CN1260801C - 基板搬运装置和基板处理装置 - Google Patents

基板搬运装置和基板处理装置 Download PDF

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Publication number
CN1260801C
CN1260801C CNB031472087A CN03147208A CN1260801C CN 1260801 C CN1260801 C CN 1260801C CN B031472087 A CNB031472087 A CN B031472087A CN 03147208 A CN03147208 A CN 03147208A CN 1260801 C CN1260801 C CN 1260801C
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CN
China
Prior art keywords
carrying
substrate
arm
space
arm member
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Expired - Fee Related
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CNB031472087A
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English (en)
Chinese (zh)
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CN1461726A (zh
Inventor
岸间泰一郎
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Tokyo Electron Ltd
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Tokyo Electron Ltd
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Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Publication of CN1461726A publication Critical patent/CN1461726A/zh
Application granted granted Critical
Publication of CN1260801C publication Critical patent/CN1260801C/zh
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Expired - Fee Related legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0214—Articles of special size, shape or weigh
    • B65G2201/022—Flat

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Manipulator (AREA)
CNB031472087A 2002-05-30 2003-05-30 基板搬运装置和基板处理装置 Expired - Fee Related CN1260801C (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP156664/02 2002-05-30
JP156664/2002 2002-05-30
JP2002156664A JP3933524B2 (ja) 2002-05-30 2002-05-30 基板処理装置

Publications (2)

Publication Number Publication Date
CN1461726A CN1461726A (zh) 2003-12-17
CN1260801C true CN1260801C (zh) 2006-06-21

Family

ID=29772800

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB031472087A Expired - Fee Related CN1260801C (zh) 2002-05-30 2003-05-30 基板搬运装置和基板处理装置

Country Status (4)

Country Link
JP (1) JP3933524B2 (enExample)
KR (1) KR100951964B1 (enExample)
CN (1) CN1260801C (enExample)
TW (1) TWI265906B (enExample)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101033121B1 (ko) * 2004-06-07 2011-05-11 엘지디스플레이 주식회사 로봇암을 포함하는 기판이송장치 및 그것을 이용한 기판이송방법
CN1721302B (zh) * 2004-07-15 2011-02-23 奇美电子股份有限公司 一种用于序列式基板盒的基板搬运装置
JP4378301B2 (ja) * 2005-02-28 2009-12-02 東京エレクトロン株式会社 基板処理装置及び基板処理方法及び基板処理プログラム
JP2007117857A (ja) * 2005-10-27 2007-05-17 Tokyo Ohka Kogyo Co Ltd 基板の搬送処理装置
JP2007203402A (ja) * 2006-02-01 2007-08-16 Nidec Sankyo Corp ロボット用ハンドおよび該ハンドを具備する搬送ロボット
JP4312787B2 (ja) * 2006-11-15 2009-08-12 東京エレクトロン株式会社 減圧乾燥装置
JP5182339B2 (ja) * 2010-08-31 2013-04-17 三星ダイヤモンド工業株式会社 基板ブレーク装置
JP5616205B2 (ja) * 2010-11-29 2014-10-29 東京エレクトロン株式会社 基板処理システム、基板処理方法、プログラム及びコンピュータ記憶媒体
KR101321322B1 (ko) * 2011-04-22 2013-10-23 시바우라 메카트로닉스 가부시끼가이샤 기판 반송 장치 및 반송 방법
JP2014519187A (ja) * 2011-05-03 2014-08-07 株式会社テラセミコン インライン熱処理装置
CN102437077A (zh) * 2011-10-19 2012-05-02 东莞宏威数码机械有限公司 Oled基片线性传输设备
CN102709392B (zh) * 2012-05-31 2014-07-16 苏州晟成新能源科技有限公司 一种输送宽度可调的铺板机
CN102683503B (zh) * 2012-05-31 2014-05-28 苏州晟成新能源科技有限公司 一种输送长度可调的铺板机
JP6616606B2 (ja) * 2015-07-13 2019-12-04 日本電産サンキョー株式会社 産業用ロボット
JP6864514B2 (ja) * 2017-03-23 2021-04-28 株式会社Ｓｃｒｅｅｎホールディングス 基板処理システムおよび基板処理方法
CN111646195B (zh) * 2020-06-04 2021-08-24 西安外事学院 一种基板运送用机械臂
CN113651121B (zh) * 2021-08-20 2023-07-25 安徽海思达机器人有限公司 一种酒盒卸垛装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62228388A (ja) * 1986-03-31 1987-10-07 オークマ株式会社 ロボツト用ハンド
JPH01316417A (ja) * 1988-06-16 1989-12-21 Ngk Spark Plug Co Ltd 雰囲気炉の露点制御装置
JPH0773755B2 (ja) * 1990-10-12 1995-08-09 有限会社ティアイエンジニアリング 搬送装置
JPH10308436A (ja) * 1997-05-08 1998-11-17 Olympus Optical Co Ltd 基板搬送装置
JPH11309409A (ja) * 1998-04-30 1999-11-09 Dainippon Screen Mfg Co Ltd 基板処理システム
JP4030654B2 (ja) * 1998-06-02 2008-01-09 大日本スクリーン製造株式会社 基板搬送装置
JP3605541B2 (ja) * 1999-05-25 2004-12-22 東京エレクトロン株式会社 基板処理装置

Also Published As

Publication number Publication date
CN1461726A (zh) 2003-12-17
KR20030093999A (ko) 2003-12-11
JP3933524B2 (ja) 2007-06-20
TW200307640A (en) 2003-12-16
TWI265906B (en) 2006-11-11
KR100951964B1 (ko) 2010-04-08
JP2004001906A (ja) 2004-01-08

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Granted publication date: 20060621

Termination date: 20130530