TWI265906B - Substrate transporting apparatus and substrate processing apparatus - Google Patents
Substrate transporting apparatus and substrate processing apparatus Download PDFInfo
- Publication number
- TWI265906B TWI265906B TW092113756A TW92113756A TWI265906B TW I265906 B TWI265906 B TW I265906B TW 092113756 A TW092113756 A TW 092113756A TW 92113756 A TW92113756 A TW 92113756A TW I265906 B TWI265906 B TW I265906B
- Authority
- TW
- Taiwan
- Prior art keywords
- substrate
- arm
- transport
- transfer
- processing unit
- Prior art date
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 537
- 238000012545 processing Methods 0.000 title claims description 143
- 230000007246 mechanism Effects 0.000 claims abstract description 102
- 230000032258 transport Effects 0.000 claims description 142
- 238000012546 transfer Methods 0.000 claims description 138
- 239000011248 coating agent Substances 0.000 claims description 55
- 238000000576 coating method Methods 0.000 claims description 55
- 230000002093 peripheral effect Effects 0.000 claims description 48
- 238000000034 method Methods 0.000 claims description 29
- 230000008569 process Effects 0.000 claims description 23
- 238000001035 drying Methods 0.000 claims description 16
- 238000001179 sorption measurement Methods 0.000 claims description 11
- 238000001291 vacuum drying Methods 0.000 claims description 11
- 229910052770 Uranium Inorganic materials 0.000 claims description 6
- 238000004528 spin coating Methods 0.000 claims description 3
- 230000036581 peripheral resistance Effects 0.000 claims 1
- 239000003795 chemical substances by application Substances 0.000 abstract description 12
- 238000005260 corrosion Methods 0.000 abstract description 2
- 230000001105 regulatory effect Effects 0.000 abstract 3
- 238000010438 heat treatment Methods 0.000 description 70
- 238000011161 development Methods 0.000 description 28
- 238000001816 cooling Methods 0.000 description 23
- 238000009987 spinning Methods 0.000 description 14
- 238000005406 washing Methods 0.000 description 13
- 230000008878 coupling Effects 0.000 description 12
- 238000010168 coupling process Methods 0.000 description 12
- 238000005859 coupling reaction Methods 0.000 description 12
- 230000006837 decompression Effects 0.000 description 11
- 238000009281 ultraviolet germicidal irradiation Methods 0.000 description 9
- 239000007788 liquid Substances 0.000 description 8
- 230000007723 transport mechanism Effects 0.000 description 7
- 210000000707 wrist Anatomy 0.000 description 6
- 239000003623 enhancer Substances 0.000 description 5
- 230000008859 change Effects 0.000 description 4
- 239000004973 liquid crystal related substance Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000002904 solvent Substances 0.000 description 4
- 238000007796 conventional method Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 208000002740 Muscle Rigidity Diseases 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 230000018044 dehydration Effects 0.000 description 2
- 238000006297 dehydration reaction Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000007779 soft material Substances 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229920002449 FKM Polymers 0.000 description 1
- 239000004677 Nylon Substances 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000001174 ascending effect Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000004042 decolorization Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 125000000816 ethylene group Chemical group [H]C([H])([*:1])C([H])([H])[*:2] 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 230000002209 hydrophobic effect Effects 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 229920001778 nylon Polymers 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000005201 scrubbing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- JFALSRSLKYAFGM-UHFFFAOYSA-N uranium(0) Chemical compound [U] JFALSRSLKYAFGM-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0214—Articles of special size, shape or weigh
- B65G2201/022—Flat
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Manipulator (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002156664A JP3933524B2 (ja) | 2002-05-30 | 2002-05-30 | 基板処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200307640A TW200307640A (en) | 2003-12-16 |
| TWI265906B true TWI265906B (en) | 2006-11-11 |
Family
ID=29772800
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW092113756A TWI265906B (en) | 2002-05-30 | 2003-05-21 | Substrate transporting apparatus and substrate processing apparatus |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP3933524B2 (enExample) |
| KR (1) | KR100951964B1 (enExample) |
| CN (1) | CN1260801C (enExample) |
| TW (1) | TWI265906B (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI466229B (zh) * | 2010-08-31 | 2014-12-21 | Mitsuboshi Diamond Ind Co Ltd | 保持裝置及基板分斷裝置 |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101033121B1 (ko) * | 2004-06-07 | 2011-05-11 | 엘지디스플레이 주식회사 | 로봇암을 포함하는 기판이송장치 및 그것을 이용한 기판이송방법 |
| CN1721302B (zh) * | 2004-07-15 | 2011-02-23 | 奇美电子股份有限公司 | 一种用于序列式基板盒的基板搬运装置 |
| JP4378301B2 (ja) * | 2005-02-28 | 2009-12-02 | 東京エレクトロン株式会社 | 基板処理装置及び基板処理方法及び基板処理プログラム |
| JP2007117857A (ja) * | 2005-10-27 | 2007-05-17 | Tokyo Ohka Kogyo Co Ltd | 基板の搬送処理装置 |
| JP2007203402A (ja) * | 2006-02-01 | 2007-08-16 | Nidec Sankyo Corp | ロボット用ハンドおよび該ハンドを具備する搬送ロボット |
| JP4312787B2 (ja) * | 2006-11-15 | 2009-08-12 | 東京エレクトロン株式会社 | 減圧乾燥装置 |
| JP5616205B2 (ja) * | 2010-11-29 | 2014-10-29 | 東京エレクトロン株式会社 | 基板処理システム、基板処理方法、プログラム及びコンピュータ記憶媒体 |
| KR101321322B1 (ko) * | 2011-04-22 | 2013-10-23 | 시바우라 메카트로닉스 가부시끼가이샤 | 기판 반송 장치 및 반송 방법 |
| JP2014519187A (ja) * | 2011-05-03 | 2014-08-07 | 株式会社テラセミコン | インライン熱処理装置 |
| CN102437077A (zh) * | 2011-10-19 | 2012-05-02 | 东莞宏威数码机械有限公司 | Oled基片线性传输设备 |
| CN102709392B (zh) * | 2012-05-31 | 2014-07-16 | 苏州晟成新能源科技有限公司 | 一种输送宽度可调的铺板机 |
| CN102683503B (zh) * | 2012-05-31 | 2014-05-28 | 苏州晟成新能源科技有限公司 | 一种输送长度可调的铺板机 |
| JP6616606B2 (ja) * | 2015-07-13 | 2019-12-04 | 日本電産サンキョー株式会社 | 産業用ロボット |
| JP6864514B2 (ja) * | 2017-03-23 | 2021-04-28 | 株式会社Ｓｃｒｅｅｎホールディングス | 基板処理システムおよび基板処理方法 |
| CN111646195B (zh) * | 2020-06-04 | 2021-08-24 | 西安外事学院 | 一种基板运送用机械臂 |
| CN113651121B (zh) * | 2021-08-20 | 2023-07-25 | 安徽海思达机器人有限公司 | 一种酒盒卸垛装置 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62228388A (ja) * | 1986-03-31 | 1987-10-07 | オークマ株式会社 | ロボツト用ハンド |
| JPH01316417A (ja) * | 1988-06-16 | 1989-12-21 | Ngk Spark Plug Co Ltd | 雰囲気炉の露点制御装置 |
| JPH0773755B2 (ja) * | 1990-10-12 | 1995-08-09 | 有限会社ティアイエンジニアリング | 搬送装置 |
| JPH10308436A (ja) * | 1997-05-08 | 1998-11-17 | Olympus Optical Co Ltd | 基板搬送装置 |
| JPH11309409A (ja) * | 1998-04-30 | 1999-11-09 | Dainippon Screen Mfg Co Ltd | 基板処理システム |
| JP4030654B2 (ja) * | 1998-06-02 | 2008-01-09 | 大日本スクリーン製造株式会社 | 基板搬送装置 |
| JP3605541B2 (ja) * | 1999-05-25 | 2004-12-22 | 東京エレクトロン株式会社 | 基板処理装置 |
-
2002
- 2002-05-30 JP JP2002156664A patent/JP3933524B2/ja not_active Expired - Fee Related
-
2003
- 2003-05-21 TW TW092113756A patent/TWI265906B/zh not_active IP Right Cessation
- 2003-05-29 KR KR1020030034238A patent/KR100951964B1/ko not_active Expired - Fee Related
- 2003-05-30 CN CNB031472087A patent/CN1260801C/zh not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI466229B (zh) * | 2010-08-31 | 2014-12-21 | Mitsuboshi Diamond Ind Co Ltd | 保持裝置及基板分斷裝置 |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1461726A (zh) | 2003-12-17 |
| KR20030093999A (ko) | 2003-12-11 |
| CN1260801C (zh) | 2006-06-21 |
| JP3933524B2 (ja) | 2007-06-20 |
| TW200307640A (en) | 2003-12-16 |
| KR100951964B1 (ko) | 2010-04-08 |
| JP2004001906A (ja) | 2004-01-08 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |