JP3804542B2 - 異方導電性コネクターおよびその製造方法、プローブ部材並びにウエハ検査装置およびウエハ検査方法 - Google Patents

異方導電性コネクターおよびその製造方法、プローブ部材並びにウエハ検査装置およびウエハ検査方法 Download PDF

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Publication number
JP3804542B2
JP3804542B2 JP2002030620A JP2002030620A JP3804542B2 JP 3804542 B2 JP3804542 B2 JP 3804542B2 JP 2002030620 A JP2002030620 A JP 2002030620A JP 2002030620 A JP2002030620 A JP 2002030620A JP 3804542 B2 JP3804542 B2 JP 3804542B2
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Japan
Prior art keywords
anisotropic conductive
conductive film
conductive
wafer
frame plate
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Expired - Fee Related
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JP2002030620A
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English (en)
Japanese (ja)
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JP2002334732A5 (enExample
JP2002334732A (ja
Inventor
浩司 妹尾
輝一 小久保
雅也 直井
和夫 井上
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JSR Corp
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JSR Corp
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B5/00—Non-insulated conductors or conductive bodies characterised by their form
    • H01B5/16—Non-insulated conductors or conductive bodies characterised by their form comprising conductive material in insulating or poorly conductive material, e.g. conductive rubber
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R13/00—Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
    • H01R13/02—Contact members
    • H01R13/22—Contacts for co-operating by abutting
    • H01R13/24—Contacts for co-operating by abutting resilient; resiliently-mounted
    • H01R13/2407—Contacts for co-operating by abutting resilient; resiliently-mounted characterized by the resilient means
    • H01R13/2414—Contacts for co-operating by abutting resilient; resiliently-mounted characterized by the resilient means conductive elastomers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R43/00—Apparatus or processes specially adapted for manufacturing, assembling, maintaining, or repairing of line connectors or current collectors or for joining electric conductors
    • H01R43/007—Apparatus or processes specially adapted for manufacturing, assembling, maintaining, or repairing of line connectors or current collectors or for joining electric conductors for elastomeric connecting elements

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  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Manufacturing Of Electrical Connectors (AREA)
  • Non-Insulated Conductors (AREA)
  • Coupling Device And Connection With Printed Circuit (AREA)
  • Laminated Bodies (AREA)
JP2002030620A 2001-02-09 2002-02-07 異方導電性コネクターおよびその製造方法、プローブ部材並びにウエハ検査装置およびウエハ検査方法 Expired - Fee Related JP3804542B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002030620A JP3804542B2 (ja) 2001-02-09 2002-02-07 異方導電性コネクターおよびその製造方法、プローブ部材並びにウエハ検査装置およびウエハ検査方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2001033908 2001-02-09
JP2001-33908 2001-02-09
JP2002030620A JP3804542B2 (ja) 2001-02-09 2002-02-07 異方導電性コネクターおよびその製造方法、プローブ部材並びにウエハ検査装置およびウエハ検査方法

Publications (3)

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JP2002334732A JP2002334732A (ja) 2002-11-22
JP2002334732A5 JP2002334732A5 (enExample) 2004-11-11
JP3804542B2 true JP3804542B2 (ja) 2006-08-02

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JP2002030620A Expired - Fee Related JP3804542B2 (ja) 2001-02-09 2002-02-07 異方導電性コネクターおよびその製造方法、プローブ部材並びにウエハ検査装置およびウエハ検査方法
JP2002030621A Expired - Lifetime JP3788361B2 (ja) 2001-02-09 2002-02-07 異方導電性コネクターおよびその応用製品
JP2004320741A Expired - Fee Related JP3807432B2 (ja) 2001-02-09 2004-11-04 異方導電性コネクターおよびその応用製品

Family Applications After (2)

Application Number Title Priority Date Filing Date
JP2002030621A Expired - Lifetime JP3788361B2 (ja) 2001-02-09 2002-02-07 異方導電性コネクターおよびその応用製品
JP2004320741A Expired - Fee Related JP3807432B2 (ja) 2001-02-09 2004-11-04 異方導電性コネクターおよびその応用製品

Country Status (9)

Country Link
US (2) US6969622B1 (enExample)
EP (1) EP1365479B1 (enExample)
JP (3) JP3804542B2 (enExample)
KR (1) KR100577947B1 (enExample)
CN (1) CN1246932C (enExample)
AT (1) ATE494645T1 (enExample)
DE (1) DE60238824D1 (enExample)
TW (1) TW533624B (enExample)
WO (1) WO2002065588A1 (enExample)

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Publication number Publication date
US7323712B2 (en) 2008-01-29
JP3788361B2 (ja) 2006-06-21
US20060033100A1 (en) 2006-02-16
US6969622B1 (en) 2005-11-29
ATE494645T1 (de) 2011-01-15
DE60238824D1 (de) 2011-02-17
EP1365479B1 (en) 2011-01-05
JP3807432B2 (ja) 2006-08-09
EP1365479A4 (en) 2007-12-26
KR100577947B1 (ko) 2006-05-10
WO2002065588A1 (en) 2002-08-22
JP2002334732A (ja) 2002-11-22
TW533624B (en) 2003-05-21
JP2002324600A (ja) 2002-11-08
KR20030083710A (ko) 2003-10-30
JP2005056860A (ja) 2005-03-03
CN1246932C (zh) 2006-03-22
CN1496597A (zh) 2004-05-12
EP1365479A1 (en) 2003-11-26

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