995-09-13 | 2002-02-04 | 株式会社日平トヤマ | Cracked work detection device and cracked work detection method |
JP3230566B2 (en) * | 1996-02-29 | 2001-11-19 | 株式会社日平トヤマ | Wafer separation and transfer equipment |
DE19904834A1 (en) * | 1999-02-07 | 2000-08-10 | Acr Automation In Cleanroom | Mechanism for detaching, separating, and storing thin, fragile disc-shaped substrates for solar cells etc. manufacture |
DE102005028112A1 (en) * | 2005-06-13 | 2006-12-21 | Schmid Technology Systems Gmbh | Method for positioning and maintaining the position of substrates, in particular of thin silicon wafers after wire sawing for their separation |
DE102006052910B4 (en) * | 2006-11-08 | 2008-12-04 | Deutsche Solar Ag | Wafer manufacturing process and apparatus |
DE102006059810A1 (en) * | 2006-12-15 | 2008-06-19 | Rena Sondermaschinen Gmbh | Apparatus and method for cleaning objects, in particular thin disks |
DE102007021512A1 (en) * | 2007-05-04 | 2008-11-13 | Rena Sondermaschinen Gmbh | Device for collecting flat objects in perpendicularly standing positioning and for fixing and conveying objects in a defined distance to each other, has two belts arranged parallel to each other |
DE102007061410A1 (en) * | 2007-12-11 | 2009-06-18 | Gebr. Schmid Gmbh & Co. | Method and apparatus for separating wafers from a wafer stack |
DE102008060014A1 (en) * | 2008-11-24 | 2010-05-27 | Gebr. Schmid Gmbh & Co. | Method and apparatus for handling a sawn wafer block |
DE102008060012A1 (en) * | 2008-11-24 | 2010-05-27 | Gebr. Schmid Gmbh & Co. | Method for turning a sawn wafer block and device therefor |
-
2009
- 2009-11-04 GB GB0919379A patent/GB0919379D0/en not_active Ceased
-
2010
- 2010-11-04 TW TW99137939A patent/TW201125032A/en unknown
- 2010-11-04 WO PCT/EP2010/006716 patent/WO2011054510A2/en active Application Filing
Also Published As
Publication number | Publication date |
---|---|
WO2011054510A2 (en) | 2011-05-12 |
WO2011054510A3 (en) | 2011-10-13 |
TW201125032A (en) | 2011-07-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
COOA | Change in applicant's name or ownership of the application |
Free format text: FORMER OWNERS: EDWARDS CHEMICAL MANAGEMENT EUROPE LIMITED;TRONRUD ENGINEERING AS;MENT EUROPE LIMITED Owner name: TRONRUD ENGINEERING AS Owner name: SOLAR SEMI ENGINEERING LIMITED Free format text: FORMER OWNERS: EDWARDS CHEMICAL MANAGEMENT EUROPE LIMITED;TRONRUD ENGINEERING AS;MENT EUROPE LIMITED |
|
AT | Applications terminated before publication under section 16(1) |