ATE494645T1 - ßANISOTROPER LEITFÄHIGER VERBINDER, HERSTELLUNGSVERFAHREN DAFÜR UND SONDENGLIEDß - Google Patents
ßANISOTROPER LEITFÄHIGER VERBINDER, HERSTELLUNGSVERFAHREN DAFÜR UND SONDENGLIEDßInfo
- Publication number
- ATE494645T1 ATE494645T1 AT02711328T AT02711328T ATE494645T1 AT E494645 T1 ATE494645 T1 AT E494645T1 AT 02711328 T AT02711328 T AT 02711328T AT 02711328 T AT02711328 T AT 02711328T AT E494645 T1 ATE494645 T1 AT E494645T1
- Authority
- AT
- Austria
- Prior art keywords
- conductive
- anisotropically conductive
- inspected
- parts
- wafer
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B5/00—Non-insulated conductors or conductive bodies characterised by their form
- H01B5/16—Non-insulated conductors or conductive bodies characterised by their form comprising conductive material in insulating or poorly conductive material, e.g. conductive rubber
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
- H01R13/00—Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
- H01R13/02—Contact members
- H01R13/22—Contacts for co-operating by abutting
- H01R13/24—Contacts for co-operating by abutting resilient; resiliently-mounted
- H01R13/2407—Contacts for co-operating by abutting resilient; resiliently-mounted characterized by the resilient means
- H01R13/2414—Contacts for co-operating by abutting resilient; resiliently-mounted characterized by the resilient means conductive elastomers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
- H01R43/00—Apparatus or processes specially adapted for manufacturing, assembling, maintaining, or repairing of line connectors or current collectors or for joining electric conductors
- H01R43/007—Apparatus or processes specially adapted for manufacturing, assembling, maintaining, or repairing of line connectors or current collectors or for joining electric conductors for elastomeric connecting elements
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001033908 | 2001-02-09 | ||
PCT/JP2002/000959 WO2002065588A1 (fr) | 2001-02-09 | 2002-02-06 | Connecteur conducteur anisotrope, son procede de fabrication et sonde |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE494645T1 true ATE494645T1 (de) | 2011-01-15 |
Family
ID=18897592
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT02711328T ATE494645T1 (de) | 2001-02-09 | 2002-02-06 | ßANISOTROPER LEITFÄHIGER VERBINDER, HERSTELLUNGSVERFAHREN DAFÜR UND SONDENGLIEDß |
Country Status (9)
Country | Link |
---|---|
US (2) | US6969622B1 (de) |
EP (1) | EP1365479B1 (de) |
JP (3) | JP3788361B2 (de) |
KR (1) | KR100577947B1 (de) |
CN (1) | CN1246932C (de) |
AT (1) | ATE494645T1 (de) |
DE (1) | DE60238824D1 (de) |
TW (1) | TW533624B (de) |
WO (1) | WO2002065588A1 (de) |
Families Citing this family (60)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2002065588A1 (fr) | 2001-02-09 | 2002-08-22 | Jsr Corporation | Connecteur conducteur anisotrope, son procede de fabrication et sonde |
JP3573120B2 (ja) * | 2001-08-31 | 2004-10-06 | Jsr株式会社 | 異方導電性コネクターおよびその製造方法並びにその応用製品 |
CN100413045C (zh) * | 2002-08-09 | 2008-08-20 | Jsr株式会社 | 各向异性导电连接器,探针元件,和晶片检测仪器及晶片检测方法 |
JP3649239B2 (ja) * | 2002-10-28 | 2005-05-18 | Jsr株式会社 | シート状コネクターの製造方法 |
EP1585197B1 (de) * | 2003-01-17 | 2011-06-29 | JSR Corporation | Anisotroper leitfähiger verbinder und herstellungsverfahren dafür und untersuchungseinheit für eine schaltungseinrichtung |
EP1596429A4 (de) * | 2003-02-18 | 2011-04-27 | Jsr Corp | Anisotroper leitfähiger verbinder und sondenglied und waferuntersuchungseinrichtung und waferuntersuchungsverfahren |
KR100756120B1 (ko) * | 2003-03-26 | 2007-09-05 | 제이에스알 가부시끼가이샤 | 이방 도전성 커넥터 및 도전성 페이스트 조성물, 프로브부재 및 웨이퍼 검사 장치 및 웨이퍼 검사 방법 |
TWI239684B (en) * | 2003-04-16 | 2005-09-11 | Jsr Corp | Anisotropic conductive connector and electric inspection device for circuit device |
KR100684221B1 (ko) * | 2003-06-09 | 2007-02-22 | 제이에스알 가부시끼가이샤 | 이방 도전성 커넥터 및 웨이퍼 검사 장치 |
JP2005026672A (ja) * | 2003-06-09 | 2005-01-27 | Jsr Corp | 異方導電性コネクターおよびウエハ検査装置 |
EP1633019B1 (de) * | 2003-06-12 | 2012-09-05 | JSR Corporation | Anisotrope leitfähige verbindereinrichtung und herstellungsverfahren dafür und schaltungsbauelement-untersuchungseinrichtung |
US20050046016A1 (en) * | 2003-09-03 | 2005-03-03 | Ken Gilleo | Electronic package with insert conductor array |
KR100921268B1 (ko) * | 2003-11-17 | 2009-10-09 | 제이에스알 가부시끼가이샤 | 이방 도전성 시트, 그의 제조 방법 및 그의 응용 제품 |
US20060177971A1 (en) * | 2004-01-13 | 2006-08-10 | Jsr Corporation | Anisotropically conductive connector, production process thereof and application product thereof |
EP1744166A1 (de) * | 2004-04-27 | 2007-01-17 | JSR Corporation | Blattartige sonde, verfahren zur herstellung der sonde und anwendung der sonde |
WO2005111632A1 (ja) * | 2004-05-19 | 2005-11-24 | Jsr Corporation | シート状プローブおよびその製造方法並びにその応用 |
CN1989606A (zh) * | 2004-08-31 | 2007-06-27 | Jsr株式会社 | 晶片检验用各向异性导电性连接器及其制造方法和其应用 |
WO2006043631A1 (ja) * | 2004-10-22 | 2006-04-27 | Jsr Corporation | ウエハ検査用異方導電性コネクターおよびその製造方法、ウエハ検査用プローブカードおよびその製造方法並びにウエハ検査装置 |
US7656176B2 (en) * | 2004-10-29 | 2010-02-02 | Jsr Corporation | Probe member for wafer inspection, probe card for wafer inspection and wafer inspection equipment |
WO2006051845A1 (ja) * | 2004-11-12 | 2006-05-18 | Jsr Corporation | ウエハ検査用探針部材、ウエハ検査用プローブカードおよびウエハ検査装置 |
US20060132167A1 (en) * | 2004-12-22 | 2006-06-22 | Jian Chen | Contactless wafer level burn-in |
JP2006216502A (ja) * | 2005-02-07 | 2006-08-17 | Jsr Corp | 異方導電性コネクター、プローブカード並びにウエハ検査装置およびウエハ検査方法 |
JP2006349671A (ja) * | 2005-05-19 | 2006-12-28 | Jsr Corp | ウエハ検査用シート状プローブおよびその応用 |
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JP2007071699A (ja) * | 2005-09-07 | 2007-03-22 | Rika Denshi Co Ltd | 垂直型プローブカード |
US20070054512A1 (en) * | 2005-09-08 | 2007-03-08 | International Business Machines Corporation | Topography compensating land grid array interposer |
JPWO2007043350A1 (ja) * | 2005-10-11 | 2009-04-16 | Jsr株式会社 | 異方導電性コネクター装置および回路装置の検査装置 |
TWI403723B (zh) * | 2005-12-21 | 2013-08-01 | Jsr Corp | Manufacturing method of foreign - shaped conductive connector |
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CN101449426B (zh) * | 2006-04-11 | 2012-05-16 | Jsr株式会社 | 各向异性导电连接器及各向异性导电连接器装置 |
JP4902867B2 (ja) * | 2006-04-19 | 2012-03-21 | パナソニック株式会社 | 電子部品の接続方法及び突起電極の形成方法、並びに電子部品実装体及び突起電極の製造装置 |
DE102006059429A1 (de) * | 2006-12-15 | 2008-06-26 | Atg Luther & Maelzer Gmbh | Modul für eine Prüfvorrichtung zum Testen von Leiterplatten |
JP2010133706A (ja) * | 2007-03-19 | 2010-06-17 | Jsr Corp | 異方導電性コネクターおよび導電接続構造体 |
JP4952787B2 (ja) * | 2007-03-30 | 2012-06-13 | Jsr株式会社 | 異方導電性コネクター、プローブ部材およびウエハ検査装置 |
DE102007017641A1 (de) * | 2007-04-13 | 2008-10-16 | Infineon Technologies Ag | Aushärtung von Schichten am Halbleitermodul mittels elektromagnetischer Felder |
US7750651B2 (en) * | 2008-03-07 | 2010-07-06 | Taiwan Semiconductor Manufacturing Co., Ltd. | Wafer level test probe card |
JP5424675B2 (ja) * | 2008-03-18 | 2014-02-26 | キヤノン株式会社 | 半導体装置の製造方法及び半導体装置 |
US20120249375A1 (en) * | 2008-05-23 | 2012-10-04 | Nokia Corporation | Magnetically controlled polymer nanocomposite material and methods for applying and curing same, and nanomagnetic composite for RF applications |
EP2461426B1 (de) * | 2009-09-02 | 2016-11-23 | Polymatech Japan Co., Ltd. | Anisotroper leiter, verfahren zur herstellung des anisotropen leiters und folie mit anordnung anisotroper leiter |
US9442133B1 (en) * | 2011-08-21 | 2016-09-13 | Bruker Nano Inc. | Edge electrode for characterization of semiconductor wafers |
US9176167B1 (en) * | 2011-08-21 | 2015-11-03 | Bruker Nano Inc. | Probe and method of manufacture for semiconductor wafer characterization |
KR101284210B1 (ko) | 2011-09-30 | 2013-07-09 | 주식회사 아이에스시 | 검사용 커넥터, 검사용 소켓, 검사용 커넥터의 제조방법 및 검사용 소켓의 제조방법 |
JP6079425B2 (ja) * | 2012-05-16 | 2017-02-15 | 日立化成株式会社 | 導電粒子、異方性導電接着剤フィルム及び接続構造体 |
US9678109B2 (en) * | 2014-01-09 | 2017-06-13 | Taiwan Semiconductor Manufacturing Co., Ltd. | Probe card |
KR101573450B1 (ko) * | 2014-07-17 | 2015-12-11 | 주식회사 아이에스시 | 테스트용 소켓 |
CN111029875B (zh) * | 2014-11-17 | 2022-05-10 | 迪睿合株式会社 | 各向异性导电膜、连接结构体及其制造方法 |
KR101833009B1 (ko) | 2016-03-18 | 2018-02-27 | 주식회사 오킨스전자 | 도전성 파티클이 자화된 도전 와이어에 의하여 자성 배열되는 테스트 소켓 및 그 제조 방법 |
JP6935702B2 (ja) * | 2016-10-24 | 2021-09-15 | デクセリアルズ株式会社 | 異方性導電フィルム |
JP2018073577A (ja) * | 2016-10-27 | 2018-05-10 | 株式会社エンプラス | 異方導電性シート及びその製造方法 |
KR102361639B1 (ko) * | 2017-07-10 | 2022-02-10 | 삼성전자주식회사 | 유니버설 테스트 소켓, 반도체 테스트 장비, 및 반도체 장치의 테스트 방법 |
CN107479274A (zh) * | 2017-07-11 | 2017-12-15 | 武汉华星光电半导体显示技术有限公司 | 显示面板与外接电路的邦定方法及显示装置 |
CN108538792A (zh) | 2018-05-16 | 2018-09-14 | 武汉华星光电半导体显示技术有限公司 | 导电物质分布状态可控的异方性导电胶及其制备方法 |
CN109188790B (zh) * | 2018-09-13 | 2022-04-15 | 京东方科技集团股份有限公司 | 基板及其制作方法、显示装置 |
JP7405337B2 (ja) * | 2018-10-11 | 2023-12-26 | 積水ポリマテック株式会社 | 電気接続シート、及び端子付きガラス板構造 |
KR102075669B1 (ko) * | 2018-10-26 | 2020-02-10 | 오재숙 | 신호 전송 커넥터 및 그 제조방법 |
KR102063763B1 (ko) * | 2019-01-08 | 2020-01-08 | (주)티에스이 | 신호 전송 커넥터 및 그 제조방법 |
CN110767348A (zh) * | 2019-11-12 | 2020-02-07 | 业成科技(成都)有限公司 | 异方性导电膜及其制作方法 |
JP2021085701A (ja) | 2019-11-26 | 2021-06-03 | デクセリアルズ株式会社 | プローブシート及びプローブシートの製造方法 |
TWI750578B (zh) * | 2020-02-04 | 2021-12-21 | 吳在淑 | 信號傳輸連接器及其製造方法 |
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TW561266B (en) * | 1999-09-17 | 2003-11-11 | Jsr Corp | Anisotropic conductive sheet, its manufacturing method, and connector |
JP4240724B2 (ja) * | 2000-01-26 | 2009-03-18 | Jsr株式会社 | 異方導電性シートおよびコネクター |
KR100509526B1 (ko) * | 2000-09-25 | 2005-08-23 | 제이에스알 가부시끼가이샤 | 이방 도전성 시트 및 그의 제조 방법 및 그의 응용 제품 |
US6663799B2 (en) * | 2000-09-28 | 2003-12-16 | Jsr Corporation | Conductive metal particles, conductive composite metal particles and applied products using the same |
US6870385B2 (en) * | 2000-12-08 | 2005-03-22 | Jsr Corporation | Anisotropic conductive sheet and wafer inspection device |
WO2002065588A1 (fr) | 2001-02-09 | 2002-08-22 | Jsr Corporation | Connecteur conducteur anisotrope, son procede de fabrication et sonde |
JP3573120B2 (ja) | 2001-08-31 | 2004-10-06 | Jsr株式会社 | 異方導電性コネクターおよびその製造方法並びにその応用製品 |
-
2002
- 2002-02-06 WO PCT/JP2002/000959 patent/WO2002065588A1/ja active IP Right Grant
- 2002-02-06 US US10/470,746 patent/US6969622B1/en not_active Expired - Lifetime
- 2002-02-06 EP EP02711328A patent/EP1365479B1/de not_active Expired - Lifetime
- 2002-02-06 DE DE60238824T patent/DE60238824D1/de not_active Expired - Lifetime
- 2002-02-06 CN CNB028062418A patent/CN1246932C/zh not_active Expired - Fee Related
- 2002-02-06 AT AT02711328T patent/ATE494645T1/de not_active IP Right Cessation
- 2002-02-06 KR KR1020037010446A patent/KR100577947B1/ko active IP Right Grant
- 2002-02-07 JP JP2002030621A patent/JP3788361B2/ja not_active Expired - Lifetime
- 2002-02-07 TW TW091102235A patent/TW533624B/zh not_active IP Right Cessation
- 2002-02-07 JP JP2002030620A patent/JP3804542B2/ja not_active Expired - Fee Related
-
2004
- 2004-11-04 JP JP2004320741A patent/JP3807432B2/ja not_active Expired - Fee Related
-
2005
- 2005-08-17 US US11/205,174 patent/US7323712B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
KR100577947B1 (ko) | 2006-05-10 |
EP1365479B1 (de) | 2011-01-05 |
JP3807432B2 (ja) | 2006-08-09 |
JP2002324600A (ja) | 2002-11-08 |
JP3804542B2 (ja) | 2006-08-02 |
KR20030083710A (ko) | 2003-10-30 |
US7323712B2 (en) | 2008-01-29 |
JP2005056860A (ja) | 2005-03-03 |
US6969622B1 (en) | 2005-11-29 |
US20060033100A1 (en) | 2006-02-16 |
CN1496597A (zh) | 2004-05-12 |
WO2002065588A1 (fr) | 2002-08-22 |
JP3788361B2 (ja) | 2006-06-21 |
EP1365479A4 (de) | 2007-12-26 |
CN1246932C (zh) | 2006-03-22 |
DE60238824D1 (de) | 2011-02-17 |
EP1365479A1 (de) | 2003-11-26 |
JP2002334732A (ja) | 2002-11-22 |
TW533624B (en) | 2003-05-21 |
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