JP2022540260A - チップパッケージ構造、およびチップパッケージ構造の製造方法 - Google Patents
チップパッケージ構造、およびチップパッケージ構造の製造方法 Download PDFInfo
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- JP2022540260A JP2022540260A JP2022502145A JP2022502145A JP2022540260A JP 2022540260 A JP2022540260 A JP 2022540260A JP 2022502145 A JP2022502145 A JP 2022502145A JP 2022502145 A JP2022502145 A JP 2022502145A JP 2022540260 A JP2022540260 A JP 2022540260A
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Abstract
Description
110、110a、110b、110c、110d、310、310a、310b、310c、310d チップ
112、312 接合パッド
114、314 ダイアタッチフィルム
120、320、350 垂直伝導性要素
130、330、360 モールディング層
140 再配線層
142、442 伝導性層
144、444 絶縁層
146 開口
150 はんだボール
160 保護層
210 接続配線
440 部分再配線層
CB1、CB2 キャリアボード
CS1、CS2 チップスタック
Dn 法線方向
Claims (20)
- 順次に積み重ねられた複数の第1のチップであって、前記複数の第1のチップのそれぞれが、少なくとも1つの第1の接合パッドを備え、前記第1の接合パッドが、前記複数の第1のチップによって覆われない、複数の第1のチップと、
前記複数の第1のチップをカプセル化する第1のモールディング層と、
前記第1のモールディング層を貫通する少なくとも1つの第1の垂直伝導性要素であって、前記第1の接合パッドのうちの少なくとも1つの上に配置され、前記第1の接合パッドのうちの前記少なくとも1つに電気的に接続された少なくとも1つの第1の垂直伝導性要素とを備える第1のチップスタックと、
前記第1のチップスタック上に配置され、前記少なくとも1つの第1の垂直伝導性要素に電気的に接続された再配線層と
を備えるチップパッケージ構造。 - 前記第1のチップスタックと前記再配線層との間に配置された第2のチップスタックをさらに備えるチップパッケージ構造であって、
前記第2のチップスタックが、
順次に積み重ねられた複数の第2のチップであって、前記複数の第2のチップのそれぞれが、少なくとも1つの第2の接合パッドを備え、前記第2の接合パッドが、前記複数の第2のチップによって覆われない、複数の第2のチップと、
前記複数の第2のチップをカプセル化する第2のモールディング層と、
前記第2のモールディング層を貫通する少なくとも1つの第2の垂直伝導性要素であって、前記第2の接合パッドのうちの少なくとも1つの上に配置され、前記第2の接合パッドのうちの前記少なくとも1つに電気的に接続され、かつ前記再配線層に電気的に接続された少なくとも1つの第2の垂直伝導性要素と
を備える、請求項1に記載のチップパッケージ構造。 - 第3のモールディング層と、少なくとも1つの第3の垂直伝導性要素とをさらに備えるチップパッケージ構造であって、
前記第3のモールディング層が、前記第1のチップスタックおよび前記第2のチップスタックをカプセル化し、前記少なくとも1つの第3の垂直伝導性要素が、前記第3のモールディング層を貫通し、前記少なくとも1つの第3の垂直伝導性要素が、前記少なくとも1つの第1の垂直伝導性要素上に配置され、かつ前記少なくとも1つの第1の垂直伝導性要素に電気的に接続され、前記少なくとも1つの第3の垂直伝導性要素が、前記再配線層に電気的に接続された、請求項2に記載のチップパッケージ構造。 - 前記少なくとも1つの第3の垂直伝導性要素の延在方向が、前記第1のチップスタックの法線方向と実質的に平行である、請求項3に記載のチップパッケージ構造。
- 前記第1のチップスタックが、前記少なくとも1つの第1の垂直伝導性要素と前記少なくとも1つの第3の垂直伝導性要素との間に配置された部分再配線層をさらに備える、請求項3に記載のチップパッケージ構造。
- 前記第2のチップスタックが、階段の形状で前記第1のチップスタック上に積み重ねられる、請求項2に記載のチップパッケージ構造。
- 前記少なくとも1つの第1の垂直伝導性要素の延在方向が、前記第1のチップスタックの法線方向と実質的に平行である、請求項1に記載のチップパッケージ構造。
- 前記複数の第1のチップが、階段の形状で積み重ねられる、請求項1に記載のチップパッケージ構造。
- 前記再配線層とは反対の前記第1のチップスタックの側の上に配置された保護層をさらに備える、請求項1に記載のチップパッケージ構造。
- 前記第1のチップスタックが、前記複数の第1のチップのうちの2つにそれぞれ属する前記第1の接合パッドのうちの2つの間で電気的に接続された接続配線をさらに備える、請求項1に記載のチップパッケージ構造。
- チップパッケージ構造の製造方法であって、
キャリアボード上に複数の第1のチップを積み重ねるステップであって、前記複数の第1のチップのそれぞれが、少なくとも1つの第1の接合パッドを有し、前記第1の接合パッドが、前記複数の第1のチップによって覆われない、積み重ねるステップと、
前記第1の接合パッドのうちの少なくとも1つの上に、前記第1の接合パッドのうちの前記少なくとも1つに電気的に接続されることになる少なくとも1つの第1の垂直伝導性要素を形成するステップと、
前記複数の第1のチップをカプセル化して第1のチップスタックを形成するように第1のモールディング層を形成するステップであって、前記少なくとも1つの第1の垂直伝導性要素が、前記第1のモールディング層を貫通し、前記第1のチップスタックが、前記複数の第1のチップと、前記少なくとも1つの第1の垂直伝導性要素と、前記第1のモールディング層とを備える、形成するステップと、
前記第1のチップスタックの上に、前記少なくとも1つの第1の垂直伝導性要素に電気的に接続されることになる再配線層を形成するステップと
を含むチップパッケージ構造の製造方法。 - 前記再配線層を形成する前記ステップの前に、前記第1のチップスタック上に第2のチップスタックを積み重ねるステップをさらに含むチップパッケージ構造の製造方法であって、
前記第2のチップスタックが、
順次に積み重ねられた複数の第2のチップであって、前記複数の第2のチップのそれぞれが、少なくとも1つの第2の接合パッドを備え、前記第2の接合パッドが、前記複数の第2のチップによって覆われない、複数の第2のチップと、
前記複数の第2のチップをカプセル化する第2のモールディング層と、
前記第2のモールディング層を貫通する少なくとも1つの第2の垂直伝導性要素であって、前記第2の接合パッドのうちの少なくとも1つの上に配置され、前記第2の接合パッドのうちの前記少なくとも1つに電気的に接続された少なくとも1つの第2の垂直伝導性要素とを備え、
前記再配線層が、前記少なくとも1つの第2の垂直伝導性要素に電気的に接続される、請求項11に記載のチップパッケージ構造の製造方法。 - 前記第2のチップスタックの形成方法が、
前記複数の第2のチップを積み重ねるステップと、
前記第2の接合パッドのうちの前記少なくとも1つの上に前記少なくとも1つの第2の垂直伝導性要素を形成するステップと、
前記複数の第2のチップをカプセル化するように前記第2のモールディング層を形成するステップとを含む、請求項12に記載のチップパッケージ構造の製造方法。 - チップパッケージ構造の製造方法であって、
前記再配線層を形成する前記ステップの前に、
前記少なくとも1つの第1の垂直伝導性要素上に、前記少なくとも1つの第1の垂直伝導性要素に電気的に接続されることになる少なくとも1つの第3の垂直伝導性要素を形成するステップと、
前記第1のチップスタックおよび前記第2のチップスタックをカプセル化するように第3のモールディング層を形成するステップであって、前記少なくとも1つの第3の垂直伝導性要素が、前記第3のモールディング層を貫通する、形成するステップとをさらに含み、
前記再配線層が、前記少なくとも1つの第3の垂直伝導性要素に電気的に接続される、請求項12に記載のチップパッケージ構造の製造方法。 - 前記第1のチップスタックと前記第2のチップスタックが、同一のキャリアボード上に形成される、請求項12に記載のチップパッケージ構造の製造方法。
- 前記第2のチップスタックが、階段の形状で前記第1のチップスタック上に積み重ねられる、請求項12に記載のチップパッケージ構造の製造方法。
- 前記第1のモールディング層を形成する前記ステップが、
前記少なくとも1つの第1の垂直伝導性要素の端部を露出させるように前記第1のモールディング層の表面を薄くするステップを含む、請求項11に記載のチップパッケージ構造の製造方法。 - 前記複数の第1のチップが、階段の形状で積み重ねられる、請求項11に記載のチップパッケージ構造の製造方法。
- 前記キャリアボードを除去するステップをさらに含む、請求項11に記載のチップパッケージ構造の製造方法。
- 前記チップパッケージ構造の製造方法であって、
前記キャリアボードを除去する前記ステップの後、前記再配線層とは反対の前記第1のチップスタックの側の上に保護層を形成するステップを含む、請求項19に記載のチップパッケージ構造の製造方法。
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