JP3933524B2 - 基板処理装置 - Google Patents

基板処理装置 Download PDF

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Publication number
JP3933524B2
JP3933524B2 JP2002156664A JP2002156664A JP3933524B2 JP 3933524 B2 JP3933524 B2 JP 3933524B2 JP 2002156664 A JP2002156664 A JP 2002156664A JP 2002156664 A JP2002156664 A JP 2002156664A JP 3933524 B2 JP3933524 B2 JP 3933524B2
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JP
Japan
Prior art keywords
substrate
transfer
arm
unit
transport
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2002156664A
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English (en)
Japanese (ja)
Other versions
JP2004001906A5 (enExample
JP2004001906A (ja
Inventor
泰一郎 岸間
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to JP2002156664A priority Critical patent/JP3933524B2/ja
Priority to TW092113756A priority patent/TWI265906B/zh
Priority to KR1020030034238A priority patent/KR100951964B1/ko
Priority to CNB031472087A priority patent/CN1260801C/zh
Publication of JP2004001906A publication Critical patent/JP2004001906A/ja
Publication of JP2004001906A5 publication Critical patent/JP2004001906A5/ja
Application granted granted Critical
Publication of JP3933524B2 publication Critical patent/JP3933524B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0214—Articles of special size, shape or weigh
    • B65G2201/022—Flat

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Manipulator (AREA)
JP2002156664A 2002-05-30 2002-05-30 基板処理装置 Expired - Fee Related JP3933524B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2002156664A JP3933524B2 (ja) 2002-05-30 2002-05-30 基板処理装置
TW092113756A TWI265906B (en) 2002-05-30 2003-05-21 Substrate transporting apparatus and substrate processing apparatus
KR1020030034238A KR100951964B1 (ko) 2002-05-30 2003-05-29 기판반송장치 및 기판처리장치
CNB031472087A CN1260801C (zh) 2002-05-30 2003-05-30 基板搬运装置和基板处理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002156664A JP3933524B2 (ja) 2002-05-30 2002-05-30 基板処理装置

Publications (3)

Publication Number Publication Date
JP2004001906A JP2004001906A (ja) 2004-01-08
JP2004001906A5 JP2004001906A5 (enExample) 2005-04-07
JP3933524B2 true JP3933524B2 (ja) 2007-06-20

Family

ID=29772800

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002156664A Expired - Fee Related JP3933524B2 (ja) 2002-05-30 2002-05-30 基板処理装置

Country Status (4)

Country Link
JP (1) JP3933524B2 (enExample)
KR (1) KR100951964B1 (enExample)
CN (1) CN1260801C (enExample)
TW (1) TWI265906B (enExample)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101033121B1 (ko) * 2004-06-07 2011-05-11 엘지디스플레이 주식회사 로봇암을 포함하는 기판이송장치 및 그것을 이용한 기판이송방법
CN1721302B (zh) * 2004-07-15 2011-02-23 奇美电子股份有限公司 一种用于序列式基板盒的基板搬运装置
JP4378301B2 (ja) * 2005-02-28 2009-12-02 東京エレクトロン株式会社 基板処理装置及び基板処理方法及び基板処理プログラム
JP2007117857A (ja) * 2005-10-27 2007-05-17 Tokyo Ohka Kogyo Co Ltd 基板の搬送処理装置
JP2007203402A (ja) * 2006-02-01 2007-08-16 Nidec Sankyo Corp ロボット用ハンドおよび該ハンドを具備する搬送ロボット
JP4312787B2 (ja) * 2006-11-15 2009-08-12 東京エレクトロン株式会社 減圧乾燥装置
JP5182339B2 (ja) * 2010-08-31 2013-04-17 三星ダイヤモンド工業株式会社 基板ブレーク装置
JP5616205B2 (ja) * 2010-11-29 2014-10-29 東京エレクトロン株式会社 基板処理システム、基板処理方法、プログラム及びコンピュータ記憶媒体
KR101321322B1 (ko) * 2011-04-22 2013-10-23 시바우라 메카트로닉스 가부시끼가이샤 기판 반송 장치 및 반송 방법
JP2014519187A (ja) * 2011-05-03 2014-08-07 株式会社テラセミコン インライン熱処理装置
CN102437077A (zh) * 2011-10-19 2012-05-02 东莞宏威数码机械有限公司 Oled基片线性传输设备
CN102709392B (zh) * 2012-05-31 2014-07-16 苏州晟成新能源科技有限公司 一种输送宽度可调的铺板机
CN102683503B (zh) * 2012-05-31 2014-05-28 苏州晟成新能源科技有限公司 一种输送长度可调的铺板机
JP6616606B2 (ja) * 2015-07-13 2019-12-04 日本電産サンキョー株式会社 産業用ロボット
JP6864514B2 (ja) * 2017-03-23 2021-04-28 株式会社Ｓｃｒｅｅｎホールディングス 基板処理システムおよび基板処理方法
CN111646195B (zh) * 2020-06-04 2021-08-24 西安外事学院 一种基板运送用机械臂
CN113651121B (zh) * 2021-08-20 2023-07-25 安徽海思达机器人有限公司 一种酒盒卸垛装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62228388A (ja) * 1986-03-31 1987-10-07 オークマ株式会社 ロボツト用ハンド
JPH01316417A (ja) * 1988-06-16 1989-12-21 Ngk Spark Plug Co Ltd 雰囲気炉の露点制御装置
JPH0773755B2 (ja) * 1990-10-12 1995-08-09 有限会社ティアイエンジニアリング 搬送装置
JPH10308436A (ja) * 1997-05-08 1998-11-17 Olympus Optical Co Ltd 基板搬送装置
JPH11309409A (ja) * 1998-04-30 1999-11-09 Dainippon Screen Mfg Co Ltd 基板処理システム
JP4030654B2 (ja) * 1998-06-02 2008-01-09 大日本スクリーン製造株式会社 基板搬送装置
JP3605541B2 (ja) * 1999-05-25 2004-12-22 東京エレクトロン株式会社 基板処理装置

Also Published As

Publication number Publication date
CN1461726A (zh) 2003-12-17
KR20030093999A (ko) 2003-12-11
CN1260801C (zh) 2006-06-21
TW200307640A (en) 2003-12-16
TWI265906B (en) 2006-11-11
KR100951964B1 (ko) 2010-04-08
JP2004001906A (ja) 2004-01-08

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