JP2021033291A - 軟質接触部を備えた封止型レチクル貯蔵器具 - Google Patents
軟質接触部を備えた封止型レチクル貯蔵器具 Download PDFInfo
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- B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
- B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
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- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
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- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
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- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
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Abstract
【解決手段】本発明は、頂部蓋、底部蓋および軟質接触部材(400)を有するレチクル貯蔵器具を開示する。頂部蓋は、シーリング(201)およびこのシーリングを包囲したカバー(202)を有する。底部蓋は、キャリヤ(203)およびこのキャリヤを包囲した周辺構造体(204)を有する。軟質接触部材は、頂部蓋と底部蓋が互いに係合すると、カバーと周辺構造体との間で側方に延びるとともに2つの蓋相互間の接触を緩衝するためにレチクル貯蔵器具の内側から外側に延びるよう構成されている。
【選択図】図4A
Description
102 底部蓋
201 シーリング(天井)
202 カバー
203 キャリヤ
204 周辺構造体
205 下向き係合面
206 上向き係合面
207,400,400′,600,600′,601,700,701,800 軟質接触部材
212 ピラー
214 トレンチ
401 下向き封止面
Claims (20)
- レチクル貯蔵器具であって、
シーリングおよび前記シーリングを包囲しているカバーを備えた頂部蓋を有し、
キャリヤおよび前記キャリヤを包囲している周辺構造体を備えた底部蓋を有し、
前記周辺構造体は、前記頂部蓋と前記底部蓋が互いに係合すると、前記カバーに向き、
前記頂部蓋と前記底部蓋が互いに係合した場合に前記カバーと前記周辺構造体との間に延びて前記頂部蓋と前記底部蓋の接触を緩衝するよう構成された軟質接触部材を有する、レチクル貯蔵器具。 - 前記軟質接触部材は、前記器具の内側から外側に延びる、請求項1記載のレチクル貯蔵器具。
- 前記頂部蓋の前記カバーは、下向きの係合面を有し、前記軟質接触部材は、前記下向き係合面に沿って延びるとともに該下向き係合面を包む、請求項1記載のレチクル貯蔵器具。
- 前記軟質組織部材は、前記底部蓋の前記周辺構造体の上向きの係合面に接触するよう構成された下向きの封止面を有する、請求項2記載のレチクル貯蔵器具。
- 前記軟質接触部材は、下向きの封止面および前記下向き封止面から下方に延びる少なくとも1つのリブを有し、前記少なくとも1つのリブは、前記底部蓋の前記周辺構造体の上向きの係合面に接触するよう構成されている、請求項2記載のレチクル貯蔵器具。
- 前記頂部蓋の前記カバーは、下向きの係合面および前記下向きの係合面から下方に延びる複数のピラーを有し、前記周辺構造体は、前記複数のピラーに対応した複数の収容空所を有し、前記複数のピラーの各々は、前記頂部蓋と前記底部蓋の接触を緩衝するよう構成された少なくとも1つの弾性構造体を有する、請求項1記載のレチクル貯蔵器具。
- 前記底部蓋の前記周辺構造体と前記キャリヤとの間には少なくとも1つのトレンチが形成されている、請求項1記載のレチクル貯蔵器具。
- 前記頂部蓋および前記底部蓋は、前記軟質接触部材によって気密封止されるレチクル収容空間を形成する、請求項1記載のレチクル貯蔵器具。
- 前記頂部蓋は、前記レチクル収容空間の気密封止状態を壊さずに前記レチクル収容空間内に受け入れられたレチクルと接触するよう前記頂部蓋から延びる少なくとも1つの保持ピンをさらに有する、請求項8記載のレチクル貯蔵器具。
- レチクル貯蔵器具であって、
シーリングおよび前記シーリングを包囲しているカバーを備えた頂部蓋を有し、
キャリヤおよび前記キャリヤを包囲している周辺構造体を備えた底部蓋を有し、
前記周辺構造体は、前記頂部蓋と前記底部蓋が互いに係合すると、前記カバーに向き、
前記頂部蓋の前記カバーの下向きの係合面に沿って側方に延びる第1の軟質接触部材を有し、
前記底部蓋の前記周辺構造体の上向きの係合面に沿って側方に延びる第2の軟質接触部材を有し、
前記第1の軟質接触部材と前記第2の軟質接触部材は、前記頂部蓋が前記底部蓋に係合すると、互いに接触して前記頂部蓋と前記蓋相互間との接触を緩衝する、レチクル貯蔵器具。 - 前記第1の軟質接触部材の内側は、前記第2の軟質接触部材の外側と接触する、請求項10記載のレチクル貯蔵器具。
- 前記第1の軟質接触部材の少なくとも一部は、前記頂部蓋の前記カバーを包む、請求項10記載のレチクル貯蔵器具。
- 前記第1の軟質接触部材の硬度は、前記第2の軟質接触部材の硬度よりも高い、請求項10記載のレチクル貯蔵器具。
- 前記頂部蓋の前記カバーは、下向きの係合面および前記下向き係合面から下方に延びる複数のピラーを有し、前記周辺構造体は、前記複数のピラーに対応した複数の収容空所を有し、前記複数のピラーの各々は、前記頂部蓋と前記底部蓋の接触を緩衝するよう構成された少なくとも1つの弾性構造体を有する、請求項10記載のレチクル貯蔵器具。
- 前記底部蓋の前記周辺構造体と前記キャリヤとの間には少なくとも1つのトレンチが形成されている、請求項10記載のレチクル貯蔵器具。
- 前記頂部蓋および前記底部蓋は、前記第1および前記第2の軟質接触部材によって気密封止されるレチクル収容空間を形成する、請求項10記載のレチクル貯蔵器具。
- 前記頂部蓋は、前記レチクル収容空間の気密封止状態を壊さずに前記レチクル収容空間内に受け入れられたレチクルと接触するよう前記頂部蓋から延びる少なくとも1つの保持ピンをさらに有する、請求項16記載のレチクル貯蔵器具。
- レチクル貯蔵器具であって、
シーリングおよび前記シーリングを包囲しているカバーを備えた頂部蓋と、
キャリヤおよび前記キャリヤを包囲している周辺構造体を備えた底部蓋と、
前記頂部蓋から下方に延びるキャップによって固定された少なくとも1つの保持ピンとを有し、
前記カバーは、前記頂部蓋と前記底部蓋が互いに係合すると、前記周辺構造体に向く、レチクル貯蔵器具。 - 前記頂部蓋の前記カバーは、下向きの係合面および前記下向き係合面から下方に延びる複数のピラーを有し、前記周辺構造体は、前記複数のピラーに対応した複数の収容空所を有し、前記複数のピラーの各々は、少なくとも1つの弾性構造体を有する、請求項18記載のレチクル貯蔵器具。
- 前記頂部蓋と前記底部蓋が互いに係合すると、前記カバーと前記周辺構造体との間に延びるよう構成された少なくとも1つの軟質接触部材をさらに有する、請求項18記載のレチクル貯蔵器具。
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Application Number | Priority Date | Filing Date | Title |
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US201962887753P | 2019-08-16 | 2019-08-16 | |
US62/887,753 | 2019-08-16 | ||
US16/929,748 US11511920B2 (en) | 2019-08-16 | 2020-07-15 | Sealed reticle storage device with soft contact |
US16/929,748 | 2020-07-15 |
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JP2021033291A true JP2021033291A (ja) | 2021-03-01 |
JP7164570B2 JP7164570B2 (ja) | 2022-11-01 |
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JP2020133042A Active JP7041722B2 (ja) | 2019-08-16 | 2020-08-05 | 非封止型レチクル貯蔵器具 |
JP2020133043A Active JP7164570B2 (ja) | 2019-08-16 | 2020-08-05 | 軟質接触部を備えた封止型レチクル貯蔵器具 |
JP2020135745A Active JP6995171B2 (ja) | 2019-08-16 | 2020-08-11 | 急速解放弁モジュール、急速解放弁モジュールを備えたレクチルポッド、および、レクチルポッド上に急速解放弁モジュールを迅速に設けるための方法 |
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CN113937041A (zh) | 2021-06-30 | 2022-01-14 | 家登精密工业股份有限公司 | 基板容器系统 |
TWI782689B (zh) * | 2021-09-02 | 2022-11-01 | 家登精密工業股份有限公司 | 快拆式氣閥、具有快拆式氣閥的基板容器及快拆式氣閥的安裝和拆卸方法 |
TW202324578A (zh) * | 2021-10-25 | 2023-06-16 | 美商恩特葛瑞斯股份有限公司 | 極紫外光內盒密封間隙 |
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CN112389846A (zh) | 2021-02-23 |
CN112394612A (zh) | 2021-02-23 |
JP7041722B2 (ja) | 2022-03-24 |
JP6995171B2 (ja) | 2022-01-14 |
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CN112393003A (zh) | 2021-02-23 |
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TW202109709A (zh) | 2021-03-01 |
CN112389846B (zh) | 2022-08-26 |
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US11511920B2 (en) | 2022-11-29 |
US20210048114A1 (en) | 2021-02-18 |
US20210047094A1 (en) | 2021-02-18 |
KR20210021268A (ko) | 2021-02-25 |
TW202109180A (zh) | 2021-03-01 |
KR20210021269A (ko) | 2021-02-25 |
KR102439646B1 (ko) | 2022-09-02 |
JP2021033290A (ja) | 2021-03-01 |
TWI752547B (zh) | 2022-01-11 |
KR102385686B1 (ko) | 2022-04-12 |
TWI737411B (zh) | 2021-08-21 |
US11104496B2 (en) | 2021-08-31 |
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