JP3662461B2 - 半導体装置、およびその製造方法 - Google Patents
半導体装置、およびその製造方法 Download PDFInfo
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- JP3662461B2 JP3662461B2 JP2000004034A JP2000004034A JP3662461B2 JP 3662461 B2 JP3662461 B2 JP 3662461B2 JP 2000004034 A JP2000004034 A JP 2000004034A JP 2000004034 A JP2000004034 A JP 2000004034A JP 3662461 B2 JP3662461 B2 JP 3662461B2
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- A—HUMAN NECESSITIES
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Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000004034A JP3662461B2 (ja) | 1999-02-17 | 2000-01-12 | 半導体装置、およびその製造方法 |
| TW89101562A TW444308B (en) | 1999-02-17 | 2000-01-29 | Semiconductor device and manufacturing method thereof |
| KR10-2000-0006756A KR100379608B1 (ko) | 1999-02-17 | 2000-02-14 | 반도체장치 및 그의 제조방법 |
| US10/162,864 US20020158325A1 (en) | 1999-02-17 | 2002-06-06 | Semiconductor device and manufacturing method thereof |
| US11/028,861 US7276437B2 (en) | 1999-02-17 | 2005-01-05 | Semiconductor device and manufacturing method thereof |
| US11/802,969 US7528011B2 (en) | 1999-02-17 | 2007-05-29 | Semiconductor device and manufacturing method thereof |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3890999 | 1999-02-17 | ||
| JP11-38909 | 1999-02-17 | ||
| JP2000004034A JP3662461B2 (ja) | 1999-02-17 | 2000-01-12 | 半導体装置、およびその製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2000307057A JP2000307057A (ja) | 2000-11-02 |
| JP2000307057A5 JP2000307057A5 (enExample) | 2005-04-14 |
| JP3662461B2 true JP3662461B2 (ja) | 2005-06-22 |
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| Application Number | Title | Priority Date | Filing Date |
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| JP2000004034A Expired - Fee Related JP3662461B2 (ja) | 1999-02-17 | 2000-01-12 | 半導体装置、およびその製造方法 |
Country Status (4)
| Country | Link |
|---|---|
| US (3) | US20020158325A1 (enExample) |
| JP (1) | JP3662461B2 (enExample) |
| KR (1) | KR100379608B1 (enExample) |
| TW (1) | TW444308B (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20150046161A (ko) | 2013-04-15 | 2015-04-29 | 가부시키가이샤 신가와 | 반도체 장치의 제조 방법 |
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| US9373666B2 (en) | 2011-02-25 | 2016-06-21 | The Regents Of The University Of Michigan | System and method of forming semiconductor devices |
| JP5266371B2 (ja) * | 2011-08-04 | 2013-08-21 | ルネサスエレクトロニクス株式会社 | 半導体装置及びその製造方法 |
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-
2000
- 2000-01-12 JP JP2000004034A patent/JP3662461B2/ja not_active Expired - Fee Related
- 2000-01-29 TW TW89101562A patent/TW444308B/zh not_active IP Right Cessation
- 2000-02-14 KR KR10-2000-0006756A patent/KR100379608B1/ko not_active Expired - Fee Related
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2002
- 2002-06-06 US US10/162,864 patent/US20020158325A1/en not_active Abandoned
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2005
- 2005-01-05 US US11/028,861 patent/US7276437B2/en not_active Expired - Fee Related
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- 2007-05-29 US US11/802,969 patent/US7528011B2/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20150046161A (ko) | 2013-04-15 | 2015-04-29 | 가부시키가이샤 신가와 | 반도체 장치의 제조 방법 |
| US9379086B2 (en) | 2013-04-15 | 2016-06-28 | Shinkawa Ltd. | Method of manufacturing semiconductor device |
Also Published As
| Publication number | Publication date |
|---|---|
| US20070232054A1 (en) | 2007-10-04 |
| JP2000307057A (ja) | 2000-11-02 |
| KR20000058032A (ko) | 2000-09-25 |
| US20020158325A1 (en) | 2002-10-31 |
| TW444308B (en) | 2001-07-01 |
| US7276437B2 (en) | 2007-10-02 |
| US7528011B2 (en) | 2009-05-05 |
| KR100379608B1 (ko) | 2003-04-10 |
| US20050148175A1 (en) | 2005-07-07 |
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