JP4113199B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
- Publication number
- JP4113199B2 JP4113199B2 JP2005109075A JP2005109075A JP4113199B2 JP 4113199 B2 JP4113199 B2 JP 4113199B2 JP 2005109075 A JP2005109075 A JP 2005109075A JP 2005109075 A JP2005109075 A JP 2005109075A JP 4113199 B2 JP4113199 B2 JP 4113199B2
- Authority
- JP
- Japan
- Prior art keywords
- insulating film
- film
- resistance element
- resistance
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000004065 semiconductor Substances 0.000 title claims description 198
- 239000004020 conductor Substances 0.000 claims description 148
- 238000002955 isolation Methods 0.000 claims description 124
- 239000000758 substrate Substances 0.000 claims description 102
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 52
- 229910052710 silicon Inorganic materials 0.000 claims description 52
- 239000010703 silicon Substances 0.000 claims description 52
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 19
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- 239000010410 layer Substances 0.000 description 89
- 238000005520 cutting process Methods 0.000 description 60
- 238000001459 lithography Methods 0.000 description 36
- 238000000034 method Methods 0.000 description 33
- 238000005530 etching Methods 0.000 description 32
- 238000010586 diagram Methods 0.000 description 27
- 230000008569 process Effects 0.000 description 24
- 238000004519 manufacturing process Methods 0.000 description 23
- 229910052751 metal Inorganic materials 0.000 description 19
- 239000002184 metal Substances 0.000 description 19
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 12
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 8
- 239000011229 interlayer Substances 0.000 description 8
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 6
- 230000008859 change Effects 0.000 description 6
- 238000000926 separation method Methods 0.000 description 6
- 239000013078 crystal Substances 0.000 description 5
- 238000003860 storage Methods 0.000 description 5
- 230000008901 benefit Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- -1 for example Substances 0.000 description 4
- 230000003071 parasitic effect Effects 0.000 description 4
- 239000000243 solution Substances 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 229910003811 SiGeC Inorganic materials 0.000 description 3
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 229910021332 silicide Inorganic materials 0.000 description 2
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 229910052718 tin Inorganic materials 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- DDFHBQSCUXNBSA-UHFFFAOYSA-N 5-(5-carboxythiophen-2-yl)thiophene-2-carboxylic acid Chemical compound S1C(C(=O)O)=CC=C1C1=CC=C(C(O)=O)S1 DDFHBQSCUXNBSA-UHFFFAOYSA-N 0.000 description 1
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910003855 HfAlO Inorganic materials 0.000 description 1
- 229910004129 HfSiO Inorganic materials 0.000 description 1
- 229910016006 MoSi Inorganic materials 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910002367 SrTiO Inorganic materials 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- 229910008484 TiSi Inorganic materials 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 239000005380 borophosphosilicate glass Substances 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- 229910000449 hafnium oxide Inorganic materials 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910021334 nickel silicide Inorganic materials 0.000 description 1
- RUFLMLWJRZAWLJ-UHFFFAOYSA-N nickel silicide Chemical compound [Ni]=[Si]=[Ni] RUFLMLWJRZAWLJ-UHFFFAOYSA-N 0.000 description 1
- PEUPIGGLJVUNEU-UHFFFAOYSA-N nickel silicon Chemical compound [Si].[Ni] PEUPIGGLJVUNEU-UHFFFAOYSA-N 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920001709 polysilazane Polymers 0.000 description 1
- 239000005368 silicate glass Substances 0.000 description 1
- WNUPENMBHHEARK-UHFFFAOYSA-N silicon tungsten Chemical compound [Si].[W] WNUPENMBHHEARK-UHFFFAOYSA-N 0.000 description 1
- VEALVRVVWBQVSL-UHFFFAOYSA-N strontium titanate Chemical compound [Sr+2].[O-][Ti]([O-])=O VEALVRVVWBQVSL-UHFFFAOYSA-N 0.000 description 1
- 229910001936 tantalum oxide Inorganic materials 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body
- H01L27/10—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration
- H01L27/105—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration including field-effect components
-
- A—HUMAN NECESSITIES
- A01—AGRICULTURE; FORESTRY; ANIMAL HUSBANDRY; HUNTING; TRAPPING; FISHING
- A01M—CATCHING, TRAPPING OR SCARING OF ANIMALS; APPARATUS FOR THE DESTRUCTION OF NOXIOUS ANIMALS OR NOXIOUS PLANTS
- A01M13/00—Fumigators; Apparatus for distributing gases
-
- A—HUMAN NECESSITIES
- A01—AGRICULTURE; FORESTRY; ANIMAL HUSBANDRY; HUNTING; TRAPPING; FISHING
- A01M—CATCHING, TRAPPING OR SCARING OF ANIMALS; APPARATUS FOR THE DESTRUCTION OF NOXIOUS ANIMALS OR NOXIOUS PLANTS
- A01M1/00—Stationary means for catching or killing insects
- A01M1/02—Stationary means for catching or killing insects with devices or substances, e.g. food, pheronones attracting the insects
- A01M1/023—Attracting insects by the simulation of a living being, i.e. emission of carbon dioxide, heat, sound waves or vibrations
-
- A—HUMAN NECESSITIES
- A01—AGRICULTURE; FORESTRY; ANIMAL HUSBANDRY; HUNTING; TRAPPING; FISHING
- A01M—CATCHING, TRAPPING OR SCARING OF ANIMALS; APPARATUS FOR THE DESTRUCTION OF NOXIOUS ANIMALS OR NOXIOUS PLANTS
- A01M1/00—Stationary means for catching or killing insects
- A01M1/20—Poisoning, narcotising, or burning insects
- A01M1/2022—Poisoning or narcotising insects by vaporising an insecticide
- A01M1/2061—Poisoning or narcotising insects by vaporising an insecticide using a heat source
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
- H10B41/40—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the peripheral circuit region
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
- H10B41/40—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the peripheral circuit region
- H10B41/42—Simultaneous manufacture of periphery and memory cells
-
- A—HUMAN NECESSITIES
- A01—AGRICULTURE; FORESTRY; ANIMAL HUSBANDRY; HUNTING; TRAPPING; FISHING
- A01M—CATCHING, TRAPPING OR SCARING OF ANIMALS; APPARATUS FOR THE DESTRUCTION OF NOXIOUS ANIMALS OR NOXIOUS PLANTS
- A01M2200/00—Kind of animal
- A01M2200/01—Insects
- A01M2200/012—Flying insects
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body
- H01L27/06—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration
- H01L27/0611—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits having a two-dimensional layout of components without a common active region
- H01L27/0617—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits having a two-dimensional layout of components without a common active region comprising components of the field-effect type
- H01L27/0629—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits having a two-dimensional layout of components without a common active region comprising components of the field-effect type in combination with diodes, or resistors, or capacitors
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S43/00—Fishing, trapping, and vermin destroying
Landscapes
- Life Sciences & Earth Sciences (AREA)
- Pest Control & Pesticides (AREA)
- Engineering & Computer Science (AREA)
- Insects & Arthropods (AREA)
- Wood Science & Technology (AREA)
- Zoology (AREA)
- Environmental Sciences (AREA)
- Power Engineering (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Semiconductor Memories (AREA)
- Non-Volatile Memory (AREA)
- Semiconductor Integrated Circuits (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
Description
本発明による半導体装置の第1の実施形態の一例を図1から図3に示す。この半導体装置は、不揮発性半導体記憶素子100と抵抗素子200とを具備する。図1は、本実施形態の半導体装置の平面図であり、図1(a)は、不揮発性半導体記憶素子100を、図1(b)は、抵抗素子200を示す。図2は、不揮発性半導体記憶素子100の断面構造を示す図であり、図2(a)は、図1(a)に切断線2A−2Aで示した制御ゲート電極130に平行な方向の断面図であり、図2(b)は、図1(a)に切断線2B−2Bで示した制御ゲート電極130に直交する方向の断面図である。図3は、抵抗素子200の断面構造を示す図であり、図3(a)は、図1(b)に切断線3A−3Aで示した抵抗素子の電極部における抵抗素子エレメント202を横断する方向の断面図であり、図3(b)は、図1(b)に切断線3B−3Bで示した抵抗素子の電極分離領域238における抵抗素子エレメント202を横断する方向の断面図であり、図3(c)は、図1(b)に切断線3C−3Cで示した抵抗素子エレメント202の長手方向の断面図である。なお、図1は、構造を分かり易くするため、制御ゲート電極130若しくは抵抗素子の電極230の表面を基準とした平面図で示している。
本発明の第2の実施形態は、不揮発性半導体記憶素子の浮遊ゲート電極及び抵抗素子の第1の導電体層を第3の導電体膜及び第4の導電体膜の2層で構成し、第4の導電体膜を素子分離間に形成された溝に形成する半導体装置である。本実施形態による半導体装置は、第1の実施形態による半導体装置と比較して、メモリセルにおいて浮遊ゲート電極の第4の導電体膜の幅を第1の実施形態の第1の導電体膜の幅よりも広くできるため、浮遊ゲート電極と制御ゲート電極との間の容量を大きくできる。
本発明の第3の実施形態は、不揮発性半導体記憶素子の浮遊ゲート電極及び抵抗素子の第1の導電体層を素子分離間に形成された溝に形成する半導体装置である。本実施形態による半導体装置は、第1及び第2の実施形態による半導体装置と比較して、メモリセルにおいて浮遊ゲート電極の幅を広くできるため、浮遊ゲート電極と制御ゲート電極との間の容量を大きくできる。その結果、浮遊ゲート電極が薄膜化しても十分なカップリング比を得ることができる。
Claims (5)
- 半導体基板に設けられた第1の半導体領域と、
前記第1の半導体領域上に形成された第1の絶縁膜と、
前記第1の絶縁膜上に形成された第1の電極と、
前記半導体基板中及び該基板上に設けられ、前記第1の絶縁膜及び前記第1の電極の側面と接する第1の素子分離と、
前記第1の電極の少なくとも上面に形成された第2の絶縁膜と、
前記第2の絶縁膜に接して設けられた第2の電極と
を具備する、不揮発性半導体記憶素子と、
前記半導体基板に設けられた第2の半導体領域と、
前記第2の半導体領域上に形成された前記第1の絶縁膜より厚い第3の絶縁膜と、
前記第3の絶縁膜上に、前記第1の電極と同一の材料で形成された導電体層と、
前記半導体基板中及び該基板上に設けられ、前記第3の絶縁膜及び前記導電体層の側面と接する第2の素子分離と、
前記導電体層の上面に形成された第4の絶縁膜と、
前記導電体層の両端の前記第4の絶縁膜上に形成され、前記第2の電極の少なくとも一部と同一の材料を含み、前記導電体層に接続された第3及び第4の電極と
を具備する、抵抗素子とを具備することを特徴とする半導体装置。 - 前記抵抗素子は、並列して周期的に形成された複数の前記導電体層を含み、少なくとも両端の前記導電体層は電気的に分離されていることを特徴とする請求項1に記載の半導体装置。
- 前記第3の絶縁膜は、13nm以上50nm以下の膜厚のシリコン酸化膜(SiO 2 膜)又はシリコン酸窒化膜(SiON膜)からなることを特徴とする請求項1若しくは2に記載の半導体装置。
- 前記抵抗素子の前記第3若しくは第4の電極の幅は、前記導電体層の幅よりも0.02μmから0.5μmだけ広いことを特徴とする請求項1ないし3のいずれか1に記載の半導体装置。
- 前記抵抗素子の前記第4の絶縁膜上に形成され、前記第3及び第4の電極の間に該電極とは電気的に分離されて配置され、前記第3及び第4の電極の少なくとも一部と同一の材料で形成され、前記導電体層の幅よりも0.02μmから0.5μmだけ広い幅を有する第2の導電体層を具備することを特徴とする請求項1ないし4のいずれか1に記載の半導体装置。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005109075A JP4113199B2 (ja) | 2005-04-05 | 2005-04-05 | 半導体装置 |
US11/174,536 US8044450B2 (en) | 2005-04-05 | 2005-07-06 | Semiconductor device with a non-volatile memory and resistor |
KR1020060031023A KR100789511B1 (ko) | 2005-04-05 | 2006-04-05 | 반도체 장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005109075A JP4113199B2 (ja) | 2005-04-05 | 2005-04-05 | 半導体装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006294649A JP2006294649A (ja) | 2006-10-26 |
JP4113199B2 true JP4113199B2 (ja) | 2008-07-09 |
Family
ID=37069229
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005109075A Active JP4113199B2 (ja) | 2005-04-05 | 2005-04-05 | 半導体装置 |
Country Status (3)
Country | Link |
---|---|
US (1) | US8044450B2 (ja) |
JP (1) | JP4113199B2 (ja) |
KR (1) | KR100789511B1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8604517B2 (en) | 2011-02-04 | 2013-12-10 | Kabushiki Kaisha Toshiba | Non-volatile semiconductor memory device for suppressing deterioration in junction breakdown voltage and surface breakdown voltage of transistor |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4600417B2 (ja) * | 2007-04-17 | 2010-12-15 | ソニー株式会社 | 半導体装置の製造方法 |
JP2009231445A (ja) * | 2008-03-21 | 2009-10-08 | Toshiba Corp | 半導体記憶装置 |
JP2009267107A (ja) | 2008-04-25 | 2009-11-12 | Toshiba Corp | 不揮発性半導体記憶装置およびその製造方法 |
FR2935196B1 (fr) * | 2008-08-19 | 2011-03-18 | St Microelectronics Rousset | Circuit integre a dimensions reduites |
JP4764461B2 (ja) * | 2008-09-17 | 2011-09-07 | 株式会社東芝 | 半導体装置 |
JP2010092929A (ja) * | 2008-10-03 | 2010-04-22 | Toshiba Corp | 不揮発性半導体記憶装置 |
JP2012009509A (ja) * | 2010-06-22 | 2012-01-12 | Toshiba Corp | 半導体装置 |
JP2012043856A (ja) * | 2010-08-16 | 2012-03-01 | Toshiba Corp | 半導体装置およびその製造方法 |
JP2012204663A (ja) | 2011-03-25 | 2012-10-22 | Toshiba Corp | 半導体装置およびその製造方法 |
FR3091410B1 (fr) * | 2018-12-26 | 2021-01-15 | St Microelectronics Crolles 2 Sas | Procédé de gravure |
WO2020166073A1 (ja) * | 2019-02-15 | 2020-08-20 | キオクシア株式会社 | 不揮発性半導体記憶装置及びその製造方法 |
JP2021136301A (ja) * | 2020-02-26 | 2021-09-13 | キオクシア株式会社 | 不揮発性半導体記憶装置及びその製造方法 |
Family Cites Families (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57202774A (en) | 1982-03-29 | 1982-12-11 | Nec Corp | Semiconductor device |
JPS59210658A (ja) * | 1983-05-16 | 1984-11-29 | Nec Corp | 半導体装置の製造方法 |
JP3028420B2 (ja) * | 1988-09-05 | 2000-04-04 | セイコーエプソン株式会社 | 半導体集積装置 |
JP3404064B2 (ja) * | 1993-03-09 | 2003-05-06 | 株式会社日立製作所 | 半導体装置及びその製造方法 |
US5316978A (en) * | 1993-03-25 | 1994-05-31 | Northern Telecom Limited | Forming resistors for intergrated circuits |
JPH08288397A (ja) | 1995-04-10 | 1996-11-01 | Sony Corp | 半導体装置の製造方法 |
JP3415712B2 (ja) * | 1995-09-19 | 2003-06-09 | 松下電器産業株式会社 | 半導体装置及びその製造方法 |
KR0183877B1 (ko) | 1996-06-07 | 1999-03-20 | 김광호 | 불휘발성 메모리 장치 및 그 제조방법 |
US6342715B1 (en) * | 1997-06-27 | 2002-01-29 | Kabushiki Kaisha Toshiba | Nonvolatile semiconductor memory device |
JP3586072B2 (ja) * | 1997-07-10 | 2004-11-10 | 株式会社東芝 | 不揮発性半導体記憶装置 |
JP2000150789A (ja) | 1998-11-10 | 2000-05-30 | Toshiba Corp | 半導体集積回路 |
JP2001085617A (ja) | 1999-09-09 | 2001-03-30 | Nec Corp | 半導体装置及びその製造方法 |
JP4031178B2 (ja) | 2000-05-01 | 2008-01-09 | 東芝マイクロエレクトロニクス株式会社 | 半導体高抵抗素子の製造方法 |
US6534867B1 (en) | 1999-09-27 | 2003-03-18 | Kabushiki Kaisha Toshiba | Semiconductor device, semiconductor element and method for producing same |
JP2002176114A (ja) | 2000-09-26 | 2002-06-21 | Toshiba Corp | 半導体装置及びその製造方法 |
JP4313941B2 (ja) * | 2000-09-29 | 2009-08-12 | 株式会社東芝 | 半導体記憶装置 |
US6590255B2 (en) * | 2000-09-29 | 2003-07-08 | Kabushiki Kaisha Toshiba | Semiconductor memory device having memory cell section and peripheral circuit section and method of manufacturing the same |
JP3984020B2 (ja) | 2000-10-30 | 2007-09-26 | 株式会社東芝 | 不揮発性半導体記憶装置 |
JP4008651B2 (ja) | 2000-10-31 | 2007-11-14 | 株式会社東芝 | 半導体装置とその製造方法 |
JP3640186B2 (ja) | 2002-03-06 | 2005-04-20 | セイコーエプソン株式会社 | 半導体装置の製造方法 |
KR20040079509A (ko) * | 2003-03-07 | 2004-09-16 | 삼성전자주식회사 | 저항 소자를 구비하는 반도체 장치 및 그 제조 방법 |
KR20050083453A (ko) * | 2004-02-23 | 2005-08-26 | 삼성전자주식회사 | 저항소자를 구비하는 비휘발성 메모리 소자의 형성 방법 |
-
2005
- 2005-04-05 JP JP2005109075A patent/JP4113199B2/ja active Active
- 2005-07-06 US US11/174,536 patent/US8044450B2/en not_active Expired - Fee Related
-
2006
- 2006-04-05 KR KR1020060031023A patent/KR100789511B1/ko not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8604517B2 (en) | 2011-02-04 | 2013-12-10 | Kabushiki Kaisha Toshiba | Non-volatile semiconductor memory device for suppressing deterioration in junction breakdown voltage and surface breakdown voltage of transistor |
Also Published As
Publication number | Publication date |
---|---|
JP2006294649A (ja) | 2006-10-26 |
KR20060107346A (ko) | 2006-10-13 |
KR100789511B1 (ko) | 2007-12-28 |
US8044450B2 (en) | 2011-10-25 |
US20060220003A1 (en) | 2006-10-05 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4113199B2 (ja) | 半導体装置 | |
US9391082B2 (en) | Memory arrays with a memory cell adjacent to a smaller size of a pillar having a greater channel length than a memory cell adjacent to a larger size of the pillar and methods | |
CN106486489B (zh) | 半导体装置 | |
KR100349279B1 (ko) | 불휘발성 반도체 기억 장치 및 그 제조 방법 | |
JP5985293B2 (ja) | 半導体装置および半導体装置の製造方法 | |
US6423584B2 (en) | method for forming capacitors and field effect transistors in a semiconductor integrated circuit device | |
US7145199B2 (en) | Nonvolatile semiconductor memory | |
US20020019100A1 (en) | Method for manufacturing semiconductor integrated circuit device having deposited layer for gate insulation | |
US7157797B2 (en) | Semiconductor device with suppressed copper migration | |
JP2006216957A (ja) | 垂直なゲート電極のトランジスタを備える半導体装置及びその製造方法 | |
US10559581B2 (en) | Semiconductor device | |
US9583502B2 (en) | Method of manufacturing a semiconductor device | |
JPH1126731A (ja) | 不揮発性半導体記憶装置およびその製造方法 | |
US8093647B2 (en) | Nonvolatile semiconductor memory having transistor with a diffusion blocking layer between the lower gate and fully silicided upper gate | |
US7126184B2 (en) | Nonvolatile semiconductor memory device and a method of the same | |
US7936005B2 (en) | Semiconductor memory device including laminated gate having electric charge accumulating layer and control gate and method of manufacturing the same | |
JP2007287795A (ja) | 不揮発性半導体記憶装置 | |
JP2011023567A (ja) | 半導体装置 | |
JP2009206355A (ja) | 不揮発性半導体メモリ及び不揮発性半導体メモリの製造方法 | |
JP2008166415A (ja) | 半導体装置及びその製造方法 | |
US8502298B2 (en) | Semiconductor device and method of manufacturing the same | |
JP2007234959A (ja) | 不揮発性半導体記憶装置およびその製造方法 | |
JP2006013336A (ja) | 半導体記憶装置およびその製造方法 | |
JPH10326881A (ja) | 不揮発性半導体記憶装置及びその製造方法 | |
JP2006228869A (ja) | 半導体記憶装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20070921 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20071009 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20071207 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20080408 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20080410 |
|
R151 | Written notification of patent or utility model registration |
Ref document number: 4113199 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R151 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110418 Year of fee payment: 3 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130418 Year of fee payment: 5 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20140418 Year of fee payment: 6 |
|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313111 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313111 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |